JP4439860B2 - 半導体基板上への成膜方法 - Google Patents
半導体基板上への成膜方法 Download PDFInfo
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- JP4439860B2 JP4439860B2 JP2003312924A JP2003312924A JP4439860B2 JP 4439860 B2 JP4439860 B2 JP 4439860B2 JP 2003312924 A JP2003312924 A JP 2003312924A JP 2003312924 A JP2003312924 A JP 2003312924A JP 4439860 B2 JP4439860 B2 JP 4439860B2
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- 238000000034 method Methods 0.000 title claims description 89
- 239000004065 semiconductor Substances 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 title claims description 9
- 239000007789 gas Substances 0.000 claims description 80
- 235000012431 wafers Nutrition 0.000 claims description 76
- 229910052760 oxygen Inorganic materials 0.000 claims description 72
- 239000001301 oxygen Substances 0.000 claims description 69
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 68
- 229910052731 fluorine Inorganic materials 0.000 claims description 53
- 239000011737 fluorine Substances 0.000 claims description 53
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 51
- 229910052786 argon Inorganic materials 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 26
- 229910052799 carbon Inorganic materials 0.000 claims description 17
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052734 helium Inorganic materials 0.000 claims description 10
- 239000011261 inert gas Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 7
- 239000003642 reactive oxygen metabolite Substances 0.000 claims description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 4
- 150000002430 hydrocarbons Chemical class 0.000 claims description 4
- 229910052743 krypton Inorganic materials 0.000 claims description 3
- 229910052754 neon Inorganic materials 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- XPDWGBQVDMORPB-UHFFFAOYSA-N Fluoroform Chemical compound FC(F)F XPDWGBQVDMORPB-UHFFFAOYSA-N 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 74
- 238000005229 chemical vapour deposition Methods 0.000 description 67
- 239000010408 film Substances 0.000 description 67
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 37
- 238000012545 processing Methods 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 230000008021 deposition Effects 0.000 description 15
- 238000011065 in-situ storage Methods 0.000 description 11
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 11
- UOBPHQJGWSVXFS-UHFFFAOYSA-N [O].[F] Chemical compound [O].[F] UOBPHQJGWSVXFS-UHFFFAOYSA-N 0.000 description 10
- 229910010271 silicon carbide Inorganic materials 0.000 description 9
- 235000012239 silicon dioxide Nutrition 0.000 description 9
- 239000000356 contaminant Substances 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
- 229910052681 coesite Inorganic materials 0.000 description 7
- 229910052906 cristobalite Inorganic materials 0.000 description 7
- 238000005137 deposition process Methods 0.000 description 7
- 239000001307 helium Substances 0.000 description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 7
- 229910052682 stishovite Inorganic materials 0.000 description 7
- 238000012546 transfer Methods 0.000 description 7
- 229910052905 tridymite Inorganic materials 0.000 description 7
- 239000006227 byproduct Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000003039 volatile agent Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 150000001722 carbon compounds Chemical class 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 239000005431 greenhouse gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000005383 fluoride glass Substances 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- -1 fluorine ions Chemical class 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4405—Cleaning of reactor or parts inside the reactor by using reactive gases
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- H01L21/02167—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
- H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Description
(1)酸素プラズマがCVD反応チャンバ内に生成されるところの現場酸素プラズマクリーニング処理。
(2)酸素プラズマがCVD反応チャンバから分離されたプラズマチャンバ内で生成されるところのダウンストリーム酸素プラズマクリーニング処理。
(3)活性酸素及びフッ素種の両方を含むプラズマがCVD反応チャンバから分離されたプラズマチャンバ内で生成されるところのダウンストリーム酸素フッ素プラズマクリーニング処理。
現場酸素プラズマクリーニング処理において、酸素プラズマは酸素含有ガス及び不活性ガス若しくは窒素の混合物で充満したCVDチャンバ内の電極を通じてRFソースによって生成される。ヘリウムまたはアルゴンを加えることでプラズマ安定性が強化される。
O2 0.1〜5.0slm
He 0.1〜10.0slm
リアクタ圧力 10〜1000Pa
処理時間 >20秒
RF電力 200〜10,000W
好適な条件は以下の通りである。
O2 0.5〜3.0slm
He 0.5〜5.0slm
リアクタ圧力 50〜500Pa
処理時間 >60秒
RF電力 500〜2000W
特に好適な条件は以下の通りである。
O2 1.0〜2.0slm
He 1.0〜2.0slm
リアクタ圧力 100〜250Pa
処理時間 >120秒
RF電力 500〜1000W
O2 0.1〜5slm
Ar 0.1〜10slm
リアクタ圧力 10〜1350Pa
処理時間 >20秒
RF電力 200〜10,000W
好適な条件は以下の通りである。
O2 0.5〜3.0slm
Ar 0.5〜5.0slm
リアクタ圧力 50〜500Pa
処理時間 >60秒
RF電力 1000〜5000W
特に好適な条件は以下の通りである。
O2 1.0〜2.0slm
Ar 1.0〜2.0slm
リアクタ圧力 100〜250Pa
処理時間 >120秒
RF電力 1000〜3000W
O2 0.1〜3.0slm
NF3 0.2〜5.0slm
Ar 0.2〜10.0slm
リアクタ圧力 10〜1350Pa
処理時間 >20秒
RF電力 500〜10,000W
好適な条件は以下の通りである。
O2 0.2〜1.0slm
NF3 0.5〜3.0slm
Ar 0.5〜5.0slm
リアクタ圧力 50〜500Pa
処理時間 >60秒
RF電力 750〜5000W
特に好適な条件は以下の通りである。
O2 0.3〜0.5slm
NF3 0.75〜1.5slm
Ar 1.0〜4.0slm
リアクタ圧力 100〜250Pa
処理時間 >120秒
RF電力 2000〜3000W
ここに開示される酸素プラズマCVDクリーニング処理はlow-k膜及びSiC蒸着処理の両方において有用である。以下に使用される“スタンバイモード”において、CVDチャンバ圧力は約533.2Paに設定され、かつN2が約1slpm流される。
低比誘電率有機シリコンガラス膜蒸着処理
シリコンウエハ3上にSiCO膜を蒸着するために、Si(OCH3)2(CH3)2及びヘリウムの混合ガスが反応ガスとしてシャワーヘッド6から処理チャンバ4へ供給される。処理チャンバ4内の圧力は処理チャンバ4に連結したコンダクタンス調整バルブ8を使って約1060Pa以下に制御かつ調節される。ヒータ9はウエハ3がロードされるところのサセプタ5を加熱する。サセプタ5上にロードされると同時にウエハ3は約350℃から400℃に加熱される。13.56MHzの高周波電力、13.56MHz及び430kHzの混合電力、27.12MHzの電力、または27.12MHz及び400kHzの混合電力がサセプタ5とシャワーヘッド6との間に印加される。生成されたプラズマはウエハ3上に薄膜を形成する。薄膜が形成された後、ウエハ3は自動移送ロボット2によって処理チャンバ4の外へ運ばれる。
Si(OCH3)2(CH3)2 140sccm
ヘリウム 50sccm
RF電力(27.12MHz) 1500〜1650W
圧力 560Pa
電極間隔 24mm
基板温度 370〜380℃
典型的なダウンストリームフッ素プラズマクリーニング条件は以下の通りである。
NF3 1slm
アルゴン 5slm
RF電力(400kHz) 2.1〜2.8kW
シリコンカーバイド(SiC)膜蒸着処理
シリコンカーバイド(SiC)膜は、ハードマスク、デュアルダマシンドライエッチ処理用のエッチストップ膜、またはCu拡散バリア膜として使用される。SiCを蒸着する際、SiCO膜蒸着で使用されるSi(OCH3)2(CH3)2の代わりにテトラメチルシランSi(CH3)4がCVDリアクタへ供給される。図5を参照して、テトラメチルシラン及びヘリウムの混合ガスが反応ガスとしてシャワーヘッド6から処理チャンバ4へ供給される。処理チャンバ4内の圧力はコンダクタンス調整バルブ8を使って約1060Pa以下に調節される。ヒータ9はウエハ3がロードされるところのサセプタ5を加熱する。ウエハ3はサセプタ5上にロードされると同時に約300〜380℃に加熱される。13.56MHzの高周波電力、13.56MHz及び430kHzの混合電力、27.12MHzの電力、または27.12MHz及び400kHzの混合電力がサセプタ5とシャワーヘッド6との間に印加される。生成されたプラズマはSiCの薄膜をウエハ3上に蒸着する。薄膜が形成された後、ウエハ3は自動移送ロボット2によって処理チャンバ4の外へ運ばれる。他の実施例において、SiC膜を蒸着するのにトリメチルシランSiH(CH3)3が使用されてもよい。SiCの代わりに酸素が少ないSiCO膜が使用されても良く、それは反応混合ガスにO2、NO2、CO2、O3またはそれらの混合物のような酸素含有ガスを添加することによって蒸着される。CO2はSiCO膜を蒸着するのに好適な酸素含有ガスである。
テトラメチルシラン 200〜700sccm
ヘリウム 500〜5000sccm
RF電力(27.12MHz) 300〜1000W
RF電力(400kHz) 100〜300W
圧力 300〜700Pa
電極間隔 24mm
基板温度 320〜380℃
典型的なダウンストリーム酸素-フッ素プラズマクリーニング条件は以下の通りである。
NF3 0.5〜1slm
アルゴン 2〜5slm
O2 0.1〜1.0slm
RF電力(400kHz) 2.0〜2.8kW
前処理クリーニング
low-k膜及びSiC前処理クリーニングの両方に対して以下の3つのプラズマドライクリーニングシーケンスが使用される。
2 ウエハ移送ロボット
3 半導体基板
4 反応チャンバ
5 サセプタ
6 シャワーヘッド
7、7’ 高周波発振器
8 コンダクタンス調整バルブ
9 ヒータ
10 遠隔プラズマ装置
11 バルブ
12 RFマッチングシステム
13 ガスライン
14 ガスライン
Claims (18)
- CVD反応チャンバ内で半導体基板上に炭素含有膜を形成する方法であって、
(a)前記CVD反応チャンバを活性酸素種と接触させる工程と、
(b)前記半導体基板を前記CVD反応チャンバ内に移送する工程と、
(c)前記炭素含有膜を前記半導体基板上に堆積する工程と、
(d)前記半導体基板を前記CVD反応チャンバ外へ移送する工程と、
(e)前記CVD反応チャンバを活性フッ素種と接触させる工程と、
(f)上記工程(b)から工程(e)を所定のロットの処理枚数に対応する回数繰り返す工程と、
を備え、
工程(b)、(c)及び(d)は、工程(a)の後であってかつ工程(e)の前に実行される、
ことを特徴とする方法。 - 工程(b)から(d)は工程(e)が実行される前に所定のウエハの処理枚数に対応する回数繰り返される、
ことを特徴とする請求項1記載の方法。 - 前記活性酸素種は前記CVD反応チャンバ内で生成される酸素プラズマの生成物である、
ことを特徴とする請求項1記載の方法。 - 前記活性酸素種は前記CVD反応チャンバの外部で生成された酸素プラズマの生成物である、
ことを特徴とする請求項1記載の方法。 - さらに、前記工程(b)の前に前記CVD反応チャンバを前記活性フッ素種と接触させる工程を含む、
ことを特徴とする請求項1記載の方法。 - 前記CVD反応チャンバと前記活性フッ素種とを接触させる工程は、前記工程(a)の後に実行される、
ことを特徴とする請求項5記載の方法。 - 前記CVD反応チャンバと前記活性フッ素種とを接触させる工程は、前記工程(a)の前に実行される、
ことを特徴とする請求項5記載の方法。 - 前記活性フッ素種はガスから生成されるフッ素プラズマの生成物であり、当該ガスは、
フッ素、炭化フッ素ガス、炭化水素フッ素ガス及びフッ化窒素ガスから成る群から選択されるフッ素含有ガスと、
He、Ar、Ne、Kr、及びXeから成る群から選択される不活性ガスと、
を含む、
ことを特徴とする請求項5記載の方法。 - 前記活性フッ素種はガスから生成されるフッ素プラズマの生成物であり、当該ガスは、
フッ素、炭化フッ素ガス、炭化水素フッ素ガス及びフッ化窒素ガスから成る群から選択されるフッ素含有ガスを含む、
ことを特徴とする請求項5記載の方法。 - 前記フッ素含有ガスはCF4、C2F6、C3F8、及びCHF3から成る群から選択される、
ことを特徴とする請求項8または9記載の方法。 - 前記フッ素含有ガスはNF3である、
ことを特徴とする請求項8または9記載の方法。 - 前記フッ素プラズマはCVD反応チャンバの外部で生成される、
ことを特徴とする請求項8または9記載の方法。 - 前記炭素含有膜は、Si、C、O及びHから成る、
ことを特徴とする請求項1記載の方法。 - 前記炭素含有膜は、Si、C及びHから成る、
ことを特徴とする請求項1記載の方法。 - 前記炭素含有膜は、Si、C、N及びHから成る、
ことを特徴とする請求項1記載の方法。 - 前記活性酸素種はガスから生成された酸素プラズマの生成物であり、当該ガスは、
O2、CO2、NO2、N2O、H2O、H2O2及びO3から成る群から選択される酸素含有ガスと、
He、Ar、Ne、Kr、及びXeから成る群から選択される不活性ガス及び/またはN2と、
を含む、
ことを特徴とする請求項1記載の方法。 - 前記活性酸素種はガスから生成された酸素プラズマの生成物であり、当該ガスは、
O2、CO2、NO2、N2O、H2O、H2O2及びO3から成る群から選択される酸素含有ガスを含む、
ことを特徴とする請求項1記載の方法。 - 前記ガスはさらにNF3を含む、
ことを特徴とする請求項16または17記載の方法。
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KR100767762B1 (ko) | 2000-01-18 | 2007-10-17 | 에이에스엠 저펜 가부시기가이샤 | 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치 |
US6329297B1 (en) | 2000-04-21 | 2001-12-11 | Applied Materials, Inc. | Dilute remote plasma clean |
US6387207B1 (en) | 2000-04-28 | 2002-05-14 | Applied Materials, Inc. | Integration of remote plasma generator with semiconductor processing chamber |
US6569257B1 (en) * | 2000-11-09 | 2003-05-27 | Applied Materials Inc. | Method for cleaning a process chamber |
JP2002198370A (ja) * | 2000-12-26 | 2002-07-12 | Mitsubishi Electric Corp | 半導体装置および半導体装置の製造方法 |
-
2002
- 2002-09-04 US US10/235,217 patent/US6767836B2/en not_active Expired - Lifetime
-
2003
- 2003-08-25 KR KR1020030058753A patent/KR20040021533A/ko not_active Application Discontinuation
- 2003-08-30 EP EP03019814A patent/EP1452625A3/en not_active Withdrawn
- 2003-09-04 JP JP2003312924A patent/JP4439860B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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KR20040021533A (ko) | 2004-03-10 |
EP1452625A3 (en) | 2008-08-06 |
US20040043626A1 (en) | 2004-03-04 |
US6767836B2 (en) | 2004-07-27 |
EP1452625A2 (en) | 2004-09-01 |
JP2004134766A (ja) | 2004-04-30 |
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