JP2005089130A5 - - Google Patents

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Publication number
JP2005089130A5
JP2005089130A5 JP2003326285A JP2003326285A JP2005089130A5 JP 2005089130 A5 JP2005089130 A5 JP 2005089130A5 JP 2003326285 A JP2003326285 A JP 2003326285A JP 2003326285 A JP2003326285 A JP 2003326285A JP 2005089130 A5 JP2005089130 A5 JP 2005089130A5
Authority
JP
Japan
Prior art keywords
transport
state
horizontal
transported object
dust removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003326285A
Other languages
English (en)
Japanese (ja)
Other versions
JP4186112B2 (ja
JP2005089130A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2003326285A external-priority patent/JP4186112B2/ja
Priority to JP2003326285A priority Critical patent/JP4186112B2/ja
Priority to TW093123790A priority patent/TWI295658B/zh
Priority to US10/920,843 priority patent/US7344350B2/en
Priority to CN2010101029988A priority patent/CN101767720B/zh
Priority to CN200410057621XA priority patent/CN1583531B/zh
Priority to KR1020040065862A priority patent/KR101112509B1/ko
Publication of JP2005089130A publication Critical patent/JP2005089130A/ja
Publication of JP2005089130A5 publication Critical patent/JP2005089130A5/ja
Publication of JP4186112B2 publication Critical patent/JP4186112B2/ja
Application granted granted Critical
Priority to KR1020110049465A priority patent/KR101152708B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003326285A 2003-08-21 2003-09-18 搬送システム Expired - Fee Related JP4186112B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2003326285A JP4186112B2 (ja) 2003-09-18 2003-09-18 搬送システム
TW093123790A TWI295658B (en) 2003-08-21 2004-08-09 Transporting apparatus
US10/920,843 US7344350B2 (en) 2003-08-21 2004-08-18 Transporting apparatus with air-supplying support means and drive-force application means
CN200410057621XA CN1583531B (zh) 2003-08-21 2004-08-20 输送装置
CN2010101029988A CN101767720B (zh) 2003-08-21 2004-08-20 输送装置
KR1020040065862A KR101112509B1 (ko) 2003-08-21 2004-08-20 반송 시스템
KR1020110049465A KR101152708B1 (ko) 2003-08-21 2011-05-25 반송 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003326285A JP4186112B2 (ja) 2003-09-18 2003-09-18 搬送システム

Publications (3)

Publication Number Publication Date
JP2005089130A JP2005089130A (ja) 2005-04-07
JP2005089130A5 true JP2005089130A5 (enExample) 2008-05-08
JP4186112B2 JP4186112B2 (ja) 2008-11-26

Family

ID=34456515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003326285A Expired - Fee Related JP4186112B2 (ja) 2003-08-21 2003-09-18 搬送システム

Country Status (1)

Country Link
JP (1) JP4186112B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100881205B1 (ko) * 2007-05-23 2009-02-05 아이시스(주) 시소운동타입 공정 챔버용 이송장치
JP2009032984A (ja) * 2007-07-27 2009-02-12 Myotoku Ltd 浮上搬送ユニット
KR100899363B1 (ko) 2008-07-11 2009-05-26 주식회사 인아텍 기판의 경사조절장치
KR101451506B1 (ko) * 2013-04-17 2014-10-17 삼성전기주식회사 비접촉 기판이송 반전기
CN108238448A (zh) * 2018-02-11 2018-07-03 贾凤鸣 一种玻璃上料装置
CN120135805A (zh) * 2025-05-15 2025-06-13 连云港同达高新技术有限公司 一种玻璃加工用智能输送台

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