JP4162892B2 - 半導体ウェハおよびその製造方法 - Google Patents

半導体ウェハおよびその製造方法 Download PDF

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Publication number
JP4162892B2
JP4162892B2 JP2002004124A JP2002004124A JP4162892B2 JP 4162892 B2 JP4162892 B2 JP 4162892B2 JP 2002004124 A JP2002004124 A JP 2002004124A JP 2002004124 A JP2002004124 A JP 2002004124A JP 4162892 B2 JP4162892 B2 JP 4162892B2
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JP
Japan
Prior art keywords
wafer
semiconductor wafer
inclined surface
main surface
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002004124A
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English (en)
Japanese (ja)
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JP2003209033A (ja
JP2003209033A5 (https=
Inventor
英樹 栗田
正志 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mining Holdings Inc
Original Assignee
Nippon Mining and Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2002004124A priority Critical patent/JP4162892B2/ja
Application filed by Nippon Mining and Metals Co Ltd filed Critical Nippon Mining and Metals Co Ltd
Priority to DE60217977T priority patent/DE60217977T2/de
Priority to US10/472,518 priority patent/US6900522B2/en
Priority to PCT/JP2002/013164 priority patent/WO2003060965A1/ja
Priority to EP02786107A priority patent/EP1465242B1/en
Priority to CNB028081331A priority patent/CN1269185C/zh
Priority to KR10-2003-7012325A priority patent/KR100536932B1/ko
Priority to TW092100105A priority patent/TWI291724B/zh
Publication of JP2003209033A publication Critical patent/JP2003209033A/ja
Publication of JP2003209033A5 publication Critical patent/JP2003209033A5/ja
Application granted granted Critical
Publication of JP4162892B2 publication Critical patent/JP4162892B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
    • H10P90/12—Preparing bulk and homogeneous wafers
    • H10P90/128—Preparing bulk and homogeneous wafers by edge treatment, e.g. chamfering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901—Materials
    • H10P14/2907—Materials being Group IIIA-VA materials
    • H10P14/2909—Phosphides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2924—Structures
    • H10P14/2925—Surface structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2926—Crystal orientations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3418—Phosphides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3414—Deposited materials, e.g. layers characterised by the chemical composition being group IIIA-VIA materials
    • H10P14/3421—Arsenides

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
JP2002004124A 2002-01-11 2002-01-11 半導体ウェハおよびその製造方法 Expired - Lifetime JP4162892B2 (ja)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2002004124A JP4162892B2 (ja) 2002-01-11 2002-01-11 半導体ウェハおよびその製造方法
US10/472,518 US6900522B2 (en) 2002-01-11 2002-12-17 Chamfered semiconductor wafer and method of manufacturing the same
PCT/JP2002/013164 WO2003060965A1 (en) 2002-01-11 2002-12-17 Semiconductor wafer and method for producing the same
EP02786107A EP1465242B1 (en) 2002-01-11 2002-12-17 Semiconductor wafer and method for producing the same
DE60217977T DE60217977T2 (de) 2002-01-11 2002-12-17 Halbleiterwafer und verfahren zu dessen herstellung
CNB028081331A CN1269185C (zh) 2002-01-11 2002-12-17 半导体晶片及其制造方法
KR10-2003-7012325A KR100536932B1 (ko) 2002-01-11 2002-12-17 반도체 웨이퍼 및 그 제조 방법
TW092100105A TWI291724B (en) 2002-01-11 2003-01-03 Semiconductor wafer and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002004124A JP4162892B2 (ja) 2002-01-11 2002-01-11 半導体ウェハおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2003209033A JP2003209033A (ja) 2003-07-25
JP2003209033A5 JP2003209033A5 (https=) 2005-03-17
JP4162892B2 true JP4162892B2 (ja) 2008-10-08

Family

ID=19190960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002004124A Expired - Lifetime JP4162892B2 (ja) 2002-01-11 2002-01-11 半導体ウェハおよびその製造方法

Country Status (8)

Country Link
US (1) US6900522B2 (https=)
EP (1) EP1465242B1 (https=)
JP (1) JP4162892B2 (https=)
KR (1) KR100536932B1 (https=)
CN (1) CN1269185C (https=)
DE (1) DE60217977T2 (https=)
TW (1) TWI291724B (https=)
WO (1) WO2003060965A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3580311B1 (ja) * 2003-03-28 2004-10-20 住友電気工業株式会社 表裏識別した矩形窒化物半導体基板
US20050161808A1 (en) * 2004-01-22 2005-07-28 Anderson Douglas G. Wafer, intermediate wafer assembly and associated method for fabricating a silicon on insulator wafer having an improved edge profile
US8710665B2 (en) * 2008-10-06 2014-04-29 Infineon Technologies Ag Electronic component, a semiconductor wafer and a method for producing an electronic component
US20120028555A1 (en) * 2010-07-30 2012-02-02 Memc Electronic Materials, Inc. Grinding Tool For Trapezoid Grinding Of A Wafer
JP2013008769A (ja) * 2011-06-23 2013-01-10 Sumitomo Electric Ind Ltd 炭化珪素基板の製造方法
TWI473283B (zh) * 2011-09-21 2015-02-11 國立清華大學 晶片
JP6130995B2 (ja) * 2012-02-20 2017-05-17 サンケン電気株式会社 エピタキシャル基板及び半導体装置
JP2015018960A (ja) * 2013-07-11 2015-01-29 三菱電機株式会社 半導体装置の製造方法
JP6045542B2 (ja) * 2014-09-11 2016-12-14 信越半導体株式会社 半導体ウェーハの加工方法、貼り合わせウェーハの製造方法、及びエピタキシャルウェーハの製造方法
US10199216B2 (en) * 2015-12-24 2019-02-05 Infineon Technologies Austria Ag Semiconductor wafer and method
JP6750592B2 (ja) * 2017-08-15 2020-09-02 信越半導体株式会社 シリコンウエーハのエッジ形状の評価方法および評価装置、シリコンウエーハ、ならびにその選別方法および製造方法
JP7067465B2 (ja) * 2018-12-27 2022-05-16 株式会社Sumco 半導体ウェーハの評価方法及び半導体ウェーハの製造方法
JP7549322B2 (ja) * 2020-04-01 2024-09-11 株式会社ノベルクリスタルテクノロジー 半導体基板及びその製造方法
EP4170700A4 (en) * 2021-09-07 2024-01-03 JX Nippon Mining & Metals Corporation INDIUM PHOSPHIDE SUBSTRATE

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504544B1 (https=) * 1970-12-21 1975-02-20
JPH0624179B2 (ja) * 1989-04-17 1994-03-30 信越半導体株式会社 半導体シリコンウェーハおよびその製造方法
JP2719855B2 (ja) * 1991-05-24 1998-02-25 信越半導体株式会社 ウエーハ外周の鏡面面取り装置
JP3027882B2 (ja) * 1992-07-31 2000-04-04 信越半導体株式会社 ウエーハ面取部研磨装置
JP2825048B2 (ja) * 1992-08-10 1998-11-18 信越半導体株式会社 半導体シリコン基板
JP2827885B2 (ja) * 1994-02-12 1998-11-25 信越半導体株式会社 半導体単結晶基板およびその製造方法
JPH09251934A (ja) * 1996-03-18 1997-09-22 Hitachi Ltd 半導体集積回路装置の製造方法および半導体ウエハ
JP3328193B2 (ja) * 1998-07-08 2002-09-24 信越半導体株式会社 半導体ウエーハの製造方法
JP3516203B2 (ja) * 1999-11-08 2004-04-05 株式会社日鉱マテリアルズ 化合物半導体ウェハ
JP4846915B2 (ja) * 2000-03-29 2011-12-28 信越半導体株式会社 貼り合わせウェーハの製造方法

Also Published As

Publication number Publication date
EP1465242A1 (en) 2004-10-06
JP2003209033A (ja) 2003-07-25
KR100536932B1 (ko) 2005-12-14
DE60217977D1 (de) 2007-03-22
CN1269185C (zh) 2006-08-09
US6900522B2 (en) 2005-05-31
TW200301931A (en) 2003-07-16
WO2003060965A1 (en) 2003-07-24
EP1465242B1 (en) 2007-01-31
US20040113236A1 (en) 2004-06-17
EP1465242A4 (en) 2005-08-17
CN1502117A (zh) 2004-06-02
TWI291724B (en) 2007-12-21
KR20040064612A (ko) 2004-07-19
DE60217977T2 (de) 2007-05-24

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