JP2009037107A - Defect correcting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a defect correcting method where using efficiency of correcting ink is high, and a period required for application of the correcting ink is short. <P>SOLUTION: In this defect correcting method, when a black defect 36 occurs over two adjacent pixels 33 and 34, a laser beam is radiated to form a white defect 35 in a part corresponding to a black matrix 31 of a black defect 36, the white defect 35 is filled with black correcting ink 40, and the ink is hardened, then a laser beam is radiated to form a white defect 35 in a part corresponding to each of the pixels 33 and 34 of the black defect 36, and each white defect 35 is filled with correcting inks 41 and 42 of the same color as the pixels 33 and 34 and is hardened. Correction is efficiently made, therefore, with a small amount of correction ink 40 comparing with the conventional method where the entire black defect 36 is removed at once. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a defect correction apparatus, and more particularly to a defect correction apparatus for correcting a defect in a color filter of an LCD (Liquid Crystal Display).

  In recent years, with the increase in size and resolution of LCDs, the number of pixels has increased, making it difficult to manufacture LCDs without defects, and the probability of occurrence of defects has also increased. Under these circumstances, in order to improve the yield, a defect correcting apparatus that corrects a defect that occurs in the manufacturing process of an LCD color filter has become indispensable for a production line.

  FIGS. 10A to 10C are diagrams showing defects that occur in the manufacturing process of the color filter of the LCD. 10A to 10C, the color filter has a black matrix 31 formed in a lattice pattern on the surface of a transparent substrate, and R (red) pixels 32, G ( A green pixel 33 or a B (blue) pixel 34 is formed. The R pixel 32, the G pixel 33, and the B pixel 34 are formed with a predetermined cycle.

  In the manufacturing process of such a color filter, the white defect 35 in which the color of the pixel or the black matrix 31 is lost as shown in FIG. 10A or the adjacent pixel as shown in FIG. Colors are mixed, or a black defect 36 in which the black matrix 31 protrudes from the pixel, a foreign object defect 37 in which a foreign object adheres to the pixel as shown in FIG.

  As a method of correcting the white defect 35, ink having the same color as that of the pixel in which the white defect 35 exists is attached to the tip of the application needle, and the ink attached to the tip of the application needle is applied to the white defect 35 to be corrected. There is a way. As a method for correcting the black defect 36 and the foreign matter defect 37, the defective portion is laser-cut to form a rectangular white defect 35, and then the ink adhered to the tip of the coating needle is applied to the white defect 35. There is a way to fix it.

  In addition, as shown in FIG. 11, the black defect 36 may occur over a plurality of (two in the figure) adjacent pixels (33 and 34 in the figure). In this case, first, as shown in FIG. 12, a rectangular region including the black defect 36 is irradiated with laser light to remove the black defect 36 and form a rectangular white defect 35. In the white defect 35, the surface of the transparent substrate 38 is exposed.

  Next, as shown in FIG. 13A, the black correction ink 40 for the black matrix 31 is applied to the portion of the white defect 35 corresponding to the black matrix 31. At this time, as shown in FIG. 13B, which is a cross-sectional view taken along line XIIIB-XIIIB in FIG. 13A, the thickness of the portion corresponding to the black matrix 31 of the correction ink 40 is the thickness of the normal portion of the black matrix 31. The correction ink 40 is applied so that the thickness is about. At this time, since the viscosity of the correction ink 40 is low, the correction ink 40 extends to the areas of the pixels 33 and 34 on both sides of the black matrix 31.

  Next, the applied correction ink 40 is irradiated with ultraviolet rays to cure the correction ink 40. Next, a portion of the cured correction ink 40 that protrudes from the width of the black matrix 31 is removed by laser irradiation. As a result, as shown in FIG. 14, the black matrix 31 is corrected, and the white defect 35 is divided into two parts by the black matrix 31.

Next, as shown in FIG. 15, the green correction ink 41 is applied to the portion corresponding to the G pixel 33 in the white defect 35, and the blue correction ink is applied to the portion corresponding to the B pixel 34 in the white defect 35. 42 is applied. Next, when the correction inks 41 and 42 are cured by irradiating ultraviolet rays, the correction of the black defect 36 is completed as shown in FIG. 16 (see, for example, Patent Document 1).
JP 2006-208716 A

  However, in the conventional defect correction method, since the viscosity of the correction ink 40 for the black matrix 31 is low, it is necessary to apply a large amount of the correction ink 40 in order to ensure a predetermined thickness. For this reason, there has been a problem that the number of times of application increases and the time required for application of the correction ink 40 (application tact) becomes longer. In addition, since many unnecessary portions of the correction ink 40 applied in a large amount were removed from a wider range than the predetermined line width of the black matrix 31, the use efficiency of the correction ink 40 was poor.

  SUMMARY OF THE INVENTION Therefore, a main object of the present invention is to provide a defect correction method and a defect correction apparatus that have high use efficiency of correction ink and a short time required for application of correction ink.

  The defect correcting method according to the present invention is a color filter including a black matrix formed in a grid pattern on a transparent substrate and a colored layer formed in each region surrounded by the black matrix. A defect correction method for correcting a defect generated over a colored layer, wherein a portion corresponding to a black matrix is removed by irradiating a laser beam, and a first correction for a black matrix is performed on the removed portion. After the ink is filled and cured, the portion corresponding to the colored layer in the defect is removed by irradiating the laser beam, and the removed portion is filled with the second correction ink for the colored layer and cured. It is characterized by.

Preferably, the first and second correction inks are cured by irradiating with ultraviolet rays.
Preferably, the first and second correction inks are cured by irradiation with halogen lamp light.

Preferably, YAG laser light is used as the laser light.
Preferably, the second harmonic or the third harmonic of the YAG laser is used as the YAG laser light.

  Further, the defect correction apparatus according to the present invention is a color filter including a black matrix formed in a grid pattern on a transparent substrate and a colored layer formed in each region surrounded by the black matrix. A defect correction apparatus for correcting a defect that has occurred across two colored layers, a laser irradiation unit that irradiates a laser beam to remove a desired portion of the defect, and a portion that is removed by the laser irradiation unit Filling means for selectively filling the first correction ink for the black matrix or the second correction ink for the colored layer, and curing means for curing the first and second correction inks filled by the filling means. The portion corresponding to the black matrix of the defect was removed by irradiating the laser beam, and the removed portion was filled with the first correction ink and cured. , By irradiating a laser beam to remove the portion corresponding to the colored layer of the defect, and wherein the curing by filling a second modified ink removed portion.

  In the defect correction method and the defect correction apparatus according to the present invention, the portion corresponding to the black matrix is removed by irradiating the laser beam, and the removed portion is filled with the first correction ink for the black matrix. After curing, the laser beam is irradiated to remove a portion corresponding to the colored layer in the defect, and the removed portion is filled with the second correction ink for the colored layer and cured. Therefore, only the portion corresponding to the black matrix in the defect is removed, and the removed portion is filled with the first correction ink for the black matrix, so that the first correction ink can be prevented from spreading. The correction ink can be used efficiently. Further, the number of times of applying the correction ink can be reduced, and the time required for applying the correction ink (application tact) can be shortened.

  FIG. 1 is a diagram showing an overall configuration of a defect correction apparatus according to an embodiment of the present invention. In FIG. 1, the defect correcting apparatus includes an observation optical system 1 for observing the surface of the substrate, a CCD camera 2 for photographing the surface of the substrate being observed, a monitor 3 for displaying an image of the photographed substrate surface, and a laser. A laser irradiation device 4 that irradiates light to remove defects on the surface of the substrate, a slit mechanism 5 that adjusts the irradiation region of the laser light according to the size and orientation of the defect, and applying a correction ink to the defect using a coating needle And a curing light source 7 that irradiates the correction ink applied to the defect with ultraviolet rays and cures it.

  In addition, the defect correcting apparatus includes a chuck unit 8 that holds the substrate horizontally, an XY stage 9 that moves the chuck unit 8 in the XY direction (horizontal direction), an observation optical system 1, a CCD camera 2, and a laser irradiation device 4. A Z stage 10 mounted with a slit mechanism 5, a coating unit 6, and a curing light source 7 and moved in the Z direction (vertical direction), an image processing unit 11 for recognizing a defect based on a photographed image, and an apparatus A control computer 12 for controlling the operation of the mechanism unit and a host computer 13 for controlling the entire apparatus are provided.

  The XY stage 9 is used to relatively move the substrate to an appropriate position when observing the surface of the substrate with the observation optical system 1 or when applying correction ink to a defect with the application unit 6. The XY stage 9 shown in FIG. 1 has a configuration in which two uniaxial stages are stacked in a perpendicular direction. However, the XY stage 9 only needs to be able to move the substrate relative to the observation optical system 1 and the coating unit 6, and is not limited to the configuration of the XY stage 9 shown in FIG. . In recent years, as the substrate size increases, the substrate is fixed, and the Z stage 10 on which the observation optical system 1 and the coating unit 6 are mounted can move independently in the X-axis direction and the Y-axis direction, respectively. Many XY stages are used.

  FIG. 2 is a diagram showing the configuration of the coating unit 6. In FIG. 2, in the application unit 6, an application needle 21 is provided so as to be movable in the vertical direction by an actuator 22, and an application pallet 23 is provided to be rotatable in a horizontal plane by a motor 24. On the coating pallet 23, four ink tanks 25 into which correction inks of R (red), G (green), B (blue), and black are respectively injected, a cleaning unit 26, and a drying unit 27 are provided. ing. A part of the circular application pallet 23 is provided with a notch 28 for allowing the application needle 21 to pass therethrough.

  When correcting the defect, the application pallet 23 is rotated, the desired correction liquid tank 25 is moved below the application needle 21, and the application needle 21 is moved up and down by the actuator 22, so that the desired tip is applied to the tip of the application needle 21. Correction ink is deposited. Next, the coating pallet 23 is rotated to move the notch 28 of the coating pallet 23 below the coating needle 21, and the coating needle 21 is moved up and down by the actuator 22, so that the tip of the coating needle 21 is a substrate (not shown). ) And the correction ink is applied to the defective portion.

  After application of the correction ink, the cleaning unit 26 is moved below the application needle 21 and the application needle 21 is inserted into the cleaning unit 26, and unnecessary correction ink is removed from the application needle 21 by the cleaning liquid. Thereafter, the drying unit 27 is moved below the application needle 21, and the application needle 21 is inserted into the drying unit 27 and dried.

  The application unit 6 may be one that moves the application needle 21 only in the Z direction as shown in FIG. 2, or may be one that further moves the application needle 21 in the XY direction (for example, Japanese Patent Laid-Open No. 2006-2006). No. 130460).

  Next, a defect correction method using this defect correction apparatus will be described. Now, as shown in FIG. 3, in the color filter of the LCD, it is assumed that the black defect 36 occurs over a plurality of adjacent pixels (two in the drawing) (33, 34 in the drawing). First, as shown in FIG. 3, the slit S through which the laser beam is passed is positioned in a portion corresponding to the black matrix 31 in the black defect 36, and the portion corresponding to the black matrix 31 in the black defect 36 is the slit S. The width and length of the slit S are set so as to be within the opening.

  Next, the black defect 36 is irradiated with laser light through the slit S, and the portion corresponding to the black matrix 31 in the black defect 36 is removed as shown in FIGS. A white defect 35 having the same shape as the portion is formed. 4B is a cross-sectional view taken along the line IVB-IVB in FIG. 4A, and the surface of the transparent substrate 38 is exposed at the white defect 35. FIG. Preferably, YAG laser light is used as the laser light, and more preferably, the second harmonic or the third harmonic of the YAG laser is used. Depending on the defect, the fundamental wave or the fourth harmonic of the YAG laser may be used.

  Next, as shown in FIGS. 5A and 5B, the black defect correction ink 40 is filled into the white defect 35 formed in the black matrix 31 using an application needle. At this time, as shown in FIG. 5B, which is a cross-sectional view taken along the line VB-VB in FIG. 5A, the spread of the correction ink 40 is suppressed by the inner wall of the white defect 35. Therefore, the spread of the correction ink 40 is smaller than in the case of FIGS. 13A and 13B, and the correction can be efficiently performed with a small amount of the correction ink 40. For this reason, the number of times of applying the correction ink 40 can be reduced, and the time required for applying the correction ink 40 (application tact) can be shortened.

  After the correction ink 40 filled in the white defect 35 is irradiated with ultraviolet rays and cured, as shown in FIG. 6, the slit S is positioned in a portion corresponding to the G pixel 33 in the black defect 36, and the black defect 36. The width and length of the slit S are set so that the portion corresponding to the G pixel 33 and the portion of the applied correction ink 40 that protrudes from the black matrix 31 fit within the opening of the slit S. Next, a rectangular region including the black defect 36 and the like is irradiated with a laser beam through the slit S to form a rectangular white defect 35 as shown in FIG.

  Similarly, as shown in FIG. 6, the slit S is positioned at a portion corresponding to the B pixel 34 in the black defect 36, and the portion corresponding to the B pixel 34 in the black defect 36 and the applied correction ink 40 are applied. The width and length of the slit S are set so that the portion protruding from the black matrix 31 is within the opening of the slit S. Next, a rectangular region including the black defect 36 and the like is irradiated with a laser beam through the slit S to form a rectangular white defect 35 as shown in FIG.

  Next, as shown in FIG. 8, the correction ink 41 for the G pixel 33 is applied to the white defect 35 in the G pixel 33 using the application needle 21, and the white defect 35 in the B pixel 34 is applied to the B defect 34. The correction ink 42 is applied. When the white defect 35 is large, the correction ink 41 or 42 may be applied to a plurality of points (two points in the figure) by moving the position of the application needle 21. Next, when the correction inks 41 and 42 are cured by irradiating ultraviolet rays, the correction of the black defect 36 is completed as shown in FIG.

  In this embodiment, ultraviolet curable inks are used as the correction inks 40 to 42, but thermosetting inks may be used as the correction inks 40 to 42. When thermosetting correction inks 40 to 42 are used, halogen lamp light may be irradiated instead of ultraviolet rays.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a figure showing the whole defect repairing device composition by one embodiment of this invention. It is a figure which shows the structure of the application | coating unit shown in FIG. It is a figure which shows one process of correcting a black defect using the defect correction apparatus shown in FIG. 1 and FIG. FIG. 4 is a diagram showing a step subsequent to the step shown in FIG. 3. FIG. 5 is a diagram showing a step subsequent to the step shown in FIG. 4. FIG. 6 is a diagram showing a step subsequent to the step shown in FIG. 5. FIG. 7 is a diagram showing a step subsequent to the step shown in FIG. 6. FIG. 8 is a diagram showing a step subsequent to the step shown in FIG. 7. It is a figure which shows the state which correction | amendment of the black defect shown in FIG. 3 was complete | finished. It is a figure which shows the defect which generate | occur | produces in the color filter of LCD. It is a figure which shows the black defect which generate | occur | produced over several pixels. It is a figure which shows one process of correcting the black defect shown in FIG. FIG. 13 is a diagram showing a step subsequent to the step shown in FIG. 12. FIG. 14 is a diagram showing a step subsequent to the step shown in FIG. 13. FIG. 15 is a diagram showing a step subsequent to the step shown in FIG. 14. It is a figure which shows the state which correction of the black defect shown in FIG. 11 was complete | finished.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Observation optical system, 2 CCD camera, 3 Monitor, 4 Laser irradiation apparatus, 5 Slit mechanism, 6 Coating unit, 7 Curing light source, 8 Chuck part, 9 XY stage, 10 Z stage, 11 Image processing part, 12 For control Computer, 13 Host computer, 21 Application needle, 22 Actuator, 23 Application pallet, 24 Motor, 25 Ink tank, 26 Cleaning unit, 27 Drying unit, 28 Notch, 31 Black matrix, 32 R pixel, 33 G pixel, 34 B Pixel, 35 White defect, 36 Black defect, 37 Foreign object defect, 38 Transparent substrate, 40-42 Correction ink.

Claims (6)

In a color filter including a black matrix formed in a lattice pattern on a transparent substrate and a colored layer formed in each region surrounded by the black matrix, defects generated in at least two adjacent colored layers are removed. A defect correction method for correcting,
After irradiating a laser beam to remove a portion of the defect corresponding to the black matrix, the removed portion is filled with the first correction ink for the black matrix and cured,
Defect correction characterized by removing a portion corresponding to the colored layer of the defect by irradiating a laser beam, filling the removed portion with a second correction ink for the colored layer and curing it Method.   The defect correction method according to claim 1, wherein the first and second correction inks are irradiated with ultraviolet rays to be cured.   The defect correction method according to claim 1, wherein the first and second correction inks are cured by irradiation with a halogen lamp light.   The defect correction method according to claim 1, wherein a YAG laser beam is used as the laser beam.   5. The defect correction method according to claim 4, wherein a second harmonic or a third harmonic of a YAG laser is used as the YAG laser light. In a color filter including a black matrix formed in a lattice pattern on a transparent substrate and a colored layer formed in each region surrounded by the black matrix, defects generated in at least two adjacent colored layers are removed. A defect correcting device for correcting,
Laser irradiation means for irradiating a laser beam to remove a desired portion of the defect;
Filling means for selectively filling the first correction ink for the black matrix or the second correction ink for the colored layer into the portion removed by the laser irradiation means;
Curing means for curing the first and second correction inks filled by the filling means,
After irradiating a laser beam to remove a portion of the defect corresponding to the black matrix, the removed portion is filled with the first correction ink and cured,
A defect correcting apparatus, wherein a portion corresponding to the colored layer in the defect is removed by irradiating a laser beam, and the removed correction portion is filled with the second correction ink and cured.

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