JP4258713B2 - 板状体搬送装置 - Google Patents

板状体搬送装置 Download PDF

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Publication number
JP4258713B2
JP4258713B2 JP2003271947A JP2003271947A JP4258713B2 JP 4258713 B2 JP4258713 B2 JP 4258713B2 JP 2003271947 A JP2003271947 A JP 2003271947A JP 2003271947 A JP2003271947 A JP 2003271947A JP 4258713 B2 JP4258713 B2 JP 4258713B2
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JP
Japan
Prior art keywords
plate
glass substrate
air
blower
width direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003271947A
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English (en)
Japanese (ja)
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JP2005029360A5 (enExample
JP2005029360A (ja
Inventor
淑照 池畑
隆佳 大野
雄一 森本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP2003271947A priority Critical patent/JP4258713B2/ja
Priority to TW093107979A priority patent/TWI327985B/zh
Priority to KR1020040025090A priority patent/KR100966131B1/ko
Priority to US10/823,408 priority patent/US7108474B2/en
Priority to CNB2004100329689A priority patent/CN100482555C/zh
Publication of JP2005029360A publication Critical patent/JP2005029360A/ja
Publication of JP2005029360A5 publication Critical patent/JP2005029360A5/ja
Application granted granted Critical
Publication of JP4258713B2 publication Critical patent/JP4258713B2/ja
Priority to KR1020100011389A priority patent/KR101051681B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003271947A 2003-04-14 2003-07-08 板状体搬送装置 Expired - Fee Related JP4258713B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003271947A JP4258713B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置
TW093107979A TWI327985B (en) 2003-04-14 2004-03-24 Apparatus for transporting plate-shaped work piece
KR1020040025090A KR100966131B1 (ko) 2003-04-14 2004-04-12 판형체 반송 장치
US10/823,408 US7108474B2 (en) 2003-04-14 2004-04-13 Apparatus for transporting plate-shaped work piece
CNB2004100329689A CN100482555C (zh) 2003-04-14 2004-04-14 板状体输送装置
KR1020100011389A KR101051681B1 (ko) 2003-04-14 2010-02-08 판형체 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003271947A JP4258713B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置

Publications (3)

Publication Number Publication Date
JP2005029360A JP2005029360A (ja) 2005-02-03
JP2005029360A5 JP2005029360A5 (enExample) 2008-05-08
JP4258713B2 true JP4258713B2 (ja) 2009-04-30

Family

ID=34209654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003271947A Expired - Fee Related JP4258713B2 (ja) 2003-04-14 2003-07-08 板状体搬送装置

Country Status (1)

Country Link
JP (1) JP4258713B2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102745453A (zh) * 2010-12-06 2012-10-24 株式会社大福 板状体搬运装置
KR101504188B1 (ko) * 2013-08-26 2015-03-19 (주)제이에스 팬필터유닛을 이용하여 기판을 이송시키는 기판이송장치
KR101536188B1 (ko) * 2010-12-06 2015-07-13 가부시키가이샤 다이후쿠 판상체 반송 장치

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100721939B1 (ko) 2006-02-08 2007-05-25 주식회사 태성기연 판유리 이송장치
JP5239227B2 (ja) * 2007-06-29 2013-07-17 株式会社Ｉｈｉ 浮上ユニット及び浮上搬送装置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
JP5952666B2 (ja) * 2012-07-13 2016-07-13 株式会社ハーモテック 非接触搬送装置
CN114877581B (zh) * 2022-05-10 2023-09-22 湛江通宝制冷设备有限公司 一种风冷式制冷机组

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102745453A (zh) * 2010-12-06 2012-10-24 株式会社大福 板状体搬运装置
KR101536188B1 (ko) * 2010-12-06 2015-07-13 가부시키가이샤 다이후쿠 판상체 반송 장치
KR101552534B1 (ko) * 2010-12-06 2015-09-11 가부시키가이샤 다이후쿠 판상체 반송 장치
CN102745453B (zh) * 2010-12-06 2016-03-02 株式会社大福 板状体搬运装置
KR101504188B1 (ko) * 2013-08-26 2015-03-19 (주)제이에스 팬필터유닛을 이용하여 기판을 이송시키는 기판이송장치

Also Published As

Publication number Publication date
JP2005029360A (ja) 2005-02-03

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