JP4588778B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
- Publication number
- JP4588778B2 JP4588778B2 JP2008192320A JP2008192320A JP4588778B2 JP 4588778 B2 JP4588778 B2 JP 4588778B2 JP 2008192320 A JP2008192320 A JP 2008192320A JP 2008192320 A JP2008192320 A JP 2008192320A JP 4588778 B2 JP4588778 B2 JP 4588778B2
- Authority
- JP
- Japan
- Prior art keywords
- transfer
- case
- substrate
- chamber
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
2 搬送室
3A〜3F 処理室
4 搬送ケース
5 搬送機構
6 基板搬送口
7 ゲートバルブ
8 排気ライン
9 ガス供給ライン
10 レール
11 移動部
12 アーム部
13 把持部
20 ケース本体
21 ピック
22 移載機構
23 ロッド
24 ラック
25 連結部
26,34,37,38 真空シール
27 ガイド
28 カバー
30 ゲートバルブ
31 コイルスプリング
32 駆動部材
33 フランジ部材
35 スプリング収容部
36 スライド部材
40 搬送ケース取り付け機構
41 板状部材
42 レール部材
43 ケース固定部材
44 ドッキング用アクチュエータ
45 押圧用アクチュエータ
46 係合部材
47 ゲート用アクチュエータ
48 ピニオン
49 モータ
51 搬送口
52 ゲートバルブ
60 移動部材
61 ローラ
62 リニヤスケール
63 センサ
70 ボールネジ
71 ナット
72,74 レール
73 移動部材73
75 第2の移動部材
76A,76B プーリ
77 ベルト
79,80 傘歯車
81 モータ
Claims (2)
- 基板を搬入・搬出するための搬送口を有し、内部に収容した基板に対して処理を施すための複数の処理室と、
外部雰囲気から隔離された状態で基板を収容し、基板を搬入・搬出するための出入り口と、前記出入り口を閉鎖する閉鎖機構とを有する搬送ケースと、
前記処理室に対して基板を搬入・搬出するための第1の位置に該搬送ケースを運ぶ搬送機構と、
該搬送機構から分離されて単独で前記搬送ケースを前記第1の位置に固定する搬送ケース取り付け機構と、
基板を搬入・搬出する基板搬送口を有し、前記処理室が周囲に接続され、前記搬送機構が移動する空間を画成する搬送室と、
前記搬送ケースから分離されて固定した位置に設けられ、アクチュエータと、該アクチュエータに取り付けられた係合部材とを有する、前記閉鎖機構を駆動するための閉鎖機構駆動源と
を有し、
前記搬送ケースの前記出入り口は前記第1の位置において前記処理室の前記搬送口に接続され、前記搬送ケースは前記搬送機構に対して着脱可能に支持され、
前記搬送ケースは前記出入り口が前記基板搬送口に接続される第2の位置と前記第1の位置との間で前記搬送機構により移動され、
前記閉鎖機構駆動源は、前記搬送ケースが前記第1又は第2の位置に固定された時に前記閉鎖機構に接続され、
前記閉鎖機構は、前記搬送ケースの前記出入り口を開閉するバルブと、該バルブを駆動する駆動部材と、該駆動部材に接続されたフランジ部材とを有し、
前記閉鎖機構の前記フランジ部材が前記閉鎖機構駆動源の前記係合部材に係合することにより、前記閉鎖機構駆動源が前記閉鎖機構に接続されることを特徴とする基板処理装置。 - 請求項1記載の基板処理装置であって、
前記搬送ケースは気密に構成されており、前記処理室に機械的に接続されることで自動的に気密に接続されることを特徴とする基板処理装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008192320A JP4588778B2 (ja) | 2002-05-10 | 2008-07-25 | 基板処理装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002136102 | 2002-05-10 | ||
JP2008192320A JP4588778B2 (ja) | 2002-05-10 | 2008-07-25 | 基板処理装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004504289A Division JP4216250B2 (ja) | 2002-05-10 | 2003-05-09 | 基板処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008283215A JP2008283215A (ja) | 2008-11-20 |
JP4588778B2 true JP4588778B2 (ja) | 2010-12-01 |
Family
ID=29416772
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004504289A Expired - Fee Related JP4216250B2 (ja) | 2002-05-10 | 2003-05-09 | 基板処理装置 |
JP2008192320A Expired - Fee Related JP4588778B2 (ja) | 2002-05-10 | 2008-07-25 | 基板処理装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004504289A Expired - Fee Related JP4216250B2 (ja) | 2002-05-10 | 2003-05-09 | 基板処理装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7780391B2 (ja) |
JP (2) | JP4216250B2 (ja) |
AU (1) | AU2003231451A1 (ja) |
WO (1) | WO2003096410A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4493955B2 (ja) * | 2003-09-01 | 2010-06-30 | 東京エレクトロン株式会社 | 基板処理装置及び搬送ケース |
US20070020067A1 (en) * | 2005-07-22 | 2007-01-25 | Au Optronics Corporation | Storage cassette for large panel glass substrates |
US20090022574A1 (en) * | 2007-07-16 | 2009-01-22 | Eudy Steve L | Workpiece loading system |
JP5338335B2 (ja) * | 2008-08-13 | 2013-11-13 | 東京エレクトロン株式会社 | 搬送容器の開閉装置及びプローブ装置 |
TW201013760A (en) * | 2008-09-17 | 2010-04-01 | Inotera Memories Inc | A wafer base clean room and a method of using the wafer base clean room |
JP2013229373A (ja) * | 2012-04-24 | 2013-11-07 | Tokyo Electron Ltd | 基板処理装置及びそのメンテナンス方法 |
JP6094731B2 (ja) * | 2012-11-08 | 2017-03-15 | ソニー株式会社 | 光ファイバケーブル処理装置およびその処理方法 |
US10043689B2 (en) * | 2015-06-05 | 2018-08-07 | Hirata Corporation | Chamber apparatus and processing system |
SG11201810635YA (en) * | 2016-06-02 | 2018-12-28 | Applied Materials Inc | Gate valve for continuous tow processing |
US11139183B2 (en) * | 2018-05-24 | 2021-10-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Systems and methods for dry wafer transport |
US11447866B2 (en) | 2020-06-17 | 2022-09-20 | Applied Materials, Inc. | High temperature chemical vapor deposition lid |
CN116400052B (zh) * | 2023-06-07 | 2023-08-25 | 北京建工环境修复股份有限公司 | 一种双通道便携式有机污染物检测器 |
Citations (3)
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JPH07312335A (ja) * | 1994-05-18 | 1995-11-28 | Sony Corp | 基板搬送システムおよびこれを用いたレジスト塗布/現像装置ならびにその使用方法 |
JP2001291765A (ja) * | 2000-04-10 | 2001-10-19 | Tokyo Electron Ltd | 基板収容ボックス及び処理システム |
JP2002231792A (ja) * | 2001-01-31 | 2002-08-16 | Tokyo Electron Ltd | 基板処理装置 |
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2003
- 2003-05-09 WO PCT/JP2003/005830 patent/WO2003096410A1/ja active Application Filing
- 2003-05-09 US US10/513,813 patent/US7780391B2/en not_active Expired - Fee Related
- 2003-05-09 JP JP2004504289A patent/JP4216250B2/ja not_active Expired - Fee Related
- 2003-05-09 AU AU2003231451A patent/AU2003231451A1/en not_active Abandoned
-
2008
- 2008-07-25 JP JP2008192320A patent/JP4588778B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07312335A (ja) * | 1994-05-18 | 1995-11-28 | Sony Corp | 基板搬送システムおよびこれを用いたレジスト塗布/現像装置ならびにその使用方法 |
JP2001291765A (ja) * | 2000-04-10 | 2001-10-19 | Tokyo Electron Ltd | 基板収容ボックス及び処理システム |
JP2002231792A (ja) * | 2001-01-31 | 2002-08-16 | Tokyo Electron Ltd | 基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JP2008283215A (ja) | 2008-11-20 |
JP4216250B2 (ja) | 2009-01-28 |
AU2003231451A1 (en) | 2003-11-11 |
JPWO2003096410A1 (ja) | 2005-09-15 |
US7780391B2 (en) | 2010-08-24 |
WO2003096410A1 (fr) | 2003-11-20 |
US20050238464A1 (en) | 2005-10-27 |
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