JP4761088B1 - ダイシング装置及びダイシング方法 - Google Patents

ダイシング装置及びダイシング方法 Download PDF

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Publication number
JP4761088B1
JP4761088B1 JP2011032224A JP2011032224A JP4761088B1 JP 4761088 B1 JP4761088 B1 JP 4761088B1 JP 2011032224 A JP2011032224 A JP 2011032224A JP 2011032224 A JP2011032224 A JP 2011032224A JP 4761088 B1 JP4761088 B1 JP 4761088B1
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JP
Japan
Prior art keywords
workpiece
work
dicing
work table
supply
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Expired - Fee Related
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JP2011032224A
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English (en)
Japanese (ja)
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JP2011228641A (ja
Inventor
正幸 東
裕介 新井
隆 藤田
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Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
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Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2011032224A priority Critical patent/JP4761088B1/ja
Priority to KR1020110026926A priority patent/KR101258444B1/ko
Priority to CN201110078846.3A priority patent/CN102205562B/zh
Application granted granted Critical
Publication of JP4761088B1 publication Critical patent/JP4761088B1/ja
Publication of JP2011228641A publication Critical patent/JP2011228641A/ja
Priority to KR1020120118433A priority patent/KR101419317B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
JP2011032224A 2010-03-29 2011-02-17 ダイシング装置及びダイシング方法 Expired - Fee Related JP4761088B1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011032224A JP4761088B1 (ja) 2010-03-29 2011-02-17 ダイシング装置及びダイシング方法
KR1020110026926A KR101258444B1 (ko) 2010-03-29 2011-03-25 다이싱 장치 및 다이싱 방법
CN201110078846.3A CN102205562B (zh) 2010-03-29 2011-03-28 切割装置以及切割方法
KR1020120118433A KR101419317B1 (ko) 2010-03-29 2012-10-24 다이싱 장치 및 다이싱 방법

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010075302 2010-03-29
JP2010075302 2010-03-29
JP2011032224A JP4761088B1 (ja) 2010-03-29 2011-02-17 ダイシング装置及びダイシング方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011129189A Division JP4915485B2 (ja) 2010-03-29 2011-06-09 ダイシング装置及びダイシング方法

Publications (2)

Publication Number Publication Date
JP4761088B1 true JP4761088B1 (ja) 2011-08-31
JP2011228641A JP2011228641A (ja) 2011-11-10

Family

ID=44597199

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2011032224A Expired - Fee Related JP4761088B1 (ja) 2010-03-29 2011-02-17 ダイシング装置及びダイシング方法
JP2011129189A Expired - Fee Related JP4915485B2 (ja) 2010-03-29 2011-06-09 ダイシング装置及びダイシング方法
JP2011202194A Expired - Fee Related JP5387924B2 (ja) 2010-03-29 2011-09-15 ダイシング装置及びダイシング方法
JP2013214428A Active JP5807757B2 (ja) 2010-03-29 2013-10-15 ワーク回収装置及び方法

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2011129189A Expired - Fee Related JP4915485B2 (ja) 2010-03-29 2011-06-09 ダイシング装置及びダイシング方法
JP2011202194A Expired - Fee Related JP5387924B2 (ja) 2010-03-29 2011-09-15 ダイシング装置及びダイシング方法
JP2013214428A Active JP5807757B2 (ja) 2010-03-29 2013-10-15 ワーク回収装置及び方法

Country Status (3)

Country Link
JP (4) JP4761088B1 (ko)
KR (2) KR101258444B1 (ko)
CN (1) CN102205562B (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014143323A (ja) * 2013-01-24 2014-08-07 Disco Abrasive Syst Ltd 加工装置
KR101333115B1 (ko) * 2013-03-08 2013-11-26 주식회사 베셀 패널 노치부 연마장치
JP2016195155A (ja) * 2015-03-31 2016-11-17 パナソニックＩｐマネジメント株式会社 プラズマ処理装置およびプラズマ処理方法
CN108318971A (zh) * 2018-01-12 2018-07-24 浙江富春江光电科技有限公司 一种光波导芯片免研抛方法
JP7265430B2 (ja) * 2019-07-02 2023-04-26 株式会社ディスコ 処理装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0647220B2 (ja) * 1987-05-18 1994-06-22 株式会社東京精密 ダイシング装置におけるワ−ク搬送方法及び装置
JPH0352248A (ja) * 1989-07-20 1991-03-06 Tokyo Electron Ltd 搬送アーム
JPH04324338A (ja) * 1991-04-25 1992-11-13 Hitachi Ltd 常圧ガス分析チャンバおよび常圧ガス分析装置
JP3153372B2 (ja) * 1992-02-26 2001-04-09 東京エレクトロン株式会社 基板処理装置
JP3485816B2 (ja) * 1998-12-09 2004-01-13 太陽誘電株式会社 ダイシング装置
JP2001168067A (ja) * 1999-12-09 2001-06-22 Sony Corp ダイシング装置
JP2001244220A (ja) * 2000-02-29 2001-09-07 Tokyo Seimitsu Co Ltd ダイシング装置
JP4032778B2 (ja) * 2002-03-07 2008-01-16 セイコーエプソン株式会社 板状部材の搬送装置
JP2006059861A (ja) * 2004-08-17 2006-03-02 Lintec Corp 脆質部材の転着装置
JP2006156633A (ja) * 2004-11-29 2006-06-15 Lintec Corp 脆質部材の処理装置
JP4564832B2 (ja) * 2004-11-30 2010-10-20 株式会社ディスコ 矩形基板の分割装置
JP4698519B2 (ja) * 2006-07-31 2011-06-08 日東電工株式会社 半導体ウエハマウント装置
JP4953738B2 (ja) * 2006-09-07 2012-06-13 日東電工株式会社 粘着テープ切断方法およびこれを用いた粘着テープ貼付け装置
JP4876819B2 (ja) * 2006-09-25 2012-02-15 株式会社東京精密 ダイシング装置及びダイシング方法
JP5068611B2 (ja) * 2007-09-13 2012-11-07 株式会社ディスコ 加工装置における加工水の確認方法及び確認装置
JP5257890B2 (ja) * 2007-12-04 2013-08-07 上野精機株式会社 ウエハリング供給排出装置
JP5169557B2 (ja) * 2008-07-09 2013-03-27 株式会社Ｉｈｉ 基板昇降移送装置及び基板処理移送システム
JP5187366B2 (ja) * 2010-08-31 2013-04-24 三星ダイヤモンド工業株式会社 基板ブレーク装置

Also Published As

Publication number Publication date
JP4915485B2 (ja) 2012-04-11
KR101258444B1 (ko) 2013-04-26
KR20120120927A (ko) 2012-11-02
CN102205562B (zh) 2015-06-24
JP5387924B2 (ja) 2014-01-15
JP2011254111A (ja) 2011-12-15
JP2011228726A (ja) 2011-11-10
CN102205562A (zh) 2011-10-05
JP5807757B2 (ja) 2015-11-10
KR101419317B1 (ko) 2014-08-13
KR20110109921A (ko) 2011-10-06
JP2014045203A (ja) 2014-03-13
JP2011228641A (ja) 2011-11-10

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