TW200600883A - Fine pattern modification device and modification method of the fine pattern defect - Google Patents

Fine pattern modification device and modification method of the fine pattern defect

Info

Publication number
TW200600883A
TW200600883A TW094115387A TW94115387A TW200600883A TW 200600883 A TW200600883 A TW 200600883A TW 094115387 A TW094115387 A TW 094115387A TW 94115387 A TW94115387 A TW 94115387A TW 200600883 A TW200600883 A TW 200600883A
Authority
TW
Taiwan
Prior art keywords
fine pattern
modification
defects
positioning
head portion
Prior art date
Application number
TW094115387A
Other languages
Chinese (zh)
Other versions
TWI373648B (en
Inventor
Masahiro Saruta
Kaoru Saito
Original Assignee
Ntn Toyo Bearing Co Ltd
Opto One Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ntn Toyo Bearing Co Ltd, Opto One Inc filed Critical Ntn Toyo Bearing Co Ltd
Publication of TW200600883A publication Critical patent/TW200600883A/en
Application granted granted Critical
Publication of TWI373648B publication Critical patent/TWI373648B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)
  • Laser Beam Processing (AREA)
  • Liquid Crystal (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The fine pattern modification device comprises a head portion 6, positioning tables X, Y, and Z 7-9 and glass plate 11 bearing a substrate 10 to be modified. The head portion 6 comprises a laser device 1 emitting laser beam to eliminate defects, an observing optical system 2 observing defects, a spreading unit 3 spreading modification liquid onto the defects, stripped grinding unit 5 grinding the defects, and positioning device moving the tables relative to the modification head and performing three dimensional positioning.
TW094115387A 2004-06-28 2005-05-12 Fine pattern modification device and modification method of the fine pattern defect TWI373648B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004189890A JP4410042B2 (en) 2004-06-28 2004-06-28 Fine pattern correction device

Publications (2)

Publication Number Publication Date
TW200600883A true TW200600883A (en) 2006-01-01
TWI373648B TWI373648B (en) 2012-10-01

Family

ID=35775097

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094115387A TWI373648B (en) 2004-06-28 2005-05-12 Fine pattern modification device and modification method of the fine pattern defect

Country Status (4)

Country Link
JP (1) JP4410042B2 (en)
KR (1) KR101118848B1 (en)
CN (1) CN100585464C (en)
TW (1) TWI373648B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392595B (en) * 2006-11-08 2013-04-11 Ntn Toyo Bearing Co Ltd Pattern correction device
TWI655800B (en) * 2018-01-04 2019-04-01 帆宣系統科技股份有限公司 Polyimide film repair method for organic light emitting diode

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4634121B2 (en) * 2004-11-18 2011-02-16 株式会社ブイ・テクノロジー Color filter defect correction method
JP2007253317A (en) * 2006-02-23 2007-10-04 Ntn Corp Tape grinding method and device
JP4719050B2 (en) * 2006-03-30 2011-07-06 Ｎｔｎ株式会社 Pattern correction device and application unit thereof
JP4867472B2 (en) * 2006-05-25 2012-02-01 凸版印刷株式会社 Micro dispenser type color correction device
KR100839031B1 (en) * 2006-11-01 2008-06-17 참앤씨(주) Method for repair of plat display panel
JP5007880B2 (en) * 2007-02-28 2012-08-22 株式会社ブイ・テクノロジー Microprojection polishing equipment
JP2009037107A (en) * 2007-08-03 2009-02-19 Ntn Corp Defect correcting device
JP5164001B2 (en) * 2008-02-07 2013-03-13 株式会社ブイ・テクノロジー Laser processing equipment
JP5200577B2 (en) * 2008-02-22 2013-06-05 凸版印刷株式会社 Color filter defect correction method
JP5164002B2 (en) * 2008-02-29 2013-03-13 株式会社ブイ・テクノロジー Laser processing equipment
KR101067373B1 (en) * 2008-09-05 2011-09-23 참엔지니어링(주) Polishing device for flat panel display and driving method thereof and repair system having the same
KR101067370B1 (en) * 2008-09-05 2011-09-23 참엔지니어링(주) Polishing Device For Flat Panel Display And Driving Method Thereof And Repair System Having The Same
JP5556001B2 (en) * 2008-10-23 2014-07-23 凸版印刷株式会社 Color filter substrate correction method and color filter
JP4505600B1 (en) * 2009-06-19 2010-07-21 レーザーテック株式会社 Defect correction method and apparatus
WO2011061884A1 (en) * 2009-11-20 2011-05-26 シャープ株式会社 Method of abrading foreign object on workpiece surface, and foreign object abrasion device
JP5495313B2 (en) * 2010-03-12 2014-05-21 Ｎｔｎ株式会社 Chuck device, substrate observation device, and defect correction device
JP5463461B2 (en) * 2010-07-20 2014-04-09 株式会社ブイ・テクノロジー Color filter protrusion height measuring instrument and repair device
CN102500929A (en) * 2011-10-31 2012-06-20 武汉先河激光技术有限公司 Ultraviolet laser etching machine
JP2013186163A (en) * 2012-03-06 2013-09-19 Ntn Corp Pattern correction method and pattern correction device
CN104384711B (en) * 2014-09-25 2016-05-18 湖北三江航天红阳机电有限公司 A kind of movable gantry laser cutting welding machine tool
KR101738981B1 (en) * 2015-06-11 2017-05-26 참엔지니어링(주) Method and Apparatus for Repairing Film
CN104959907B (en) * 2015-07-15 2017-07-18 合肥京东方光电科技有限公司 Lapping device and Ginding process
CN105499788A (en) * 2016-02-16 2016-04-20 济南金胜星机械设备有限公司 Multifunctional numerical control laser welding, cutting and carving machine
CN110605643A (en) * 2018-06-14 2019-12-24 帆宣系统科技股份有限公司 Metal mask cleaning device and metal mask cleaning method
TWI671519B (en) * 2018-11-30 2019-09-11 帆宣系統科技股份有限公司 Non-contact repair method for polyimine film defects
CN110394730A (en) * 2019-07-27 2019-11-01 南京昱晟机器人科技有限公司 A kind of industrial robot sanding and polishing equipment and its application method
KR102403911B1 (en) * 2019-12-04 2022-06-02 참엔지니어링(주) Multiple repair apparatus for display

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI392595B (en) * 2006-11-08 2013-04-11 Ntn Toyo Bearing Co Ltd Pattern correction device
TWI655800B (en) * 2018-01-04 2019-04-01 帆宣系統科技股份有限公司 Polyimide film repair method for organic light emitting diode

Also Published As

Publication number Publication date
TWI373648B (en) 2012-10-01
JP2006007295A (en) 2006-01-12
CN1716043A (en) 2006-01-04
JP4410042B2 (en) 2010-02-03
KR101118848B1 (en) 2012-03-19
CN100585464C (en) 2010-01-27
KR20060046299A (en) 2006-05-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees