CN110605643A - Metal mask cleaning device and metal mask cleaning method - Google Patents
Metal mask cleaning device and metal mask cleaning method Download PDFInfo
- Publication number
- CN110605643A CN110605643A CN201810614463.5A CN201810614463A CN110605643A CN 110605643 A CN110605643 A CN 110605643A CN 201810614463 A CN201810614463 A CN 201810614463A CN 110605643 A CN110605643 A CN 110605643A
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- CN
- China
- Prior art keywords
- metal mask
- belt
- cleaning device
- grinding
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/033—Other grinding machines or devices for grinding a surface for cleaning purposes, e.g. for descaling or for grinding off flaws in the surface
Abstract
The invention relates to a metal shade cleaning device which is arranged above a bearing platform and connected with a driving mechanism, the driving mechanism can drive the metal shade cleaning device to move in three-dimensional direction, the metal shade cleaning device comprises a base and a grinding mechanism arranged on the base, the metal shade cleaning method is to detect the position of foreign matters attached to the surface of the metal shade by using an image identification means and transmit the foreign matters to a control device, the driving mechanism drives the metal mask cleaning device to move to the position where the foreign matters are attached on the surface of the metal mask through the control device according to the foreign matter position data, the metal mask cleaning device mainly removes the foreign matters on the surface of the metal mask in a grinding way, so that the problem of damage to the metal mask can be effectively avoided, and the reuse rate of the metal mask can be improved.
Description
Technical Field
The invention relates to a metal mask cleaning device and a metal mask cleaning method, in particular to a metal mask cleaning device and a metal mask cleaning method for cleaning a metal mask used in an organic light emitting diode panel evaporation process and the like.
Background
With the development of technology, the technology of Organic Light Emitting Diode (OLED) panels is becoming mature, and is a competitive light emitting and display technology. The main mass production method of the Organic Light Emitting Diode (OLED) is to control the pattern of the organic material by heating and sublimating the organic material under a high vacuum condition by a vacuum evaporation technology, so that the gasified organic material is uniformly deposited on the substrate.
However, the metal mask is prone to have foreign matters adhered to the surface thereof over a long period of time, which may affect the deposition quality of the organic light emitting diode panel, and therefore, in order to ensure the quality of the Organic Light Emitting Diode (OLED) vacuum deposition process, the metal mask must be cleaned periodically or according to actual use requirements.
In the cleaning operation of the metal mask surface, the position of the foreign object on the metal mask surface is detected by an image recognition means, and the laser is used to remove the foreign object attached to the metal mask surface. However, since the types and sizes of the foreign materials attached to the surface of the metal mask are different, and the area of the laser projected effective beam is limited, the laser beam must be precisely aligned to accurately remove the foreign materials on the surface of the metal mask during the cleaning process, and the laser beam is liable to damage the surface of the metal mask during the cleaning process, so that the metal mask is damaged to affect the subsequent process.
Disclosure of Invention
The present invention is directed to a metal mask cleaning apparatus and a metal mask cleaning method, which are used to solve the problems of the conventional method for cleaning foreign matters on the surface of a metal mask, such as difficult operation and easy damage of the metal mask.
In order to achieve the above object, the metal mask cleaning device of the present invention is disposed above a carrier and connected to a driving mechanism, wherein the driving mechanism can drive the metal mask cleaning device to move in three dimensions, and the metal mask cleaning device includes:
a base, which comprises a base body and a fixing component, wherein the base body comprises a clamping belt mounting part and a guide belt part, the guide belt part is positioned below the clamping belt mounting part, and the fixing component is arranged on the clamping belt mounting part of the base body and forms a mounting area with the clamping belt mounting part of the base body; and
a grinding mechanism disposed on the base, the grinding mechanism comprising:
a grinding head which is arranged on the guide belt part of the seat body and protrudes out of the bottom of the seat body;
a clamping belt driving component, which comprises a belt winding motor, a tension motor, a belt winding convex shaft, a tension convex shaft and a plurality of belt guiding shaft rods, wherein the belt winding motor and the tension motor are arranged at the clamping belt mounting part at intervals; and
and the grinding clamping belt set comprises a shell, two coiling belt wheels and a grinding belt, wherein the two coiling belt wheels are arranged at intervals, the two coiling belt wheels are rotatably arranged in the shell, the coiling belt convex shaft and the tension convex shaft respectively extend into the two coiling belt wheels, the grinding belt bypasses the guide belt shaft levers and the bottom of the grinding head, and two end parts of the grinding belt extend into the shell and are respectively wound on the two coiling belt wheels.
In order to achieve the above object, the present invention provides a metal mask cleaning method performed by using the above metal mask cleaning apparatus, the metal mask cleaning method comprising:
placing and positioning a metal shade to be cleaned on the bearing table;
detecting the positions of foreign matters attached to the surface of the metal shade by using an image identification means, and transmitting the position data of each foreign matter to a control device;
the control device executes the following steps according to the position data of each foreign object:
controlling the driving mechanism to drive the metal mask cleaning device to move to a position above a position where foreign matters are attached to the surface of the metal mask, and driving the metal mask cleaning device to move downwards; and
and driving the grinding mechanism to grind and remove foreign matters attached to the surface of the metal mask, and controlling the driving mechanism to drive the metal mask cleaning device to ascend after the foreign matters attached to the surface of the metal mask are ground and removed.
The metal mask cleaning device of the invention is mainly used for removing foreign matters on the surface of a metal mask used in the manufacturing process of an organic light-emitting diode panel, and has the following advantages:
1. can avoid the metal shade to be damaged during the cleaning operation: as mentioned above, the metal mask cleaning device of the present invention mainly uses a grinding method to remove the foreign matters on the surface of the metal mask, so that the grinding mechanism can only grind the foreign matters on the surface of the metal mask, thereby effectively avoiding the problem of damage to the metal mask.
2. Can really remove foreign matters on the surface of the metal mask, and improves the reuse rate of the metal mask: the metal mask cleaning device can push the grinding belt through the grinding head, so that the grinding belt contacts the surface of the metal mask to be cleaned, and the winding motor and the tension motor of the grinding mechanism can drive the winding wheel of the grinding clamping belt set to wind so that the grinding belt moves relative to the grinding head, so that the grinding belt can grind the surface of the metal mask in a small area to remove foreign matters on the surface of the metal mask, and the reuse rate of the metal mask is improved.
Drawings
FIG. 1: the invention is a front plan view of the metal shade cleaning device arranged above the bearing table and connected with the driving mechanism.
FIG. 2: is a schematic front plan view of a preferred embodiment of the metal mask cleaning device of the present invention.
FIG. 3: the invention is a schematic view of the opening state of the fixing component of the metal shade cleaning device.
FIG. 4: a schematic view of fig. 3 showing the removal of the polishing chuck set.
FIG. 5: is a schematic front view of a metal mask placed on a carrier table.
FIG. 6: the metal mask cleaning device of the present invention is used for polishing.
Detailed Description
The invention is described in detail below with reference to the drawings and specific examples, but the invention is not limited thereto.
Referring to fig. 1 to 4, a metal mask cleaning device according to a preferred embodiment of the present invention is disposed above a carrier 30 and connected to a driving mechanism 40, wherein the driving mechanism 40 can drive the metal mask cleaning device to move in three dimensions, and the metal mask cleaning device includes a base 10 and a polishing mechanism 20.
As shown in fig. 1 and 4, the base 10 includes a base body 11 and a fixing component 12, the base body 11 includes a fastening strip mounting portion 13 and a guiding strip portion 14, the guiding strip portion 14 is located below the fastening strip mounting portion 13, and the fixing component 12 is disposed on the fastening strip mounting portion 13 of the base body 11 and forms a mounting area with the fastening strip mounting portion 13 of the base body 11.
As shown in fig. 1 to 4, the grinding mechanism 20 is disposed on the base 11, the grinding mechanism 20 includes a grinding head 21, a tape drive assembly 22 and a grinding tape set 23, the grinding head 21 is disposed on the tape guiding portion 14 of the base 11 and protrudes out of the bottom of the base 11, the tape drive assembly 22 includes a tape motor 221, a tension motor 222, a tape protruding shaft 223, a tension protruding shaft 224 and a plurality of tape guiding shaft rods 225, the tape motor 221 and the tension motor 222 are disposed at the tape mounting portion 13 at intervals, the tape protruding shaft 223 is controlled by the tape motor 221 and protrudes into the mounting region, the tension protruding shaft 224 is controlled by the tension motor 222 and protrudes into the mounting region, the plurality of tape guiding shaft rods 225 are pivoted to the tape guiding portion 14 of the base 11, the grinding tape set 23 is disposed on the tape mounting portion 13 of the base 11, the grinding tape set 23 includes a housing 231, a cover 231, a tape cover, and a grinding tape set 23, Two tape reels 232 and a grinding belt 233, the two tape reels 232 are rotatably disposed in the housing 231, the tape winding protruding shaft 223 and the tension protruding shaft 224 respectively extend into the two tape reels 232, the grinding belt 233 bypasses the tape guiding shafts 225 and the bottom of the grinding head 21, and two ends of the grinding belt 233 extend into the housing 231 and are respectively wound on the two tape reels 232.
Wherein, this fixed subassembly 12 contains a fixed locking plate 121 and a fixed casket 122, and this fixed locking plate 121 sets up in one side of the cassette installation portion 13 of this pedestal 11, and this fixed casket 122 pivot is located this cassette installation portion 13 and is relative to the opposite side of this fixed locking plate 121, and this fixed casket 122 can lock in this fixed locking plate 121 to with this fixed locking plate 121 and the formation is enclosed by the cassette installation portion 13 the installation district, in addition, two sides of this grinding head 21 form a spacing groove 211 respectively, the grinding belt 233 stretches into in these two spacing grooves 211.
As shown in fig. 5 to 6, the present invention provides a metal mask cleaning method performed by using the metal mask cleaning apparatus, the metal mask 50 cleaning method comprising:
placing and positioning a metal mask 50 to be cleaned on the carrier table 30;
the control device executes the following steps according to the position data of each foreign object:
controlling the driving mechanism 40 to drive the metal mask cleaning device to move to a position above the position of the foreign matter attached on the surface of the metal mask 50 and to drive the metal mask cleaning device to move downwards; and
the grinding mechanism 20 is driven to grind and remove the foreign matters attached to the surface of the metal mask 50, and the driving mechanism 40 is controlled to drive the metal mask cleaning device to ascend after the foreign matters attached to the surface of the metal mask 50 are ground and removed.
In the embodiment of the metal mask cleaning method of the present invention, in the step of removing the foreign matters adhered to the surface of the metal mask 50 by the polishing mechanism 20, the tape winding motor 221 of the tape driving assembly 22 winds the polishing tape 223 by forward winding and the tension motor 222 releases the polishing tape 223 by forward rotation.
As shown in fig. 6, when the control device controls the driving mechanism 40 to move the metal mask cleaning device downward, the polishing head 21 of the metal mask cleaning device abuts against the polishing tape 233 at the bottom thereof, so that the polishing tape 233 contacts and polishes the foreign materials attached to the surface of the metal mask 50.
As shown in fig. 2, the polishing tape 233 bypasses the polishing head 21 and extends into the limiting grooves 211 on both sides of the polishing head 21, so that the metal mask cleaning device can effectively position the polishing tape 233 during the process of polishing the foreign matters on the surface of the metal mask 50, thereby preventing the polishing tape 233 from separating from the polishing head 21, and the tape winding motor 221 and the tension motor 222 drive the two tape winding wheels 232 to respectively wind and release in the forward direction during the polishing operation, thereby preventing the contacted and polished part of the polishing tape 233 from being reused, and effectively improving the polishing quality.
As shown in fig. 2 to 4, when the worker replaces the grinding cassette set 23, the worker can open the fixing box 122 of the fixing component 12 to separate the fixing box 122 from the fixing locking plate 121, then take out the grinding cassette set 23, pull out the grinding tape 233 of the new grinding cassette set 23 and bypass the plurality of tape guiding shaft rods 225 and the grinding head 21, set the grinding cassette set 23 in the mounting area of the base 10 to make the tape winding convex shaft 223 and the tension convex shaft 224 respectively extend into the two tape winding wheels 232 of the grinding cassette set 23, and finally, the worker can complete the replacement of the grinding cassette set 23 by fastening the fixing box 122 to the fixing locking plate 121.
In summary, the metal mask cleaning device and the metal mask cleaning method of the present invention mainly drive the polishing tape 233 of the polishing chuck set 23 to move relative to the polishing head 21, and the polishing head 21 pushes against the polishing tape 233, so that the polishing tape 233 cleans the foreign matters on the surface of the metal mask in a polishing manner, which not only can effectively avoid the problem of damage of the metal mask, but also can improve the reuse rate of the metal mask.
The present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and it should be understood that various changes and modifications can be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (5)
1. The utility model provides a metal shade cleaning device for set up in a plummer top and connect a actuating mechanism, actuating mechanism can drive this metal shade cleaning device and carry out three-dimensional direction and remove, and this metal shade cleaning device includes:
a base, which comprises a base body and a fixing component, wherein the base body comprises a clamping belt mounting part and a guide belt part, the guide belt part is positioned below the clamping belt mounting part, and the fixing component is arranged on the clamping belt mounting part of the base body and forms a mounting area with the clamping belt mounting part of the base body; and
a grinding mechanism disposed on the base, the grinding mechanism comprising:
a grinding head which is arranged on the guide belt part of the seat body and protrudes out of the bottom of the seat body;
a clamping belt driving component, which comprises a belt winding motor, a tension motor, a belt winding convex shaft, a tension convex shaft and a plurality of belt guiding shaft rods, wherein the belt winding motor and the tension motor are arranged at the clamping belt mounting part at intervals; and
and the grinding clamping belt set comprises a shell, two coiling belt wheels and a grinding belt, wherein the two coiling belt wheels are arranged at intervals, the two coiling belt wheels are rotatably arranged in the shell, the coiling belt convex shaft and the tension convex shaft respectively extend into the two coiling belt wheels, the grinding belt bypasses the guide belt shaft levers and the bottom of the grinding head, and two end parts of the grinding belt extend into the shell and are respectively wound on the two coiling belt wheels.
2. The metal mask cleaning device of claim 1, wherein the fixing assembly comprises a fixing locking plate and a fixing box, the fixing locking plate is disposed on one side of the band mounting portion of the base, the fixing box is pivotally disposed on the other side of the band mounting portion opposite to the fixing locking plate, the fixing box can be fastened to the fixing locking plate and forms the mounting area with the fixing locking plate and the band mounting portion.
3. The metal mask cleaning device according to claim 1 or 2, wherein a retaining groove is formed on each of two sides of the polishing head, and the polishing tape extends into the two retaining grooves.
4. A metal mask cleaning method performed using the metal mask cleaning apparatus according to any one of claims 1 to 3, the metal mask cleaning method comprising:
placing and positioning a metal shade to be cleaned on the bearing table;
detecting the positions of foreign matters attached to the surface of the metal shade by using an image identification means, and transmitting the position data of each foreign matter to a control device;
the control device executes the following steps according to the position data of each foreign object:
controlling the driving mechanism to drive the metal mask cleaning device to move to a position above a position where foreign matters are attached to the surface of the metal mask, and driving the metal mask cleaning device to move downwards; and
and driving the grinding mechanism to grind and remove foreign matters attached to the surface of the metal mask, and controlling the driving mechanism to drive the metal mask cleaning device to ascend after the foreign matters attached to the surface of the metal mask are ground and removed.
5. The method according to claim 4, wherein the step of removing the foreign matter adhered to the surface of the metal mask by the polishing mechanism is performed by winding the polishing tape by a tape winding motor of the tape drive assembly in a forward winding forward rotation, and releasing the polishing tape by a tension motor in a forward rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614463.5A CN110605643A (en) | 2018-06-14 | 2018-06-14 | Metal mask cleaning device and metal mask cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810614463.5A CN110605643A (en) | 2018-06-14 | 2018-06-14 | Metal mask cleaning device and metal mask cleaning method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110605643A true CN110605643A (en) | 2019-12-24 |
Family
ID=68887657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810614463.5A Pending CN110605643A (en) | 2018-06-14 | 2018-06-14 | Metal mask cleaning device and metal mask cleaning method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110605643A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07186034A (en) * | 1993-12-27 | 1995-07-25 | Fuji Photo Film Co Ltd | Polishing device |
| JPH08108359A (en) * | 1994-10-07 | 1996-04-30 | Fuji Photo Film Co Ltd | Polishing device |
| CN1716043A (en) * | 2004-06-28 | 2006-01-04 | Ntn株式会社 | Correcting device for micro pattern and defect correcting method for micro pattern |
| CN101085508A (en) * | 2006-06-09 | 2007-12-12 | 株式会社Snu精密 | Substrate repairing device and method |
| JP4505600B1 (en) * | 2009-06-19 | 2010-07-21 | レーザーテック株式会社 | Defect correction method and apparatus |
| CN201685164U (en) * | 2009-12-24 | 2010-12-29 | 濮阳贝英数控机械设备有限公司 | Bearing cup outer diameter polishing device |
-
2018
- 2018-06-14 CN CN201810614463.5A patent/CN110605643A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07186034A (en) * | 1993-12-27 | 1995-07-25 | Fuji Photo Film Co Ltd | Polishing device |
| JPH08108359A (en) * | 1994-10-07 | 1996-04-30 | Fuji Photo Film Co Ltd | Polishing device |
| CN1716043A (en) * | 2004-06-28 | 2006-01-04 | Ntn株式会社 | Correcting device for micro pattern and defect correcting method for micro pattern |
| CN101085508A (en) * | 2006-06-09 | 2007-12-12 | 株式会社Snu精密 | Substrate repairing device and method |
| JP4505600B1 (en) * | 2009-06-19 | 2010-07-21 | レーザーテック株式会社 | Defect correction method and apparatus |
| CN201685164U (en) * | 2009-12-24 | 2010-12-29 | 濮阳贝英数控机械设备有限公司 | Bearing cup outer diameter polishing device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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Application publication date: 20191224 |