CN106711284B - 一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法 - Google Patents
一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000003475 lamination Methods 0.000 title claims abstract description 10
- 238000005516 engineering process Methods 0.000 title claims abstract description 8
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- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims abstract description 26
- 239000011521 glass Substances 0.000 claims abstract description 19
- 238000001994 activation Methods 0.000 claims abstract description 14
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 9
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000004913 activation Effects 0.000 claims abstract description 6
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- 230000003213 activating effect Effects 0.000 claims abstract description 3
- 239000000203 mixture Substances 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 230000008569 process Effects 0.000 abstract description 5
- 230000009466 transformation Effects 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 description 4
- 229910004613 CdTe Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
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- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XSOKHXFFCGXDJZ-UHFFFAOYSA-N telluride(2-) Chemical compound [Te-2] XSOKHXFFCGXDJZ-UHFFFAOYSA-N 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
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- 150000001875 compounds Chemical class 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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- 238000012805 post-processing Methods 0.000 description 1
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- H01L31/0264—Inorganic materials
- H01L31/0296—Inorganic materials including, apart from doping material or other impurities, only AIIBVI compounds, e.g. CdS, ZnS, HgCdTe
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
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Abstract
本发明公开了一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,包括以下步骤:将衬底玻璃磨边;在衬底玻璃上沉积TCO导电玻璃并清洗;在TCO导电玻璃上沉积第一层硫化镉;在第一层硫化镉上沉积第一层碲化镉;第一次氯化镉活化处理;第一次活化后清洗;在第一层碲化镉上面沉积第二层硫化镉;在第二层硫化镉上面沉积第二层碲化镉;第二次氯化镉活化处理;第二次活化后清洗;P1激光刻线;沉积缓冲层;P2激光刻线;沉积金属背电极;P3激光刻画背电极;激光扫边;封装测试。本发明结合碲化镉电池特点和现有技术进行工艺改善,不但提高电池的转化效率,还有效降低电池的开路电压。
Description
技术领域
本发明涉及光伏太阳能电池技术领域,尤其是一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法。
背景技术
薄膜太阳能电池作为未来电池发展的方向,特别是碲化镉薄膜太阳能电池,碲化镉电池和晶硅电池比较主要特点是弱光性好,衰减率低,温度系数好等优点而受到很多机构的研究。但是其有一定的缺点,比如转化效率还没有晶硅电池高,开路电压较高,本工艺制作发明可解决此缺点,给碲化镉电池发展带来明显优势。
现在国内外已有的碲化镉电池工艺设计制造均为单节电池(即只有一个PN结),主要工艺流程如图1所示,依次为:玻璃磨边,导电玻璃清洗,激光刻线(TCO薄膜),沉积硫化镉,沉积碲化镉,氯化镉活化处理,激光刻线,沉积缓冲层(复合背接触层),后处理活化,沉积金属背电极,激光刻画背电极,激光扫边,封装测试。该工艺所制作的电池结构如图2所示,自下而上依次为:玻璃衬底10、TCO层20、硫化镉30、碲化镉40、缓冲层70、背电极层80。这种已有电池制作工艺虽然简单,但是转化效率不高,在产品市场化后,竞争力不够,由于薄膜太阳能电池开路电压都偏高,虽然有的厂商已设计了并联刻线连接的方式制作电池组件,将开路电压降低,但是对转化效率没有明显改善,也难于适应市场竞争。
发明内容
为解决上述技术问题,本发明目的是提供一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法。
本发明采用的技术方案是:
一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,包括以下步骤(1)将衬底玻璃磨边;(2)在衬底玻璃上沉积TCO导电玻璃并清洗;(3)在TCO导电玻璃上沉积第一层硫化镉;(4)在第一层硫化镉上沉积第一层碲化镉;(5)第一次氯化镉活化处理;(6)第一次活化后清洗;(7)在第一层碲化镉上面沉积第二层硫化镉;(8)在第二层硫化镉上面沉积第二层碲化镉;(9)第二次氯化镉活化处理;(10)第二次活化后清洗;(11)P1激光刻线;(12)沉积缓冲层;(13)P2激光刻线;(14)沉积金属背电极;(15)P3激光刻画背电极;(16)激光扫边;(17)封装测试。
所述第一层硫化镉厚度为100nm,第一层碲化镉厚度为500nm,第二层硫化镉厚度为400nm,第二层碲化镉厚度为3um。
所述步骤(11)、(13)和(15)采用并联的方式刻线,P1\P2\P3激光刻线重合,封装的时候再用并联连接的方式连接线路。
所述第一层硫化镉与第一层碲化镉组成的第一个PN结,第二层硫化镉与第二层碲化镉组成的第二个PN结,第一个PN结与第二个PN结串联。
本发明的有益效果:本发明有效提高电池的转化效率,提高电池产品的市场竞争力,有效降低了产品的成本;同时打开的碲化镉电池研究的工艺窗口,结合并联刻线的工艺方法,有效解决电池电压偏高的情况。
附图说明
下面结合附图对本发明的具体实施方式做进一步的说明。
图1是传统碲化镉薄膜太阳能电池制造工艺流程图;
图2是传统碲化镉薄膜太阳能电池的剖面结构图;
图3是本发明碲化镉薄膜太阳能电池制造工艺流程图;
图4是本发明碲化镉薄膜太阳能电池的剖面结构图。
具体实施方式
参照图3-图4所示,为本发明的一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,包括以下步骤:
(1)将衬底玻璃10磨边;
(2)在衬底玻璃10上沉积TCO导电玻璃20并清洗;
(3)在TCO导电玻璃上沉积第一层硫化镉30(CdS);
(4)在第一层硫化镉上沉积第一层碲化镉40(CdTe);
(5)第一次氯化镉活化处理;
(6)第一次活化后清洗;
(7)在第一层碲化镉40上面沉积第二层硫化镉50(CdS);
(8)在第二层硫化镉50上面沉积第二层碲化镉60(CdTe);
(9)第二次氯化镉活化处理;
(10)第二次活化后清洗;
(11)P1激光刻线;
(12)沉积缓冲层70;
(13)P2激光刻线;
(14)沉积金属背电极80;
(15)P3激光刻画背电极;
(16)激光扫边;
(17)封装测试。
镀膜过程中,适当减薄窗口层CdS 的厚度,可减少入射光的损失,从而增加电池短波响应以提高短路电流密度,因此第一个PN结中的硫化镉厚度控制在100nm左右,碲化镉厚度500nm;保证光透过第一个PN结被第二个PN结吸收,第二个PN结的硫化镉膜厚约400nm,碲化镉膜厚3µm。有效提高电池转化效率约2%。
由于薄膜电池电压偏高,因此采用并联的方式刻线,P1\P2\P3激光刻线需重合,封装的时候才用并联连接的方式连接线路。
以上所述仅为本发明的优先实施方式,本发明并不限定于上述实施方式,只要以基本相同手段实现本发明目的的技术方案都属于本发明的保护范围之内。
Claims (3)
1.一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,其特征在于,包括以下步骤:(1)将衬底玻璃磨边;(2)在衬底玻璃上沉积TCO导电玻璃并清洗;(3)在TCO导电玻璃上沉积第一层硫化镉;(4)在第一层硫化镉上沉积第一层碲化镉;(5)第一次氯化镉活化处理;(6)第一次活化后清洗;(7)在第一层碲化镉上面沉积第二层硫化镉;(8)在第二层硫化镉上面沉积第二层碲化镉;(9)第二次氯化镉活化处理;(10)第二次活化后清洗;(11)P1激光刻线;(12)沉积缓冲层;(13)P2激光刻线;(14)沉积金属背电极;(15)P3激光刻画背电极;(16)激光扫边;(17)封装测试;所述第一层硫化镉厚度为100nm,第一层碲化镉厚度为500nm,第二层硫化镉厚度为400nm,第二层碲化镉厚度为3um。
2.根据权利要求1所述的一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,其特征在于,所述步骤(11)、(13)和(15)采用并联的方式刻线,P1\P2\P3激光刻线重合,封装的时候再用并联连接的方式连接线路。
3.根据权利要求1所述的一种双节叠层并联的碲化镉薄膜太阳能电池制造工艺方法,其特征在于,所述第一层硫化镉与第一层碲化镉组成的第一个PN结,第二层硫化镉与第二层碲化镉组成的第二个PN结,第一个PN结与第二个PN结串联。
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