TWI671519B - Non-contact repair method for polyimine film defects - Google Patents

Abstract

This creation is a non-contact repair method for polyimide film defects, which is performed using a polyimide film repair device. The non-contact repair method for polyimide film defects is based on image inspection. Detect and transmit the 3D position data of the polyimide film defect and the size data of the panel substrate to the control device, and control the repair pin of the polyimide film repair device according to the defect size data and the 3D position data. The height distance between the needle tip and the polyimide film enables the needle tip of the repair needle to adhere the polyimide solution to the polyimide film without contacting the polyimide film. Defects, in order to achieve the effect of repairing polyimide film defects, can effectively avoid the problem of abrasion of the needle tip of the repair needle, thereby improving the accuracy of the polyimide film defect repairing operation.

Description

Non-contact repairing method for polyimide film defects

This creation is a non-contact repair method for polyimide film defects, especially a repair method for repairing polyimide film defects.

In the field of display panels, a panel substrate includes a glass substrate and a polyimide film (referred to as a PI film). The polyimide film is coated on the glass substrate, and when the panel is When the substrate is applied to a flexible organic light emitting diode (OLED) panel, a polyimide film is used as a base, and a processing or other process is performed on the polyimide mold. The related components (such as semiconductor material films, electrodes, dielectric films, etc.) are processed on the amine film; and when the panel substrate is applied to a liquid crystal panel (LCD), it will pass through the polyimide film Processing, thereby controlling the alignment direction and angle of the liquid crystal molecules.

Wherein, if the polyimide film is coated on the glass substrate and has defects such as uneven thickness or damage, it may easily affect subsequent processes and the quality of the panel product, so the polyimide must be performed. Film repair operation, and now in the repair operation of polyimide film, polyimide liquid is applied to the position of the polyimide film to be repaired through a polyimide film repair device To achieve the purpose of repairing polyimide film, the polyimide film repairing device can be arranged on an external plane displacement device. The polyimide film repairing device includes a support frame, a plurality of needle seats and a plurality of repairs. A plurality of spaced-apart receiving grooves are formed on the support frame. The plurality of needle seats are movably arranged on the support frame. The positions of the plurality of needle seats are respectively located above the plurality of grooves. Needle separately The plurality of needle seats are detachably arranged on the plurality of needle seats, and the needle tips of the plurality of repairing needles can respectively extend into the plurality of receiving grooves.

Before the polyimide film repairing device is used for repairing the polyimide film, a plurality of photoresist boxes filled with a polyimide solution can be placed in the respective tanks of the support frame. The polyimide film repairing device can be controlled by an external plane displacement device to move above the defect of the polyimide film, and then control the needle seat to move downward so that the tip of the repairing needle passes through the corresponding light. The blocking box does not reach the defect of the polyimide film. At this time, the polyimide solution in the photoresist box will be brought to the defect of the polyimide film by the repair pin to repair the polyimide film.效果 Effect of imine film defect.

However, in the aforementioned repair operation, when the tip of the repair needle contacts the defect of the polyimide film, a small amount of abrasion will be generated. When the repair operation is performed for a long time and multiple times, the tip of the repair needle It is easy to produce deformation or increase the end area under long-term wear. Therefore, when the polyimide film is repaired for a long time or multiple times, the area coated with the polyimide solution will vary with the wear of the needle tip. Gradually increase, which affects the accuracy of repair operations.

The main purpose of this creation is to provide a non-contact repair method for polyimide film defects, in order to improve the problem that the repair of the polyimide film has abrasion of the repair pins and affects the accuracy of the repair operation. .

In order to achieve the purpose of the previous disclosure, the non-contact repair method for polyimide film defects of this creation is performed using a polyimide film repair device, a plane displacement device, and a control device. The polyimide film The repairing device respectively puts a photoresist box filled with polyfluorene imine in its plurality of holding tanks, and the needle tips of the repairing needles in the plurality of needle holders which are located above the holding tank and can be moved up and down respectively extend into the plurality of holding tanks. In the tank, the non-contact repair method for the polyimide film defect includes: placing a panel substrate to be repaired on a bearing platform; Detecting defects of the polyimide film of the panel substrate positioned on the supporting platform by using image recognition means, and transmitting the three-dimensional position data of the defects of the polyimide film and the size data of the defect range to the control device ; The control device calculates an adhesion height position data according to the size of the defect range, the adhesion height position data is based on the distance between the tip of the repair needle and the polyimide film and the polyimide solution The range attached to the polyimide film is inversely proportional, and then the control device calculates the needle distance data based on the attached height position data and the three-dimensional position data, and then is performed by the control device. The following steps: based on the three-dimensional position data, controlling the plane displacement device to drive the polyimide film repair device to move the repair pin of the polyimide film repair device to the polyimide film defect of the panel substrate Above the position; and controlling the needle base of the polyimide film repair device to move downward according to the lower needle distance data, so that the needle tip of the repair needle on the needle base penetrates the corresponding one The blocking box is moved to a predetermined position above the position of the polyimide film defect, and the distance between the needle tip and the polyimide film conforms to the position data of the adhesion height, so that the polyimide film repair device The polyimide solution in the photoresist box adheres to the defect position of the polyimide film along the needle tip, and repairs the defects of the polyimide film.

The non-contact repair method of polyimide film defects is mainly based on the distance between the tip of the repair needle and the polyimide film, and the range of the polyimide solution adhering to the polyimide film is inversely proportional. By detecting the three-dimensional position data of the polyimide film defect and the size data of the defect range by means of image recognition, the control device can calculate the position of the attached height that conforms to the size of the defect range according to the size data of the defect range. Data, and further calculate the lower needle distance data using the adhesion height position data and the three-dimensional position data of the polyimide film defect, so that the control device can accurately control the polyimide film repair device, so that The tip of the repair needle of the polyimide film repair device can be moved A predetermined position above the defect position allows the polyimide solution to adhere to the defect position of the polyimide film along the needle tip.

By controlling the height distance between the repair needle tip of the polyimide film repair device and the polyimide film, the needle tip of the repair needle can contact the polyimide film without contacting the polyimide film. The polyimide solution is adhered to the defects of the polyimide film to achieve the effect of repairing the defects of the polyimide film, which can effectively avoid the problem of abrasion of the needle tip of the repair needle, thereby improving the polyimide film. Accuracy of defect repair operations.

10‧‧‧Polyimide film repair device

11‧‧‧ support

12‧‧‧ Needle Block

13‧‧‧ repair needle

131‧‧‧ Needle tip

14‧‧‧ tank

15‧‧‧Photoresistance Box

151‧‧‧Polyimide

20‧‧‧ Panel substrate

21‧‧‧ glass substrate

22‧‧‧Polyimide film

23‧‧‧ Defect

30‧‧‧bearing platform

Fig. 1: Schematic diagram of a polyimide film repairing device for a non-contact repair method for creating a polyimide film defect.

Fig. 2: Schematic diagram of needle action under the non-contact repair method for polyimide film defects of this creation (1).

Fig. 3: Schematic diagram of needle action under the non-contact repair method of polyimide film defects for this creation (2).

Figure 4: Schematic diagram of needle action under the non-contact repair method for polyimide film defects (C).

Please refer to FIG. 1 and FIG. 2. The non-contact repairing method of the polyimide film defect of the present invention is performed by using a polyimide film repair device 10, wherein the polyimide film repair device 10 is used for setting On an external plane displacement device (not shown), and located above a loading platform 30, the polyimide film repair device 10 includes a support frame 11, a plurality of needle seats 12, and a plurality of repair needles 13, the support Shelf 11 A plurality of spaced-apart receptacles 14 are formed thereon, and the plurality of needle receptacles 12 are movably disposed on the support frame 11. The positions of the plurality of needle receptacles 12 are respectively located above the plurality of receptacles 14. Needles 13 are detachably arranged on the plurality of needle seats 12, and the needle tips 131 of the plurality of repair pins 13 can be respectively extended into the plurality of receiving grooves 14, the receiving grooves 14 of the polyimide film repairing device 10. A photoresist box 15 filled with a polyfluorene solution 151 can be placed in each of them.

Please refer to FIG. 2, when performing the polyimide film 22 repair operation, an operator can place one of the panel substrates 20 to be repaired on the supporting platform 30, and the panel substrate 20 includes a glass substrate 21 and a polyimide film 22 coated on the surface of the glass substrate 21, and then detect the defects 23 of the polyimide film 22 of the panel substrate 20 by means of image recognition, and apply the polyimide film The three-dimensional position data of the defect 22 and the size data of the defect range are transmitted to a control device (not shown).

The control device calculates a sticking height position data according to the defect range size data, and then calculates a needle distance data based on the sticking height position data and the three-dimensional position data, wherein the sticking height position data It is based on the characteristic that the distance between the tip 131 of the repair needle 13 and the polyimide film 22 is inversely proportional to the range in which the polyimide solution 151 adheres to the polyimide film 22, and by the defect range The size data calculates the optimal distance parameter between the tip 131 of the repair needle 13 and the polyimide film 22 that matches the size of the defect 23, and the lower needle distance data is based on the three-dimensional position data and the The parameter of the distance that the needle base 12 calculated by the attached height position data drives the needle tip 131 of the repair needle 13 to move down is described.

Next, please refer to FIG. 2. The control device will control a planar displacement device to drive the polyimide film repair device 10 according to the three-dimensional position data, so that the repair needle 13 of the polyimide film repair device 10 moves. To the position of the defect 23 of the panel substrate 20.

Please refer to FIG. 2 to FIG. 4, and then control the needle base 12 of the polyimide membrane repair device 10 to move downward according to the lower needle distance data, so that the needle tip 131 of the repair needle 13 on the needle base 12 passes through. Penetrate the corresponding photoresist box 15 and move to a predetermined position above the position 23 of the polyimide film 22 defect, so that the needle The distance between the tip 131 and the polyimide film 22 conforms to the position data of the adhesion height, so that the polyimide solution 151 in the photoresist box 15 of the polyimide film repair device 10 can follow the The needle tip 131 is attached to the position of the defect 23 of the polyimide film 22 to repair the defect 23 of the polyimide film 22.

To sum up, the non-contact repair method for the polyimide film defect of this creation is mainly by controlling the height between the needle 13 of the repair pin 13 and the polyimide film 22 of the polyimide film repair device 10 The distance method enables the needle tip 131 of the repair needle 13 to attach the polyimide solution 151 to the defect 23 of the polyimide film 22 without contacting the polyimide film 22, In order to achieve the effect of repairing the defect 23 of the polyimide film 22, the problem of wear of the needle tip 131 of the repair needle 13 can be effectively avoided, and the accuracy of the repair operation of the defect 23 of the polyimide film 22 can be effectively improved.

Claims (1)

A non-contact repair method for polyimide film defects, which is performed using a polyimide film repair device, a plane displacement device and a control device. The polyimide film repair device is in a plurality of tanks. Photoresist boxes filled with polyfluorene imine are respectively placed therein, and the tips of the repair pins in the plurality of needle holders which are located above the holding groove and can move up and down are respectively extended into the plurality of holding grooves, and the polysilicon A non-contact repair method for an imine film defect includes: placing a panel substrate to be repaired on a supporting platform; and using image recognition means to detect a polysilicon of the panel substrate positioned on the supporting platform. The amine film defect, and transmits the three-dimensional position data of the defect of the polyimide film and the size data of the defect range to the control device; the control device calculates an attached height position data according to the size data of the defect range, The position data of the adhesion height is obtained based on an inverse relationship between the distance between the tip of the repair needle and the polyimide film and the range in which the polyimide solution adheres to the polyimide film; Control device The attached height position data and the three-dimensional position data are used to calculate the needle distance data, and then the control device performs the following steps: according to the three-dimensional position data, controlling the plane displacement device to drive the polyimide film repair device Moving the repair pin of the polyimide film repair device above the position of the polyimide film defect on the panel substrate; and controlling the needle base of the polyimide film repair device according to the lower needle distance data Move down to make the needle tip of the repair pin on the needle base penetrate the corresponding photoresist box and move to a predetermined position above the polyimide film defect position, and the needle tip and the polyimide film The distance between them is in accordance with the position data of the adhesion height, so that the polyimide solution in the photoresist box of the polyimide film repair device adheres to the defect position of the polyimide film along the needle tip. To repair the defects of the polyfluoreneimide film.