KR101067373B1 - Polishing device for flat panel display and driving method thereof and repair system having the same - Google Patents

Abstract

Disclosed are a polishing apparatus for a flat panel display panel, a driving method thereof, and a repair system having the same. The polishing apparatus for a flat panel display panel according to the present invention includes a repair table 100 having a stage 500 on which the flat panel display panel 600 is mounted; An X-axis moving unit 210 positioned on the repair table 100; A Y-axis moving unit 220 positioned on the X-axis moving unit 210; An image measuring unit 400 positioned on the Y-axis moving unit 220 and detecting protrusions formed on the flat panel display panel 600; And a polishing unit 300 positioned on the Y-axis moving unit 220 and having polishing means 340 for rotating and polishing the protrusions.

Therefore, the alignment accuracy of the polishing apparatus and the projection state during the polishing process can be confirmed by a three-dimensional image, thereby achieving a good polishing degree while shortening the processing time.

Flat Panel Display, Projection, Repair, Grinder, Defective Pixel, Polishing

Description

Polishing device for flat panel display and driving method etc. and repair system having the same}

The present invention relates to a polishing apparatus for a flat panel display panel, a driving method thereof, and a repair system including the same. The present invention relates to a repair system that can repair a defective driving pixel while including the polishing apparatus.

Recently, as the demand for displays such as mobile phones, notebook computers, PDAs (Personal Digital Assistants) and large TVs increases, the development of the thin and light flat panel display field is progressing.

Such a flat panel display includes a liquid crystal display (LCD), an organic light emitting diode display (OLED), and the like, and a core of the flat panel display is arranged in a matrix form between transparent substrates. Pixels are deposited in a thin film form to form a flat panel display panel. In this case, the pixel is driven by an electrical signal applied from a plurality of data lines and gate lines, which are electric wirings.

However, in the manufacturing process for forming the thin film, there are cases where protrusion defects occur due to non-uniformity of the thin film and inflow of foreign matters, and such protrusion defects cause height deviations between the substrates, especially large area panels. In this case, the transmittance of light may be disturbed and electrical short or disconnection may be caused.

In addition, when a part of the wiring is disconnected among the plurality of pixels, the pixel may be electrically turned off, resulting in a driving failure pixel that is not driven.

First, in order to repair the protrusion defects, the polishing process of removing the protrusion by a predetermined height is conventionally performed. However, in the case of the polishing apparatus according to the related art, the alignment state of the projection and the polishing apparatus cannot be known, and the state of the projection cannot be seen even during the polishing process. Therefore, after measuring the height of the projections with a separate measuring instrument, the process of grinding the projections to a certain depth, and again measuring the height of the projections with a measuring instrument had to be repeated. As a result, the polishing accuracy is lowered and there is a problem that the process time increases due to the repeated process.

Next, in order to repair the defective pixel, a repair process is performed by detecting defective pixels using a probe and then connecting a wire disconnected by depositing a conductive material. However, the method of using the probe includes a flat panel display panel. There is a problem that a secondary failure may occur due to interference by direct contact.

In addition, the polishing process and the repair process of the defective pixel have been divided in each separate device, there is a problem that the process time and equipment cost increases.

Accordingly, an object of the present invention is to solve the above problems of the prior art, and an object of the present invention is to provide a polishing apparatus and a driving method thereof capable of confirming the alignment accuracy of the polishing apparatus and the polishing state of the projection in a three-dimensional image.

Another object of the present invention is to provide a polishing apparatus for a flat panel display panel, a method of driving the same, and a repair system having the same, which allows the polishing process and the repairing operation of the defective pixel to be performed in one apparatus.

The object of the present invention is a repair table having a stage on which a flat panel display panel is mounted; An X-axis moving unit positioned on the repair table; A Y-axis moving unit positioned on the X-axis moving unit; An image measuring unit positioned on the Y-axis moving unit and detecting protrusions formed on the flat panel display panel; And a polishing unit positioned on the Y-axis moving unit and having polishing means for rotating and polishing the projections.

In addition, (a) the image measuring unit to generate the image information of the flat panel display panel; (b) analyzing the image information to detect protrusions formed on the flat panel display panel; (c) checking with the image measuring unit whether the grinding means is positioned on the protrusion; And (d) checking the state of the protrusions with the image measuring unit while polishing the protrusions.

In addition, a repair table on which the stage on which the flat panel display panel is mounted is located; An X-axis moving unit positioned on the repair table; A Y-axis moving unit positioned on the X-axis moving unit; A chemical vapor deposition unit positioned in the Y-axis moving unit and performing repair on a defective pixel and a test pad of the flat panel display panel; An image measuring unit coupled to the chemical vapor deposition unit and detecting protrusions formed on the flat panel display panel; And a polishing unit coupled to the chemical vapor deposition unit and having polishing means for rotating and polishing the protrusions.

According to the present invention, the alignment accuracy of the polishing apparatus and the projection state during the polishing process can be confirmed in a three-dimensional image, so that the projection defect of the flat panel display panel can be detected in a non-contact manner, and the polishing time can be obtained while reducing the processing time. .

In addition, according to the present invention, the polishing process and the repair process of the defective driving pixel can be performed in one apparatus, and thus, the effect of saving the process and equipment costs can be obtained.

Details of the above object, technical configuration and effects according to the present invention will be more clearly understood by the following detailed description with reference to the drawings showing preferred embodiments of the present invention.

1 is a perspective view of a polishing apparatus for a flat panel display panel according to the present invention.

2 is an enlarged view of the polishing part 300 of FIG. 1.

3A is a coupling diagram of the image measuring unit 400 of FIG. 1.

3B is a side view of the image measuring unit 400 of FIG. 1.

First, referring to FIG. 1, a flat panel display panel polishing apparatus according to the present invention includes a repair table 100, a table moving unit 200, a polishing unit 300, an image measuring unit 400, and a stage 500. It is comprised of.

Repair table 100, also known as a gantry (Gantry) is a metal frame structure that is firmly installed on the ground to prevent external vibration or impact. At this time, the repair table 100 forms an accurate horizontal line in order to proceed with a more reliable repair process.

Next, the table moving unit 200 is a moving means that can move the repair table 100 on the X-axis, Y-axis direction is composed of the X-axis moving unit 210 and the Y-axis moving unit 220. In more detail, a pair of rails 110 are installed facing each other on the upper long side of the repair table 100, and the X-axis moving part 210 formed perpendicular to the rails 110 is formed on the rails 110. Combined. Therefore, the X-axis moving unit 210 can easily move on the rail 110 in the X-axis direction.

In addition, the Y-axis moving unit 210 having a smaller size than the X-axis moving unit 210 is coupled to the X-axis moving unit 210 to move on the X-axis moving unit 210 in the Y-axis direction.

As a result, the Y-axis moving unit 220 can be easily moved to any X, Y coordinate on the repair table 100. At this time, the X-axis moving unit 210 and the Y-axis moving unit 220 is operated by the driving force of the motor not shown.

Next, referring to FIG. 2, the polishing unit 300 installed on the Y-axis moving unit 220 includes a first moving unit 311 including first moving means 311 moving in the Y-axis by the first motor 312. The second moving unit 320 including the moving unit 310, the second moving unit 321 moving in the Z axis by the second motor 322, and moving in the X axis by the third motor 332. And a third moving part 330 having a third moving means 331 and a grinding means 340.

In more detail, the first moving unit 310 is provided with a first moving unit 311 capable of moving in the Y-axis direction and a first motor 312 at one end of the first moving unit 311. The first moving unit 311 may convert the rotational motion transmitted from the first motor 312 into a linear motion and move in the Y-axis direction.

In addition, the second moving part 320 coupled to the first moving part 310 in a vertical direction has a second moving means 321 and a second moving means 321 which are movable in the Z-axis direction. The motor 322 is provided. The second movement means 321 may move in the Z-axis direction by converting the rotational movement transmitted from the second motor 322 into a linear movement.

In addition, the third moving part 330 coupled to the second moving part 320 in the vertical direction may include a third moving part 331 and a third moving part connected to the X moving direction in one direction of the third moving part 331. The motor 332 is provided. The third moving unit 331 may move in the X-axis direction by converting the rotational movement transmitted from the third motor 332 into a linear movement.

In this case, the first, second, and third motors 312, 322, and 332 may use a known motor capable of controlling an angle without limitation, but more preferably, precisely and easily controlled by an applied pulse signal. Stepping motor can be used.

The first, second, and third moving means 311, 321, and 331 connected to the first, second, and third motors 312, 322, and 332, respectively, may include a ball screw or an LM guide. The same linear motion device can be used to convert the rotational motion of the motor into linear motion.

On the other hand, the grinding means 340 is coupled to the third moving unit 330 is rotated by a rotating device to polish the projections of the flat panel display panel 600. Such a grinding means 340 may use a variety of types, for example, any one of a wheel (wheel), blade (blade), shaft type (shaft) can be used.

At this time, the grinding means 340 is positioned to form a predetermined angle with the image measuring unit 400. Therefore, when the position of the polishing means 340 is controlled by the X, Y, and Z axes by using the first, second, and third moving parts 310, 320, and 330, any projections on the flat panel display panel 600 may be removed. It can be formed in place or polished precisely. In addition, if the angle of the polishing means 340 is controlled according to the material or various shapes of the projection, it is possible to obtain a more accurate polishing degree.

Next, the image measuring unit 400 is installed in the Y-axis moving unit 220. Referring to FIGS. 3A and 3B, the image measuring unit 400 analyzes an image to obtain a three-dimensional position value (X, Y, Z) in space. It may be an image measuring apparatus, and the position value is detected by performing image processing and image processing in a high resolution camera. Therefore, since the measurement is performed without contacting the flat panel 600 that is the actual object to be measured, the position of the projection defect can be detected without physically damaging the flat panel 600.

The image measuring unit 400 may move in the Z-axis direction by including an image measuring moving part 410 that may move in the Z-axis direction. In this case, the image measuring unit 400 may be easily combined with the image measuring moving unit 410 by one or a plurality of fixing bars 420.

Next, the stage 500 is fixed to the repair table 100 in a horizontal state as the flat panel display panel 600 is seated and aligned.

In the above detailed description, the flat panel display panel 600 has been described as one panel for convenience of description, but the flat panel panel 600 has a structure in which a plurality of unit panels are formed on a large-area mother board (8 in FIG. 1). Shown), which is cut into a unit panel in a subsequent cutting process and the dead region is removed. In addition, the flat panel display panel 600 may be a color filter substrate.

4 is a view showing the operation of the polishing apparatus for flat panel display panel according to the present invention.

Referring to FIG. 4, at this time, the grinding means 340 is rotated to form a constant angle (a) with the image measuring unit 400 to polish the projections of the flat panel display panel 600. The predetermined angle (a) is a process. It can be adjusted variously according to the conditions. Therefore, while the projections are polished by the polishing means 340, the projections can be measured by the image measuring unit 400, so that a good polishing degree can be obtained while improving alignment accuracy and shortening the processing time.

In addition, the projection defect can be easily confirmed as a three-dimensional image without direct contact with the flat panel display panel 600.

Such a polishing apparatus for a flat panel display panel according to the present invention will become more apparent from the following detailed description with reference to FIG.

5 is a driving method of the polishing apparatus for flat panel display panel of the present invention.

Referring to FIG. 5, first, the image measuring unit 400 generates the image information of the flat panel display panel 600 (S10). Next, the step of analyzing the image to detect the projection formed on the flat panel 600 (S20). Subsequently, the step of checking with the image measuring unit 400 whether the grinding means 340 is positioned on the protrusion is performed (S30). Subsequently, the step of checking the state of the protrusion is performed by the image measuring unit 400 while polishing the protrusion (S40).

The grinding means 340 forms a predetermined angle with the image measuring unit 400 and polishes the protrusions, and the exact position and the state of the protrusions are confirmed as a 3D image through the image measuring unit 400. Therefore, when the polishing apparatus for the flat panel display panel is driven in this order, the alignment state of the projections and the polishing means 340 can be confirmed by the image, and the projection state can be confirmed even during the polishing process of the projections, so that a better polishing degree can be obtained. In addition, by using the image information, the projection defect of the flat panel display panel 600 can be detected in a non-contact manner.

6 is a perspective view of a repair system including a polishing apparatus for a flat panel display panel according to the present invention.

FIG. 7 is an enlarged view of the polishing unit 300 of FIG. 6.

8 is a coupling diagram of the image measuring unit 400 of FIG. 6.

Referring to FIG. 6, a repair system including a polishing apparatus for a flat panel display panel according to the present invention includes a repair table 100, a table moving unit 200, a polishing unit 300, an image measuring unit 400, and a stage ( 500) and the chemical vapor deposition unit 700 is configured.

In the repair system, the chemical vapor deposition unit 700 is added to the polishing apparatus for a flat panel display panel, and the polishing unit 300 and the image measuring unit 400 are coupled to the chemical vapor deposition unit 700. The configuration is the same as that for the flat panel display polishing apparatus described with reference to FIG. 1, and description thereof will be omitted.

The chemical vapor deposition unit 700 is installed on the Y-axis moving unit 220, and searches for a defective pixel of the flat panel display panel 600, deposits a conductive material, and connects wires to perform a repair process. In this case, in order to detect a driving failure pixel, the chemical vapor deposition unit 700 includes a probe unit (not shown) that can contact the data line and the gate line of the flat panel display panel 600 and an optical unit that can observe the detection process ( Not shown). However, the driving unit is not limited to the method of detecting the driving defective pixel using the probe unit and the optical unit, and the driving defective pixel may be detected using the image measuring unit 400.

Although not shown in the drawing, the chemical vapor deposition unit 700 is provided with a chamber for providing a chemical vapor deposition space for a repair operation on a defective pixel of the flat panel display panel 600, Including a laser unit for irradiating a laser to the space and an optical unit for adjusting the optical path and the focus of the laser irradiated from the laser unit, located in the dead pixel of the flat panel display panel 600 and the dead region of the flat panel display panel 600 The repair operation may be performed on the test pad.

Therefore, according to the repair system of the present invention, it is possible to detect a drive failure pixel of a flat panel display panel in a non-contact manner, and to carry out a polishing process and a repair process of a drive failure pixel in one device, thereby saving process and equipment costs. You can also get the effect.

Next, referring to FIGS. 7 and 8, the polishing unit 300 and the image measuring unit 400 are coupled to the chemical vapor deposition unit 700 and installed on the Y-axis moving unit 220. In order to easily combine with the deposition unit 700, the polishing unit 300 is provided with a first fixing bracket 350, the image measuring unit 400 is further provided with a second fixing bracket 430 Is the same as the polishing apparatus for flat panel display panels.

Although the present invention has been shown and described with reference to preferred embodiments as described above, it is not limited to the above embodiments and various modifications made by those skilled in the art without departing from the spirit of the present invention. Modifications and variations are possible. Such modifications and variations are intended to fall within the scope of the invention and the appended claims.

1 is a perspective view of a polishing apparatus for a flat panel display panel according to the present invention.

2 is an enlarged view of the polishing part 300 of FIG. 1.

3A is a coupling diagram of the image measuring unit 400 of FIG. 1.

3B is a side view of the image measuring unit 400 of FIG. 1.

4 is a view showing the operation of the polishing apparatus for flat panel display panel according to the present invention.

5 is a driving method of the polishing apparatus for flat panel display panel of the present invention.

6 is a perspective view of a repair system including a polishing apparatus for a flat panel display panel according to the present invention.

FIG. 7 is an enlarged view of the polishing unit 300 of FIG. 6.

8 is a coupling diagram of the image measuring unit 400 of FIG. 6.

<Explanation of symbols for the main parts of the drawings>

100: repair table (gantry)

200: table moving part

210: X axis moving part

220: Y axis moving part

300: polishing part

310: first moving part

311: first means of transportation

312: first motor

320: second moving part

321: second means of transportation

322: second motor

330: third moving part

331: third means of transportation

332: third motor

340: grinding means

400: image measuring unit

500: stage

600: flat panel display panel

700: chemical vapor deposition unit

Claims (18)

delete delete delete delete delete delete delete delete delete delete delete delete A repair table having a stage on which a flat panel display panel is mounted; An X-axis moving unit positioned on the repair table; A Y-axis moving unit positioned on the X-axis moving unit; A chemical vapor deposition unit positioned in the Y-axis moving unit and performing repair on a defective pixel and a test pad of the flat panel display panel; An image measuring unit coupled to the chemical vapor deposition unit and detecting protrusions formed on the flat panel display panel; And And a polishing unit coupled to the chemical vapor deposition unit and having polishing means for rotating and polishing the protrusions. The method of claim 13, The polishing means is a repair system, characterized in that any one of a wheel (wheel), blade (blade), shaft type. delete The method of claim 13, The polishing unit A first moving part including first moving means moving in the Y-axis direction by the first motor; A second moving part coupled to the first moving part in a vertical direction and having second moving means moved in a Z-axis direction by a second motor; And And a third moving unit coupled to the second moving unit in a vertical direction and having a third moving unit moving in the X-axis direction by a third motor. The method of claim 13, The image measuring unit further includes an image measuring moving unit moving in the Z-axis direction. The method of claim 13, The image measuring unit is a repair system, characterized in that the three-dimensional image measuring apparatus.

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