JP4512262B2 - 光学素子駆動装置 - Google Patents

光学素子駆動装置 Download PDF

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Publication number
JP4512262B2
JP4512262B2 JP2000385619A JP2000385619A JP4512262B2 JP 4512262 B2 JP4512262 B2 JP 4512262B2 JP 2000385619 A JP2000385619 A JP 2000385619A JP 2000385619 A JP2000385619 A JP 2000385619A JP 4512262 B2 JP4512262 B2 JP 4512262B2
Authority
JP
Japan
Prior art keywords
mirror
movable
optical element
magnetic
movable members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000385619A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002189177A5 (enExample
JP2002189177A (ja
Inventor
哲夫 池亀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2000385619A priority Critical patent/JP4512262B2/ja
Priority to US10/021,652 priority patent/US6721112B2/en
Publication of JP2002189177A publication Critical patent/JP2002189177A/ja
Priority to US10/783,476 priority patent/US7450324B2/en
Publication of JP2002189177A5 publication Critical patent/JP2002189177A5/ja
Application granted granted Critical
Publication of JP4512262B2 publication Critical patent/JP4512262B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3572—Magnetic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3582—Housing means or package or arranging details of the switching elements, e.g. for thermal isolation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/3588—Control or adjustment details, e.g. calibrating of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3554—3D constellations, i.e. with switching elements and switched beams located in a volume
    • G02B6/3556—NxM switch, i.e. regular arrays of switches elements of matrix type constellation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Recording Or Reproduction (AREA)
JP2000385619A 2000-12-19 2000-12-19 光学素子駆動装置 Expired - Fee Related JP4512262B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000385619A JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置
US10/021,652 US6721112B2 (en) 2000-12-19 2001-12-12 Mirrors drive device
US10/783,476 US7450324B2 (en) 2000-12-19 2004-02-20 Mirrors drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000385619A JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置

Publications (3)

Publication Number Publication Date
JP2002189177A JP2002189177A (ja) 2002-07-05
JP2002189177A5 JP2002189177A5 (enExample) 2008-02-14
JP4512262B2 true JP4512262B2 (ja) 2010-07-28

Family

ID=18852850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000385619A Expired - Fee Related JP4512262B2 (ja) 2000-12-19 2000-12-19 光学素子駆動装置

Country Status (2)

Country Link
US (2) US6721112B2 (enExample)
JP (1) JP4512262B2 (enExample)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4217217B2 (ja) * 2002-12-11 2009-01-28 オリンパス株式会社 光学素子の支持装置およびその製造方法、製造装置
JP2010172190A (ja) * 2002-12-27 2010-08-05 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP4088188B2 (ja) * 2003-04-07 2008-05-21 セイコーエプソン株式会社 プロジェクタ
WO2004104673A1 (ja) * 2003-05-26 2004-12-02 Nidec Sankyo Corporation 光スイッチ装置
KR20050113327A (ko) * 2004-05-27 2005-12-02 엘지전자 주식회사 해상도 향상 장치
EP1692864A1 (en) * 2003-12-11 2006-08-23 LG Electronics, Inc. Actuator for improvement of resolution
KR20050118510A (ko) * 2004-06-14 2005-12-19 엘지전자 주식회사 디스플레이기기의 해상도 향상 장치 및 그 구동방법
JP2006195083A (ja) * 2005-01-12 2006-07-27 Sharp Corp 光走査装置
JP2008084508A (ja) * 2006-09-29 2008-04-10 Mitsumi Electric Co Ltd 光ピックアップ
JP5344035B2 (ja) 2009-03-31 2013-11-20 富士通株式会社 マイクロ可動素子アレイおよび通信機器
US20120182764A1 (en) * 2011-01-13 2012-07-19 Sarah Anne Mitchell Indoor illumination system
US9715107B2 (en) * 2012-03-22 2017-07-25 Apple Inc. Coupling schemes for gimbaled scanning mirror arrays
WO2013168385A1 (ja) * 2012-05-07 2013-11-14 パナソニック株式会社 光学反射素子
WO2014063737A1 (en) * 2012-10-25 2014-05-01 Lemoptix Sa A mems device
CN103984091A (zh) * 2013-11-21 2014-08-13 苏州浩创信息科技有限公司 一种扫描器摆镜装置
PL2902148T3 (pl) * 2013-11-25 2020-03-31 Preco, Inc. Obudowa galvo o wysokim zagęszczeniu do stosowania z wieloma wiązkami laserowymi, układ galvo i system obróbki wiązką laserową z taką obudową
EP3006975A3 (en) * 2014-10-08 2016-05-25 Optotune AG Device for tilting an optical element, particularly a mirror
US9835853B1 (en) 2014-11-26 2017-12-05 Apple Inc. MEMS scanner with mirrors of different sizes
US9784838B1 (en) 2014-11-26 2017-10-10 Apple Inc. Compact scanner with gimbaled optics
US9798135B2 (en) 2015-02-16 2017-10-24 Apple Inc. Hybrid MEMS scanning module
US9897801B2 (en) 2015-09-30 2018-02-20 Apple Inc. Multi-hinge mirror assembly
US9703096B2 (en) 2015-09-30 2017-07-11 Apple Inc. Asymmetric MEMS mirror assembly
US10488652B2 (en) 2016-09-21 2019-11-26 Apple Inc. Prism-based scanner
RU2666224C1 (ru) * 2017-03-15 2018-09-06 Самсунг Электроникс Ко., Лтд. Система сканирования для лидара, основанного на отражателе с магнитной подвеской
CN108227181B (zh) 2017-12-08 2020-06-16 华为技术有限公司 一种阵列转镜的光束扫描装置
WO2019160431A1 (ru) * 2018-02-14 2019-08-22 Константин Александрович ШАВРИН Устройство и способ записи информации на магнитный носитель информации
US11604347B2 (en) 2019-08-18 2023-03-14 Apple Inc. Force-balanced micromirror with electromagnetic actuation
US20210173177A1 (en) * 2019-12-05 2021-06-10 Panasonic Automotive Systems Company Of America, Division Of Panasonic Corporation Of North America Magnetic mirror movement
JP7437177B2 (ja) 2020-02-12 2024-02-22 スタンレー電気株式会社 光走査装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2748899B2 (ja) * 1995-09-26 1998-05-13 日本電気株式会社 光ヘッド装置
JP4112060B2 (ja) 1998-01-27 2008-07-02 オリンパス株式会社 光学系可動部の支持装置
JPH11219537A (ja) * 1998-02-02 1999-08-10 Olympus Optical Co Ltd 光ピックアップ
US6962830B1 (en) * 1999-03-09 2005-11-08 The Regents Of The University Of California Global mechanical stop
US6424759B1 (en) * 1999-10-12 2002-07-23 Primawave Photonics, Inc. Mechanically actuated MXN optical switch matrix
JP2001235690A (ja) * 2000-02-22 2001-08-31 Mitsubishi Electric Corp 光スイッチ
JP4105842B2 (ja) * 2000-07-17 2008-06-25 日立電線株式会社 光スイッチ
JP3716740B2 (ja) * 2000-11-22 2005-11-16 オムロン株式会社 マトリクス光スイッチ

Also Published As

Publication number Publication date
US20040168179A1 (en) 2004-08-26
US7450324B2 (en) 2008-11-11
JP2002189177A (ja) 2002-07-05
US6721112B2 (en) 2004-04-13
US20020075786A1 (en) 2002-06-20

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