JP4212106B2 - ガス分離装置及びガス分離方法 - Google Patents

ガス分離装置及びガス分離方法 Download PDF

Info

Publication number
JP4212106B2
JP4212106B2 JP2005120668A JP2005120668A JP4212106B2 JP 4212106 B2 JP4212106 B2 JP 4212106B2 JP 2005120668 A JP2005120668 A JP 2005120668A JP 2005120668 A JP2005120668 A JP 2005120668A JP 4212106 B2 JP4212106 B2 JP 4212106B2
Authority
JP
Japan
Prior art keywords
gas
separation
column
pfc
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005120668A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006297245A5 (enExample
JP2006297245A (ja
Inventor
義宣 田嶋
高志 二ツ木
哲也 阿部
貞光 丹澤
成治 廣木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organo Corp
Original Assignee
Organo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2005120668A priority Critical patent/JP4212106B2/ja
Application filed by Organo Corp filed Critical Organo Corp
Priority to US11/912,125 priority patent/US7892322B2/en
Priority to PCT/JP2006/308197 priority patent/WO2006112472A1/ja
Priority to EP06732104A priority patent/EP1872847A4/en
Priority to KR1020077026882A priority patent/KR20080011205A/ko
Priority to TW095113893A priority patent/TWI359691B/zh
Publication of JP2006297245A publication Critical patent/JP2006297245A/ja
Publication of JP2006297245A5 publication Critical patent/JP2006297245A5/ja
Application granted granted Critical
Publication of JP4212106B2 publication Critical patent/JP4212106B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/10—Nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40001—Methods relating to additional, e.g. intermediate, treatment of process gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/416—Further details for adsorption processes and devices involving cryogenic temperature treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0423—Beds in columns
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Treating Waste Gases (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Hydrogen, Water And Hydrids (AREA)
JP2005120668A 2005-04-19 2005-04-19 ガス分離装置及びガス分離方法 Expired - Fee Related JP4212106B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005120668A JP4212106B2 (ja) 2005-04-19 2005-04-19 ガス分離装置及びガス分離方法
PCT/JP2006/308197 WO2006112472A1 (ja) 2005-04-19 2006-04-19 ガス分離装置及びガス分離方法
EP06732104A EP1872847A4 (en) 2005-04-19 2006-04-19 APPARATUS AND METHOD FOR SEPARATING GAS
KR1020077026882A KR20080011205A (ko) 2005-04-19 2006-04-19 가스 분리 장치 및 가스 분리 방법
US11/912,125 US7892322B2 (en) 2005-04-19 2006-04-19 Apparatus and method for separating gas
TW095113893A TWI359691B (en) 2005-04-19 2006-04-19 Gas separating device and gas separating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005120668A JP4212106B2 (ja) 2005-04-19 2005-04-19 ガス分離装置及びガス分離方法

Publications (3)

Publication Number Publication Date
JP2006297245A JP2006297245A (ja) 2006-11-02
JP2006297245A5 JP2006297245A5 (enExample) 2007-09-20
JP4212106B2 true JP4212106B2 (ja) 2009-01-21

Family

ID=37115186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005120668A Expired - Fee Related JP4212106B2 (ja) 2005-04-19 2005-04-19 ガス分離装置及びガス分離方法

Country Status (6)

Country Link
US (1) US7892322B2 (enExample)
EP (1) EP1872847A4 (enExample)
JP (1) JP4212106B2 (enExample)
KR (1) KR20080011205A (enExample)
TW (1) TWI359691B (enExample)
WO (1) WO2006112472A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009018269A (ja) * 2007-07-12 2009-01-29 Japan Organo Co Ltd ガス分離装置及びガス分離方法
JP2012194042A (ja) * 2011-03-16 2012-10-11 Taiyo Nippon Sanso Corp ガス分析計用前処理装置
TWI490029B (zh) * 2012-07-20 2015-07-01 Kern Energy Entpr Co Ltd 氣體回收系統
KR20150026707A (ko) 2013-08-30 2015-03-11 주식회사 코캣 저농도 sf6 가스 회수장치 및 회수방법
US10315002B2 (en) 2015-03-24 2019-06-11 Ventec Life Systems, Inc. Ventilator with integrated oxygen production
US11247015B2 (en) 2015-03-24 2022-02-15 Ventec Life Systems, Inc. Ventilator with integrated oxygen production
US10773049B2 (en) 2016-06-21 2020-09-15 Ventec Life Systems, Inc. Cough-assist systems with humidifier bypass
US11191915B2 (en) 2018-05-13 2021-12-07 Ventec Life Systems, Inc. Portable medical ventilator system using portable oxygen concentrators
KR20210014577A (ko) * 2019-07-29 2021-02-09 에이에스엠 아이피 홀딩 비.브이. 불소 제거를 이용해서 구조물을 형성하는 방법
GB2588908B (en) * 2019-11-13 2022-04-20 Edwards Ltd Inert gas recovery from a semiconductor manufacturing tool
US12440634B2 (en) 2020-12-21 2025-10-14 Ventec Life Systems, Inc. Ventilator systems with integrated oxygen delivery, and associated devices and methods
CN119701628B (zh) * 2024-12-16 2025-12-30 安庆市长三角未来产业研究院 一种六氟化硫降解装置和方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4194892A (en) * 1978-06-26 1980-03-25 Union Carbide Corporation Rapid pressure swing adsorption process with high enrichment factor
JPH07100604B2 (ja) * 1986-09-12 1995-11-01 日本酸素株式会社 ネオン、ヘリウムの製造方法
JP2848557B2 (ja) 1987-06-18 1999-01-20 三菱瓦斯化学株式会社 水素の精製法
JP3210812B2 (ja) 1994-10-07 2001-09-25 日本原子力研究所 水素同位体とヘリウムの分離方法及び装置
JP2741743B2 (ja) * 1994-11-17 1998-04-22 工業技術院長 二酸化炭素の高温分離法
US5840953A (en) 1995-11-16 1998-11-24 Eagle-Picher Industries, Inc. Purified tetraethoxysilane and method of purifying
US5626033A (en) * 1996-07-12 1997-05-06 The Boc Group, Inc. Process for the recovery of perfluorinated compounds
US5720797A (en) * 1996-12-18 1998-02-24 Alliedsignal Inc. Process for recovering sulfur hexafluoride
JP3654477B2 (ja) * 1997-02-17 2005-06-02 独立行政法人科学技術振興機構 パラメトリックガスクロマトグラフィーによる気体のバルク分離方法
JP3356965B2 (ja) * 1997-06-20 2002-12-16 株式会社日立製作所 Ｓｆ６ガス回収・精製処理装置及び方法
US5976222A (en) * 1998-03-23 1999-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series
DE19910678A1 (de) * 1998-08-20 2000-09-14 Solvay Fluor & Derivate Verfahren zur Reinigung von SF¶6¶-kontaminierten Gasen
EP1048337A1 (en) * 1999-04-28 2000-11-02 Air Products And Chemicals, Inc. Recovery of perfluorinated compounds from the exhaust of semiconductors fabrications with recycle of vaccum pump dilutent
WO2001089666A1 (en) * 2000-05-26 2001-11-29 Showa Denko K.K. Composition and method for rendering halogen-containing gas harmless
JP2002035528A (ja) * 2000-07-26 2002-02-05 Japan Atom Energy Res Inst ガス分離装置
JP5093635B2 (ja) * 2001-03-21 2012-12-12 独立行政法人日本原子力研究開発機構 ガス分離装置
JP4538622B2 (ja) 2003-07-29 2010-09-08 オルガノ株式会社 ガス分離装置
JP2009018269A (ja) * 2007-07-12 2009-01-29 Japan Organo Co Ltd ガス分離装置及びガス分離方法

Also Published As

Publication number Publication date
EP1872847A1 (en) 2008-01-02
WO2006112472A1 (ja) 2006-10-26
US7892322B2 (en) 2011-02-22
KR20080011205A (ko) 2008-01-31
TW200706232A (en) 2007-02-16
EP1872847A4 (en) 2010-04-21
TWI359691B (en) 2012-03-11
US20090056540A1 (en) 2009-03-05
JP2006297245A (ja) 2006-11-02

Similar Documents

Publication Publication Date Title
KR101107196B1 (ko) 가스 분리 장치 및 가스 분리 방법
EP1175933B1 (en) Gas separation apparatus
CN101547857B (zh) 氙回收系统及回收设备
JP3152389B2 (ja) 膜によるフルオロケミカルの分離回収方法
JP4212106B2 (ja) ガス分離装置及びガス分離方法
US6530980B2 (en) Gas separation apparatus
JP5093635B2 (ja) ガス分離装置
JP2019195758A (ja) ガス分離装置及びガス分離方法
JP4538622B2 (ja) ガス分離装置
JP4683543B2 (ja) ガス分離方法及びガス分離装置
JP2020006324A (ja) ガス分離装置及びガス分離方法
KR101420082B1 (ko) 불화가스 분리 및 농축장치, 및 이를 이용한 불화가스 분리 및 농축방법
JP4787550B2 (ja) ガス分離方法及びガス分離装置
US6702874B2 (en) Gas separation apparatus and gas separation method
JP4683544B2 (ja) ガス分離方法及びガス分離装置
JP2000005561A (ja) フッ化物の処理方法
JP2005046746A (ja) ガス分離装置
Futatsuki et al. Low cost and compact solution for recycling PFCs by the continuous gas chromatography

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070802

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20071129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080408

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080603

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20081007

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20081027

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111107

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111107

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111107

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121107

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121107

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131107

Year of fee payment: 5

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees