JP4002918B2 - 窒化物含有半導体装置 - Google Patents
窒化物含有半導体装置 Download PDFInfo
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- JP4002918B2 JP4002918B2 JP2004255467A JP2004255467A JP4002918B2 JP 4002918 B2 JP4002918 B2 JP 4002918B2 JP 2004255467 A JP2004255467 A JP 2004255467A JP 2004255467 A JP2004255467 A JP 2004255467A JP 4002918 B2 JP4002918 B2 JP 4002918B2
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- 239000004065 semiconductor Substances 0.000 title claims description 190
- 150000004767 nitrides Chemical class 0.000 title claims description 175
- 229910002601 GaN Inorganic materials 0.000 claims description 195
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 claims description 142
- 230000004888 barrier function Effects 0.000 claims description 15
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 264
- 230000015556 catabolic process Effects 0.000 description 31
- 230000000694 effects Effects 0.000 description 14
- 238000002955 isolation Methods 0.000 description 9
- 230000002093 peripheral effect Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 230000005669 field effect Effects 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 229910052733 gallium Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 240000001973 Ficus microcarpa Species 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66446—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET]
- H01L29/66462—Unipolar field-effect transistors with an active layer made of a group 13/15 material, e.g. group 13/15 velocity modulation transistor [VMT], group 13/15 negative resistance FET [NERFET] with a heterojunction interface channel or gate, e.g. HFET, HIGFET, SISFET, HJFET, HEMT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1066—Gate region of field-effect devices with PN junction gate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Description
チャネル層として形成されたノンドープの第1の窒化アルミニウムガリウム(AlxGa1−xN(0≦x≦1))層と、
上記第1の窒化アルミニウムガリウム層上にバリア層として形成されたノンドープ又はn型の第2の窒化アルミニウムガリウム(AlyGa1−yN(0≦y≦1,x<y))層と、
上記第2の窒化アルミニウムガリウム層上の所定領域に所定間隔ごとに形成されたストライプ状の部分を有するp型の第3の窒化アルミニウムガリウム(AlzGa1−zN(0≦z≦1))層と、
上記第3の窒化アルミニウムガリウム層の一端に電気的に接続されるように上記第2の窒化アルミニウムガリウム層上に形成されたソース電極と、
上記第3の窒化アルミニウムガリウム層の他端から離隔して上記第2の窒化アルミニウムガリウム層上に形成されたドレイン電極と、
上記ソース電極と上記ドレイン電極との間であって上記第3の窒化アルミニウムガリウム層の他端よりも上記ソース電極寄りに上記第2の窒化アルミニウムガリウム層上に形成されたゲート電極と、
を備えていることを特徴とする。
2 n型窒化アルミニウムガリウム(AlGaN)層
3 p型窒化ガリウム(GaN)層
4 ソース電極
5 ドレイン電極
6 ゲート電極
7 p型窒化ガリウム(GaN)層
8 絶縁膜
9 フィールドプレート電極
10 第2のフィールドプレート電極
11 ゲート絶縁膜
12 ゲート引出電極
Claims (5)
- チャネル層として形成されたノンドープの第1の窒化アルミニウムガリウム(AlxGa1−xN(0≦x≦1))層と、
前記第1の窒化アルミニウムガリウム層上にバリア層として形成されたノンドープ又はn型の第2の窒化アルミニウムガリウム(AlyGa1−yN(0≦y≦1,x<y))層と、
前記第2の窒化アルミニウムガリウム層上の所定領域に所定間隔ごとに形成されたストライプ状の部分を有するp型の第3の窒化アルミニウムガリウム(AlzGa1−zN(0≦z≦1))層と、
前記第3の窒化アルミニウムガリウム層の一端に電気的に接続されるように前記第2の窒化アルミニウムガリウム層上に形成されたソース電極と、
前記第3の窒化アルミニウムガリウム層の他端から離隔して前記第2の窒化アルミニウムガリウム層上に形成されたドレイン電極と、
前記ソース電極と前記ドレイン電極との間であって前記第3の窒化アルミニウムガリウム層の他端よりも前記ソース電極寄りに前記第2の窒化アルミニウムガリウム層上に形成されたゲート電極と、
を備えていることを特徴とする窒化物含有半導体装置。 - 前記第2の窒化アルミニウムガリウム層と前記ゲート電極との間に形成されたp型の第4の窒化アルミニウムガリウム(AlzGa1−zN(0≦z≦1))層をさらに備えていることを特徴とする請求項1に記載の窒化物含有半導体装置。
- 前記第3の窒化アルミニウムガリウム層と前記第4の窒化アルミニウムガリウム層との間隔dが、前記ソース電極から前記ドレイン電極に向かう方向における前記第4の窒化アルミニウムガリウム層の長さLよりも短い(d<L)ことを特徴とする請求項2に記載の窒化物含有半導体装置。
- 前記ゲート電極並びに前記第3及び第4の窒化アルミニウムガリウム層を被覆して形成された絶縁膜と、
前記ゲート電極並びに前記第3及び第4の窒化アルミニウムガリウム層を被覆するように前記絶縁膜上に形成され、前記ソース電極に電気的に接続されたフィールドプレート電極と、
さらに備えていることを特徴とする請求項1乃至3のいずれかに記載の窒化物含有半導体装置。 - 前記第2の窒化アルミニウムガリウム層と前記ゲート電極との間に形成されたゲート絶縁膜をさらに備えていることを特徴とする請求項1に記載の窒化物含有半導体装置。
Priority Applications (3)
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---|---|---|---|
JP2004255467A JP4002918B2 (ja) | 2004-09-02 | 2004-09-02 | 窒化物含有半導体装置 |
US11/109,858 US7271429B2 (en) | 2004-09-02 | 2005-04-20 | Nitride semiconductor device |
US11/766,484 US7732837B2 (en) | 2004-09-02 | 2007-06-21 | Nitride semiconductor device |
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JP2004255467A JP4002918B2 (ja) | 2004-09-02 | 2004-09-02 | 窒化物含有半導体装置 |
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JP2006073802A JP2006073802A (ja) | 2006-03-16 |
JP4002918B2 true JP4002918B2 (ja) | 2007-11-07 |
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JP (1) | JP4002918B2 (ja) |
Cited By (1)
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KR101843192B1 (ko) | 2011-09-30 | 2018-03-29 | 삼성전기주식회사 | 질화물 반도체 소자 및 그 제조방법 |
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2004
- 2004-09-02 JP JP2004255467A patent/JP4002918B2/ja not_active Expired - Fee Related
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2005
- 2005-04-20 US US11/109,858 patent/US7271429B2/en not_active Expired - Fee Related
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US7732837B2 (en) | 2010-06-08 |
US20060043501A1 (en) | 2006-03-02 |
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