JP4117843B2 - スピンコート装置 - Google Patents

スピンコート装置 Download PDF

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Publication number
JP4117843B2
JP4117843B2 JP2003429087A JP2003429087A JP4117843B2 JP 4117843 B2 JP4117843 B2 JP 4117843B2 JP 2003429087 A JP2003429087 A JP 2003429087A JP 2003429087 A JP2003429087 A JP 2003429087A JP 4117843 B2 JP4117843 B2 JP 4117843B2
Authority
JP
Japan
Prior art keywords
coater
cup
recording material
inner cup
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2003429087A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005190532A (ja
Inventor
孝祐 稲谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP2003429087A priority Critical patent/JP4117843B2/ja
Priority to DE112004002534T priority patent/DE112004002534T5/de
Priority to PCT/JP2004/018793 priority patent/WO2005063409A1/ja
Priority to CNB2004800387305A priority patent/CN100528378C/zh
Priority to CN2009100077731A priority patent/CN101518770B/zh
Priority to TW93139732A priority patent/TWI264721B/zh
Publication of JP2005190532A publication Critical patent/JP2005190532A/ja
Application granted granted Critical
Publication of JP4117843B2 publication Critical patent/JP4117843B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Landscapes

  • Coating Apparatus (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2003429087A 2003-12-25 2003-12-25 スピンコート装置 Expired - Fee Related JP4117843B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2003429087A JP4117843B2 (ja) 2003-12-25 2003-12-25 スピンコート装置
DE112004002534T DE112004002534T5 (de) 2003-12-25 2004-12-16 Vorrichtung zur Rotationsbeschichtung
PCT/JP2004/018793 WO2005063409A1 (ja) 2003-12-25 2004-12-16 スピンコート装置
CNB2004800387305A CN100528378C (zh) 2003-12-25 2004-12-16 旋涂装置
CN2009100077731A CN101518770B (zh) 2003-12-25 2004-12-16 旋涂装置
TW93139732A TWI264721B (en) 2003-12-25 2004-12-21 Spin coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003429087A JP4117843B2 (ja) 2003-12-25 2003-12-25 スピンコート装置

Publications (2)

Publication Number Publication Date
JP2005190532A JP2005190532A (ja) 2005-07-14
JP4117843B2 true JP4117843B2 (ja) 2008-07-16

Family

ID=34736292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003429087A Expired - Fee Related JP4117843B2 (ja) 2003-12-25 2003-12-25 スピンコート装置

Country Status (5)

Country Link
JP (1) JP4117843B2 (zh)
CN (2) CN100528378C (zh)
DE (1) DE112004002534T5 (zh)
TW (1) TWI264721B (zh)
WO (1) WO2005063409A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HUE036191T2 (hu) 2006-03-01 2018-06-28 Tokuyama Corp Eljárás többrétegû anyag elõállítására
JP5457866B2 (ja) * 2010-02-08 2014-04-02 株式会社日立ハイテクノロジーズ スピンコート方法及びスピンコーター
CN106111465B (zh) * 2016-07-29 2018-10-23 芜湖市振华戎科智能科技有限公司 一种加密光盘生产线用旋涂装置
CN107116007A (zh) * 2017-06-20 2017-09-01 柴德维 用于橡胶零部件的涂胶工装
CN113655167A (zh) * 2020-05-12 2021-11-16 国家烟草质量监督检验中心 一种滤片自动涂液装置测定卷烟主流烟气中氨含量的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5889966A (ja) * 1981-11-24 1983-05-28 Hitachi Ltd 塗布装置
JP3002368B2 (ja) * 1993-11-12 2000-01-24 東京応化工業株式会社 回転カップ式液体供給装置
DE19748063A1 (de) * 1997-10-31 1999-05-06 Acr Automation In Cleanroom Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens
JP2003047903A (ja) * 2001-08-08 2003-02-18 Dainippon Screen Mfg Co Ltd 基板処理装置及びその整流板

Also Published As

Publication number Publication date
DE112004002534T5 (de) 2006-12-07
CN101518770A (zh) 2009-09-02
WO2005063409A1 (ja) 2005-07-14
CN101518770B (zh) 2011-01-12
CN1898031A (zh) 2007-01-17
JP2005190532A (ja) 2005-07-14
TW200529222A (en) 2005-09-01
CN100528378C (zh) 2009-08-19
TWI264721B (en) 2006-10-21

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