CN219347642U - Visual detection device for target size and defects - Google Patents
Visual detection device for target size and defects Download PDFInfo
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- CN219347642U CN219347642U CN202223417769.2U CN202223417769U CN219347642U CN 219347642 U CN219347642 U CN 219347642U CN 202223417769 U CN202223417769 U CN 202223417769U CN 219347642 U CN219347642 U CN 219347642U
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Abstract
The utility model discloses a visual detection device for the size and defects of a target, wherein a tabletop is horizontally arranged and supported by table legs at the bottom, a supporting table is arranged on the tabletop, one end of the supporting table is provided with an end plate which is vertically arranged upwards, a bracket for supporting the target to be detected is respectively arranged at the front part and the rear part of the supporting table, top beams are arranged above the supporting table, two side brackets are symmetrically arranged on two sides of the top beams, and measuring units which are obliquely aligned with the supporting table downwards and collect image information are arranged at the end parts of the two side brackets. The utility model can detect large-size products, simultaneously detect a plurality of detection requirements, improve the detection efficiency, has simple integral mechanical structure, can reduce the production cost, can carry out size measurement, gradient measurement, curvature measurement and defect detection on the products by the detection of the laser sensor, improves the detection precision, and reduces misjudgment and missed judgment during the detection.
Description
Technical Field
The utility model relates to the technical field of target size and defect detection in automatic production, in particular to a target size and defect visual detection device.
Background
The target is a sputtering source for forming various functional films on the substrate by sputtering under proper process conditions through magnetron sputtering or other types of coating systems. The positive charge ions impact the target material with compact atomic accumulation during sputtering, and atoms of the target material are scattered after impact and then deposited on the substrate, so that a film is finally formed. In order to judge whether the target product is qualified, the defects such as size measurement, gradient measurement, bending degree, flatness and the like of the product are detected. In the existing production, the size measurement and detection defects are generally carried out on the product manually, so that the product has the advantages of consuming certain manpower and material resources, being low in efficiency, being easy to be influenced by subjective factors such as testers and the like, being easy to cause misjudgment or missed judgment, and being convenient for the existing common detection device as follows:
for example, application number 202110931371.1, patent name "a sputtering target detection mechanism" discloses a sputtering target detection mechanism, including a material conveying device and a detection device; the detection device comprises a manipulator, a turnover assembly, a lifting rotating assembly and a shooting assembly, wherein the manipulator is arranged above the lifting rotating assembly and can move horizontally and longitudinally above the lifting rotating assembly, the turnover assembly is arranged at intervals with the lifting rotating assembly, the shooting assembly is arranged at intervals with the lifting rotating assembly, the turnover assembly is used for overturning materials on the lifting rotating assembly, the lifting rotating assembly is used for lifting materials in a rotating mode, and the shooting assembly is used for shooting and detecting the flatness of the surfaces of the materials. The device shoots the roughness on detection material surface through the camera light source, and the detection effect is difficult to guarantee, utilizes the manipulator operation, has increased the cost of equipment.
Disclosure of Invention
The utility model aims to solve the technical problem of realizing a device for visual detection of the size and defects of a target material, which is reliable in detection and simple in mechanical structure.
In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows: the utility model provides a visual inspection device of target size and defect, desktop level sets up and is supported by the table leg of bottom, be equipped with the brace table on the desktop, one of them one end of brace table is equipped with the end plate that erects the setting upward, anterior and rear portion on the brace table respectively are equipped with a bracket that is used for supporting the target that awaits measuring, the top of brace table is equipped with the back timber, back timber bilateral symmetry is equipped with two side brackets, two the tip of side bracket is equipped with the measurement unit that the inclined downward alignment brace table gathered image information.
The sliding mechanism is arranged on the sliding table and drives the sliding mechanism to slide along the top beam, and the side brackets are fixed on the sliding table.
The lower surface of the top beam is provided with a strip-shaped light source arranged along the top beam.
The top beam is arranged along the axis of the tabletop, and is fixed on the tabletop through the upright posts at the two ends.
An electric lifting mechanism is fixed on the tabletop, and the supporting table is fixed on the electric lifting mechanism.
The measuring unit is a laser sensor, the laser sensor is connected with and outputs induction signals to a computer, and the computer is connected with and outputs control signals to the electric lifting mechanism and the sliding mechanism.
The two brackets are identical in shape and size, the brackets are of plate-shaped structures which are vertically arranged, and the upper eave is of a V-shaped structure from the center to the bottom in a sunken mode.
The utility model can detect large-size products, simultaneously detect a plurality of detection requirements, improve the detection efficiency, has simple integral mechanical structure, can reduce the production cost, can carry out size measurement, gradient measurement, curvature measurement and defect detection on the products by the detection of the laser sensor, improves the detection precision, and reduces misjudgment and missed judgment during the detection.
Drawings
The contents of each drawing in the specification of the present utility model are briefly described as follows:
fig. 1 and 2 are schematic structural diagrams of a visual detection device for target size and defects;
FIG. 3 is a schematic diagram of a coordinate system;
FIG. 4 is a schematic view of a curvature measurement;
the labels in the above figures are: 1. a tabletop; 2. a top beam; 3. a light source; 4. a side bracket; 5. a measuring unit; 6. a support table; 7. a bracket; 8. a target to be measured; 9. end plates.
Detailed Description
The following detailed description of the embodiments of the utility model, such as the shape and construction of the components, the mutual positions and connection relationships between the components, the roles and working principles of the components, the manufacturing process and the operating and using method, etc., is provided to assist those skilled in the art in a more complete, accurate and thorough understanding of the inventive concept and technical solution of the present utility model.
The bearing structure of visual detection device of target size and defect adopts conventional desk, desktop 1 level sets up and is supported by the table leg of bottom promptly, the table leg is equipped with four, set up the four corners of desktop 1 bottom respectively, be equipped with supporting bench 6 on the desktop 1, supporting bench 6 is a rectangle flat board, its bottom is preferential fixes in desktop 1 central point put through electric elevating system, desktop 1 is rectangle, supporting bench 6 also is rectangle, two rectangular axis are parallel, any mechanism that can electric control goes up and down can all be regarded as electric elevating system, concrete structure is no longer described, electric elevating system controls supporting bench 6 maintains the horizontality and can be equivalent to the lift of desktop 1, in order to adapt to the scanning work of target 8 that awaits measuring of equidimension, adjust the distance of target 8 for measuring unit 5 that awaits measuring.
The front part and the rear part on the supporting table 6 are respectively provided with a bracket 7 for supporting a target material 8 to be tested, the brackets 7 are plate-shaped structures, the two brackets 7 are arranged in parallel, the structures are V-shaped structures with the upper eave recessed downwards from the center, the two brackets 7 are identical in shape and size, the cylindrical target material 8 to be tested is supported by the brackets 7, the axes of the target material can be parallel to the axes of the supporting table 6 and the tabletop 1 in a plane, the end plates 9 which are vertically arranged upwards are arranged at one end of the supporting table 6, the end plates 9 are used for limiting the positions of the target material 8 to be tested, and when the target material 8 to be tested is placed, one end of the target material 8 to be tested is leaned against the end plates 9.
The upper side of the supporting table 6 is provided with the top beam 2, the axis of the top beam 2 and the axes of the supporting table 6 and the tabletop 1 are all in the same plane and are parallel to each other, the top beam 2 is fixed on the tabletop 1 through upright posts at two ends, the whole structure of the top beam 2 is a long bar, a bar-shaped light source 3 arranged along the top beam 2 is arranged on the lower surface of the top beam 2, the top beam 2 is convenient to supplement illumination during measurement, a translation sliding table is arranged along the top beam 2, a sliding mechanism for driving the translation sliding table to slide along the top beam 2 is arranged on the translation sliding table, the sliding mechanism can adopt any mechanism capable of driving the translation sliding table to slide along the top beam 2, for example, the sliding mechanism comprises a sliding sleeve, a motor, a gear and a rack, the sliding sleeve is of a hollow tubular structure sleeved on the top beam 2 and can slide along the top beam 2, the motor is fixed outside the sliding sleeve, the output shaft of the motor is provided with the gear, a driving window is arranged along the top beam 2, the sliding sleeve is arranged at the position of the rack, the driving window is meshed with the gear, and the driving motor can control the sliding sleeve to slide along the top beam 2.
Two side brackets 4 are symmetrically arranged on two sides of the top beam 2, the side brackets 4 are fixed on the translation sliding table, and measuring units 5 which are obliquely downwards aligned with the supporting table 6 and collect image information are arranged at the ends of the two side brackets 4. The measuring unit 5 is a laser sensor, preferably a laser sensor, and drives the laser sensor to move through the translation sliding table to collect point cloud information on the surface of a target product. The laser sensor is connected with and outputs induction signals to the computer, the point cloud information is transmitted to the computer for analysis, in addition, the computer is connected with and outputs control signals to the electric lifting mechanism and the sliding mechanism, and the electric lifting mechanism and the sliding mechanism can be automatically controlled by utilizing electric power.
The working flow of the visual detection device for the size and the defects of the target is as follows:
1. the target material 8 to be measured is fed to a 3D detection area, namely placed on a bracket 7;
2. the electric lifting mechanism jacks up the target material 8 to be detected for 3D visual scanning and measurement and detection;
3. starting the measuring unit 5 and driving the sliding mechanism to reciprocate once;
4. after the measurement and detection are finished, the lifting positioning mechanism returns;
5. and taking out the target 8 to be measured, or turning over the target 8 to be measured to measure the other surface of the target 8 to be measured.
The workbench detects the target through machine vision, performs size measurement, gradient measurement, curvature measurement and defect detection on the product, can be simultaneously suitable for products with different lengths and different shapes, has the characteristics of high detection precision, high detection speed, strong stability and the like, ensures the product quality in automatic assembly production, and improves the working efficiency.
The working flow based on the target size and defect visual detection device is as follows:
and step 1, calibrating the sensor after the detection device is installed.
And 2, feeding the product to a 3D detection area.
And 3, jacking up the workpiece by the lifting positioning mechanism.
And 4, after the measurement and detection are finished, returning the lifting positioning mechanism.
And 5, taking away the product and waiting for next feeding detection.
In step 1, in order to make the symmetrically installed laser profilers and translation sliding tables form a 3D measurement unit 5, the relation between the two laser profilers and the translation sliding tables needs to be calibrated, specifically, the movement direction of the translation sliding tables under the initial coordinate system of each measurement unit 5 needs to be calibrated, so that a single laser profiler and the translation sliding tables form a 3D measurement subsystem, and then the space pose relation between the two 3D measurement subsystems is calibrated, thereby obtaining the final 3D measurement unit.
The motion direction of the translation sliding table under the initial coordinate system of the laser profiler is calibrated, and the principle and the method are as follows:
1) As shown in fig. 3, when the translation sliding table is in a self-moving zero position (d=0), a coordinate system { S } (i.e. an initial coordinate system of the laser profiler) of the 3D measurement subsystem is established, wherein an X axis and a Z axis in the coordinate system { S } are the X axis and the Z axis of the coordinate system of the laser profiler, and meanwhile, the coordinate system { S } and the 3D measurement subsystem are fixedly connected, and the coordinate system { S } is regarded as the coordinate system of the 3D measurement subsystem;
2) Let the actual moving direction of the translation sliding table be V (namely, the direction to be calibrated, the unit vector, and two degrees of freedom), the description of V under the coordinate system { S } (spherical coordinate parameters) is:
V＝[sin(α)cos(β)，cos(α)，sin(α)sin(β)] T
3) When the laser profiler translates a distance d along a moving direction V of the translation sliding table (the distance value is directly obtained through the translation sliding table), exactly scanning a space point P, and obtaining a temporary coordinate system { S1} by translating the distance d along the moving direction V of a scanning measurement subsystem coordinate system { S }, wherein the coordinates (the coordinates are directly obtained through the laser profiler) of the point P under the temporary coordinate system { S1}, are as follows:
P S1 ＝[x，0，z] T
the transformation matrix of the coordinate system { S1} with respect to the 3D measurement sub-coordinate system { S } is:
wherein I is 3*3 identity matrix;
4) Therefore, the position coordinates of the point P in the coordinate system { S } can be calculated as:
wherein p= [ x, y, z] T ，y＝d，V′＝[sin(α)cos(β)，cos(α)-1，sin(α)sin(β)] T ；
5) Placing a standard sphere with the radius of R at a proper position, so that the 3D measurement subsystem can scan the upper hemispherical surface of the standard sphere;
6) And (3) operating a 3D measurement subsystem, recording laser profiler data (x, z) and translation sliding table data D, and obtaining a spherical point set:
P i ＝[x i ，y i ，z i ] T ，y i ＝d i ，i＝1，2，...，N
7) Let the coordinates of the sphere center in the coordinate system { S) be:
P 0 ＝[x 0 ，y 0 ，z 0 ] T
8) For sphere points, there are according to the sphere equation:
||(P i +y i V′)-P 0 || 2 -R 2 ＝0
wherein the method comprises the steps of
V′＝[sin(α)cos(β)，cos(α)-1，sin(α)sin(β)] T
In the spherical equation, the unknowns are:
Ω＝[α，β，x 0 ，y 0 ，z 0 ] T
9) Establishing a nonlinear least square problem, and carrying out optimization solving:
solving to obtain omega;
10 After the optimization solution (α, β), for a given laser profiler data (x, z) and translational slip data d, the coordinates of the point under the measurement subsystem can be obtained according to the following formula:
11 The other measurement subsystem optimally solves for (α, β) in the same way.
The principle and method of calibrating two measurement subsystems is as follows:
1) Placing a standard sphere at a proper space position, scanning the sphere by a measurement subsystem 1, fitting a sphere center coordinate to be P, keeping the standard sphere motionless, scanning the sphere by a measurement subsystem 2, and fitting the sphere center coordinate to be Q;
2) Placing standard balls at different positions in space for n times, respectively scanning the spherical surfaces through a measuring subsystem 1 and a measuring subsystem 2, fitting the spherical centers, and respectively obtaining a spherical center point set A= { P 1 ，P 2 ，P 3 ，...，P n Sum b= { Q 1 ，Q 2 ，Q 3 ，...，Q n -the set of spherical points a is represented in the coordinate system { S1} of the measurement subsystem 1 and the set of spherical points B is represented in the coordinate system { S2} of the measurement subsystem 2;
3) The pose relation between two measurement subsystem coordinate systems is set as follows:
wherein R is a rotation matrix, expresses the description of the coordinate axis of the coordinate system { S2) under the coordinate system { S1}, t is a translation vector, expresses the description of the coordinate origin of the coordinate system { S2} under the coordinate system { S1 };
4) Since the standard sphere is kept stationary each time the standard sphere is scanned by the measurement subsystem 1 and the measurement subsystem 2, respectively, the point set a and the point set B have the same spatial distribution, i.e
P i ＝RQ i +t，i＝1，2，3，...，n
5) Establishing a nonlinear least square problem, and carrying out optimization solving:
6) After (R, t) is optimized and solved, any point measured by the measurement subsystem 2 can be converted into the coordinate system of the measurement subsystem 1, and the coordinate system of the measurement subsystem 1 is regarded as the coordinate system of the whole 3D measurement system, namely, the target object point cloud data acquisition function of the double-laser profiler matched with the translation sliding table is realized.
The visual detection method for the target size and the defects comprises the following steps:
1) Size measurement: the 3D measuring unit 5 is calibrated through an external sensor to obtain point cloud data required by the left end and the right end of the planar workpiece under a sensor coordinate system, the length of the two ends of the workpiece is calculated through a point cloud fitting plane, and the measuring principle of the width and the height of the workpiece is the same.
2) Slope measurement: the 3D measuring unit 5 is calibrated through an external sensor to obtain all point cloud data of the surface of the planar workpiece under the sensor coordinate system, the side plane of the workpiece and the upper surface plane of the workpiece are fitted through the point cloud, and the side gradient value of the workpiece is calculated through 2 fitting surfaces.
3) Bending measurement: as shown in fig. 4, the 3D measurement unit 5 obtains the point cloud data of the surface of the cylindrical workpiece in the sensor coordinate system by calibrating the external sensor, intercepts the point cloud data of two ends and a middle section of the workpiece, fits the two sections of the cylindrical surface, obtains leftmost end point a and rightmost end point B of the axis of the cylindrical surface of the left and right ends and concave-convex point C on the axis of the middle cylindrical surface by the central axis of the cylindrical surface, and further calculates the distance from the concave-convex point C to the AB, namely the curvature of the workpiece.
4) Defect detection: and analyzing the surface defects of the product by an algorithm through collecting the surface point cloud data.
While the utility model has been described above with reference to the accompanying drawings, it will be apparent that the utility model is not limited to the above embodiments, but is capable of being modified or applied directly to other applications without modification, as long as various insubstantial modifications of the method concept and technical solution of the utility model are adopted, all within the scope of the utility model.
Claims (7)
1. Visual detection device of target size and defect, desktop level setting and by the table leg support of bottom, its characterized in that: the desktop is provided with a supporting table, one end of the supporting table is provided with an end plate which is arranged vertically upwards, the front part and the rear part of the supporting table are respectively provided with a bracket used for supporting a target to be tested, a top beam is arranged above the supporting table, two side brackets are symmetrically arranged on two sides of the top beam, and measuring units which are obliquely downwards aligned with the supporting table and collect image information are arranged at the end parts of the two side brackets.
2. The visual inspection device for target size and defects according to claim 1, wherein: the sliding mechanism is arranged on the sliding table and drives the sliding mechanism to slide along the top beam, and the side brackets are fixed on the sliding table.
3. The visual inspection device for target size and defects according to claim 2, wherein: the lower surface of the top beam is provided with a strip-shaped light source arranged along the top beam.
4. A visual inspection apparatus for target size and defects according to claim 3, wherein: the top beam is arranged along the axis of the tabletop, and is fixed on the tabletop through the upright posts at the two ends.
5. The visual inspection device of target size and defects according to claim 2, 3 or 4, wherein: an electric lifting mechanism is fixed on the tabletop, and the supporting table is fixed on the electric lifting mechanism.
6. The visual inspection device for target size and defects according to claim 5, wherein: the measuring unit is a laser sensor, the laser sensor is connected with and outputs induction signals to a computer, and the computer is connected with and outputs control signals to the electric lifting mechanism and the sliding mechanism.
7. The visual inspection device for target size and defects according to claim 6, wherein: the two brackets are identical in shape and size, the brackets are of plate-shaped structures which are vertically arranged, and the upper eave is of a V-shaped structure from the center to the bottom in a sunken mode.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116336940A (en) * | 2022-12-20 | 2023-06-27 | 哈尔滨工业大学芜湖机器人产业技术研究院 | A visual detection device and detection method for target size and defect |
| CN117367284A (en) * | 2023-12-06 | 2024-01-09 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
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2022
- 2022-12-20 CN CN202223417769.2U patent/CN219347642U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116336940A (en) * | 2022-12-20 | 2023-06-27 | 哈尔滨工业大学芜湖机器人产业技术研究院 | A visual detection device and detection method for target size and defect |
| CN117367284A (en) * | 2023-12-06 | 2024-01-09 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
| CN117367284B (en) * | 2023-12-06 | 2024-03-29 | 有研亿金新材料有限公司 | Synchronous detection system and detection method for target size and hole site |
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