JP2005029360A5 - - Google Patents

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Publication number
JP2005029360A5
JP2005029360A5 JP2003271947A JP2003271947A JP2005029360A5 JP 2005029360 A5 JP2005029360 A5 JP 2005029360A5 JP 2003271947 A JP2003271947 A JP 2003271947A JP 2003271947 A JP2003271947 A JP 2003271947A JP 2005029360 A5 JP2005029360 A5 JP 2005029360A5
Authority
JP
Japan
Prior art keywords
plate
blower
shaped body
shaped
conveyance device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003271947A
Other languages
English (en)
Japanese (ja)
Other versions
JP4258713B2 (ja
JP2005029360A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2003271947A external-priority patent/JP4258713B2/ja
Priority to JP2003271947A priority Critical patent/JP4258713B2/ja
Priority to TW093107979A priority patent/TWI327985B/zh
Priority to KR1020040025090A priority patent/KR100966131B1/ko
Priority to US10/823,408 priority patent/US7108474B2/en
Priority to CNB2004100329689A priority patent/CN100482555C/zh
Publication of JP2005029360A publication Critical patent/JP2005029360A/ja
Publication of JP2005029360A5 publication Critical patent/JP2005029360A5/ja
Publication of JP4258713B2 publication Critical patent/JP4258713B2/ja
Application granted granted Critical
Priority to KR1020100011389A priority patent/KR101051681B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003271947A 2003-04-14 2003-07-08 板状体搬送装置 Expired - Fee Related JP4258713B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003271947A JP4258713B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置
TW093107979A TWI327985B (en) 2003-04-14 2004-03-24 Apparatus for transporting plate-shaped work piece
KR1020040025090A KR100966131B1 (ko) 2003-04-14 2004-04-12 판형체 반송 장치
US10/823,408 US7108474B2 (en) 2003-04-14 2004-04-13 Apparatus for transporting plate-shaped work piece
CNB2004100329689A CN100482555C (zh) 2003-04-14 2004-04-14 板状体输送装置
KR1020100011389A KR101051681B1 (ko) 2003-04-14 2010-02-08 판형체 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003271947A JP4258713B2 (ja) 2003-07-08 2003-07-08 板状体搬送装置

Publications (3)

Publication Number Publication Date
JP2005029360A JP2005029360A (ja) 2005-02-03
JP2005029360A5 true JP2005029360A5 (enExample) 2008-05-08
JP4258713B2 JP4258713B2 (ja) 2009-04-30

Family

ID=34209654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003271947A Expired - Fee Related JP4258713B2 (ja) 2003-04-14 2003-07-08 板状体搬送装置

Country Status (1)

Country Link
JP (1) JP4258713B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100721939B1 (ko) 2006-02-08 2007-05-25 주식회사 태성기연 판유리 이송장치
JP5239227B2 (ja) * 2007-06-29 2013-07-17 株式会社Ｉｈｉ 浮上ユニット及び浮上搬送装置
JP5088591B2 (ja) * 2010-04-15 2012-12-05 株式会社ダイフク 板状体搬送装置
JP5440875B2 (ja) * 2010-12-06 2014-03-12 株式会社ダイフク 板状体搬送装置
JP5495065B2 (ja) * 2010-12-06 2014-05-21 株式会社ダイフク 板状体搬送装置
JP5952666B2 (ja) * 2012-07-13 2016-07-13 株式会社ハーモテック 非接触搬送装置
KR101504188B1 (ko) * 2013-08-26 2015-03-19 (주)제이에스 팬필터유닛을 이용하여 기판을 이송시키는 기판이송장치
CN114877581B (zh) * 2022-05-10 2023-09-22 湛江通宝制冷设备有限公司 一种风冷式制冷机组

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