JP4753144B2 - 表面被覆切削工具 - Google Patents
表面被覆切削工具 Download PDFInfo
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- JP4753144B2 JP4753144B2 JP2009288850A JP2009288850A JP4753144B2 JP 4753144 B2 JP4753144 B2 JP 4753144B2 JP 2009288850 A JP2009288850 A JP 2009288850A JP 2009288850 A JP2009288850 A JP 2009288850A JP 4753144 B2 JP4753144 B2 JP 4753144B2
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- coating layer
- coating
- cutting tool
- coated cutting
- elements
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- 238000005520 cutting process Methods 0.000 title claims description 59
- 239000011247 coating layer Substances 0.000 claims description 102
- 239000010410 layer Substances 0.000 claims description 69
- 238000000576 coating method Methods 0.000 claims description 60
- 239000011248 coating agent Substances 0.000 claims description 57
- 239000010408 film Substances 0.000 claims description 47
- 239000000463 material Substances 0.000 claims description 37
- 239000000758 substrate Substances 0.000 claims description 32
- 229910052757 nitrogen Inorganic materials 0.000 claims description 25
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 21
- 239000013078 crystal Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 18
- 238000005240 physical vapour deposition Methods 0.000 claims description 18
- 229910052796 boron Inorganic materials 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 12
- 230000035699 permeability Effects 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 229910052804 chromium Inorganic materials 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 6
- 239000011195 cermet Substances 0.000 claims description 5
- 229910052758 niobium Inorganic materials 0.000 claims description 5
- 229910052715 tantalum Inorganic materials 0.000 claims description 5
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052720 vanadium Inorganic materials 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 32
- 239000000203 mixture Substances 0.000 description 23
- 238000012360 testing method Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000003801 milling Methods 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 238000007514 turning Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000007373 indentation Methods 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000005469 synchrotron radiation Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 229910000816 inconels 718 Inorganic materials 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003763 resistance to breakage Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000004227 thermal cracking Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B51/00—Tools for drilling machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23C—MILLING
- B23C5/00—Milling-cutters
- B23C5/02—Milling-cutters characterised by the shape of the cutter
- B23C5/06—Face-milling cutters, i.e. having only or primarily a substantially flat cutting surface
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
- C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Drilling Tools (AREA)
Description
本発明の表面被覆切削工具は、基材とその上に形成された被膜とを備えたものである。このような基本的構成を有する本発明の表面被覆切削工具は、たとえばドリル、エンドミル、フライス加工用または旋削加工用刃先交換型切削チップ、メタルソー、歯切工具、リーマ、タップ、またはクランクシャフトのピンミーリング加工用チップ等として極めて有用に用いることができる。本発明の表面被覆切削工具は、特にステンレス、インコネル、チタン等の難削材を削る場合にも、被膜が剥離しにくいという特徴を有する。
本発明の表面被覆切削工具の基材としては、このような切削工具の基材として知られる従来公知のものを特に限定なく使用することができる。たとえば、超硬合金(たとえばWC基超硬合金、WCの他、Coを含み、あるいはさらにTi、Ta、Nb等の炭窒化物等を添加したものも含む)、サーメット(TiC、TiN、TiCN等を主成分とするもの)、高速度鋼、セラミックス(炭化チタン、炭化硅素、窒化硅素、窒化アルミニウム、酸化アルミニウム、およびこれらの混合体など)、立方晶型窒化硼素焼結体、ダイヤモンド焼結体等をこのような基材の例として挙げることができる。
本発明の被膜は、物理蒸着法により形成されるものであって、一以上の層を含み、該一以上の層のうち、少なくとも一層は第1被膜層であり、該第1被膜層は、AlとNとを含み、その熱浸透率が2000J・sec -1/2 ・m -2 ・K -1 以上5000J・sec -1/2 ・m -2 ・K -1 以下であって、基材側から順に非晶質領域と結晶質領域とを有し、非晶質領域は、非晶質からなり、かつ0.01μm以上2μm以下の厚みであり、結晶質領域は、六方晶構造を含む結晶構造からなることを特徴とする。
<第1被膜層>
本発明の被膜に含まれる第1被膜層は、AlとNとを含み、その熱浸透率は、2000J・sec -1/2 ・m -2 ・K -1 以上5000J・sec -1/2 ・m -2 ・K -1 以下であることを特徴とする。従来のAlとNとを含む被膜は、潤滑性の点では優れているものの、その熱浸透率が高いためそれ以外の層および基材が高温になってしまい、熱損傷により工具寿命が短くなりやすいという問題があった。
第1被膜層は、−1GPa以上0GPa以下の残留応力を有することが好ましい。このような残留応力を有することにより、優れた耐欠損性を有しつつ、第1被膜層の形成時に破壊されず切削加工時にも破壊されないという特性を効果的に発現することができる。
本発明の第1被膜層は、その層を構成する化合物(すなわちAlとNとを含む化合物)がV、Cr、Y、Nb、Hf、Ta、B、およびSiからなる群より選ばれる少なくとも1種の元素を含むことが好ましく、その割合は、該化合物に含まれる金属成分(すなわちAl)に対して0.1〜20原子%含むことが好ましい。すなわち、第1被膜層が、Al1-xMexN(0.001≦x≦0.2)からなり、Meは、V、Cr、Y、Nb、Hf、Ta、B、およびSiからなる群より選ばれる1種以上の元素であることが好ましい。このような他の元素を含むことにより、結晶質領域中の結晶構造に歪みが入り硬度がさらに向上することから耐摩耗性がより向上したものとなる。しかも、切削加工時において被膜中あるいは被膜と基材間において原子拡散が抑制され、耐酸化性等の耐反応性が良好となる。
本発明において、被膜は、上記の第1被膜層の他に、1以上の第2被膜層を含むことが好ましい。このような第2被膜層は、基材と第1被膜層との間に中間層として形成されていてもよいし、第1被膜層の表面側に最表層として形成されていてもよい。
本発明の被膜を形成するのに用いられる物理蒸着法(PVD法)としては、従来公知の物理蒸着法を特に限定することなく用いることができる。これは、本発明の被膜を基材表面に成膜するためには結晶性の高い化合物を形成することができる成膜プロセスであることが不可欠であり、種々の成膜方法を検討した結果、物理蒸着法を用いることが最適であることが見出されたからである。物理蒸着法には、たとえばスパッタリング法、イオンプレーティング法、アークイオンプレーティング法、電子イオンビーム蒸着法等があるが、特に原料元素のイオン化率が高いカソードアークイオンプレーティング法、もしくはスパッタリング法を用いると、生産性が高いので好ましい。
以下のようにして表面被覆切削工具を作成し、その評価を行なった。
まず、表面被覆切削工具の基材として、材質がP20超硬であり、形状がSEET13T3AGSN(JIS)である正面フライス加工用の刃先交換型切削チップと、材質がP20超硬であり、形状がCNMG120408(JIS)である旋削加工用の刃先交換型切削チップとを準備し、これらの基材をカソードアークイオンプレーティング・スパッタ装置、またはCVD装置に装着した。
上記で作製した実施例1〜31および比較例1〜8の表面被覆切削工具のそれぞれについて、以下の条件による正面フライス試験および連続旋削試験を行なうことにより耐摩耗性の評価を行なった。該評価は、刃先の逃げ面摩耗幅が0.2mmを超えるまでの時間、または被膜に欠損が生じるまでの時間を切削時間として測定することにより行なった。その結果を表3に示す。なお、正面フライス試験および連続旋削試験のいずれも、切削時間が長いものほど耐摩耗性が優れていることを示している。
基材としては上記の通り材質がP20超硬合金であり、形状がSEET13T3AGSN(JIS)である正面フライス加工用の刃先交換型切削チップを用いて、以下の条件により行なった。
切削速度:100m/分
切り込み:2.0mm
送り:0.15mm/rev
DRY/WET:DRY
<連続旋削試験の条件>
基材としては上記の通り材質がP20超硬合金であり、形状がCNMG120408である旋削加工用刃先交換型切削チップを用い、以下の条件により行なった。
切削速度:40m/分
切り込み:0.5mm
送り:0.15mm/rev
DRY/WET:WET
Claims (9)
- 基材と、該基材上に形成された被膜とを備える表面被覆切削工具であって、
前記被膜は、物理蒸着法により形成され、かつ一以上の層を含み、
前記一以上の層のうち少なくとも一層は、第1被膜層であり、
前記第1被膜層は、AlとNとを含み、その熱浸透率が2000J・sec -1/2 ・m -2 ・K -1 以上5000J・sec -1/2 ・m -2 ・K -1 以下であって、かつ0.2μm以上5μm以下の膜厚であり、
前記第1被膜層は、前記基材側から順に非晶質領域と結晶質領域とを有し、
前記非晶質領域は、非晶質からなり、かつ0.01μm以上2μm以下の厚みであり、
前記結晶質領域は、六方晶構造を含む結晶構造からなる、表面被覆切削工具。 - 前記結晶質領域は、2500mgf/μm2以上3800mgf/μm2以下の硬度を有する、請求項1に記載の表面被覆切削工具。
- 前記第1被膜層は、−1GPa以上0GPa以下の残留応力を有する、請求項1または2に記載の表面被覆切削工具。
- 前記第1被膜層は、スパッタリング法により形成される、請求項1〜3のいずれかに記載の表面被覆切削工具。
- 前記第1被膜層は、Al1-xMexN(0.001≦x≦0.2)からなり、
前記Meは、V、Cr、Y、Nb、Hf、Ta、B、およびSiからなる群より選ばれる1種以上の元素である、請求項1〜4のいずれかに記載の表面被覆切削工具。 - 前記被膜は、前記第1被膜層以外に、1以上の第2被膜層を含み、
前記第2被膜層は、周期律表のIVa族元素、Va族元素、VIa族元素、Al、およびSiからなる群より選ばれる1種以上の元素、または該元素のうちの1種以上の元素と、炭素、窒素、酸素、および硼素からなる群より選ばれる1種以上の元素との化合物によって構成される、請求項1〜5のいずれかに記載の表面被覆切削工具。 - 前記第2被膜層の1以上は、Cr、Al、Ti、およびSiからなる群より選ばれる1種以上の元素、または該元素のうちの1種以上の元素と、炭素、窒素、酸素、および硼素からなる群より選ばれる1種以上の元素との化合物によって構成される、請求項6に記載の表面被覆切削工具。
- 前記第2被膜層は、1nm以上100nm以下の厚みの薄膜層を周期的に積層した超多層構造を有し、
前記薄膜層は、Cr、Al、Ti、およびSiからなる群より選ばれる1種以上の元素、または該元素のうちの1種以上の元素と、炭素、窒素、酸素、および硼素からなる群より選ばれる1種以上の元素との化合物によって構成される、請求項6または7に記載の表面被覆切削工具。 - 前記基材は、超硬合金、サーメット、立方晶型窒化硼素焼結体、高速度鋼、セラミックス、またはダイヤモンド焼結体のいずれかにより構成される請求項1〜8のいずれかに記載の表面被覆切削工具。
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