JP4541299B2 - 光検出装置 - Google Patents
光検出装置 Download PDFInfo
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- JP4541299B2 JP4541299B2 JP2005506427A JP2005506427A JP4541299B2 JP 4541299 B2 JP4541299 B2 JP 4541299B2 JP 2005506427 A JP2005506427 A JP 2005506427A JP 2005506427 A JP2005506427 A JP 2005506427A JP 4541299 B2 JP4541299 B2 JP 4541299B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/58—Photometry, e.g. photographic exposure meter using luminescence generated by light
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14638—Structures specially adapted for transferring the charges across the imager perpendicular to the imaging plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/0557—Disposition the external layer being disposed on a via connection of the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16238—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area protruding from the surface of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
- H01L27/14661—X-ray, gamma-ray or corpuscular radiation imagers of the hybrid type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
Claims (4)
- 複数の光検出素子が表面に設けられた第1基板と、
前記光検出素子それぞれの出力信号を処理するための信号処理部が表面に設けられた第2基板と、そして、
前記第1及び第2基板との間に位置し、該第1基板に対面した第1面と該第2基板に対面した第2面を有する第3基板であって、前記第1面上に設けられかつ前記光検出素子それぞれと電気的に接続された共通配線と、前記第2面上に設けられかつ前記共通配線と電気的に接続されるとともに前記信号処理部と電気的に接続された端子部とを有する第3基板を備えた光検出装置であって、
前記第3基板の第1面上に設けられた前記共通配線は、所定間隔で配置された複数の配線要素を含み、前記第3基板の第2面上に設けられた前記端子部は、前記複数の配線要素の配置間隔よりも狭い間隔で配置された複数の端子を含むことを特徴とする光検出装置。 - 前記第1基板と第3基板との間に設けられ、前記光検出素子それぞれと前記共通配線とを電気的に接続する第1バンプと、前記第3基板と前記第2基板との間に設けられ、前記信号処理部と前記端子部とを電気的に接続するための第2バンプをさらに備えたことを特徴とする請求項1記載の光検出装置。
- 前記第3基板は、前記共通配線と前記端子部とを接続する内部配線がセラミック基板内に埋設された構成を有することを特徴とする請求項1又は2記載の光検出装置。
- 前記第1基板は、前記各光検出素子に接続された複数のスイッチを備え、そして、
前記光検出装置は、前記スイッチそれぞれを順次開閉させる制御部を備えることを特徴とする請求項1〜3のいずれか一項記載の光検出装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003146663 | 2003-05-23 | ||
JP2003146663 | 2003-05-23 | ||
PCT/JP2004/007332 WO2004105137A1 (ja) | 2003-05-23 | 2004-05-21 | 光検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2004105137A1 JPWO2004105137A1 (ja) | 2006-07-20 |
JP4541299B2 true JP4541299B2 (ja) | 2010-09-08 |
Family
ID=33475305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005506427A Expired - Fee Related JP4541299B2 (ja) | 2003-05-23 | 2004-05-21 | 光検出装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7470893B2 (ja) |
EP (1) | EP1628348A4 (ja) |
JP (1) | JP4541299B2 (ja) |
KR (1) | KR101075626B1 (ja) |
CN (1) | CN100407433C (ja) |
IL (1) | IL172123A0 (ja) |
WO (1) | WO2004105137A1 (ja) |
Cited By (1)
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JP2014514891A (ja) * | 2011-05-12 | 2014-06-19 | オリーブ・メディカル・コーポレーション | 相互接続を最適化する許容誤差がある画像センサ |
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KR100718878B1 (ko) | 2005-06-28 | 2007-05-17 | (주)실리콘화일 | 3차원 구조를 갖는 이미지 센서의 분리형 단위화소 및 그제조방법 |
US20080001246A1 (en) * | 2006-05-24 | 2008-01-03 | Dipak Sengupta | Single package detector and digital converter integration |
KR100801447B1 (ko) * | 2006-06-19 | 2008-02-11 | (주)실리콘화일 | 배면 광 포토다이오드를 이용한 이미지센서 및 그 제조방법 |
JP4289377B2 (ja) * | 2006-08-21 | 2009-07-01 | ソニー株式会社 | 物理量検出装置及び撮像装置 |
JP4463793B2 (ja) * | 2006-10-10 | 2010-05-19 | 浜松ホトニクス株式会社 | 光検出装置 |
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JP5643555B2 (ja) | 2010-07-07 | 2014-12-17 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
JP5697371B2 (ja) | 2010-07-07 | 2015-04-08 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5751766B2 (ja) * | 2010-07-07 | 2015-07-22 | キヤノン株式会社 | 固体撮像装置および撮像システム |
JP5885401B2 (ja) | 2010-07-07 | 2016-03-15 | キヤノン株式会社 | 固体撮像装置および撮像システム |
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JP5633323B2 (ja) | 2010-11-11 | 2014-12-03 | ソニー株式会社 | 固体撮像装置及び電子機器 |
US20140367578A1 (en) * | 2011-06-16 | 2014-12-18 | Forstgarten International Holding Gmbh | X-ray image sensor |
JP5791571B2 (ja) | 2011-08-02 | 2015-10-07 | キヤノン株式会社 | 撮像素子及び撮像装置 |
JP2013090127A (ja) * | 2011-10-18 | 2013-05-13 | Olympus Corp | 固体撮像装置および撮像装置 |
US8629524B2 (en) * | 2012-04-27 | 2014-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for vertically integrated backside illuminated image sensors |
US10090349B2 (en) | 2012-08-09 | 2018-10-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMOS image sensor chips with stacked scheme and methods for forming the same |
US9153565B2 (en) | 2012-06-01 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Image sensors with a high fill-factor |
US8957358B2 (en) | 2012-04-27 | 2015-02-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | CMOS image sensor chips with stacked scheme and methods for forming the same |
US10297630B2 (en) * | 2012-06-18 | 2019-05-21 | Forza Silicon Corporation | Pinned charge transimpedance amplifier |
IN2015MN00019A (ja) | 2012-07-26 | 2015-10-16 | Olive Medical Corp | |
JP6433975B2 (ja) | 2013-03-15 | 2018-12-05 | デピュイ・シンセス・プロダクツ・インコーポレイテッド | 入力クロック及びデータ伝送クロックのない画像センサ同期 |
BR112015022884A2 (pt) | 2013-03-15 | 2017-07-18 | Olive Medical Corp | minimizar o sensor de imagem i/o e as contagens do condutor em aplicações de endoscópio |
JP6250959B2 (ja) * | 2013-06-19 | 2017-12-20 | キヤノン株式会社 | 放射線検出装置およびその製造方法 |
JP2015061041A (ja) * | 2013-09-20 | 2015-03-30 | 株式会社東芝 | 放射線検出器および放射線検出装置 |
TWI648986B (zh) * | 2014-04-15 | 2019-01-21 | 日商新力股份有限公司 | 攝像元件、電子機器 |
JP6693068B2 (ja) * | 2015-03-12 | 2020-05-13 | ソニー株式会社 | 固体撮像装置および製造方法、並びに電子機器 |
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2004
- 2004-05-21 US US10/557,547 patent/US7470893B2/en not_active Expired - Fee Related
- 2004-05-21 WO PCT/JP2004/007332 patent/WO2004105137A1/ja active Application Filing
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JPH11261044A (ja) * | 1998-03-11 | 1999-09-24 | Matsushita Electric Ind Co Ltd | 固体撮像素子付半導体装置及び該半導体装置の製造方法 |
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JP2014514891A (ja) * | 2011-05-12 | 2014-06-19 | オリーブ・メディカル・コーポレーション | 相互接続を最適化する許容誤差がある画像センサ |
Also Published As
Publication number | Publication date |
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KR20060011845A (ko) | 2006-02-03 |
KR101075626B1 (ko) | 2011-10-21 |
CN1795559A (zh) | 2006-06-28 |
WO2004105137A1 (ja) | 2004-12-02 |
CN100407433C (zh) | 2008-07-30 |
US20070181780A1 (en) | 2007-08-09 |
EP1628348A1 (en) | 2006-02-22 |
IL172123A0 (en) | 2009-02-11 |
JPWO2004105137A1 (ja) | 2006-07-20 |
EP1628348A4 (en) | 2007-07-18 |
US7470893B2 (en) | 2008-12-30 |
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