CN205785105U - A kind of detector detecting plane - Google Patents

A kind of detector detecting plane Download PDF

Info

Publication number
CN205785105U
CN205785105U CN201620535865.2U CN201620535865U CN205785105U CN 205785105 U CN205785105 U CN 205785105U CN 201620535865 U CN201620535865 U CN 201620535865U CN 205785105 U CN205785105 U CN 205785105U
Authority
CN
China
Prior art keywords
drive mechanism
laser sensor
rail
detector
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201620535865.2U
Other languages
Chinese (zh)
Inventor
马宏权
敖荟兰
周江秀
徐地华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangdong Zhengye Technology Co Ltd
Original Assignee
Guangdong Zhengye Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangdong Zhengye Technology Co Ltd filed Critical Guangdong Zhengye Technology Co Ltd
Priority to CN201620535865.2U priority Critical patent/CN205785105U/en
Application granted granted Critical
Publication of CN205785105U publication Critical patent/CN205785105U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model discloses a kind of detector detecting plane, this detector includes: base, crossbeam, laser sensor, drive mechanism and power set, described drive mechanism includes that X is to drive mechanism and Y-direction drive mechanism, described Y-direction drive mechanism connects described laser sensor, described power set connect described X to drive mechanism, by driving described X to work to drive mechanism, described crossbeam is driven to move along X-direction, described power set are also connected with described Y-direction drive mechanism, by driving described Y-direction drive mechanism to work, described laser sensor is driven to move along Y direction.This utility model uses pointwise detection mode, detects each point of measured panel one by one, and laser sensor can be treated test point coordinate be accurately positioned for the Z axis coordinate of acquisition point, this detector, adapts to the panel detection of various sizes.

Description

A kind of detector detecting plane
Technical field
This utility model relates to panel detection technical field, particularly relates to a kind of detector detecting plane.
Background technology
At liquid crystal panel production field, the warpage of liquid crystal panel detects multiplex manual mode, utilizes standard feeler gauge to detect, only Can measure the warpage of the surrounding of liquid crystal panel, the anthropic factor simultaneously detected is big, and measurement error is big, and efficiency is low, it is impossible to the most anti- Reflect the warpage situation of entire area.In recent years, the angularity occurring utilizing optical grating method to measure liquid crystal panel is started, although The complete plane of liquid crystal panel can be measured, but warpage point coordinates cannot be accurately positioned, be unfavorable for that application vendor is done Going out and position improvement accurately, meanwhile, Grating examinations detects for big specification panel and glass substrate and has some limitations, no Adapt to large-sized detection.
Utility model content
The purpose of this utility model is to provide a kind of detector detecting plane, solves above technical problem.
For reaching this purpose, this utility model by the following technical solutions:
This utility model provides a kind of detector detecting plane, including: base, crossbeam, laser sensor, drive mechanism And power set;
The middle part of described base is provided with plane monitoring-network portion;The upper surface in described plane monitoring-network portion is smooth plane, is used for Place measured panel;
Described drive mechanism includes that X is to drive mechanism and Y-direction drive mechanism;
Described X is arranged at the end of described base to drive mechanism, and described X connects described crossbeam to drive mechanism;Described Y Being arranged on described crossbeam to drive mechanism, described Y-direction drive mechanism connects described laser sensor;
The described power set described X of connection, to drive mechanism, by driving described X to work to drive mechanism, drives described Crossbeam moves along X-direction;Described power set are also connected with described Y-direction drive mechanism, by driving described Y-direction drive mechanism work Make, drive described laser sensor to move along Y direction.
This utility model uses pointwise detection mode, by transmission mechanism control laser sensor along X-direction and Y-axis Direction moves, and detects each point of measured panel one by one, and the X-axis coordinate put and Y-axis coordinate can be according to transmissions The displacement acquisition that mechanism is current, wherein, laser sensor is for the Z axis coordinate of acquisition point, and Z axis coordinate i.e. judges panel angularity Parameter, and after learning the coordinate of each point, owing to the base plate of detector is the most fixed, therefore be easy to according to point The anti-position released a little of coordinate, is accurately positioned warpage point coordinates, and this detector is owing to using pointwise The mode of detection, therefore do not have size detection to limit, adapt to the angularity detection of various sizes.
Preferably, described X includes X direction guiding rail and X direction guiding rail connector to drive mechanism;Described Y-direction drive mechanism includes Y Direction guiding rail and Y-direction guide-rail coupling member;
Described X direction guiding rail is screw rod, and described X direction guiding rail connector is provided with the first spiral shell mated with described X direction guiding rail Female;Described first nut and described X direction guiding rail are threaded;Described X direction guiding rail connector connects described crossbeam;
Described Y-direction guide rail is screw rod, described Y-direction guide-rail coupling member is provided with and the second spiral shell of described Y-direction guide rail Female;Described second nut and described Y-direction guide rail are threaded;Described Y-direction guide-rail coupling member connects described laser sensor;
Described power set connect described X direction guiding rail, to drive described X direction guiding rail to rotate, drive described first nut edge X-direction to move;Described power set are also connected with described Y-direction guide rail, to drive described Y-direction guide rail to rotate, drive described Two nuts move along Y direction.
Preferably, described X also includes that to drive mechanism X is to slide block;Described Y-direction drive mechanism also includes Y-direction slide block;
Described X is provided with the first chute on slide block;It is additionally provided with and described first chute on described X direction guiding rail connector First chute connecting portion of coupling;
It is provided with the second chute on described Y-direction slide block;It is additionally provided with on described Y-direction guide-rail coupling member and described second chute Second chute connecting portion of coupling.
Use slide block be to ensure that laser sensor along X-direction move time steadily or stability.
Preferably, described detector also includes Z-direction elevating mechanism;Described laser sensor is fixed on described Z-direction elevator On structure;Described Z-direction elevating mechanism can drive described laser sensor to move along Z-direction;
Described Z-direction elevating mechanism is fixing with described Y-direction guide-rail coupling member to be connected.
Described Z-direction elevating mechanism can use motor or cylinder.
Preferably, described Z-direction elevating mechanism being additionally provided with optical image parts, described optical image parts electrically connect institute State laser sensor, described X to drive mechanism and described Y-direction drive mechanism, work as obtaining described laser sensor in real time The coordinate of the point of the measured panel of front position;Coordinate generation one 3D being additionally operable to the point according to the measured panel got regards Figure.
Wherein, the coordinate of point includes X-axis coordinate a little, Y-axis coordinate and Z axis coordinate.
Preferably, described base uses grouan material to make.
Preferably, described drive mechanism uses ball leading screw driving structure.
Crossbeam preferably employs grouan material and makes, because the flatness error of granite surface plate is only 0.01 millimeter, adds Upper high-precision guide rail and ball leading screw driving, it is ensured that systematic measurement error is less than 0.025 millimeter.
Preferably, described measured panel is liquid crystal panel or face glass.
The beneficial effects of the utility model: this utility model uses pointwise detection mode, to each point of measured panel by One detects, and laser sensor is for the Z axis coordinate of acquisition point, and this detector can be treated test point coordinate and carry out accurately determining Position, adapts to the panel detection of various sizes.
Accompanying drawing explanation
In order to be illustrated more clearly that this utility model embodiment or technical scheme of the prior art, below will be to embodiment Or the required accompanying drawing used is briefly described in description of the prior art, it should be apparent that, the accompanying drawing in describing below is only It is embodiments more of the present utility model, for those of ordinary skill in the art, before not paying creative work Put, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
The three-dimensional structure diagram of the detector of the detection plane that Fig. 1 provides for this utility model embodiment.
The detection method flow chart of the detection plane that Fig. 2 provides for this utility model embodiment.
In figure:
100, base;101, plane monitoring-network portion;110, crossbeam;120, column;131, X direction guiding rail;132, X to slide block 133, X direction guiding rail connector;141, Y-direction guide rail;142, Y-direction slide block;143, Y-direction guide-rail coupling member;150, Z-direction elevating mechanism;160、 Laser sensor;170, optical image parts;200, measured panel.
Detailed description of the invention
For making utility model purpose of the present utility model, feature, the advantage can be the most obvious and understandable, below will knot Close the accompanying drawing in this utility model embodiment, the technical scheme in this utility model embodiment be clearly and completely described, Obviously, the embodiments described below are only a part of embodiment of this utility model, and not all embodiment.Based on this reality By the embodiment in novel, those of ordinary skill in the art obtained under not making creative work premise all other Embodiment, broadly falls into the scope of this utility model protection.
Further illustrate the technical solution of the utility model below in conjunction with the accompanying drawings and by detailed description of the invention.
Refer to the three-dimensional structure diagram of the detector of the detection plane that Fig. 1, Fig. 1 provide for this utility model embodiment.Should Detector include base 100, crossbeam 110, for support two columns 120 of crossbeam 110, drive mechanism, Z-direction elevating mechanism 150, Laser sensor 160, optical image parts 170 and power set.
Wherein, base 100 is in "convex" shaped, and base 100 lobe is plane monitoring-network portion 101.Plane monitoring-network portion 101 is positioned at The middle part of base 100, its upper surface is smooth plane, is used for placing measured panel 200;In this utility model embodiment, treat Surveying panel 200 is liquid crystal panel or face glass.
Concrete, drive mechanism includes that X is to drive mechanism and Y-direction drive mechanism.In the present embodiment, drive mechanism uses rolling Ballscrew drive mechanism.
Wherein, the upper surface at the both ends being positioned at the base 100 of the both sides in plane monitoring-network portion 101 is provided with X to transmission Mechanism.X specifically includes X direction guiding rail 131, X to slide block 132 and X direction guiding rail connector 133 to drive mechanism.
More specifically, X direction guiding rail 131 is screw rod, and X direction guiding rail connector 133 includes the first nut, and X is used for slide block 132 Ensure crossbeam 110 along X-direction move time steadily or stability.
The one side of X direction guiding rail connector 133 and the fixing connection of column 120, column 120 and the fixing connection of crossbeam 110.Work When making, motor switches on power, and drives X direction guiding rail 131 to start to rotate, and X direction guiding rail 131 rotarily drives the first nut along X-axis side To movement, and then crossbeam 110 is driven to move along X-direction.
Y-direction drive mechanism is arranged at the uper side surface of crossbeam 110, and Y-direction drive mechanism specifically includes Y-direction guide rail 141, Y-direction Slide block 142 and Y-direction guide-rail coupling member 143.
More specifically, Y-direction guide rail 141 is screw rod, and Y-direction guide-rail coupling member 143 includes that the second nut, Y-direction slide block 142 are used for Ensure Z-direction elevating mechanism 150 along Y direction move time steadily or stability.
The one side of Y-direction guide-rail coupling member 143 and the fixing connection of Z-direction elevating mechanism 150, laser sensor 160 and light Image parts 170 are fixing with Z-direction elevating mechanism 150 to be connected.In the present embodiment, power set are motor.During work, power fills Put drive Y-direction guide rail 141 to start to rotate, and then drive Y-direction guide-rail coupling member 143 to move along Y direction, make laser sensor 160 move along Y direction.Wherein, Z-direction elevating mechanism 150 can drive laser sensor 160 to move along Z axis square shaft direction.
The detector of the present embodiment can control laser sensor 160 and move along X-direction, Y direction and Z-direction Dynamic.Realize the coordinate measurement of each point of the plane to measured panel 200 and store, drawing the angularity of measured panel 200, also The result detected can be fed back to computer or Correlation method for data processing equipment processes or analyzes, owing to using pointwise Detection, therefore can position for the position of each point, quickly find out the warpage point of correspondence, in the present embodiment, the seat of point Mark includes X-axis coordinate, Y-axis coordinate and Z axis coordinate a little.
Refer to the detection method flow chart of the detection plane that Fig. 2, Fig. 2 provide for this utility model embodiment.Concrete Detection method is as follows:
S301, determine Z axis origin.
The multiple points randomly drawing plane monitoring-network portion 101 detect, and determine Z axis origin.
S302, measured panel 200 is positioned in plane monitoring-network portion 101.
S303, control detector are started working, and start to scan each point of measured panel 200 one by one, and acquisition is treated Survey the coordinate of each point of panel 200, and store.
S304, obtain measured panel 200 each point coordinate after, by measured panel 200 each point coordinate send To computer or Correlation method for data processing equipment.
S305, the coordinate put according to each, generate 3D (3Dimensions, the three-dimensional) figure of measured panel 200.
3D figure is more convenient to be checked, by checking that 3D schemes, it is easy to just can find that the plane of measured panel 200 is the most smooth, And know height change and the wave chart picture of plane warping of measured panel 200 clearly.Its result is relative to traditional inspection The result that survey mode draws, the most accurate, and more directly perceived.
In description of the present utility model, it is to be understood that term " on ", D score, " X-direction ", " Y direction ", " Z Direction of principal axis " etc. instruction orientation or position relationship be based on orientation shown in the drawings or position relationship, be for only for ease of description This utility model and simplification describe rather than indicate or imply that the device of indication or element must have specific orientation, Yi Te Fixed azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.
The above, above example only in order to the technical solution of the utility model to be described, is not intended to limit;Although ginseng According to previous embodiment, this utility model is described in detail, it will be understood by those within the art that: it is still Technical scheme described in foregoing embodiments can be modified, or wherein portion of techniques feature is carried out equivalent replace Change;And these amendments or replacement, do not make the essence of appropriate technical solution depart from this utility model each embodiment technical scheme Spirit and scope.

Claims (8)

1. the detector detecting plane, it is characterised in that including: base, crossbeam, laser sensor, drive mechanism and Power set;
The middle part of described base is provided with plane monitoring-network portion;The upper surface in described plane monitoring-network portion is smooth plane, is used for placing Measured panel;
Described drive mechanism includes that X is to drive mechanism and Y-direction drive mechanism;
Described X is arranged at the end of described base to drive mechanism, and described X connects described crossbeam to drive mechanism;Described Y-direction passes Motivation structure is arranged on described crossbeam, and described Y-direction drive mechanism connects described laser sensor;
The described power set described X of connection, to drive mechanism, by driving described X to work to drive mechanism, drives described crossbeam Move along X-direction;Described power set are also connected with described Y-direction drive mechanism, by driving described Y-direction drive mechanism to work, Described laser sensor is driven to move along Y direction.
Detector the most according to claim 1, it is characterised in that described X includes X direction guiding rail and guide X to drive mechanism Rail connector;Described Y-direction drive mechanism includes Y-direction guide rail and Y-direction guide-rail coupling member;
Described X direction guiding rail is screw rod, and described X direction guiding rail connector is provided with the first nut mated with described X direction guiding rail;Institute State the first nut and described X direction guiding rail is threaded;Described X direction guiding rail connector connects described crossbeam;
Described Y-direction guide rail is screw rod, described Y-direction guide-rail coupling member is provided with and the second nut of described Y-direction guide rail;Institute State the second nut and described Y-direction guide rail is threaded;Described Y-direction guide-rail coupling member connects described laser sensor;
Described power set connect described X direction guiding rail, to drive described X direction guiding rail to rotate, drive described first nut along X-axis Direction is moved;Described power set are also connected with described Y-direction guide rail, to drive described Y-direction guide rail to rotate, drive described second nut Move along Y direction.
Detector the most according to claim 2, it is characterised in that described X also includes that to drive mechanism X is to slide block;Described Y Y-direction slide block is also included to drive mechanism;
Described X is provided with the first chute on slide block;It is additionally provided with on described X direction guiding rail connector and mates with described first chute The first chute connecting portion;
It is provided with the second chute on described Y-direction slide block;It is additionally provided with on described Y-direction guide-rail coupling member and mates with described second chute The second chute connecting portion.
Detector the most according to claim 2, it is characterised in that also include Z-direction elevating mechanism;Described laser sensor is solid On described Z-direction elevating mechanism;Described Z-direction elevating mechanism can drive described laser sensor to move along Z-direction;
Described Z-direction elevating mechanism is fixing with described Y-direction guide-rail coupling member to be connected.
Detector the most according to claim 4, it is characterised in that be additionally provided with optical image on described Z-direction elevating mechanism Parts, described optical image parts electrical connection described laser sensor, described X to drive mechanism and described Y-direction drive mechanism, Coordinate for the point of the measured panel of the described laser sensor present position of acquisition in real time;It is additionally operable to what basis got The Coordinate generation one 3D view of the point of measured panel;
Wherein, the coordinate of point includes X-axis coordinate a little, Y-axis coordinate and Z axis coordinate.
Detector the most according to claim 1, it is characterised in that described base uses grouan material to make.
Detector the most according to claim 1, it is characterised in that described drive mechanism uses ball leading screw driving structure.
Detector the most according to claim 1, it is characterised in that described measured panel is liquid crystal panel or face glass.
CN201620535865.2U 2016-06-03 2016-06-03 A kind of detector detecting plane Expired - Fee Related CN205785105U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620535865.2U CN205785105U (en) 2016-06-03 2016-06-03 A kind of detector detecting plane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201620535865.2U CN205785105U (en) 2016-06-03 2016-06-03 A kind of detector detecting plane

Publications (1)

Publication Number Publication Date
CN205785105U true CN205785105U (en) 2016-12-07

Family

ID=58133547

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201620535865.2U Expired - Fee Related CN205785105U (en) 2016-06-03 2016-06-03 A kind of detector detecting plane

Country Status (1)

Country Link
CN (1) CN205785105U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910553A (en) * 2016-06-03 2016-08-31 广东正业科技股份有限公司 Detector of detection plane and detection method thereof
CN107063975A (en) * 2017-03-27 2017-08-18 中国科学院广州生物医药与健康研究院 Method, device and the equipment of cell image collection
CN107990884A (en) * 2017-12-19 2018-05-04 淮阴工学院 It is a kind of uniformly to take a device and detection method for automobile engine cover detection
CN112525113A (en) * 2020-12-01 2021-03-19 顺诠达(重庆)电子有限公司 Semiconductor packaging testing device
CN113340224A (en) * 2021-06-08 2021-09-03 彩虹(合肥)液晶玻璃有限公司 Panel warpage deformation on-line measuring device based on vertical scanning

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105910553A (en) * 2016-06-03 2016-08-31 广东正业科技股份有限公司 Detector of detection plane and detection method thereof
CN107063975A (en) * 2017-03-27 2017-08-18 中国科学院广州生物医药与健康研究院 Method, device and the equipment of cell image collection
CN107990884A (en) * 2017-12-19 2018-05-04 淮阴工学院 It is a kind of uniformly to take a device and detection method for automobile engine cover detection
CN112525113A (en) * 2020-12-01 2021-03-19 顺诠达(重庆)电子有限公司 Semiconductor packaging testing device
CN113340224A (en) * 2021-06-08 2021-09-03 彩虹(合肥)液晶玻璃有限公司 Panel warpage deformation on-line measuring device based on vertical scanning
CN113340224B (en) * 2021-06-08 2023-01-03 彩虹(合肥)液晶玻璃有限公司 Panel warpage deformation on-line measuring device based on vertical scanning

Similar Documents

Publication Publication Date Title
CN205785105U (en) A kind of detector detecting plane
CN105910553A (en) Detector of detection plane and detection method thereof
CN203849177U (en) Non-contact detection equipment
CN204373601U (en) A kind of form and position tolerance pick-up unit for deadlight
CN201795778U (en) Measuring device for images of parts with deep holes
CN102589492B (en) A kind of large-scale curved flexible detection device
CN207263130U (en) A kind of one-touch 3D profile measurements equipment
CN103712555A (en) Automobile crossbeam assembly hole visual on-line measurement system and method thereof
KR20100023258A (en) Method and apparatus for inspecting of flat display panel
CN102749068B (en) Installation precision detection method for planar array antenna surface
CN103292720B (en) substrate deflection test method and system
CN103389052A (en) Vertical shape measuring device capable of compensating shaft system errors of wafer
CN106940178A (en) Silicon crystal workpiece flatness detecting device and silicon crystal workpiece measurement method of planeness
CN104515487A (en) Two-in-one full-automatic three-Z-axis measuring instrument
CN207248408U (en) High-precision intelligent withdrawal force testing system
CN104132607A (en) Welding deformation detection platform for agricultural machinery chassis frame
CN109341522A (en) The device and method of vibration mirror scanning type laser measurement three-dimensional coordinate
CN104048602A (en) Complete imaging vision measurement device
CN103884251B (en) The Laser Processing focal length measuring equipment of irregular workpiece
CN108594495A (en) A kind of full angle LCD macro -graph machines
CN201945522U (en) Testing device for bending strength of silicon wafer
CN219347642U (en) Visual detection device for target size and defects
CN208537856U (en) A kind of full angle LCD macro -graph machine
CN206695770U (en) A kind of Large Precast Members surface defects detection and indication device
CN207395703U (en) silicon crystal workpiece flatness detecting device

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161207

Termination date: 20210603