JP4295776B2 - 半導体レーザ装置及びその製造方法 - Google Patents
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
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- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
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- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2201—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure in a specific crystallographic orientation
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2206—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on III-V materials
- H01S5/221—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on III-V materials containing aluminium
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- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2218—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers having special optical properties
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- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34326—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on InGa(Al)P, e.g. red laser
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- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar
- H01S5/4087—Array arrangements, e.g. constituted by discrete laser diodes or laser bar emitting more than one wavelength
Description
11 n型バッファ層
12 n型クラッド層
13 活性層
13b1、13b2 バリア層
13g1 第一ガイド層
13g2 第二ガイド層
13w1、13w2、13w3 ウェル層
14 p型クラッド層
14a リッジ部
15 電流ブロック層
16 p型保護層
16 保護層
17 p型コンタクト層
18 p型境界層
19 レジストパターン
21 n型バッファ層
22 n型クラッド層
23 活性層
23b1、23b2 バリア層
23g1 第一ガイド層
23g2 第二ガイド層
23w1、23w2、23w3 ウェル層
24 p型クラッド層
24a リッジ部
25 n型電流ブロック層
26 保護層
27 p型コンタクト層
29 レジストパターン
30 Zn拡散源
31 ストライプマスク
32 Zn拡散領域
40 窓領域
Claims (8)
- 同一基板上に、赤色発光部と赤外発光部とが設けられた半導体レーザ装置において、
前記赤色発光部は、
第1導電型のAlGaInP系材料からなり且つ電流注入のための赤色側ストライプを有する第1のクラッド層と、第2導電型のAlGaInP系材料からなる第2のクラッド層とによりInGaP系又はAlGaInP系材料からなる赤色側活性層が挟まれたダブルへテロ構造を有し、
前記赤外発光部は、
第1導電型のAlGaInP系材料からなり且つ電流注入のための赤外側ストライプを有する第3のクラッド層と、第2導電型のAlGaInP系材料からなる第4のクラッド層とによりGaAs系又はAlGaAs系材料からなる赤外側活性層が挟まれたダブルへテロ構造を有し、
前記第1のクラッド層、前記第2のクラッド層、前記第3のクラッド層及び前記第4のクラッド層において、Al:Gaの組成比をそれぞれ順にX1:1−X1、X2:1−X2、X3:1−X3及びX4:1−X4とするとき、
X1>X2、X3>X4、X1≧X3、X2>X4及びX1−X3≦0.1の関係を満たすことを特徴とする半導体レーザ装置。 - 請求項1において、
前記赤色側活性層及び前記赤外側活性層は量子井戸構造を有すると共に、
前記赤色発光部及び前記赤外発光部にそれぞれ構成された共振器の少なくとも一方の端面部において、前記赤色側活性層及び前記赤色側活性層は、不純物の導入により無秩序化された窓領域を備えていることを特徴とする半導体レーザ装置。 - 請求項2において、
前記不純物は、Zn及びSiの少なくとも一方を含むことを特徴とする半導体レーザ装置。 - 請求項1〜3のいずれか1つにおいて、
前記赤色側ストライプ及び前記赤外側ストライプは、それぞれメサ状のリッジからなり、
前記リッジの側壁には、同一の半導体層が形成されていることを特徴とする半導体レーザ装置。 - 請求項4において、
前記半導体層は、AlInP電流ブロック層であることを特徴とする半導体レーザ装置。 - 請求項4において、
前記同一の半導体層に代えて、同一の誘電体層が形成されていることを特徴とする半導体レーザ装置。 - 請求項6において、
前記誘電体層は、SiN層、SiO2 層、TiO2 層、Al2 O3 層及び水素化アモルファスSi層のうちの少なくとも1つを含むことを特徴とする半導体レーザ装置。 - 基板上に赤色発光部と赤外発光部とが設けられた半導体レーザ装置の製造方法において、
第1導電型のAlGaInP系材料からなる第1のクラッド層と、第2導電型のAlGaInP系材料からなる第2のクラッド層とによりInGaP又はAlGaInP系材料からなる赤色側活性層が挟まれた赤色発光部のダブルへテロ構造を形成する工程(a)と、
第1導電型のAlGaInP系材料からなる第3のクラッド層と、第2導電型のAlGaInP系材料からなる第4のクラッド層とによりGaAs又はAlGaAs系材料からなる赤外側活性層が挟まれた赤外発光部のダブルへテロ構造を形成する工程(b)と、
前記工程(a)及び(b)の後に、前記赤色側活性層及び前記赤外側活性層の所定の領域に不純物を導入することにより、窓領域を形成する工程(c)と、
前記工程(a)及び(b)の後に、前記第1のクラッド層及び前記第3のクラッド層を加工することにより、それぞれ順に電流注入のための赤色側ストライプ及び赤外側ストライプを形成する工程(d)とを備え、
前記第1のクラッド層、前記第2のクラッド層、前記第3のクラッド層及び前記第4のクラッド層において、Al:Gaの組成比をそれぞれ順にX1:1−X1、X2:1−X2、X3:1−X3及びX4:1−X4とするとき、
X1>X2、X3>X4、X1≧X3、X2>X4及びX1−X3≦0.1の関係を満たすことを特徴とする半導体レーザ装置の製造方法。
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JP2006220216A JP4295776B2 (ja) | 2006-08-11 | 2006-08-11 | 半導体レーザ装置及びその製造方法 |
US11/882,173 US7539230B2 (en) | 2006-08-11 | 2007-07-31 | Semiconductor laser device and method for fabricating the same |
TW096128493A TW200810305A (en) | 2006-08-11 | 2007-08-03 | Semiconductor laser device and method for fabricating the same |
KR1020070080177A KR20080014661A (ko) | 2006-08-11 | 2007-08-09 | 반도체레이저장치 및 그 제조방법 |
CN2007101413995A CN101123343B (zh) | 2006-08-11 | 2007-08-09 | 半导体激光装置及其制造方法 |
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JP2009224480A (ja) * | 2008-03-14 | 2009-10-01 | Panasonic Corp | 2波長半導体レーザ装置 |
JP5715332B2 (ja) * | 2009-08-31 | 2015-05-07 | 株式会社東芝 | 半導体発光素子 |
JP5877070B2 (ja) | 2012-01-12 | 2016-03-02 | ウシオオプトセミコンダクター株式会社 | 半導体レーザ装置 |
US10396529B2 (en) * | 2017-05-22 | 2019-08-27 | Finisar Corporation | VCSELs having mode control and device coupling |
DE102017122032A1 (de) * | 2017-09-22 | 2019-03-28 | Osram Opto Semiconductors Gmbh | Laserdiode |
CN108767657B (zh) * | 2018-05-15 | 2020-05-08 | 深圳市光脉电子有限公司 | 一种结合紫外光和红外光的激光器及其生产工艺 |
WO2020022235A1 (ja) * | 2018-07-27 | 2020-01-30 | パナソニックIpマネジメント株式会社 | 半導体レーザ素子、検査方法及び検査装置 |
CN113340419B (zh) * | 2021-06-19 | 2023-03-14 | 上海国科航星量子科技有限公司 | 激光发散角检测系统及方法 |
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JP2775950B2 (ja) | 1990-01-12 | 1998-07-16 | 日本電気株式会社 | 半導体レーザ |
JPH11186651A (ja) | 1997-12-19 | 1999-07-09 | Sony Corp | 集積型半導体発光装置 |
JPH11243259A (ja) | 1997-12-25 | 1999-09-07 | Denso Corp | 半導体レーザおよび半導体レーザの駆動方法 |
JP2000244060A (ja) | 1998-12-22 | 2000-09-08 | Sony Corp | 半導体発光装置およびその製造方法 |
JP3501676B2 (ja) * | 1999-05-07 | 2004-03-02 | 松下電器産業株式会社 | 半導体レーザ装置の製造方法 |
JP3971581B2 (ja) | 2000-02-29 | 2007-09-05 | 松下電器産業株式会社 | 半導体レーザ素子アレイ及びその製造方法 |
US6546035B2 (en) | 2000-02-29 | 2003-04-08 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser diode array and method of fabricating the same |
JP4317357B2 (ja) | 2002-11-18 | 2009-08-19 | シャープ株式会社 | 半導体レーザ素子およびその製造方法 |
JP4077348B2 (ja) * | 2003-03-17 | 2008-04-16 | 松下電器産業株式会社 | 半導体レーザ装置およびそれを用いた光ピックアップ装置 |
JP4284126B2 (ja) | 2003-07-22 | 2009-06-24 | シャープ株式会社 | 半導体レーザ素子 |
JP2005109102A (ja) * | 2003-09-30 | 2005-04-21 | Mitsubishi Electric Corp | モノリシック半導体レーザおよびその製造方法 |
JP4198070B2 (ja) | 2004-01-16 | 2008-12-17 | 三洋電機株式会社 | 光ピックアップ装置 |
JP2005235865A (ja) * | 2004-02-17 | 2005-09-02 | Sony Corp | 半導体レーザ |
JP2005347478A (ja) * | 2004-06-02 | 2005-12-15 | Sharp Corp | 半導体レーザ素子 |
JP4904682B2 (ja) | 2004-10-27 | 2012-03-28 | ソニー株式会社 | ブロードストライプ型半導体レーザ素子およびこれを用いたブロードストライプ型半導体レーザアレイ、並びにブロードストライプ型半導体レーザ素子の製造方法 |
JP2006196846A (ja) | 2005-01-17 | 2006-07-27 | Matsushita Electric Ind Co Ltd | 多波長半導体レーザ装置 |
JP2006294984A (ja) * | 2005-04-13 | 2006-10-26 | Matsushita Electric Ind Co Ltd | 半導体レーザ素子とその製造方法およびそれを用いた光ピックアップ装置 |
JP4671793B2 (ja) * | 2005-07-22 | 2011-04-20 | パナソニック株式会社 | 半導体レーザ装置及びその製造方法 |
-
2006
- 2006-08-11 JP JP2006220216A patent/JP4295776B2/ja not_active Expired - Fee Related
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2007
- 2007-07-31 US US11/882,173 patent/US7539230B2/en not_active Expired - Fee Related
- 2007-08-03 TW TW096128493A patent/TW200810305A/zh unknown
- 2007-08-09 CN CN2007101413995A patent/CN101123343B/zh not_active Expired - Fee Related
- 2007-08-09 KR KR1020070080177A patent/KR20080014661A/ko not_active Application Discontinuation
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CN101123343B (zh) | 2010-12-01 |
JP2008047639A (ja) | 2008-02-28 |
US7539230B2 (en) | 2009-05-26 |
CN101123343A (zh) | 2008-02-13 |
TW200810305A (en) | 2008-02-16 |
US20080043797A1 (en) | 2008-02-21 |
KR20080014661A (ko) | 2008-02-14 |
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