JP2001264255A5 - - Google Patents
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- Publication number
- JP2001264255A5 JP2001264255A5 JP2000078723A JP2000078723A JP2001264255A5 JP 2001264255 A5 JP2001264255 A5 JP 2001264255A5 JP 2000078723 A JP2000078723 A JP 2000078723A JP 2000078723 A JP2000078723 A JP 2000078723A JP 2001264255 A5 JP2001264255 A5 JP 2001264255A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000078723A JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000078723A JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001264255A JP2001264255A (ja) | 2001-09-26 |
| JP2001264255A5 true JP2001264255A5 (de) | 2007-05-17 |
| JP4673953B2 JP4673953B2 (ja) | 2011-04-20 |
Family
ID=18596096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000078723A Expired - Fee Related JP4673953B2 (ja) | 2000-03-21 | 2000-03-21 | マクロ照明装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4673953B2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5006024B2 (ja) * | 2006-12-27 | 2012-08-22 | オリンパス株式会社 | 外観検査用投光装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0621775B2 (ja) * | 1986-04-04 | 1994-03-23 | 日産自動車株式会社 | 表面検査装置 |
| JP2960978B2 (ja) * | 1991-03-29 | 1999-10-12 | マツダ株式会社 | 表面状態検査用照明装置 |
| JP3095856B2 (ja) * | 1992-02-19 | 2000-10-10 | オリンパス光学工業株式会社 | 外観検査用投光装置 |
| JP3657694B2 (ja) * | 1995-03-31 | 2005-06-08 | リンテック株式会社 | 照明装置 |
| JPH09231832A (ja) * | 1996-02-23 | 1997-09-05 | Asahi Glass Co Ltd | ガラス物品検査用照明装置 |
| JP3782525B2 (ja) * | 1996-10-09 | 2006-06-07 | オリンパス株式会社 | 基板検査装置 |
| JP3944285B2 (ja) * | 1997-09-24 | 2007-07-11 | オリンパス株式会社 | 基板検査装置 |
| JPH11166901A (ja) * | 1997-12-03 | 1999-06-22 | Nikon Corp | 検査装置及び方法 |
| JP2000066164A (ja) * | 1998-08-25 | 2000-03-03 | Toshiba Electronic Engineering Corp | 基板外観検査装置 |
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2000
- 2000-03-21 JP JP2000078723A patent/JP4673953B2/ja not_active Expired - Fee Related