JP4243350B2 - Beを含んだ▲2▼―▲6▼族青・緑色レーザダイオード - Google Patents
Beを含んだ▲2▼―▲6▼族青・緑色レーザダイオード Download PDFInfo
- Publication number
- JP4243350B2 JP4243350B2 JP50290398A JP50290398A JP4243350B2 JP 4243350 B2 JP4243350 B2 JP 4243350B2 JP 50290398 A JP50290398 A JP 50290398A JP 50290398 A JP50290398 A JP 50290398A JP 4243350 B2 JP4243350 B2 JP 4243350B2
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- JP
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- Prior art keywords
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- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 238000005253 cladding Methods 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 27
- 230000003287 optical effect Effects 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 7
- 230000007704 transition Effects 0.000 claims description 5
- 229910052711 selenium Inorganic materials 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 48
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 31
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 29
- 229910015894 BeTe Inorganic materials 0.000 description 21
- 239000000203 mixture Substances 0.000 description 15
- 238000001451 molecular beam epitaxy Methods 0.000 description 13
- 229910052790 beryllium Inorganic materials 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 239000010931 gold Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000002128 reflection high energy electron diffraction Methods 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 229910007709 ZnTe Inorganic materials 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052749 magnesium Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229910052717 sulfur Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000000992 sputter etching Methods 0.000 description 2
- QNRATNLHPGXHMA-XZHTYLCXSA-N (r)-(6-ethoxyquinolin-4-yl)-[(2s,4s,5r)-5-ethyl-1-azabicyclo[2.2.2]octan-2-yl]methanol;hydrochloride Chemical group Cl.C([C@H]([C@H](C1)CC)C2)CN1[C@@H]2[C@H](O)C1=CC=NC2=CC=C(OCC)C=C21 QNRATNLHPGXHMA-XZHTYLCXSA-N 0.000 description 1
- 241000408659 Darpa Species 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/347—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIBVI compounds, e.g. ZnCdSe- laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2304/00—Special growth methods for semiconductor lasers
- H01S2304/02—MBE
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/327—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIBVI compounds, e.g. ZnCdSe-laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3409—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers special GRINSCH structures
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US2089396P | 1996-06-27 | 1996-06-27 | |
| US08/726,618 | 1996-10-07 | ||
| US08/726,618 US5818859A (en) | 1996-06-27 | 1996-10-07 | Be-containing II-VI blue-green laser diodes |
| US60/020,893 | 1996-10-07 | ||
| PCT/US1997/000612 WO1997050159A1 (en) | 1996-06-27 | 1997-01-16 | Be-CONTAINING II-VI BLUE-GREEN LASER DIODES |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007166312A Division JP2007324607A (ja) | 1996-06-27 | 2007-06-25 | Ii−vi族化合物半導体レーザダイオード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000513146A JP2000513146A (ja) | 2000-10-03 |
| JP2000513146A5 JP2000513146A5 (enExample) | 2004-11-18 |
| JP4243350B2 true JP4243350B2 (ja) | 2009-03-25 |
Family
ID=26694025
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50290398A Expired - Lifetime JP4243350B2 (ja) | 1996-06-27 | 1997-01-16 | Beを含んだ▲2▼―▲6▼族青・緑色レーザダイオード |
| JP2007166312A Pending JP2007324607A (ja) | 1996-06-27 | 2007-06-25 | Ii−vi族化合物半導体レーザダイオード |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007166312A Pending JP2007324607A (ja) | 1996-06-27 | 2007-06-25 | Ii−vi族化合物半導体レーザダイオード |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5818859A (enExample) |
| EP (1) | EP1016175B1 (enExample) |
| JP (2) | JP4243350B2 (enExample) |
| AU (1) | AU1534997A (enExample) |
| DE (1) | DE69711942T2 (enExample) |
| MY (1) | MY114337A (enExample) |
| TW (1) | TW413959B (enExample) |
| WO (1) | WO1997050159A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6090637A (en) | 1997-02-13 | 2000-07-18 | 3M Innovative Properties Company | Fabrication of II-VI semiconductor device with BeTe buffer layer |
| US6214678B1 (en) * | 1997-05-21 | 2001-04-10 | Hughes Electronics Corp | Growth technique for low noise high electron mobility transistors by metal organic vapor phase epitaxy |
| DE19729186A1 (de) * | 1997-07-08 | 1999-01-14 | Siemens Ag | Verfahren zum Herstellen eines II-VI-Halbleiter-Bauelements |
| US5974070A (en) * | 1997-11-17 | 1999-10-26 | 3M Innovative Properties Company | II-VI laser diode with facet degradation reduction structure |
| JP3692269B2 (ja) * | 1999-01-29 | 2005-09-07 | シャープ株式会社 | 半導体レーザ素子及びその製造方法 |
| US7026653B2 (en) * | 2004-01-27 | 2006-04-11 | Lumileds Lighting, U.S., Llc | Semiconductor light emitting devices including current spreading layers |
| JP4920344B2 (ja) * | 2006-08-25 | 2012-04-18 | 株式会社日立製作所 | 半導体レーザ |
| US20110156002A1 (en) * | 2008-09-04 | 2011-06-30 | Leatherdale Catherine A | Light source having light blocking components |
| WO2010027648A1 (en) * | 2008-09-04 | 2010-03-11 | 3M Innovative Properties Company | I i-vi mqw vcsel on a heat sink optically pumped by a gan ld |
| US8385380B2 (en) * | 2008-09-04 | 2013-02-26 | 3M Innovative Properties Company | Monochromatic light source |
| US8518814B2 (en) | 2011-12-02 | 2013-08-27 | Northrop Grumman Systems Corporation | Methods of fabrication of high-density laser diode stacks |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2068339C (en) * | 1990-09-12 | 2001-08-14 | Narihito Matsumoto | Quantum well semiconductor laser device |
| US5375134A (en) * | 1991-02-21 | 1994-12-20 | Sony Corporation | Semiconductor light emitting device |
| US5404027A (en) * | 1991-05-15 | 1995-04-04 | Minnesota Mining & Manufacturing Compay | Buried ridge II-VI laser diode |
| CN1119358A (zh) * | 1991-05-15 | 1996-03-27 | 明尼苏达州采矿制造公司 | 蓝-绿激光二极管 |
| US5406574A (en) * | 1991-10-23 | 1995-04-11 | Kabushiki Kaisha Toshiba | Semiconductor laser device |
| SG77568A1 (en) * | 1992-02-19 | 2001-01-16 | Sony Corp | Semiconductor laser |
| JPH06104533A (ja) * | 1992-09-22 | 1994-04-15 | Matsushita Electric Ind Co Ltd | 青色発光素子およびその製造方法 |
| US5422902A (en) * | 1993-07-02 | 1995-06-06 | Philips Electronics North America Corporation | BeTe-ZnSe graded band gap ohmic contact to p-type ZnSe semiconductors |
| JP3239550B2 (ja) * | 1993-08-30 | 2001-12-17 | ソニー株式会社 | 半導体レーザ |
| JPH07232999A (ja) * | 1994-02-21 | 1995-09-05 | Kobe Steel Ltd | ZnSe系単結晶及びその製造方法 |
| JP3233330B2 (ja) * | 1994-08-23 | 2001-11-26 | 松下電器産業株式会社 | 半導体発光素子及びその製造方法 |
| JPH0870155A (ja) * | 1994-08-29 | 1996-03-12 | Nippon Telegr & Teleph Corp <Ntt> | 半導体発光素子 |
| JPH0897518A (ja) * | 1994-09-28 | 1996-04-12 | Sony Corp | 半導体発光素子 |
| JP2586349B2 (ja) * | 1994-11-17 | 1997-02-26 | 日本電気株式会社 | 半導体発光素子 |
| DE19542241C2 (de) * | 1995-11-13 | 2003-01-09 | Siemens Ag | Optoelektronisches Bauelement in II-VI-Halbleitermaterial |
-
1996
- 1996-10-07 US US08/726,618 patent/US5818859A/en not_active Expired - Lifetime
-
1997
- 1997-01-16 AU AU15349/97A patent/AU1534997A/en not_active Abandoned
- 1997-01-16 EP EP97901454A patent/EP1016175B1/en not_active Expired - Lifetime
- 1997-01-16 DE DE69711942T patent/DE69711942T2/de not_active Expired - Lifetime
- 1997-01-16 JP JP50290398A patent/JP4243350B2/ja not_active Expired - Lifetime
- 1997-01-16 WO PCT/US1997/000612 patent/WO1997050159A1/en not_active Ceased
- 1997-03-17 MY MYPI97001122A patent/MY114337A/en unknown
- 1997-05-10 TW TW086106235A patent/TW413959B/zh not_active IP Right Cessation
-
2007
- 2007-06-25 JP JP2007166312A patent/JP2007324607A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP1016175A1 (en) | 2000-07-05 |
| AU1534997A (en) | 1998-01-14 |
| DE69711942D1 (de) | 2002-05-16 |
| JP2007324607A (ja) | 2007-12-13 |
| DE69711942T2 (de) | 2002-09-12 |
| TW413959B (en) | 2000-12-01 |
| MY114337A (en) | 2002-09-30 |
| US5818859A (en) | 1998-10-06 |
| EP1016175B1 (en) | 2002-04-10 |
| WO1997050159A1 (en) | 1997-12-31 |
| JP2000513146A (ja) | 2000-10-03 |
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