JP4629007B2 - 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 - Google Patents

薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 Download PDF

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Publication number
JP4629007B2
JP4629007B2 JP2006215557A JP2006215557A JP4629007B2 JP 4629007 B2 JP4629007 B2 JP 4629007B2 JP 2006215557 A JP2006215557 A JP 2006215557A JP 2006215557 A JP2006215557 A JP 2006215557A JP 4629007 B2 JP4629007 B2 JP 4629007B2
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JP
Japan
Prior art keywords
air
porous film
thin plate
plate
plate material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006215557A
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English (en)
Japanese (ja)
Other versions
JP2008041989A (ja
Inventor
成之 名倉
亮明 濱中
説治 弓場
典之 鳥山
勤 小栗
勉 牧野
丈二 福田
治道 廣瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to JP2006215557A priority Critical patent/JP4629007B2/ja
Priority to KR1020070035014A priority patent/KR100831135B1/ko
Priority to CN2007101008176A priority patent/CN101121466B/zh
Priority to TW096114041A priority patent/TW200811021A/zh
Publication of JP2008041989A publication Critical patent/JP2008041989A/ja
Application granted granted Critical
Publication of JP4629007B2 publication Critical patent/JP4629007B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2006215557A 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置 Expired - Fee Related JP4629007B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006215557A JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
KR1020070035014A KR100831135B1 (ko) 2006-08-08 2007-04-10 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치
CN2007101008176A CN101121466B (zh) 2006-08-08 2007-04-18 薄板状材料输送用气动工作台以及薄板状材料输送装置
TW096114041A TW200811021A (en) 2006-08-08 2007-04-20 Air table for transferring sheet material, and apparatus for transferring the sheet material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006215557A JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Publications (2)

Publication Number Publication Date
JP2008041989A JP2008041989A (ja) 2008-02-21
JP4629007B2 true JP4629007B2 (ja) 2011-02-09

Family

ID=39084012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006215557A Expired - Fee Related JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Country Status (4)

Country Link
JP (1) JP4629007B2 (zh)
KR (1) KR100831135B1 (zh)
CN (1) CN101121466B (zh)
TW (1) TW200811021A (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8047354B2 (en) 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
JP5123842B2 (ja) * 2008-12-26 2013-01-23 Ｃｋｄ株式会社 非接触支持装置
TWI472467B (zh) * 2009-04-23 2015-02-11 Corning Inc 玻璃片運送之液體射出軸承
JP6043123B2 (ja) * 2012-08-22 2016-12-14 オイレス工業株式会社 非接触支持装置及び塗布装置
JP6173173B2 (ja) * 2013-11-11 2017-08-02 株式会社ディスコ 切削装置
KR20210143725A (ko) * 2019-12-26 2021-11-29 난징 리안 세미컨덕터 리미티드 반도체 산업에서 웨이퍼 기하학적 구조 측정을 위한 툴 아키텍처

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680227A (ja) * 1992-08-31 1994-03-22 Taiyo Yuden Co Ltd 物品搬送ベルト
JPH10139160A (ja) * 1996-11-01 1998-05-26 Toray Eng Co Ltd 板状物搬送装置及び非接触搬送ライン
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JPH11268831A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
JP2004307152A (ja) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk 起倒可能な非接触搬送装置
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2005029359A (ja) * 2003-07-08 2005-02-03 Daifuku Co Ltd 板状体搬送装置
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP2006049493A (ja) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法
JP2006108131A (ja) * 2004-09-30 2006-04-20 Dainippon Screen Mfg Co Ltd 基板保管装置
JP2006179653A (ja) * 2004-12-22 2006-07-06 Murata Mach Ltd 枚葉搬送用トレイおよび搬送システム

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02158152A (ja) * 1988-12-09 1990-06-18 Rohm Co Ltd ペレット収納整列用治具
JP2003321119A (ja) 2002-05-07 2003-11-11 Mineya Mori プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
JP4313080B2 (ja) 2003-04-02 2009-08-12 第一施設工業株式会社 非接触浮上ユニット
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
KR200346820Y1 (ko) 2004-01-06 2004-04-06 김태원 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치
CN1810608A (zh) * 2005-01-26 2006-08-02 三发机电有限公司 基底传送设备

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680227A (ja) * 1992-08-31 1994-03-22 Taiyo Yuden Co Ltd 物品搬送ベルト
JPH10139160A (ja) * 1996-11-01 1998-05-26 Toray Eng Co Ltd 板状物搬送装置及び非接触搬送ライン
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JPH11268831A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
JP2004307152A (ja) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk 起倒可能な非接触搬送装置
JP2004345744A (ja) * 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2005029359A (ja) * 2003-07-08 2005-02-03 Daifuku Co Ltd 板状体搬送装置
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP2006049493A (ja) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法
JP2006108131A (ja) * 2004-09-30 2006-04-20 Dainippon Screen Mfg Co Ltd 基板保管装置
JP2006179653A (ja) * 2004-12-22 2006-07-06 Murata Mach Ltd 枚葉搬送用トレイおよび搬送システム

Also Published As

Publication number Publication date
CN101121466B (zh) 2012-01-04
JP2008041989A (ja) 2008-02-21
TW200811021A (en) 2008-03-01
KR100831135B1 (ko) 2008-05-20
KR20080013693A (ko) 2008-02-13
TWI352056B (zh) 2011-11-11
CN101121466A (zh) 2008-02-13

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