JP4673953B2 - マクロ照明装置 - Google Patents
マクロ照明装置 Download PDFInfo
- Publication number
- JP4673953B2 JP4673953B2 JP2000078723A JP2000078723A JP4673953B2 JP 4673953 B2 JP4673953 B2 JP 4673953B2 JP 2000078723 A JP2000078723 A JP 2000078723A JP 2000078723 A JP2000078723 A JP 2000078723A JP 4673953 B2 JP4673953 B2 JP 4673953B2
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- Prior art keywords
- illumination
- unit
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- light
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000078723A JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000078723A JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001264255A JP2001264255A (ja) | 2001-09-26 |
JP2001264255A5 JP2001264255A5 (de) | 2007-05-17 |
JP4673953B2 true JP4673953B2 (ja) | 2011-04-20 |
Family
ID=18596096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000078723A Expired - Fee Related JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4673953B2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5006024B2 (ja) * | 2006-12-27 | 2012-08-22 | オリンパス株式会社 | 外観検査用投光装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62233710A (ja) * | 1986-04-04 | 1987-10-14 | Nissan Motor Co Ltd | 表面検査装置 |
JPH05232032A (ja) * | 1992-02-19 | 1993-09-07 | Olympus Optical Co Ltd | 外観検査用投光装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
JPH09231832A (ja) * | 1996-02-23 | 1997-09-05 | Asahi Glass Co Ltd | ガラス物品検査用照明装置 |
JPH10111253A (ja) * | 1996-10-09 | 1998-04-28 | Olympus Optical Co Ltd | 基板検査装置 |
JPH1194756A (ja) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | 基板検査装置 |
JP2000066164A (ja) * | 1998-08-25 | 2000-03-03 | Toshiba Electronic Engineering Corp | 基板外観検査装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2960978B2 (ja) * | 1991-03-29 | 1999-10-12 | マツダ株式会社 | 表面状態検査用照明装置 |
JPH11166901A (ja) * | 1997-12-03 | 1999-06-22 | Nikon Corp | 検査装置及び方法 |
-
2000
- 2000-03-21 JP JP2000078723A patent/JP4673953B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62233710A (ja) * | 1986-04-04 | 1987-10-14 | Nissan Motor Co Ltd | 表面検査装置 |
JPH05232032A (ja) * | 1992-02-19 | 1993-09-07 | Olympus Optical Co Ltd | 外観検査用投光装置 |
JPH08327554A (ja) * | 1995-03-31 | 1996-12-13 | Lintec Corp | 照明装置 |
JPH09231832A (ja) * | 1996-02-23 | 1997-09-05 | Asahi Glass Co Ltd | ガラス物品検査用照明装置 |
JPH10111253A (ja) * | 1996-10-09 | 1998-04-28 | Olympus Optical Co Ltd | 基板検査装置 |
JPH1194756A (ja) * | 1997-09-24 | 1999-04-09 | Olympus Optical Co Ltd | 基板検査装置 |
JP2000066164A (ja) * | 1998-08-25 | 2000-03-03 | Toshiba Electronic Engineering Corp | 基板外観検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2001264255A (ja) | 2001-09-26 |
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