JP4435748B2 - 赤外線検知器 - Google Patents
赤外線検知器 Download PDFInfo
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- 239000002096 quantum dot Substances 0.000 claims description 300
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 30
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 27
- 230000009467 reduction Effects 0.000 claims description 26
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 397
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 182
- 239000000758 substrate Substances 0.000 description 39
- 230000005284 excitation Effects 0.000 description 27
- 230000004888 barrier function Effects 0.000 description 25
- 238000000034 method Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 5
- 238000001312 dry etching Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 238000001459 lithography Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005036 potential barrier Methods 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H01L29/151—Compositional structures
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- H01L29/155—Comprising only semiconductor materials
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035272—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions characterised by at least one potential jump barrier or surface barrier
- H01L31/035281—Shape of the body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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Description
Journal of Applied Physics,Vol.92,No.12,pp.7462-7468,15 December 2002
先ず、本発明の第1の実施形態について説明する。図2は、本発明の第1の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第2の実施形態について説明する。図6は、本発明の第2の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第3の実施形態について説明する。図7は、本発明の第3の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第4の実施形態について説明する。図9は、本発明の第4の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第5の実施形態について説明する。図10は、本発明の第5の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第6の実施形態について説明する。図11は、本発明の第6の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第7の実施形態について説明する。図12は、本発明の第7の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第8の実施形態について説明する。図14は、本発明の第8の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第9の実施形態について説明する。図15は、本発明の第9の実施形態に係るQDIPの概念的な構成を示す断面図である。
次に、本発明の第10の実施形態について説明する。図17は、本発明の第10の実施形態に係るQDIPの概念的な構成を示す断面図である。
積層された複数の量子ドット層を有する赤外線検知部と、
前記赤外線検知部の積層方向の端部に設けられ、量子井戸構造を有する少なくとも1層の暗電流低減層と、
を有することを特徴とする赤外線検知器。
前記量子ドット層は、
化合物半導体層と、
前記化合物半導体層に埋め込まれた複数の量子ドットと、
を有することを特徴とする付記1に記載の赤外線検知器。
前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも平均サイズが大きな複数の量子ドットを含むことを特徴とする付記2に記載の赤外線検知器。
前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも数的な密度が高い複数の量子ドットを含むことを特徴とする付記2に記載の赤外線検知器。
前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも平均サイズが大きく、且つ数的な密度が高い複数の量子ドットを含むことを特徴とする付記2に記載の赤外線検知器。
前記暗電流低減層は、
前記化合物半導体層と同一組成の化合物半導体層と、
前記複数の量子ドットと同一組成の量子ドットと、
を有することを特徴とする付記2乃至5のいずれか1項に記載の赤外線検知器。
前記暗電流低減層は、1次元量子井戸層を含むことを特徴とする付記1に記載の赤外線検知器。
前記暗電流低減層は、1次元量子井戸層を含むことを特徴とする付記2に記載の赤外線検知器。
前記暗電流低減層は、前記1次元量子井戸層を挟む2個のバリア層を含むことを特徴とする付記8に記載の赤外線検知器。
前記バリア層の組成は、前記化合物半導体層の組成と同一であることを特徴とする付記9に記載の赤外線検知器。
前記量子ドット層に含まれる量子ドット及び前記暗電流低減層に含まれる量子ドットは、InAsからなることを特徴とする付記1乃至10のいずれか1項に記載の赤外線検知器。
前記暗電流低減層は、前記量子ドットよりもバンドギャップが小さい材料を量子井戸として用いた複数の量子ドットを含むことを特徴とする付記2に記載の赤外線検知器。
前記量子ドット層に含まれる量子ドット及び前記暗電流低減層に含まれる量子ドットは、InGaAsからなることを特徴とする付記12に記載の赤外線検知器。
前記量子ドット層に含まれる量子ドット中のIn組成は、前記暗電流低減層に含まれる量子ドット中のIn組成よりも低いことを特徴とする付記13に記載の赤外線検知器。
前記暗電流低減層の数は、1層、2層又は3層であることを特徴とする付記1乃至14のいずれか1項に記載の赤外線検知器。
2:量子ドット層
3:量子ドット
4:暗電流低減層
5:量子ドット層
6:量子ドット
7:電極層
8:電極層
11:半絶縁性GaAs基板
12:n型GaAs層
13:i型GaAs層
14:量子ドット
15:i型GaAs層
16:量子ドット
17:i型GaAs層
18:n型GaAs層
19:電極
20:電極
21:電源
22:電流計
23:基底準位
24:第一励起準位
25:高位の励起準位
26:高位の励起準位
27:電子
28:量子ドット
29:量子ドット
30:i型InGaAs層
31:i型GaAs層
32:基底準位
33:第一励起準位
34:量子ドット
35:量子ドット
36:基底準位
37:第一励起準位
38:高位の励起準位
39:高位の励起準位
40:電子
41:量子ドット
51:半絶縁性GaAs基板
52:下部電極層
53:量子ドット層
54:i型GaAs層
55:InAs量子ドット
56:n型GaAs上部電極層
57:電極
58:電極
59:電源
60:電流計
61:基底準位
62:励起準位
63:電子
Claims (10)
- 積層された複数の量子ドット層を有する赤外線検知部と、
前記赤外線検知部の積層方向の端部に設けられ、量子井戸構造を有する少なくとも1層の暗電流低減層と、
を有することを特徴とする赤外線検知器。 - 前記量子ドット層は、
化合物半導体層と、
前記化合物半導体層に埋め込まれた複数の量子ドットと、
を有することを特徴とする請求項1に記載の赤外線検知器。 - 前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも平均サイズが大きな複数の量子ドットを含むことを特徴とする請求項2に記載の赤外線検知器。
- 前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも数的な密度が高い複数の量子ドットを含むことを特徴とする請求項2に記載の赤外線検知器。
- 前記暗電流低減層は、前記量子ドット層に含まれる量子ドットよりも平均サイズが大きく、且つ数的な密度が高い複数の量子ドットを含むことを特徴とする請求項2に記載の赤外線検知器。
- 前記暗電流低減層は、1次元量子井戸層を含むことを特徴とする請求項1に記載の赤外線検知器。
- 前記量子ドット層に含まれる量子ドット及び前記暗電流低減層に含まれる量子ドットは、InAsからなることを特徴とする請求項1乃至6のいずれか1項に記載の赤外線検知器。
- 前記暗電流低減層は、前記量子ドットよりもバンドギャップが小さい材料を量子井戸として用いた複数の量子ドットを含むことを特徴とする請求項2に記載の赤外線検知器。
- 前記量子ドット層に含まれる量子ドット及び前記暗電流低減層に含まれる量子ドットは、InGaAsからなることを特徴とする請求項8に記載の赤外線検知器。
- 前記量子ドット層に含まれる量子ドット中のIn組成は、前記暗電流低減層に含まれる量子ドット中のIn組成よりも低いことを特徴とする請求項9に記載の赤外線検知器。
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JP2006068172A JP4435748B2 (ja) | 2005-12-09 | 2006-03-13 | 赤外線検知器 |
US11/447,014 US7473922B2 (en) | 2005-12-09 | 2006-06-06 | Infrared detector |
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US9951438B2 (en) | 2006-03-07 | 2018-04-24 | Samsung Electronics Co., Ltd. | Compositions, optical component, system including an optical component, devices, and other products |
WO2009014590A2 (en) | 2007-06-25 | 2009-01-29 | Qd Vision, Inc. | Compositions and methods including depositing nanomaterial |
WO2009014707A2 (en) | 2007-07-23 | 2009-01-29 | Qd Vision, Inc. | Quantum dot light enhancement substrate and lighting device including same |
JP4894672B2 (ja) * | 2007-08-08 | 2012-03-14 | 富士通株式会社 | 赤外線検知装置の製造方法 |
CN101855938B (zh) | 2007-09-10 | 2012-05-02 | 佛罗里达大学研究基金公司 | 发光晶体管和纵向场效应晶体管 |
JP4445556B2 (ja) | 2008-02-18 | 2010-04-07 | 国立大学法人広島大学 | 発光素子およびその製造方法 |
US8044382B2 (en) * | 2008-03-26 | 2011-10-25 | Hiroshima University | Light-emitting device and method for manufacturing the same |
EP2297762B1 (en) | 2008-05-06 | 2017-03-15 | Samsung Electronics Co., Ltd. | Solid state lighting devices including quantum confined semiconductor nanoparticles |
WO2009137053A1 (en) | 2008-05-06 | 2009-11-12 | Qd Vision, Inc. | Optical components, systems including an optical component, and devices |
US9207385B2 (en) | 2008-05-06 | 2015-12-08 | Qd Vision, Inc. | Lighting systems and devices including same |
TWI400813B (zh) * | 2008-08-26 | 2013-07-01 | Academia Sinica | 量子點及量子井混合模式紅外線偵測器裝置及其形成方法 |
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