JP4530638B2 - 半導体ウエハへの保護テープ貼付方法及び貼付装置 - Google Patents
半導体ウエハへの保護テープ貼付方法及び貼付装置 Download PDFInfo
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- JP4530638B2 JP4530638B2 JP2003347750A JP2003347750A JP4530638B2 JP 4530638 B2 JP4530638 B2 JP 4530638B2 JP 2003347750 A JP2003347750 A JP 2003347750A JP 2003347750 A JP2003347750 A JP 2003347750A JP 4530638 B2 JP4530638 B2 JP 4530638B2
- Authority
- JP
- Japan
- Prior art keywords
- protective tape
- outer peripheral
- semiconductor wafer
- wafer
- peripheral member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26F—PERFORATING; PUNCHING; CUTTING-OUT; STAMPING-OUT; SEVERING BY MEANS OTHER THAN CUTTING
- B26F1/00—Perforating; Punching; Cutting-out; Stamping-out; Apparatus therefor
- B26F1/38—Cutting-out; Stamping-out
- B26F1/3846—Cutting-out; Stamping-out cutting out discs or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C2793/00—Shaping techniques involving a cutting or machining operation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
- Y10T156/1084—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing of continuous or running length bonded web
- Y10T156/1085—One web only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
- Y10T156/1317—Means feeding plural workpieces to be joined
- Y10T156/1343—Cutting indefinite length web after assembly with discrete article
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
- Y10T156/1348—Work traversing type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/12—Surface bonding means and/or assembly means with cutting, punching, piercing, severing or tearing
- Y10T156/1348—Work traversing type
- Y10T156/1352—Work traversing type with liquid applying means
- Y10T156/1361—Cutting after bonding
Description
前記保持部材と前記外周部材は、保持テーブル上に配置され、保持部材に保持された半導体ウエハの外周と外周部材の内周とによって保護テープ切断用溝を形成し、
当該保護テープ切断用溝のカッタの刃先を突き刺して半導体ウエハの周縁に沿って保護テープを切断したとき、外周部材側からはみ出した切断後の保護テープの上下動を抑える溝幅になるよう外周部材を保持部材と1〜10mmの隙間を設けて近接配置し、
前記保持部材と前記外周部材が、前記保持テーブルと別部材で形成されており、前記保持部材は加温手段で加温され、前記外周部材は冷却手段で冷却されることを特徴とするものである。
また、保持部材は加温手段で加温され、外周部材は冷却手段で冷却されることが好ましい。
前記保持部材に近接して配置され、冷却手段を備えた外周部材と、
保護テープの表面を押圧して転動する貼付ローラを介して前記半導体ウエハ表面に保護テープを貼り付ける保護テープ貼付機構と、
前記保護テープを前記半導体ウエハの外周に沿って切断する保護テープ切断機構と、
切断された不要な保護テープを剥離する剥離機構と、を備えてなり、
前記保持部材と前記外周部材は、保持テーブル上に配置されてなり、前記外周部材が、前記保持テーブルと別部材で形成されてなり、保持部材に保持された半導体ウエハの外周と外周部材の内周とによって保護テープ切断用溝を形成し、
当該保護テープ切断用溝のカッタの刃先を突き刺して半導体ウエハの周縁に沿って保護テープを切断したとき、外周部材側からはみ出した切断後の保護テープの上下動を抑える溝幅になるよう外周部材を保持部材と1〜10mmの隙間を設けて近接配置されてなるものである。
また、保持部材は、加温手段を備え、外周部材は、冷却手段を備えることが好ましい。
2 ウエハ
3 保持テーブル
4 保護テープ
5 保護テープ供給部
6 離型ライナー
7 離型機構部
8 ライナー巻き取り部
9 保護テープ貼付機構
10 保護テープ切抜き手段
11a、11b ウエハ収納部
12 ロボットアーム
14 アライメントステージ
15 不要テープ巻き取り部
17 ウエハ保持部
20 保持部材
21 外周部材
22 保護テープ切断用溝
23 吸着パッド用通路
26 カッターユニット
27 昇降駆動部
28 アーム
29 モータ
30 不要テープ剥離機構部
31 テープボビン
32 回収ボビン
33 貼付ローラ
34 ボール軸
35 刃先
Claims (3)
- パターンが形成された半導体ウエハを保持部材上に載置し、前記半導体ウエハ表面に前記パターンを保護するための保護テープを、前記半導体ウエハ表面とともに前記保持部材の周囲に配置される外周部材の表面にも貼り付けた後、前記保護テープを前記半導体ウエハの外周に沿って切断する半導体ウエハへの保護テープ貼付方法であって、
前記保持部材と前記外周部材は、保持テーブル上に配置され、保持部材に保持された半導体ウエハの外周と外周部材の内周とによって保護テープ切断用溝を形成し、
当該保護テープ切断用溝のカッタの刃先を突き刺して半導体ウエハの周縁に沿って保護テープを切断したとき、外周部材側からはみ出した切断後の保護テープの上下動を抑える溝幅になるよう外周部材を保持部材と1〜10mmの隙間を設けて近接配置し、
前記保持部材と前記外周部材が、前記保持テーブルと別部材で形成されており、前記保持部材は加温手段で加温され、前記外周部材は冷却手段で冷却されることを特徴とする半導体ウエハへの保護テープ貼付方法。 - 半導体ウエハを保持する加温手段を備えた保持部材と、
前記保持部材に近接して配置され、冷却手段を備えた外周部材と、
保護テープの表面を押圧して転動する貼付ローラを介して前記半導体ウエハ表面に保護テープを貼り付ける保護テープ貼付機構と、
前記保護テープを前記半導体ウエハの外周に沿って切断する保護テープ切断機構と、
切断された不要な保護テープを剥離する剥離機構と、を備えてなり、
前記保持部材と前記外周部材は、保持テーブル上に配置されてなり、前記外周部材が、前記保持テーブルと別部材で形成されてなり、保持部材に保持された半導体ウエハの外周と外周部材の内周とによって保護テープ切断用溝を形成し、
当該保護テープ切断用溝のカッタの刃先を突き刺して半導体ウエハの周縁に沿って保護テープを切断したとき、外周部材側からはみ出した切断後の保護テープの上下動を抑える溝幅になるよう外周部材を保持部材と1〜10mmの隙間を設けて近接配置した半導体ウエハへの保護テープ貼付装置。 - 前記外周部材が、少なくとも1以上の部材で形成されている請求項2に記載の半導体ウエハへの保護テープ貼付装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003347750A JP4530638B2 (ja) | 2003-10-07 | 2003-10-07 | 半導体ウエハへの保護テープ貼付方法及び貼付装置 |
SG200405669A SG111212A1 (en) | 2003-10-07 | 2004-09-02 | Method and apparatus for joining protective tape to semiconductor wafer |
US10/939,453 US7118645B2 (en) | 2003-10-07 | 2004-09-14 | Method and apparatus for joining protective tape to semiconductor wafer |
CN2004100834758A CN1606135B (zh) | 2003-10-07 | 2004-09-29 | 将保护带接合到半导体晶片的方法和装置 |
KR1020040078696A KR101049024B1 (ko) | 2003-10-07 | 2004-10-04 | 반도체 웨이퍼에의 보호테이프 접착방법 및 접착장치 |
TW093130187A TWI342042B (en) | 2003-10-07 | 2004-10-06 | Method and apparatus for joining protective tape to semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003347750A JP4530638B2 (ja) | 2003-10-07 | 2003-10-07 | 半導体ウエハへの保護テープ貼付方法及び貼付装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005116711A JP2005116711A (ja) | 2005-04-28 |
JP4530638B2 true JP4530638B2 (ja) | 2010-08-25 |
Family
ID=34386413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003347750A Expired - Fee Related JP4530638B2 (ja) | 2003-10-07 | 2003-10-07 | 半導体ウエハへの保護テープ貼付方法及び貼付装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7118645B2 (ja) |
JP (1) | JP4530638B2 (ja) |
KR (1) | KR101049024B1 (ja) |
CN (1) | CN1606135B (ja) |
SG (1) | SG111212A1 (ja) |
TW (1) | TWI342042B (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006272505A (ja) * | 2005-03-29 | 2006-10-12 | Nitto Denko Corp | 保護テープ切断方法およびこれを用いた装置 |
JP4461176B2 (ja) * | 2005-08-11 | 2010-05-12 | リンテック株式会社 | シート貼付装置及び貼付方法 |
JP4795772B2 (ja) * | 2005-10-24 | 2011-10-19 | リンテック株式会社 | シート切断用テーブル及びシート貼付装置 |
JP4606319B2 (ja) * | 2005-12-19 | 2011-01-05 | 日東電工株式会社 | 復旧支援装置 |
JP4895766B2 (ja) * | 2006-11-14 | 2012-03-14 | 日東電工株式会社 | 半導体ウエハの保護テープ切断方法および保護テープ切断装置 |
JP4642002B2 (ja) * | 2006-11-14 | 2011-03-02 | 日東電工株式会社 | 半導体ウエハの保護テープ切断方法および保護テープ切断装置 |
KR100775933B1 (ko) * | 2006-12-14 | 2007-11-13 | 우리마이크론(주) | 확산판 보호테이프 자동 부착장치 |
KR101008647B1 (ko) * | 2008-07-25 | 2011-01-17 | 엘지전자 주식회사 | 곡면스탬퍼의 제작방법 |
JP5216472B2 (ja) * | 2008-08-12 | 2013-06-19 | 日東電工株式会社 | 半導体ウエハの保護テープ貼付け方法およびその装置 |
JP5075084B2 (ja) * | 2008-10-16 | 2012-11-14 | 日東電工株式会社 | 保護テープ貼付け方法および保護テープ貼付け装置 |
JP5324319B2 (ja) * | 2009-05-26 | 2013-10-23 | 日東電工株式会社 | ウエハマウント方法とウエハマウント装置 |
JP5465944B2 (ja) * | 2009-07-30 | 2014-04-09 | 日東電工株式会社 | 保護テープ貼付け方法 |
JP5412260B2 (ja) * | 2009-12-10 | 2014-02-12 | 日東電工株式会社 | 粘着テープ貼付け方法およびこれを用いた装置 |
JP5054169B2 (ja) * | 2010-08-06 | 2012-10-24 | リンテック株式会社 | シート切断用テーブル |
US8834662B2 (en) * | 2012-03-22 | 2014-09-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method of separating wafer from carrier |
JP6500170B2 (ja) * | 2015-03-24 | 2019-04-17 | 株式会社タカトリ | 基板への接着テープ貼り付け装置及び貼り付け方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3754489A (en) * | 1971-06-02 | 1973-08-28 | Dove J B Inc | Smokeless cut-off blade for plastic wrapping film |
US4414872A (en) * | 1981-04-29 | 1983-11-15 | American Optical Corporation | Lens tape cutter |
US4603609A (en) * | 1983-10-21 | 1986-08-05 | Disco Abrasive Systems, Ltd. | Apparatus for cutting a sheet-like member applied to a surface of a semiconductor wafer |
JPS60231328A (ja) * | 1984-04-27 | 1985-11-16 | Disco Abrasive Sys Ltd | 半導体ウエハに貼付されたシ−ト状部材を切断するための装置 |
JPS62174940A (ja) * | 1986-01-28 | 1987-07-31 | Nitto Electric Ind Co Ltd | ウエハとリングの自動貼合せ装置 |
JPH10112492A (ja) * | 1996-10-07 | 1998-04-28 | Teikoku Seiki Kk | ウェハ保護テープの裁断方法及びその装置 |
JP2003209082A (ja) | 2002-01-15 | 2003-07-25 | Nitto Denko Corp | 保護テープの貼付方法およびその装置並びに保護テープの剥離方法 |
-
2003
- 2003-10-07 JP JP2003347750A patent/JP4530638B2/ja not_active Expired - Fee Related
-
2004
- 2004-09-02 SG SG200405669A patent/SG111212A1/en unknown
- 2004-09-14 US US10/939,453 patent/US7118645B2/en not_active Expired - Fee Related
- 2004-09-29 CN CN2004100834758A patent/CN1606135B/zh not_active Expired - Fee Related
- 2004-10-04 KR KR1020040078696A patent/KR101049024B1/ko not_active IP Right Cessation
- 2004-10-06 TW TW093130187A patent/TWI342042B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
SG111212A1 (en) | 2005-05-30 |
CN1606135A (zh) | 2005-04-13 |
TW200520084A (en) | 2005-06-16 |
KR101049024B1 (ko) | 2011-07-12 |
JP2005116711A (ja) | 2005-04-28 |
CN1606135B (zh) | 2011-02-09 |
TWI342042B (en) | 2011-05-11 |
US20050072517A1 (en) | 2005-04-07 |
KR20050033809A (ko) | 2005-04-13 |
US7118645B2 (en) | 2006-10-10 |
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