JP4410042B2 - 微細パターン修正装置 - Google Patents

微細パターン修正装置 Download PDF

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Publication number
JP4410042B2
JP4410042B2 JP2004189890A JP2004189890A JP4410042B2 JP 4410042 B2 JP4410042 B2 JP 4410042B2 JP 2004189890 A JP2004189890 A JP 2004189890A JP 2004189890 A JP2004189890 A JP 2004189890A JP 4410042 B2 JP4410042 B2 JP 4410042B2
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JP
Japan
Prior art keywords
defect
correction
unit
fine pattern
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004189890A
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English (en)
Japanese (ja)
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JP2006007295A (ja
Inventor
正弘 猿田
馨 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTN Corp
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NTN Corp
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Filing date
Publication date
Application filed by NTN Corp filed Critical NTN Corp
Priority to JP2004189890A priority Critical patent/JP4410042B2/ja
Priority to TW094115387A priority patent/TWI373648B/zh
Priority to KR1020050045905A priority patent/KR101118848B1/ko
Priority to CN200510082397A priority patent/CN100585464C/zh
Publication of JP2006007295A publication Critical patent/JP2006007295A/ja
Application granted granted Critical
Publication of JP4410042B2 publication Critical patent/JP4410042B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP2004189890A 2004-06-28 2004-06-28 微細パターン修正装置 Expired - Fee Related JP4410042B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004189890A JP4410042B2 (ja) 2004-06-28 2004-06-28 微細パターン修正装置
TW094115387A TWI373648B (en) 2004-06-28 2005-05-12 Fine pattern modification device and modification method of the fine pattern defect
KR1020050045905A KR101118848B1 (ko) 2004-06-28 2005-05-31 미세 패턴의 결함 수정 방법
CN200510082397A CN100585464C (zh) 2004-06-28 2005-06-27 微小图案修正装置及微小图案的缺陷修正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004189890A JP4410042B2 (ja) 2004-06-28 2004-06-28 微細パターン修正装置

Publications (2)

Publication Number Publication Date
JP2006007295A JP2006007295A (ja) 2006-01-12
JP4410042B2 true JP4410042B2 (ja) 2010-02-03

Family

ID=35775097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004189890A Expired - Fee Related JP4410042B2 (ja) 2004-06-28 2004-06-28 微細パターン修正装置

Country Status (4)

Country Link
JP (1) JP4410042B2 (zh)
KR (1) KR101118848B1 (zh)
CN (1) CN100585464C (zh)
TW (1) TWI373648B (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102500929A (zh) * 2011-10-31 2012-06-20 武汉先河激光技术有限公司 一种紫外激光蚀刻机
CN104384711A (zh) * 2014-09-25 2015-03-04 湖北三江航天红阳机电有限公司 一种龙门移动式激光切割焊接机床
CN105499788A (zh) * 2016-02-16 2016-04-20 济南金胜星机械设备有限公司 一种多功能数控激光焊接切割雕刻机

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4634121B2 (ja) * 2004-11-18 2011-02-16 株式会社ブイ・テクノロジー カラーフィルタの欠陥修正方法
JP2007253317A (ja) * 2006-02-23 2007-10-04 Ntn Corp テープ研磨方法および装置
JP4719050B2 (ja) * 2006-03-30 2011-07-06 Ｎｔｎ株式会社 パターン修正装置およびその塗布ユニット
JP4867472B2 (ja) * 2006-05-25 2012-02-01 凸版印刷株式会社 マイクロディスペンサ方式色修正装置
KR100839031B1 (ko) * 2006-11-01 2008-06-17 참앤씨(주) 평판 디스플레이 패널의 리페어 방법
JP5015552B2 (ja) * 2006-11-08 2012-08-29 Ｎｔｎ株式会社 パターン修正装置
JP5007880B2 (ja) * 2007-02-28 2012-08-22 株式会社ブイ・テクノロジー 微小突起研磨装置
JP2009037107A (ja) * 2007-08-03 2009-02-19 Ntn Corp 欠陥修正装置
JP5164001B2 (ja) * 2008-02-07 2013-03-13 株式会社ブイ・テクノロジー レーザ加工装置
JP5200577B2 (ja) * 2008-02-22 2013-06-05 凸版印刷株式会社 カラーフィルタの欠陥修正方法
JP5164002B2 (ja) * 2008-02-29 2013-03-13 株式会社ブイ・テクノロジー レーザ加工装置
KR101067370B1 (ko) * 2008-09-05 2011-09-23 참엔지니어링(주) 평판표시패널용 연마장치와 그 구동방법 및 이를 구비하는 리페어 시스템
KR101067373B1 (ko) * 2008-09-05 2011-09-23 참엔지니어링(주) 평판표시패널용 연마장치와 그 구동방법 및 이를 구비하는 리페어 시스템
JP5556001B2 (ja) * 2008-10-23 2014-07-23 凸版印刷株式会社 カラーフィルタ基板の修正方法およびカラーフィルタ
JP4505600B1 (ja) * 2009-06-19 2010-07-21 レーザーテック株式会社 欠陥修正方法及び装置
JP5372169B2 (ja) * 2009-11-20 2013-12-18 シャープ株式会社 ワーク表面の異物研磨方法及び異物研磨装置
JP5495313B2 (ja) * 2010-03-12 2014-05-21 Ｎｔｎ株式会社 チャック装置、基板観察装置、および欠陥修正装置
JP5463461B2 (ja) * 2010-07-20 2014-04-09 株式会社ブイ・テクノロジー カラーフィルタの突起欠陥高さ測定器及びリペア装置
JP2013186163A (ja) * 2012-03-06 2013-09-19 Ntn Corp パターン修正方法およびパターン修正装置
KR101738981B1 (ko) * 2015-06-11 2017-05-26 참엔지니어링(주) 리페어 방법 및 리페어 장치
CN104959907B (zh) * 2015-07-15 2017-07-18 合肥京东方光电科技有限公司 研磨装置和研磨方法
TWI655800B (zh) * 2018-01-04 2019-04-01 帆宣系統科技股份有限公司 有機發光二極體的聚醯亞胺膜修補方法
CN110605643A (zh) * 2018-06-14 2019-12-24 帆宣系统科技股份有限公司 金属遮罩清洁装置及金属遮罩清洁方法
TWI671519B (zh) * 2018-11-30 2019-09-11 帆宣系統科技股份有限公司 聚醯亞胺膜缺陷之非接觸式修補方法
CN110394730A (zh) * 2019-07-27 2019-11-01 南京昱晟机器人科技有限公司 一种工业机器人打磨抛光设备及其使用方法
KR102403911B1 (ko) * 2019-12-04 2022-06-02 참엔지니어링(주) 디스플레이 복합 리페어 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102500929A (zh) * 2011-10-31 2012-06-20 武汉先河激光技术有限公司 一种紫外激光蚀刻机
CN104384711A (zh) * 2014-09-25 2015-03-04 湖北三江航天红阳机电有限公司 一种龙门移动式激光切割焊接机床
CN104384711B (zh) * 2014-09-25 2016-05-18 湖北三江航天红阳机电有限公司 一种龙门移动式激光切割焊接机床
CN105499788A (zh) * 2016-02-16 2016-04-20 济南金胜星机械设备有限公司 一种多功能数控激光焊接切割雕刻机

Also Published As

Publication number Publication date
CN100585464C (zh) 2010-01-27
CN1716043A (zh) 2006-01-04
KR101118848B1 (ko) 2012-03-19
JP2006007295A (ja) 2006-01-12
TW200600883A (en) 2006-01-01
KR20060046299A (ko) 2006-05-17
TWI373648B (en) 2012-10-01

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