JP4977695B2 - 紫外受光素子 - Google Patents
紫外受光素子 Download PDFInfo
- Publication number
- JP4977695B2 JP4977695B2 JP2008516535A JP2008516535A JP4977695B2 JP 4977695 B2 JP4977695 B2 JP 4977695B2 JP 2008516535 A JP2008516535 A JP 2008516535A JP 2008516535 A JP2008516535 A JP 2008516535A JP 4977695 B2 JP4977695 B2 JP 4977695B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- light receiving
- receiving element
- ultraviolet light
- gan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 claims description 34
- 239000000758 substrate Substances 0.000 claims description 27
- 229910002704 AlGaN Inorganic materials 0.000 claims description 17
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 238000000034 method Methods 0.000 description 17
- 239000013078 crystal Substances 0.000 description 12
- 150000004767 nitrides Chemical class 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000005533 two-dimensional electron gas Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910001425 magnesium ion Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/112—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor
- H01L31/1124—Devices with PN homojunction gate
- H01L31/1126—Devices with PN homojunction gate the device being a field-effect phototransistor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Description
基板と、
前記基板上に設けられ、GaN系半導体によって構成された第1層と、
前記第1層に接触し、ソース領域、ドレイン領域及びチャネル領域を有するようGaN系半導体によって構成された、前記第1層と同一の導電型の第2層と、
前記第2層に接触し、ゲート領域を有するようにGaN系半導体によって構成されたp型の第3層とを具えることを特徴とする
本明細書中、「GaN系半導体」とは、GaN,AlN,InN及びこれらを含む混晶を意味する。
2,32,34,73,76 n型層
3,33,45,74 p型層
4 i層
5 n電極
6 p電極
11,25 光
12 価電子帯
13 電子
14,51,61 伝導帯
15 正孔
22,43,44,75 アンドープ層
23,24 電極
35 エミッタ電極
36 コレクタ電極
42,72 緩衝層
46,77 ドレイン電極
47,79 ソース電極
48,78 ゲート電極
52,62 擬フェルミ準位
63 2次元電子ガス
BG バンドギャップ
図5は、本発明による紫外受光素子の第1の実施の形態の素子構造を示す図である。このような紫外受光素子を製造するに際し、有機金属化合物気相成長法などの方法により、基板(例えば、サファイア基板)41上に、約500℃で緩衝層(例えば、低温AlN緩衝層)42を結晶成長し、約1000℃でアンドープ層(例えば、アンドープGaN層)43を約2μm結晶成長する。
Claims (8)
- 基板と、
前記基板上に設けられ、GaN系半導体によって構成された第1層と、
前記第1層に接触し、ソース領域、ドレイン領域及びチャネル領域を有するようGaN系半導体によって構成された、前記第1層と同一の導電型の第2層と、
前記第2層に接触し、ゲート領域を有するようにGaN系半導体によって構成されたp型の第3層とを具えることを特徴とする紫外線受光素子。 - 前記第1層をGaNによって構成するとともに、前記第2層をAlGaNによって構成し、前記第1層及び前記第2層がGaN/AlGaNヘテロ接合を形成したことを特徴とする請求項1記載の紫外線受光素子。
- 前記第2層にドーピングを行ったことを特徴とする請求項1又は2記載の紫外線受光素子。
- 前記第2層にアンドープのスペーサ層を介在し又は量子井戸若しくはヘテロ構造を組み込むことを特徴とする請求項3記載の紫外線受光素子。
- 光閉じ込め構造を組み込むことを特徴とする請求項1から4のうちのいずれか1項に記載の紫外線受光素子。
- 前記光閉じ込め構造を、半導体DBR又は誘電体多層膜によって構成したことを特徴とする請求項5記載の紫外線受光素子。
- 前記第1層をアンドープ又は1×1018cm−3以下のドーピング濃度としたことを特徴とする請求項1から6のうちのいずれか1項に記載の紫外線受光素子。
- 前記第3層を1×1016cm−3以上のアクセプタ濃度としたことを特徴とする請求項1から7のうちのいずれか1項に記載の紫外線受光素子。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2006/310342 WO2007135739A1 (ja) | 2006-05-24 | 2006-05-24 | 紫外受光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007135739A1 JPWO2007135739A1 (ja) | 2009-09-24 |
JP4977695B2 true JP4977695B2 (ja) | 2012-07-18 |
Family
ID=38723055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008516535A Active JP4977695B2 (ja) | 2006-05-24 | 2006-05-24 | 紫外受光素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090166674A1 (ja) |
EP (1) | EP2023403A4 (ja) |
JP (1) | JP4977695B2 (ja) |
KR (1) | KR101027225B1 (ja) |
WO (1) | WO2007135739A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150077047A (ko) * | 2013-12-27 | 2015-07-07 | 서울바이오시스 주식회사 | 자외선 광 검출 소자 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100012849A1 (en) * | 2008-07-21 | 2010-01-21 | United States Of America As Represented By The Administrator Of The National Aeronautics And Spac | Detector for dual band ultraviolet detection |
JP2012033773A (ja) * | 2010-07-30 | 2012-02-16 | Panasonic Electric Works Co Ltd | 半導体素子および半導体デバイス |
DE102011075103B4 (de) | 2011-05-02 | 2014-04-10 | Forschungsverbund Berlin E.V. | Photodetektor |
JP6048718B2 (ja) * | 2011-11-07 | 2016-12-21 | 国立大学法人 名古屋工業大学 | 紫外線受光素子 |
US20130334537A1 (en) * | 2012-06-14 | 2013-12-19 | The Curators Of The University Of Missouri | Optically Controlled Power Devices |
WO2014028468A2 (en) | 2012-08-13 | 2014-02-20 | The Curators Of The University Of Missouri | An optically activated linear switch for radar limiters or high power switching applications |
JP6614486B2 (ja) * | 2015-11-05 | 2019-12-04 | 旭化成株式会社 | 紫外線受光素子 |
JP6628133B2 (ja) * | 2015-11-05 | 2020-01-08 | 学校法人 名城大学 | 紫外線受光素子 |
CN105742399B (zh) * | 2016-02-22 | 2018-02-06 | 中山大学 | 一种三族氮化物基双异质结光电晶体管 |
JP6876290B2 (ja) * | 2016-09-27 | 2021-05-26 | 旭化成株式会社 | 受光素子 |
JP6506453B2 (ja) | 2017-06-13 | 2019-04-24 | 旭化成株式会社 | Msm型紫外線受光素子、msm型紫外線受光装置 |
US10566493B1 (en) | 2018-07-31 | 2020-02-18 | International Business Machines Corporation | Device with integration of light-emitting diode, light sensor, and bio-electrode sensors on a substrate |
CN109698250B (zh) * | 2018-12-26 | 2021-01-01 | 中南大学 | 栅极调控AlGaN基金属-半导体-金属紫外探测器及制备方法 |
CN110047968A (zh) * | 2019-04-17 | 2019-07-23 | 中南大学 | 一种AlGaN基3D倒装焊MSM阵列紫外探测器的制备方法 |
KR102485133B1 (ko) * | 2021-01-08 | 2023-01-09 | 한국공학대학교 산학협력단 | 고효율 질화물계 광 검출기 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06350196A (ja) * | 1993-06-04 | 1994-12-22 | Matsushita Electric Ind Co Ltd | 光半導体素子 |
JPH08316522A (ja) * | 1995-05-19 | 1996-11-29 | Canon Inc | Hemt型光検出部を備えた光検出器 |
JP2000286442A (ja) * | 1999-03-30 | 2000-10-13 | Osaka Gas Co Ltd | 受光素子の製造方法及び火炎センサ |
JP2002064103A (ja) * | 2000-08-16 | 2002-02-28 | Sony Corp | 半導体素子の製造方法およびそれにより得られた半導体素子 |
JP2002231705A (ja) * | 2001-02-06 | 2002-08-16 | Sony Corp | エッチング方法および半導体装置の製造方法 |
JP2003046111A (ja) * | 2001-05-24 | 2003-02-14 | Ngk Insulators Ltd | 半導体受光素子 |
JP2003514402A (ja) * | 1999-11-16 | 2003-04-15 | 松下電子工業株式会社 | 相分離が抑制されたiii族窒化物材料系を用いた半導体構造及び製造方法 |
JP2006013463A (ja) * | 2004-05-21 | 2006-01-12 | Showa Denko Kk | Iii族窒化物半導体発光素子 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726462A (en) * | 1996-02-07 | 1998-03-10 | Sandia Corporation | Semiconductor structures having electrically insulating and conducting portions formed from an AlSb-alloy layer |
JPH09229763A (ja) | 1996-02-22 | 1997-09-05 | Osaka Gas Co Ltd | 火炎センサ |
EP1017113B1 (en) * | 1997-01-09 | 2012-08-22 | Nichia Corporation | Nitride semiconductor device |
JP2001217257A (ja) * | 2000-01-31 | 2001-08-10 | Sony Corp | 半導体装置およびその製造方法 |
JP2003023175A (ja) | 2001-07-10 | 2003-01-24 | Pawdec:Kk | Msm型半導体受光素子 |
US6953740B2 (en) * | 2002-03-15 | 2005-10-11 | Cornell Research Foundation, Inc. | Highly doped III-nitride semiconductors |
US7123637B2 (en) * | 2003-03-20 | 2006-10-17 | Xerox Corporation | Nitride-based laser diode with GaN waveguide/cladding layer |
KR100493059B1 (ko) * | 2003-04-18 | 2005-06-02 | 삼성전자주식회사 | 게이트 캐패시턴스를 감소시킬 수 있는 트랜지스터 |
JP4041075B2 (ja) * | 2004-02-27 | 2008-01-30 | 株式会社東芝 | 半導体装置 |
JP4002918B2 (ja) * | 2004-09-02 | 2007-11-07 | 株式会社東芝 | 窒化物含有半導体装置 |
US7728355B2 (en) * | 2005-12-30 | 2010-06-01 | International Rectifier Corporation | Nitrogen polar III-nitride heterojunction JFET |
-
2006
- 2006-05-24 US US12/227,529 patent/US20090166674A1/en not_active Abandoned
- 2006-05-24 JP JP2008516535A patent/JP4977695B2/ja active Active
- 2006-05-24 EP EP06756548A patent/EP2023403A4/en not_active Withdrawn
- 2006-05-24 WO PCT/JP2006/310342 patent/WO2007135739A1/ja active Application Filing
- 2006-05-24 KR KR1020087031312A patent/KR101027225B1/ko active IP Right Grant
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06350196A (ja) * | 1993-06-04 | 1994-12-22 | Matsushita Electric Ind Co Ltd | 光半導体素子 |
JPH08316522A (ja) * | 1995-05-19 | 1996-11-29 | Canon Inc | Hemt型光検出部を備えた光検出器 |
JP2000286442A (ja) * | 1999-03-30 | 2000-10-13 | Osaka Gas Co Ltd | 受光素子の製造方法及び火炎センサ |
JP2003514402A (ja) * | 1999-11-16 | 2003-04-15 | 松下電子工業株式会社 | 相分離が抑制されたiii族窒化物材料系を用いた半導体構造及び製造方法 |
JP2002064103A (ja) * | 2000-08-16 | 2002-02-28 | Sony Corp | 半導体素子の製造方法およびそれにより得られた半導体素子 |
JP2002231705A (ja) * | 2001-02-06 | 2002-08-16 | Sony Corp | エッチング方法および半導体装置の製造方法 |
JP2003046111A (ja) * | 2001-05-24 | 2003-02-14 | Ngk Insulators Ltd | 半導体受光素子 |
JP2006013463A (ja) * | 2004-05-21 | 2006-01-12 | Showa Denko Kk | Iii族窒化物半導体発光素子 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150077047A (ko) * | 2013-12-27 | 2015-07-07 | 서울바이오시스 주식회사 | 자외선 광 검출 소자 |
KR101639780B1 (ko) | 2013-12-27 | 2016-07-15 | 서울바이오시스 주식회사 | 자외선 광 검출 소자 |
Also Published As
Publication number | Publication date |
---|---|
EP2023403A1 (en) | 2009-02-11 |
JPWO2007135739A1 (ja) | 2009-09-24 |
US20090166674A1 (en) | 2009-07-02 |
WO2007135739A1 (ja) | 2007-11-29 |
KR20100075711A (ko) | 2010-07-05 |
EP2023403A4 (en) | 2010-10-13 |
KR101027225B1 (ko) | 2011-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4977695B2 (ja) | 紫外受光素子 | |
JP4571920B2 (ja) | 光検知器 | |
US7795640B2 (en) | Depletion-less photodiode with suppressed dark current and method for producing the same | |
IL174844A (en) | Unipolar semiconductor photodetector with suppressed dark current and method for producing the same | |
JP4635187B2 (ja) | 半導体光検出器 | |
JP6487284B2 (ja) | 赤外線センサ素子及びその製造方法 | |
JP5857774B2 (ja) | 半導体受光素子 | |
JP2009065142A (ja) | 量子ドット型赤外線検知器 | |
JP2006040919A (ja) | アバランシェフォトダイオード | |
TWI244768B (en) | Photodetector | |
US8143648B1 (en) | Unipolar tunneling photodetector | |
JP5217140B2 (ja) | 光半導体装置 | |
US11799047B2 (en) | Avalanche photodiode and method for manufacturing same | |
JP2007123587A (ja) | 受光素子 | |
JP2008187022A (ja) | 赤外線検知器 | |
JP4694417B2 (ja) | 量子ドット光半導体素子 | |
JP2011171367A (ja) | 半導体受光素子および半導体受光装置 | |
Lee et al. | Performance Improvement of AlGaAs/GaAs QWIP by ${\rm NH} _ {3} $ Plasma Treatment | |
JP2008060161A (ja) | 光検出器及び光検出器の製造方法 | |
Liao et al. | In-plane gate transistors for photodetector applications | |
JP2023056719A (ja) | 紫外線受光素子 | |
JP2018182261A (ja) | 半導体受光デバイス | |
JP2009272543A (ja) | フォトダイオード | |
JP2006302954A (ja) | 半導体受光素子および該半導体受光素子の製造方法 | |
TWI458109B (zh) | 紫外光檢測器的製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120403 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120416 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4977695 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150420 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |