JP4540724B2 - Cis系薄膜太陽電池の製造方法 - Google Patents
Cis系薄膜太陽電池の製造方法 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 claims description 106
- 239000002184 metal Substances 0.000 claims description 106
- 239000010408 film Substances 0.000 claims description 84
- 238000000034 method Methods 0.000 claims description 73
- 239000002243 precursor Substances 0.000 claims description 57
- 230000031700 light absorption Effects 0.000 claims description 49
- 229910052783 alkali metal Inorganic materials 0.000 claims description 39
- 150000001340 alkali metals Chemical class 0.000 claims description 39
- 239000011521 glass Substances 0.000 claims description 37
- 238000004544 sputter deposition Methods 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 34
- 239000003513 alkali Substances 0.000 claims description 22
- 229910052708 sodium Inorganic materials 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 238000007740 vapor deposition Methods 0.000 claims description 13
- 238000001704 evaporation Methods 0.000 claims description 10
- 230000008020 evaporation Effects 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 238000007733 ion plating Methods 0.000 claims description 7
- 229910052744 lithium Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000010949 copper Substances 0.000 description 35
- 229910052738 indium Inorganic materials 0.000 description 22
- 238000006243 chemical reaction Methods 0.000 description 18
- 229910052802 copper Inorganic materials 0.000 description 13
- 238000005477 sputtering target Methods 0.000 description 12
- 238000005987 sulfurization reaction Methods 0.000 description 11
- 150000001875 compounds Chemical class 0.000 description 9
- 240000002329 Inga feuillei Species 0.000 description 8
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000011669 selenium Substances 0.000 description 7
- 238000002474 experimental method Methods 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000005357 flat glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910052717 sulfur Inorganic materials 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 239000002585 base Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- 229910000846 In alloy Inorganic materials 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical group [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000807 Ga alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
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- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
- H01L31/0323—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2 characterised by the doping material
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- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
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- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
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Description
実験に用いたCIS系薄膜太陽電池では、図2の(b)に示す構造の金属プリカーサー膜30bが形成された。即ち、ガラス基板1上にMoの金属裏面電極2を形成した後、スパッタ法によって低Na濃度CuGa層32、高Na濃度CuGa層31、In層33を形成し、その後、表1のプロセス条件に従ってセレン化/硫化法を実行してCu(InGa)(SSe)2のp型光吸収層3を形成した。その後、さらに表1のプロセス条件に従って、n型高抵抗バッファ層4及びn型透明導電膜窓層5を形成し、CIS系薄膜太陽電池を構成した。低NaターゲットのNa濃度は10原子数ppmに固定し、高Naターゲットの濃度を表2の4種類に設定し、高Na濃度のCuGa層31、低Na濃度CuGa層32の膜厚比を変化させた。この場合の実験結果を表3に示す。
実験に用いたCIS系薄膜太陽電池は、実験例1と同様の構造を有し、同じ製造工程を経て構成された。即ち、ガラス基板1上にMoの金属裏面電極2を形成した後、スパッタ法によって低Na濃度CuGa層32、高Na濃度CuGa層31、In層33を形成し(図2(b)参照)、その後、表1のプロセス条件に従ってセレン化/硫化法を実行してCu(InGa)(SSe)2のp型光吸収層3を形成した。その後、さらに表1のプロセス条件に従って、n型高抵抗バッファ層4及びn型透明導電膜窓層5を形成し、その光電変換効率を測定した。
実験に用いたCIS系薄膜太陽電池では、図3の(a)に示す構造の金属プリカーサー膜130aが形成された。即ち、ガラス基板1上にMoの金属裏面電極2を形成した後、スパッタ法によってCuGa層、高Na濃度In層、低Na濃度In層を形成し、その後、表1のプロセス条件に従ってセレン化/硫化法を実行してCu(InGa)(SSe)2のp型光吸収層3を形成した。その後、さらに表1のプロセス条件に従って、n型高抵抗バッファ層4及びn型透明導電膜窓層5を形成し、CIS系薄膜太陽電池を構成した。低NaターゲットのNa濃度は10原子数ppmに固定し、高Naターゲットの濃度を表5の4種類に設定し、高Na濃度のIn層、低Na濃度のIn層の膜厚比を変化させた。この場合の実験結果を表6に示す。
実験に用いたCIS系薄膜太陽電池は、実験例3と同様の構造を有し、同じ製造工程を経て構成された。即ち、ガラス基板1上にMoの金属裏面電極2を形成した後、スパッタ法によってCuGa層、高Na濃度In層、低Na濃度In層を形成し(図3(a)参照)、その後、表1のプロセス条件に従ってセレン化/硫化法を実行してCu(InGa)(SSe)2のp型光吸収層3を形成した。その後、さらに表1のプロセス条件に従って、n型高抵抗バッファ層4及びn型透明導電膜窓層5を形成し、その光電変換効率を測定した。
2 金属裏面電極層
3 p型光吸収層
4 n型高抵抗バッファ層
5 n型透明導電膜窓層
30a〜30f 金属プリカーサー膜
31 Naを含むCuGa層
32 Naを含まないCuGa層
33 In層
34 Cu層
100 スパッタ装置
102 Naを含むCuGaターゲット
104 Naを含まないCuGaターゲット
106 Inターゲット
130a〜130f 金属プリカーサー膜
230a〜230f 金属プリカーサー膜
Claims (13)
- 基板上に裏面電極層を形成し、
前記裏面電極層上にp型CIS系光吸収層を形成し、
前記p型CIS系光吸収層上にn型透明導電膜を形成する、各ステップを備えるCIS系薄膜太陽電池の製造方法において、
前記p型CIS系光吸収層を形成するステップは、I族元素を含む第1の金属層とIII族元素を含む第2の金属層とを少なくとも積層して金属プリカーサー膜を形成するステップと、前記金属プリカーサー膜をセレン化および/または硫化するステップとを備え、
前記金属プリカーサー膜を形成するステップは、前記第1の金属層または第2の金属層のいずれか一方を、アルカリ金属を添加した前記第1または第2の金属層材料を用いる第1の形成ステップとアルカリ金属を実質的に含まない前記材料を用いる第2の形成ステップとをそれぞれ別個に実行することによって形成することを特徴とする、CIS系薄膜太陽電池の製造方法。 - 請求項1に記載の方法において、前記基板は、高歪点ガラス、無アルカリガラス、金属または樹脂のいずれかを材料として形成される、CIS系薄膜太陽電池の製造方法。
- 請求項2に記載の方法において、前記第1の金属層は、Cu、CuGa合金のいずれかで形成され、前記第2の金属層はInで形成される、CIS系薄膜太陽電池の製造方法。
- 請求項3に記載の方法において、前記第1の金属層がCuGa合金層である場合、前記アルカリ金属を含む層は、Naを少なくとも0.5原子数%含むCuGaをターゲットまたは蒸着源として用いて形成される、CIS系薄膜太陽電池の製造方法。
- 請求項4に記載の方法において、前記CuGaのターゲットにおけるGa組成は10〜50原子数%である、CIS系薄膜太陽電池の製造方法。
- 請求項4に記載の方法において、前記アルカリ金属を実質的に含まない層は、100原子数ppm以下のNaを含むCuGaをターゲットまたは蒸着源として用いて形成される、CIS系薄膜太陽電池の製造方法。
- 請求項5に記載の方法において、前記アルカリ金属を実質的に含まない層は、100原子数ppm以下のNaを含むCuGaをターゲットまたは蒸着源として用いて形成される、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記第1の金属層がCuGa合金層である場合、前記アルカリ金属を含む層はアルカリ金属を含むCuGaを第1のターゲットまたは蒸着源として、前記アルカリ金属を実質的に含まない層はアルカリ金属を実質的に含まないCuGaを第2のターゲットまたは蒸着源として用いて形成され、前記第1および第2のターゲットまたは蒸着源において、CuGa合金中のGa濃度は実質的に同じである、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記第2の金属層がIn層である場合、前記アルカリ金属を含む層は、Naを少なくとも0.2原子数%含むInをターゲットまたは蒸着源として用いて形成される、CIS系薄膜太陽電池の製造方法。
- 請求項9に記載の方法において、前記アルカリ金属を実質的に含まない層は、100原子数ppm以下のNaを含むInをターゲットまたは蒸着源として用いて形成される、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記第1の金属層および前記第2の金属層は、スパッタ法、蒸着法またはイオンプレーティング法のいずれかで形成される、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記アルカリ金属はNa、K、Liのいずれかである、CIS系薄膜太陽電池の製造方法。
- 請求項1に記載の方法において、前記p型光吸収層を形成するステップと前記n型透明導電膜を形成するステップ間に、n型高抵抗バッファ層を形成するステップを含む、CIS系薄膜太陽電池の製造方法。
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EP09750678.6A EP2284906A4 (en) | 2008-05-20 | 2009-05-19 | METHOD FOR MANUFACTURING THIN-FILM SOLAR CELL AT CIS |
US12/993,232 US20110067755A1 (en) | 2008-05-20 | 2009-05-19 | Method for manufacturing cis-based thin film solar cell |
KR1020107025579A KR101623051B1 (ko) | 2008-05-20 | 2009-05-19 | Cis계 박막태양전지의 제조방법 |
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Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110067998A1 (en) * | 2009-09-20 | 2011-03-24 | Miasole | Method of making an electrically conductive cadmium sulfide sputtering target for photovoltaic manufacturing |
JP2011129631A (ja) | 2009-12-16 | 2011-06-30 | Showa Shell Sekiyu Kk | Cis系薄膜太陽電池の製造方法 |
US20110162696A1 (en) * | 2010-01-05 | 2011-07-07 | Miasole | Photovoltaic materials with controllable zinc and sodium content and method of making thereof |
WO2011083647A1 (ja) * | 2010-01-07 | 2011-07-14 | Jx日鉱日石金属株式会社 | Cu-Ga系スパッタリングターゲット、同ターゲットの製造方法、光吸収層及び該光吸収層を用いた太陽電池 |
KR20140016386A (ko) * | 2010-01-07 | 2014-02-07 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 스퍼터링 타겟, 화합물 반도체 박막, 화합물 반도체 박막을 갖는 태양 전지 및 화합물 반도체 박막의 제조 방법 |
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JP4831258B2 (ja) * | 2010-03-18 | 2011-12-07 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
JP2012004427A (ja) * | 2010-06-18 | 2012-01-05 | Showa Shell Sekiyu Kk | Cis系薄膜太陽電池 |
US20120018828A1 (en) * | 2010-07-23 | 2012-01-26 | Stion Corporation | Sodium Sputtering Doping Method for Large Scale CIGS Based Thin Film Photovoltaic Materials |
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JP5725610B2 (ja) | 2011-04-29 | 2015-05-27 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
JP2013004552A (ja) * | 2011-06-13 | 2013-01-07 | Honda Motor Co Ltd | 太陽電池の製造方法 |
JP5795897B2 (ja) * | 2011-07-28 | 2015-10-14 | 株式会社アルバック | CuGaNa系スパッタリング用ターゲット |
JP5795898B2 (ja) * | 2011-07-28 | 2015-10-14 | 株式会社アルバック | CuGaNa系スパッタリング用ターゲット |
JP5575163B2 (ja) * | 2012-02-22 | 2014-08-20 | 昭和シェル石油株式会社 | Cis系薄膜太陽電池の製造方法 |
CN103474505B (zh) * | 2012-06-06 | 2016-07-20 | 尚越光电科技有限公司 | 铜铟镓硒薄膜太阳能电池大规模生产中的碱金属掺杂方法 |
JP2014037556A (ja) * | 2012-08-10 | 2014-02-27 | Mitsubishi Materials Corp | スパッタリングターゲット及びその製造方法 |
JP2012246574A (ja) * | 2012-09-18 | 2012-12-13 | Mitsubishi Materials Corp | スパッタリングターゲット及びその製造方法 |
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US9153729B2 (en) | 2012-11-26 | 2015-10-06 | International Business Machines Corporation | Atomic layer deposition for photovoltaic devices |
US8889466B2 (en) | 2013-04-12 | 2014-11-18 | International Business Machines Corporation | Protective insulating layer and chemical mechanical polishing for polycrystalline thin film solar cells |
JP6365922B2 (ja) | 2013-04-15 | 2018-08-01 | 三菱マテリアル株式会社 | スパッタリングターゲット及びその製造方法 |
CN103357633A (zh) * | 2013-07-17 | 2013-10-23 | 北京四方继保自动化股份有限公司 | 一种薄膜太阳能电池玻璃基底的清洗方法 |
JP5733357B2 (ja) * | 2013-08-02 | 2015-06-10 | 住友金属鉱山株式会社 | Cu−Ga合金スパッタリングターゲット |
US9893220B2 (en) * | 2013-10-15 | 2018-02-13 | Nanoco Technologies Ltd. | CIGS nanoparticle ink formulation having a high crack-free limit |
CN103594539B (zh) * | 2013-10-22 | 2016-02-10 | 扬州乾照光电有限公司 | 一种柔性多结GaAs太阳电池及其制备方法 |
EP2947682A1 (en) * | 2014-05-20 | 2015-11-25 | IMEC vzw | Method for forming chalcogenide layers |
JP5973041B2 (ja) * | 2014-08-28 | 2016-08-17 | 三菱マテリアル株式会社 | Cu−Gaスパッタリングターゲット及びCu−Gaスパッタリングターゲットの製造方法 |
CN104576776A (zh) * | 2014-12-29 | 2015-04-29 | 瑞德兴阳新能源技术有限公司 | 选择性生长接触层的GaAs太阳能电池及其制备方法 |
CN105047737B (zh) * | 2015-06-30 | 2017-04-19 | 厦门神科太阳能有限公司 | Cigs基薄膜太阳能电池的制备方法 |
CN106711284B (zh) * | 2016-12-27 | 2018-06-15 | 中山瑞科新能源有限公司 | 一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1074966A (ja) * | 1996-08-29 | 1998-03-17 | Moririka:Kk | 薄膜太陽電池の製造方法 |
JPH10135495A (ja) * | 1996-10-25 | 1998-05-22 | Showa Shell Sekiyu Kk | 薄膜太陽電池の製造方法及び製造装置 |
JP2004047917A (ja) * | 2002-07-12 | 2004-02-12 | Honda Motor Co Ltd | 薄膜太陽電池およびその製造方法 |
JP2004140307A (ja) * | 2002-10-16 | 2004-05-13 | Honda Motor Co Ltd | 薄膜太陽電池の製造方法 |
JP2006186200A (ja) * | 2004-12-28 | 2006-07-13 | Showa Shell Sekiyu Kk | プリカーサ膜及びその製膜方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6474968A (en) | 1987-09-16 | 1989-03-20 | Kuniko Iwaki | Preparation of larval fish of anchovy boiled down in soy |
JP3311873B2 (ja) | 1994-09-30 | 2002-08-05 | 松下電器産業株式会社 | 半導体薄膜の製造方法 |
DE4442824C1 (de) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
KR100743923B1 (ko) * | 2006-02-08 | 2007-07-30 | 한국에너지기술연구원 | 씨아이예스계 화합물 박막 태양 전지의 후면 전극 |
EP1992010A2 (en) * | 2006-02-23 | 2008-11-19 | Van Duren, Jeroen K.J. | High-throughput printing of chalcogen layer and the use of an inter-metallic material |
EP2047515A1 (en) * | 2006-07-26 | 2009-04-15 | SoloPower, Inc. | Technique for doping compound layers used in solar cell fabrication |
-
2008
- 2008-05-20 JP JP2008132100A patent/JP4540724B2/ja active Active
-
2009
- 2009-05-19 KR KR1020107025579A patent/KR101623051B1/ko active IP Right Grant
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- 2009-05-19 WO PCT/JP2009/059483 patent/WO2009142316A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1074966A (ja) * | 1996-08-29 | 1998-03-17 | Moririka:Kk | 薄膜太陽電池の製造方法 |
JPH10135495A (ja) * | 1996-10-25 | 1998-05-22 | Showa Shell Sekiyu Kk | 薄膜太陽電池の製造方法及び製造装置 |
JP2004047917A (ja) * | 2002-07-12 | 2004-02-12 | Honda Motor Co Ltd | 薄膜太陽電池およびその製造方法 |
JP2004140307A (ja) * | 2002-10-16 | 2004-05-13 | Honda Motor Co Ltd | 薄膜太陽電池の製造方法 |
JP2006186200A (ja) * | 2004-12-28 | 2006-07-13 | Showa Shell Sekiyu Kk | プリカーサ膜及びその製膜方法 |
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