JP4282702B2 - 不揮発性半導体記憶装置 - Google Patents
不揮発性半導体記憶装置 Download PDFInfo
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- JP4282702B2 JP4282702B2 JP2006257754A JP2006257754A JP4282702B2 JP 4282702 B2 JP4282702 B2 JP 4282702B2 JP 2006257754 A JP2006257754 A JP 2006257754A JP 2006257754 A JP2006257754 A JP 2006257754A JP 4282702 B2 JP4282702 B2 JP 4282702B2
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- 239000004065 semiconductor Substances 0.000 title claims description 26
- 238000003860 storage Methods 0.000 claims description 162
- 230000015654 memory Effects 0.000 claims description 129
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 79
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 79
- 229910052710 silicon Inorganic materials 0.000 claims description 70
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 63
- 239000010703 silicon Substances 0.000 claims description 63
- 239000000463 material Substances 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 45
- -1 nitride compound Chemical class 0.000 claims description 32
- 239000012535 impurity Substances 0.000 claims description 28
- 229910052782 aluminium Inorganic materials 0.000 claims description 24
- 239000002019 doping agent Substances 0.000 claims description 22
- 230000006870 function Effects 0.000 claims description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052733 gallium Inorganic materials 0.000 claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 12
- 229910052732 germanium Inorganic materials 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 7
- 239000007769 metal material Substances 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 239000010408 film Substances 0.000 description 364
- 239000010410 layer Substances 0.000 description 336
- 238000005229 chemical vapour deposition Methods 0.000 description 49
- 238000000034 method Methods 0.000 description 49
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 38
- 239000000203 mixture Substances 0.000 description 38
- 229910052698 phosphorus Inorganic materials 0.000 description 36
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 34
- 125000004429 atom Chemical group 0.000 description 34
- 239000011574 phosphorus Substances 0.000 description 34
- 238000004519 manufacturing process Methods 0.000 description 30
- 230000007935 neutral effect Effects 0.000 description 26
- 229910052746 lanthanum Inorganic materials 0.000 description 25
- 229910052751 metal Inorganic materials 0.000 description 24
- 239000002184 metal Substances 0.000 description 24
- 229910002601 GaN Inorganic materials 0.000 description 23
- 239000007789 gas Substances 0.000 description 22
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 21
- 229910021529 ammonia Inorganic materials 0.000 description 19
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 18
- 229910052721 tungsten Inorganic materials 0.000 description 17
- 239000010937 tungsten Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 15
- 239000002994 raw material Substances 0.000 description 15
- 230000004048 modification Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 14
- 238000004544 sputter deposition Methods 0.000 description 13
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 13
- BUMGIEFFCMBQDG-UHFFFAOYSA-N dichlorosilicon Chemical compound Cl[Si]Cl BUMGIEFFCMBQDG-UHFFFAOYSA-N 0.000 description 11
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 10
- 239000010419 fine particle Substances 0.000 description 10
- 229910052735 hafnium Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 9
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 229910052787 antimony Inorganic materials 0.000 description 8
- 229910052785 arsenic Inorganic materials 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 8
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 6
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 6
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 6
- 239000003574 free electron Substances 0.000 description 6
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 6
- 238000005546 reactive sputtering Methods 0.000 description 6
- 238000003949 trap density measurement Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 4
- MANYRMJQFFSZKJ-UHFFFAOYSA-N bis($l^{2}-silanylidene)tantalum Chemical group [Si]=[Ta]=[Si] MANYRMJQFFSZKJ-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- BIXHRBFZLLFBFL-UHFFFAOYSA-N germanium nitride Chemical compound N#[Ge]N([Ge]#N)[Ge]#N BIXHRBFZLLFBFL-UHFFFAOYSA-N 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 238000000608 laser ablation Methods 0.000 description 4
- 230000014759 maintenance of location Effects 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000013081 microcrystal Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910019001 CoSi Inorganic materials 0.000 description 2
- 229910004542 HfN Inorganic materials 0.000 description 2
- 229910016006 MoSi Inorganic materials 0.000 description 2
- 229910005883 NiSi Inorganic materials 0.000 description 2
- 229910004200 TaSiN Inorganic materials 0.000 description 2
- 229910008484 TiSi Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910008812 WSi Inorganic materials 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000027756 respiratory electron transport chain Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- LZIAMMQBHJIZAG-UHFFFAOYSA-N 2-[di(propan-2-yl)amino]ethyl carbamimidothioate Chemical compound CC(C)N(C(C)C)CCSC(N)=N LZIAMMQBHJIZAG-UHFFFAOYSA-N 0.000 description 1
- 229910005987 Ge3N4 Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910002244 LaAlO3 Inorganic materials 0.000 description 1
- 229910007991 Si-N Inorganic materials 0.000 description 1
- 229910003811 SiGeC Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910006294 Si—N Inorganic materials 0.000 description 1
- VZVQQBDFMNEUHK-UHFFFAOYSA-N [La].[Hf] Chemical compound [La].[Hf] VZVQQBDFMNEUHK-UHFFFAOYSA-N 0.000 description 1
- DBOSVWZVMLOAEU-UHFFFAOYSA-N [O-2].[Hf+4].[La+3] Chemical compound [O-2].[Hf+4].[La+3] DBOSVWZVMLOAEU-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- IVHJCRXBQPGLOV-UHFFFAOYSA-N azanylidynetungsten Chemical compound [W]#N IVHJCRXBQPGLOV-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005264 electron capture Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40117—Multistep manufacturing processes for data storage electrodes the electrodes comprising a charge-trapping insulator
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/4234—Gate electrodes for transistors with charge trapping gate insulator
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28088—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being a composite, e.g. TiN
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
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- Condensed Matter Physics & Semiconductors (AREA)
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Description
A. Chin, C.C. Laio, C. Chen, K.C. Chiang, D.S. Yu, W.J. Yoo, G.S. Samudra, T. Wang, I.J. Hsieh, S. P. McAlister, and C. C. Chi,"Low Voltage High Speed SiO2/AlGaN/AlLaO3/TaN Memory with Good Retention,"IEDM Tech. Dig. pp.165-168 (2005).
図7は、本発明の第1の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。
図13は、本発明の第2の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7と同一部分には同一符号を付して、その詳しい説明は省略する。
図15は、本発明の第3の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7と同一部分には同一符号を付して、その詳しい説明は省略する。
図16は、本発明の第4の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7と同一部分には同一符号を付して、その詳しい説明は省略する。
図17は、本発明の第5の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7と同一部分には同一符号を付して、その詳しい説明は省略する。
図19は、本発明の第6の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7及び図17と同一部分には同一符号を付して、その詳しい説明は省略する。
図20は、本発明の第7の実施形態に係わるメモリセルの要部構成を示す断面図であり、特にチャネル長方向に沿った断面を示している。なお、図7及び図17と同一部分には同一符号を付して、その詳しい説明は省略する。
[AlGaNの電子親和力]=3.1×(1−x)+4.7×x(eV)
と表される。また、窒化タンタル(TaN)の仕事関数はSiバンドギャップの中央付近(約4.4eV)にある。従って、TaNからAlGaN側に電子が移動し、TaNが電子供給層として十分に機能する条件は、
3.1×(1−x)+4.7×x≧4.4
となる。即ち、x≧0.81である。なお、これは、この条件であればTaNが電子供給層として働くことが確実であるという意味である。それよりもAlGaNの組成xが小さい場合でもTaNが電子供給層として機能する可能性を否定するものではない。
なお、本発明は上述した各実施形態に限定されるものではなく、その要旨を逸脱しない範囲で、種々変形して実施することができる。
32…浮遊ゲート(n+ 型の多結晶シリコン)
34,44,54…ブロック絶縁膜(第2絶縁膜)
36,56…ドナーイオン
37…自由電子
42,52…トラップ絶縁膜(Si3 N4 )
47,57…トラップ
48…捕獲電子
53…ドナー層
58…捕獲電子
101…p型シリコン基板
102…酸窒化シリコン膜(トンネル絶縁膜)
103…シリコン窒化膜(電荷蓄積層)
104…リンを含んだシリコン窒化膜(ドナー層)
105…ランタンアルミネート膜(ブロック絶縁膜)
106…窒化タングステン膜(制御ゲート電極)
107…タングステン膜(低抵抗金属膜)
111,114…マスク材
112a…スリット
112b…素子分離トレンチ
113…シリコン酸化膜
203…リンを含んだシリコン窒化膜(ドナー含有電荷蓄積層)
250…ブロック絶縁膜
251,253…ランタンアルミネート膜
252…ボロンをドープしたシリコン窒化膜
303…シリコン窒化膜(電荷蓄積層)
304…リンを含んだシリコンの微粒子
403…シリコン窒化膜(電荷蓄積層)
413…極薄シリコン熱酸化膜
503…窒化アルミニウム・ガリウム膜(電荷蓄積層)
504…Si原子を含んだ窒化アルミニウム・ガリウム層(ドナー層)
505…アルミニウム酸窒化膜(ブロック層)
506…窒化タンタル膜(制御ゲート電極)
514…リンを含んだシリコン窒化膜(ドナー層)
603…シリコンをドープした窒化アルミニウム・ガリウム(ドナー含有電荷蓄積層)
704…窒化タンタル膜(電子供給層)
714…タンタルシリサイド膜(電子供給層)
Claims (6)
- 電気的に情報の書き込み・消去・読み出しが可能なメモリセルを有する不揮発性半導体記憶装置であって、前記メモリセルは、
半導体基板の表面部に離間して形成されたソース・ドレイン拡散層と、
前記ソース・ドレイン拡散層の間のチャネル上に形成された第1絶縁膜と、
前記第1絶縁膜上に形成された材料であって、Si,Ge,Ga,Alの中から選ばれた少なくとも一つを含む窒化物又は酸窒化物で形成された電荷蓄積層と、
前記電荷蓄積層上に形成されたn型ドーパント不純物を含む材料であって、Si,Ge,Ga,Alの中から選ばれた少なくとも一つを含む窒化物で形成されたドナー層と、
前記ドナー層上に形成された第2絶縁膜と、
前記第2絶縁膜上に形成された制御ゲート電極と、
を具備し、
前記電荷蓄積層の電子親和力は前記ドナー層の電子親和力と同じ又はそれよりも大きく、前記ドナー層の膜厚は前記電荷蓄積層の膜厚よりも薄く、前記第2絶縁膜の電子親和力は前記ドナー層の電子親和力よりも小さいことを特徴とする不揮発性半導体記憶装置。 - 前記電荷蓄積層がシリコン窒化膜又はシリコン酸窒化膜で形成され、前記電荷蓄積層と前記ドナー層との間に、前記電荷蓄積層及び前記ドナー層の何れよりも薄く、かつシリコン酸化膜を主成分として形成される層を更に有することを特徴とする請求項1記載の不揮発性半導体記憶装置。
- 電気的に情報の書き込み・消去・読み出しが可能なメモリセルを有する不揮発性半導体記憶装置であって、前記メモリセルは、
半導体基板の表面部に離間して形成されたソース・ドレイン拡散層と、
前記ソース・ドレイン拡散層の間のチャネル上に形成された第1絶縁膜と、
前記第1絶縁膜上に形成された材料であって、Si,Ge,Ga,Alの中から選ばれた少なくとも一つを含む窒化物又は酸窒化物で形成された電荷蓄積層と、
前記電荷蓄積層上に形成された金属系材料の電子供給層と、
前記電子供給層上に形成された第2絶縁膜と、
前記第2絶縁膜上に形成された制御ゲート電極と、
を具備し、
前記電荷蓄積層の電子親和力は、前記電子供給層の仕事関数と同じ又はそれよりも大きく、前記電子供給層の膜厚は前記電荷蓄積層の膜厚よりも薄く、前記第2絶縁膜の電子親和力は前記電子供給層の仕事関数よりも小さいことを特徴とする不揮発性半導体記憶装置。 - 前記第2絶縁膜が複数の層からなり、その中に負電荷を蓄えることのできる層が存在することを特徴とする請求項1乃至3の何れかに記載の不揮発性半導体記憶装置。
- 前記負電荷を蓄えることのできる層は、ボロンを含むことを特徴とする請求項4に記載の不揮発性半導体記憶装置。
- 前記第2絶縁膜が複数の層からなり、その中に負電荷を蓄えることのできる層が存在し、該層のボロンの面密度は、前記n型ドーパント不純物の面密度よりも小さいことを特徴とする請求項1に記載の不揮発性半導体記憶装置。
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