200529222 九、發明說明： 【發明所屬之技術領域】 本發明，係關於用以將液體塗布於各種碟片之旋塗裝 置。 本案主張2003年12月25日申請之日本特願 2003-429087號之優先權，將其内容援用於此。 【先前技術】 例如，在CD-R、DVD-R、DVD + R等覆寫型光碟之製程， 藉由旋塗裝置將碟片基板依既定之旋轉模式旋轉，藉此， 以離心力將記錄材料之溶液擴展至碟片基板全面，將多餘 之溶液甩開，俾形成厚度均一之記錄層。 要旋塗1片碟片基板所供應之溶液量，-般係〇」 又’、中土布於碟片基板上之溶液，即供形成記錄膜實 際所使用之溶液係50%以下。除此以外之溶液或記錄材料， 則透過塗布11杯、时用_部时於回收容器。 供形成記錄層之旋塗奘署私兮 尔與光碟之保護膜形成用、 …體之光阻膜形成用的旋塗裝置不㈣，所塗布之溶 液大部分係由溶劑與溶解於該溶劑之色素材料所構成。例 如，一般之記錄材料溶液，係以有機溶劑溶解酞花青色辛、 花青色素、偶氮色素等之有機色素溶液之情形為多=， 因溶劑會短時間蒸發，致使色素 曰 性高之狀態，故為了要右… 成固肖狀之黏 對策。 為了要有效率地回收記錄材料，必須施加 在旋塗時被电開之剩餘有機色素溶液的色素材料，會 200529222 附著於塗布器蓋之内壁而變 洛妄、六+ 右後來所甩開之多餘有機 附著之色素材料碰撞，則回彈之剩餘有機色 “:：：再附著於碟“板’而導致良品率之降低。 將承集於塗布器杯之記錄材料溶 回收容器之機構，若不將㈣ 合在迚中廍各 &田 、路进里鈿紐，記錄材料則 ::二 茂通路漸漸變成細小，而不容易 ▲動，故洛液之回收作業則成 H、六Μ从 成為困難。又，在旋塗裝置雖 5又置整机構件，俾防止使溶 、力浐絲A , 之務滴繞至碟片基板之背 戈在二：二Γ“則’但亦有在該整流構件附著記錄材料， 或在内杯與塗布器杯之抵接處㈣記錄材料的情形。 在日本特開平9_27146 节八鉬& π π 。Α報及日本特開2003-6948 5虎Α報，為了要解決記錄材 形，已分別提案：設置洗淨裝置各部分之不良情 « ^ x置，將裝置内部定期洗淨； 及將e己錄材料；谷液通過排洩部回收之裝置。 【發明内容】 然而，即使施加如上述之洗淨’仍無法完全防止 材料之附著或堆積’而有對 ' 時，旋塗裝置之停止時間長2:者之記錄材料之去除費 =因CD-R|R、_"覆寫型光碟之製造 衣 刀係具備4個以上之塗布器杯，此等塗布 保養所需要之時間相當長， D。不之 造成阻礙。 ❿心^置之❹效率提昇 本發明之旋塗裝置’其特徵在於具備：旋轉台，用以 保持碟片基板；旋轉機構，用以使該旋轉台旋轉；塗布= 200529222 I包圍5亥旋轉台，將從保持於該旋轉台上之碟片基板甩 開之液體擋住；内杯，將順延該塗布器蓋滴落之液體播住 且保持；及塗布器杯，用以支撲該内杯；該内杯係能^亥 Mil杯卸下。依此裝i ’能將捕集液體之内杯簡單卸下 來父換或洗淨，而能提高旋塗裝置之運轉效率。 此裝置，亦可進一步具備配置於該旋轉台周圍的整流 構件’用以防止液體繞至該旋轉台或碟片基板之下側。該 整流構件亦可具有：内側固定部分，固定於該内杯；及;: 側裝卸部a ’設置成能從該内洲定部分卸下；該外側裝 卸部^，具有比該旋轉台之直徑為大之内徑。依此裝置，、 不僅藉由整流構件能防止液體繞至旋轉台或碟片基板之下 X並且因藉由從整流構件之内側固定部分卸下外側裂卸 部分，使内杯能容易卸下，故亦不會阻礙維修性。 該塗布器蓋，亦可具有朝該内杯内往下方突出 之裙部。在此掩形 實滴落於内杯。…附著於塗布器蓋之液體從插部確 供應=置在具至碟片基板之液體 # 乂在"亥塗布淼盍，為了防止液體供應 枝;構之液體堵塞，亦 方了形成至少1個試滴用孔，俾於液體 :Μ ’使錢滴之液體流入該内杯。在此情形， 杯回收該試滴之、波雕 壯 /肢’而不須設置另外之回收機構。 ，裝置亦可進_步具備將液體供應至碟片基板之液 :科機構；在該塗布器蓋，為了防止該液體供應機構之 液體堵塞而形成5 + η 夕1個試滴用孔，俾於液體試滴時，使 200529222 該試滴之㈣流人該内杯㈣狀下端 口於該裙部之外側。在此情形， t、 口糸開 液體，並能抑制液體之霧滴附著於試滴用孔之出口滴之 在/亥裙部之外周面，亦可形成連結於該試滴用孔之出 口且沿上下方向延伸之槽。在此情形，試滴時從 之出口所排出之液體則圓滑地滴落於内杯，、夜^ 留於裙部之外面。 別液體殘 在該塗布器蓋之下面，亦# 成产壯娣甘s 了於6玄塗布益盍全周全面形 ^ ^ ’其通過比該試滴用孔之出σ更外周側而 形’能抑制液體順延塗布器蓋之下面而附著於裝置 亦可具有定位用卡止部 内杯或塗布器杯。在此情形 用孔與液體供應機構之定位 ，用以將該塗布器蓋定位於該 ，能使形成於塗布器蓋之試滴 谷易進行。 該内杯 在此情形， 該旋轉台， 徑。 ，亦可未具有供排出該記錄材料之排洩構造。 内杯之裝卸容易，液體亦不會附著於排洩部。 亦可具有與碟片基板之直徑相同或較大之直 【實施方式】 依圖1至圖6說明本發明之一實施例。圖i係表示本 發明之—實施例之旋塗裝4 1GG的截面圖。此裝置具有·· 有底圓筒狀之塗布器杯（c〇ater cup)1 ;圓形之旋轉台4, -己置於此塗布為杯丨之内側；圓環狀之内杯6，配置於塗 布為杯1内，但位於比旋轉台4更外側；圓環狀之整流構 200529222 件5 ’配置於此内女β彳 人才疋轉σ 4之間；及塗布 cover)?,配置於内杯6上。 冲。。盍（coater 在塗布器杯1 >圓泌处e 口形狀底邛1 a之中央， 朝上裝設。驅動馬達2之旋轉力藉 ：動馬達2 轉台4。旋轉台4，且有· 70傳達至旋 之基部4B，同軸形成於載置 ° 1 μ卜側，基部4β在F]虹从 合於心軸單元3。載置部4Α之 ”。 、、，。 且仅d 1 為了要確伴碟Η 基板s之平坦性，如圖2所 ^ 孕乂仏者為與碟片基200529222 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a spin coating device for applying liquid to various discs. This case claims the priority of Japanese Patent Application No. 2003-429087, filed on December 25, 2003, and incorporates its contents here. [Prior art] For example, in the process of overwriting optical discs such as CD-R, DVD-R, DVD + R, etc., the disc substrate is rotated in a predetermined rotation mode by a spin coating device, and the recording is performed by centrifugal force. The solution of the material is extended to the entire surface of the disc substrate, and the excess solution is thrown away to form a recording layer with a uniform thickness. To spin-coat the amount of solution supplied by one disc substrate, the general solution is 0 ″, and the solution of middle-earth cloth on the disc substrate, that is, the solution used for forming the recording film is 50% or less. For other solutions or recording materials, 11 cups are applied through the container. The spin-coating device for forming a recording layer for spin-coating, forming a protective film for an optical disc, ... for forming a photoresist film for a bulk body is not difficult, and most of the applied solution is composed of a solvent and dissolved in the solvent Made of pigment materials. For example, a general recording material solution is an organic pigment solution in which organic solvents such as phthalocyanine, cyanine pigment, and azo pigment are dissolved in an organic solvent. In many cases, the solvent evaporates in a short period of time, resulting in a high pigment state. , So in order to make the right ... sticky countermeasures like a solid shape. In order to efficiently recover the recording material, the pigment material of the remaining organic pigment solution that has been electrically turned on during spin coating must be applied. It will be attached to the inner wall of the applicator cover and become delirious. If the organically attached pigment material collides, the remaining organic color of the rebound "::: is re-attached to the plate" plate ", resulting in a decrease in the yield rate. The mechanism that dissolves the recording material collected in the applicator cup in the recovery container. If it is not combined with each of the fields, and the road and road, the recording material will be gradually reduced to a small, but It is easy to move, so the recovery operation of Luoye becomes H and 6M. In addition, although the spin coating device is provided with a whole mechanism, it is necessary to prevent the solvent and the wire from being threaded A, and the task of dripping to the back of the disc substrate is as follows: two "two" "then" but also in the rectification The recording material is attached to the member, or the recording material is in contact with the inner cup and the applicator cup. In Japanese Unexamined Patent Publication No. 9_27146 Section Eight Molybdenum & π π. Α and JP 2003-6948 5 Tiger Α, In order to solve the problem of the shape of the recording material, proposals have been made separately: set up the bad conditions of each part of the cleaning device «^ x, and regularly clean the inside of the device; and e have recorded materials; the device for the recovery of the valley liquid through the excretion department. [Invention Contents] However, even if cleaning is performed as described above, "the material cannot be completely prevented from adhering or accumulating," and there is a "pair," the spin-coating device has a long stop time 2: the removal fee for the recording material = due to CD-R | R, _ " Cloth knives for overwrite optical discs are equipped with more than 4 applicator cups. The time required for coating and maintenance is quite long. D. It does not cause obstacles. The spin coating device of the invention is characterized by including: a rotary table for protecting Hold the disc substrate; a rotating mechanism to rotate the turntable; coating = 200529222 I surrounds the 5H Rotary Stage and will be blocked by the liquid thrown away from the disc substrate held on the turntable; the inner cup will be extended to the The dripping liquid from the applicator cover is broadcasted and held; and the applicator cup is used to support the inner cup; the inner cup can be removed from the Mil Cup. According to this installation, the inner cup that can capture the liquid Simple removal and replacement or washing can improve the operation efficiency of the spin-coating device. This device can also be equipped with a rectifying member arranged around the turntable to prevent liquid from winding around the turntable or disc substrate. The lower side. The rectifying member may also have: an inner fixing portion fixed to the inner cup; and: a side loading and unloading portion a ′ provided to be detachable from the inner continent portion; and the outer loading and unloading portion ^, The diameter of the turntable is a large inner diameter. According to this device, not only can the liquid be prevented from winding around the turntable or the disc substrate X by the rectifying member, but also the outer crack can be removed by removing the inner fixed part of the rectifying member. Part, so that the inner cup can be easily removed, so Prevents maintainability. The applicator cover may also have a skirt projecting downwardly into the inner cup. Here, the cover is dripped into the inner cup .... The liquid adhered to the applicator cover is supplied from the insertion part. In order to prevent the liquid supply branch from clogging, the liquid # 乂 在 ”in the substrate of the disc substrate was used to form at least one test drop hole, and the liquid: Μ '使 钱 滴The liquid flows into the inner cup. In this case, the cup recovers the test drops and waves, and does not need to be provided with another recovery mechanism. The device can further be provided with a liquid that supplies the liquid to the disc substrate. : Scientific institution; in the applicator cover, in order to prevent the liquid supply mechanism from clogging, a 5 + η 1 test drop hole is formed, and when the liquid test drop is made, the flow of 200529222 test drop flows into the The cup-shaped lower port is outside the skirt. In this case, t, the liquid is opened in the mouth, and the droplet of the liquid can be prevented from adhering to the peripheral surface of the outlet of the test drop hole. Slots that extend up and down. In this case, the liquid discharged from the outlet at the time of the test drop smoothly drops into the inner cup, leaving the outer surface of the skirt at night. Do n’t leave liquid under the cover of the applicator, and also produce Zhuang 娣 Gan s in the entire shape of 6 xuan coating Yi 全面 full shape ^ ^ 'It is shaped on the outer peripheral side than the opening σ of the test drop hole' The liquid can be prevented from advancing under the applicator cover and attached to the device, and it may have an inner cup or an applicator cup for positioning. In this case, the positioning of the hole and the liquid supply mechanism is used to position the applicator cover thereon, so that the test drop valley formed on the applicator cover can be easily performed. The inner cup in this case, the rotary table, diameter. It is also possible that there is no excretion structure for discharging the recording material. The inner cup is easy to install and remove, and the liquid will not adhere to the excretion part. It may also have the same or larger diameter as the diameter of the disc substrate. [Embodiment] An embodiment of the present invention will be described with reference to FIGS. 1 to 6. Fig. I is a sectional view showing a spin coating 41GG of an embodiment of the present invention. This device has a bottomed cylindrical coater cup (coater cup) 1; a circular rotating table 4, which has been placed inside the coating cup; a ring-shaped inner cup 6, configured It is coated in the cup 1 but located more outward than the rotating table 4. The ring-shaped rectifying structure 200529222 pieces 5 'are arranged between the female β 彳 talents 疋 and σ 4; and coated cover) ?, arranged inside Cup 6 on. Rush. . Coat (coater is installed in the center of the applicator cup 1 > round mouth e-shaped bottom 邛 1 a, facing upwards. The rotation force of the drive motor 2 is: the motor 2 turntable 4. The turntable 4, and there is 70 Conveyed to the base 4B of the spin, it is coaxially formed on the side of the mounting ° 1 μ, and the base 4β is connected to the mandrel unit 3. The mounting part 4A of the ".", And, and only d 1 in order to confirm With the flatness of the substrate s, as shown in Figure 2
徑相等或較大，但若必要亦可比碟片基板s之直N 以同轴包圍旋轉台4之載置部4A之外周及下； 式’設置圓環狀之整流構件5。整流構件5，藉由後述之 吸引機構，使旋轉台4周圍之空氣朝直徑方向外方流動來 整流，使以離心力從碟片基板甩開之液體(例如記錄材 溶幻往直徑方向外方飛賤來限制，同時使記錄材料之ρ 滴不要繞至旋轉台4之下面及碟片基板5之下面。 務 本實施例之整流構件5，其特徵在於具備：圓環狀之 内側固定部分5A;及圓環狀之外側裝卸部& 5B，嵌合於 此内側固定部分5A之外周而能卸下。内側固定部分^，、 固定於固定部位（固定於塗布器杯丨，未圖示）。内側固定 部分5Α之内周面，以不接觸於旋轉纟4之圓筒狀基部2 之方式，具有同軸配置於圓筒狀基部4Β之外周面的圓筒 狀之内壁面。内側固定部分5Α之上面，從载置部“之^ 面起離一定之間隙而與載置部4Α平行配置。 内側固定部分5Α，係由外徑大之下側之大徑部5a，及 10 200529222 比該大徑部5a之直徑小之上側之小徑部5b形成。在大徑 部5a與小徑部5b之間，形成圓環狀之段差部5c。如圖2 所不，内側固定部分5A之大徑部5a及小徑部5b，分別具 有D2、D2 ’之直徑。 如圖7所示，亦可在内側固定部分5A之上面，形成與 方疋Ιτ σ 4同軸之圓環狀凸部1 〇，並且在與圓環狀凸部工〇 對向之旋轉台4之載置冑4A之下面，形成圓環狀槽12， 於圓環狀槽12全周，將圓環狀凸部1〇之前端留微小之間 隙插上。在此情形’液體之飛散所產生之霧滴則被圓環狀 凸部播住，更不容易滲人於載置部^與内側固定部分 5A之間隙。 構件5之外側裝卸部分㈤，具有與内側固定部分 5久之外周：及段差部5c幾乎無間隙地卡合的内周面及段 差部5d。藉由外側裝卸部分5 — 之奴差部5d抵接於内側固The diameter is equal or larger, but if necessary, it can be coaxially surround the outer periphery and the lower part of the mounting portion 4A of the rotary table 4 with the straight N of the disc substrate s; The rectifying member 5 rectifies the air around the turntable 4 outward in the diameter direction by a suction mechanism described later, so that the liquid (for example, the recording material melts away from the diameter direction and flies outward in the diameter direction by centrifugal force) Low to limit, at the same time so that the ρ drops of the recording material do not wind below the turntable 4 and below the disc substrate 5. The rectifying member 5 of this embodiment is characterized by having: a ring-shaped inner fixed portion 5A; And the ring-shaped outer side attaching and detaching part & 5B is fitted to the outer periphery of the inner fixing part 5A and can be detached. The inner fixing part ^, is fixed to a fixed position (fixed to the applicator cup 丨, not shown). The inner peripheral surface of the inner fixed portion 5A has a cylindrical inner wall surface coaxially disposed on the outer peripheral surface of the cylindrical base 4B so as not to contact the cylindrical base 2 of the rotary shaft 4. The inner fixed portion 5A The upper part is arranged parallel to the mounting part 4A with a certain gap from the surface of the mounting part. The inner fixing part 5A is formed by a large diameter part 5a on the lower side with a larger outer diameter, and 10 200529222 is larger than the larger diameter. The upper side of the portion 5a having a small diameter The small-diameter portion 5b is formed. Between the large-diameter portion 5a and the small-diameter portion 5b, an annular step portion 5c is formed. As shown in FIG. 2, the large-diameter portion 5a and the small-diameter portion 5b of the inner fixed portion 5A are respectively It has a diameter of D2, D2 '. As shown in FIG. 7, an annular convex portion 10, which is coaxial with the square 疋 Ιτσ4, can also be formed on the inner fixed portion 5A, and the annular convex portion can be formed on the inner fixed portion 5A. 〇 A ring-shaped groove 12 is formed below the mounting table 4A of the opposite rotating table 4 and a small gap is inserted at the front end of the ring-shaped convex portion 10 throughout the entire circumference of the ring-shaped groove 12. Here, In case 'the liquid droplets are scattered by the ring-shaped convex part, it is less likely to infiltrate the gap between the mounting part ^ and the inner fixing part 5A. The outer loading and unloading part 之外 of the member 5 is fixed to the inner side. The outer periphery of the part 5 is long: the inner peripheral surface and the step part 5d which are engaged with the step part 5c with almost no gap. The outer part 5d, the slave part 5d abuts against the inner part.
疋口P分5Δ之段差部5c，夕卜側穿知#八R 衣卸口P刀5β雖以内側固定部 刀 '支撐，但若舉起它則容易從内 以::外側裝卸部分5Β载置於内側固定部分5Α之狀二外 側I卸部分5β之形成圓 Μ ^ 4 ^ # 乂又門周面之上部5e，係從旋 口 載置部4A之外周面起離開_ _ al /0ιί ^ . 疋距離而同軸配置。 外側裝卸部分56之内周面 轉台4之载置邻4A夕古〆 be之直從D1，比才疋 η…1略大，直徑❹直徑IM之 差，係不接觸之程度或數 ”直4 面5f，# # & * t 外側裝卸部分5B之上 高度，或比之上面大致相同 之外側，形成越往外側 200529222 越降低之錐形面5g。 用以捕集剩餘溶液之 c θ , 内杯6，具備··圓筒狀之内壁部 6a ’具有比内侧固定 之直徑们；圓筒狀之外辟1之大控部5a之直aD2為大 钍入Jt # β @ 土邛6b ;及圓環狀之底板部6c， 、、、口 口此寺内壁部6a盥外辟邱 ^ ^ ^ /、卜土邛6b之底面來封閉。在本實施 例之底板部6 c並去招# 4 μ 、 士 工未形成§己錄材料排出用之排泡部。因此， :二=開之剩餘之溶液則回收於内杯6而積 !::=上部，形成向外方擴展之圓環狀之段差部6d， =大部6d之外周緣豎起之方式形成比外壁部此直 徑為大之圓環狀之大徑部6e。 直 在塗布器杯1之側壁部1 ΙΪ1严貼> 之上糙，形成向外方擴展之 a %狀之段差部lc，形成比 ,,,^ Λ 叫土 # 1 b直徑為大之大徑部 id。大徑部ld之内徑，係比大 若 &。卩6e之外徑略大之程度。 右將内杯6之段差部6d嵌 ^ ^ 瓦堂布态杯1之段差部lc， 内杯6之底板部6c，則抵接於涂右w 而祐古^ — 土布斋杯1之圓形狀底部la 而被支撐。猎此，内杯6藉由涂 支撐。 土布1^杯1以同軸方式穩定 塗布器蓋7，如圖3所示，呈古·门 e . L ^ 〆、有·圓裱狀之上面7b， 具有比碟片基板s之直徑為大之中 M.± hh ^ , a 之中央孔7a ;外壁部7c， 具有比内杯6之大徑部6e之直押畋丨^ 略小，旎收納於大徑部6e 之外偟，飛散抑制壁部7 d，用以抑制 圓铃也、 |制5己錄材料之液體飛散，· 圓同狀之裙部7e，從飛散抑制壁立 β肉·冋, u 7d之下端延伸至内杯 6内，Η壞狀之環狀槽7f，在裙邱7 之庙都η 4 ⑷7e之外側與塗布器蓋7 之底邛同軸形成；及試滴用孔7 g 接党記錄材料供應機構 12 200529222 亦可將試滴 8試滴時所排出之記錄材料之液體。若必要 用孔7 g設置複數個，或亦可省略。 t飛散抑制壁部7d，係向外側降低之錐形自，在與外側 K卸部分5B之錐形面5g之間離間隙配置。從碟片美# ^ ，外周甩，之溶液，與飛散抑制壁部7d碰撞飛 月丈抑制壁# 7d流下’傳至裙告p 7e，從其下部掉落於内杯 6内。亦可省略裙部7e，亦可僅在飛散抑制壁部μ之 端形成圓環狀之突起。The gap 5c in the P point of the mouth is 5Δ, and the side side is known. # 八 R The clothes unloading port P knife 5β is supported by the inner fixed part knife, but if it is lifted, it is easy to load from the inside: the outer loading and unloading part 5B. It is placed in the shape of the inner fixed part 5A and the outer part I of the unloading part 5β forms a circle M ^ 4 ^ # 乂 The upper part of the peripheral surface of the door 5e, leaving from the outer peripheral surface of the rotary mounting part 4A__ al / 0ιί ^疋 Distance and coaxial configuration. The placement of the turntable 4 on the inner peripheral surface of the outer loading and unloading portion 56 is adjacent to 4A, and the straight line is from D1, which is slightly larger than 疋 ... 1. The difference between the diameter and the diameter IM is the degree or number of non-contact. Surface 5f, # # & * t The height above the outer loading and unloading part 5B, or approximately the same as the upper side, forms a tapered surface 5g that decreases toward the outside 200529222. c θ for trapping the remaining solution, inside The cup 6 is provided with a cylindrical inner wall portion 6a 'having a diameter fixed to the inside; the straight aD2 of the large control portion 5a of the cylindrical outer portion 1 is a large-diameter Jt # β @ 土 邛 6b; and The ring-shaped bottom plate portion 6c is closed at the bottom of the inner wall portion 6a of the temple. ^ ^ ^ / Bu Tuo 6b is closed. In the bottom plate portion 6c of this embodiment, go to stroke # 4 μ, the non-skilled worker has not formed a bubble discharging part for discharging the recorded material. Therefore, the remaining solution of: 2 = open is recovered in the inner cup 6 to accumulate! :: = upper, forming a ring shape that expands outward The stepped portion 6d = the large portion 6d is erected outside the peripheral edge to form an annular large diameter portion 6e having a larger diameter than the outer wall portion. Straight on the side wall portion 1 of the applicator cup 1 ΙΪ1 is tightly adhered to the top, forming an a% -like step difference lc that expands outward, forming a ratio ,,,, ^ Λ called soil # 1 b The diameter is the large-diameter portion id. Within the large-diameter portion ld Diameter, which is larger than Daruo. 卩 6e has a slightly larger outer diameter. Right insert the step 6d of the inner cup 6 ^ ^ The step difference lc of the Watang cloth cup 1, the bottom 6c of the inner cup 6, Then it abuts on the right w and yougu ^ — the round bottom bottom la of the Tubuzhai Cup 1 is supported. Hunting this, the inner cup 6 is supported by Tu. The Tubu 1 ^ cup 1 stabilizes the applicator cover 7 coaxially, As shown in FIG. 3, the upper surface 7b, which has an ancient door e. L ^ 〆 and a round mounting shape, has a center hole 7a larger than the diameter of the disc substrate s, M. ± hh ^, a; The portion 7c is slightly smaller than the large diameter portion 6e of the inner cup 6 and is slightly smaller than the large diameter portion 6e. It is stored outside the large diameter portion 6e. The scattering suppression wall portion 7d is used to suppress the round bell. The liquid scattering of the recording material, a circular shaped skirt 7e, extends from the scattering suppression wall to stand β meat · 冋, the lower end of u 7d extends into the inner cup 6, and the broken circular groove 7f is in the temple of skirt 7 Both η 4 ⑷ 7e and the bottom of the applicator cover 7 邛Coaxially formed; and 7 g of holes for test drops are connected to the party recording material supply mechanism 12 200529222 The liquid of the recording material discharged when 8 drops of test drops are also used. If necessary, a plurality of holes 7 g may be provided or omitted. The t-scattering suppression wall portion 7d is a tapered cone that is lowered to the outside, and is disposed at a distance from the tapered surface 5g of the outer K-unloading portion 5B. From the disc beauty # ^, the outer periphery of the solution, and the scattering suppression The wall part 7d collided with Feiyue Zhang's restraint wall # 7d and flowed down to the skirt p 7e and dropped from the lower part into the inner cup 6. The skirt portion 7e may be omitted, or a ring-shaped protrusion may be formed only at the end of the scattering suppression wall portion µ.
試滴用孔7g設置於塗布器蓋7之上 一· ^ 1 υ ^ 一 處，入 口之内徑最大’越往下内徑變越狭窄，接著保持一定内秤， 鄰接於裙部7e之外周面而到達底部之出口。即，試滴工用 孔7g之上端面開口呈錐形狀。 4所示，在本實施例之德部7e之外面，形成連結 1 孔7g之槽7h，使試滴時流落於試滴用孔&之容 二通過裙…槽711，滴落於内杯6内。亦能省略此 槽7h 〇The test drop hole 7g is provided on the applicator cover 7 at a place of ^ 1 υ ^ where the inner diameter of the inlet is the largest, and the inner diameter becomes narrower as it goes down, and then a certain inner scale is maintained, adjacent to the outer periphery of the skirt 7e Face to the bottom exit. In other words, the opening on the upper end surface of the 7g hole for a test dripper is tapered. As shown in FIG. 4, a groove 7h is formed on the outer surface of the German part 7e of this embodiment to connect a hole 7g for 7h, so that the test drop flows into the test drop hole & the second volume passes through the skirt ... slot 711, and drops into the inner cup. 6 within. This slot can also be omitted for 7h.
在本實施例，如圖5所示，在塗布器杯卜 塗布器蓋7之各側壁，形成定位用之W用來 對塗布器杯1將試滴用孔7.經常定位於一定位置。此例， :塗：…之大徑部H之内周面，形成沿上下方向延 =面換形之突條的卡…，在内杯6之大徑部“ ° 形成舁卡止部X1嚙合之截面楔形之凹部的卡 =2二同樣，在内杯6之大徑…内周面，形成沿 下方向延伸之截面楔形之突條的卡止部χ3，在塗布器蓋 13 200529222 7之外壁部 7 r，4 彡a、a卜 形成與卡止部Χ3嚙合之截面楔形之凹部 的卡止部Χ4。 ^由此等卡止部χ卜序卡合，對塗布器杯丄能經 吊保持内杯6 >5冷右栗、f Γ7 A 一〜 土布7之位置，試滴用孔7g亦能經 吊m當後述之記錄材料供應機構8進行試滴時， 能：所排出之溶液經常滴落於試滴用孔7g。又，雖未圖示， I:::之構造：在塗布器杯1與塗布器蓋7分別形成彼 =妾卡合之卡合部’内杯6不與此等卡合部卡合而保持 可動狀態。 對卡止x卜X4能作各種變形，可為矩形狀、半圓狀 寺任何截面^狀。替代卡止部，亦可在塗布器杯ι、内杯 彼此及主布益盘7之各側壁簡單形成標記，使其標記位置 a準來組裝。又’亦能構成：設置於塗布器杯！之卡 哭：透過设置於内杯6之缺口或開口部，與形成於塗布 :風7之卡止部卡合。凸部與凹部之方向亦可與圖$相反。 :部’雖亦可在側壁以外之處形成，但若形成於側壁， 之優點。 之位置邊進行組裝作業 在塗布器蓋7之上方，如圖〗所 庫M m 0 所不，具備記錄材料供 :械構8,用來供應記錄材料溶液至碟片基板s 料供應機構δ，具有··臂8a，藉由未 ，、才 斿、π 糟由未圖不之驅動機構水平 灸迴’·及喷嘴处，設於此臂 去罔 之引、。至於其他構件並 :::。如圖6之箭…示，臂8a從基本位置p旋迴 '、片基板S之中央附近之正上方而停止，通過中央孔h 14 200529222 從喷嘴8b將溶液供應至 亦可使碟片基板S低速土：：之内周部上。供應時’ 回至基本位置P。 疋轉。洛液之供應結束，臂8a則 在要變更記錄材料In this embodiment, as shown in FIG. 5, W is formed on each side wall of the applicator cup 7 and the applicator cover 7 for positioning the test drop hole 7 in the applicator cup 1 at a certain position. In this example, the coating: the inner peripheral surface of the large-diameter portion H forms a card that extends in the up-down direction = a surface-reforming protrusion. The large-diameter portion of the inner cup 6 ° forms a 舁 locking portion X1 meshing The cross section of the wedge-shaped recessed part = 2. Similarly, the large diameter of the inner cup 6 ... the inner peripheral surface forms the locking part χ3 of the cross-sectioned wedge-shaped protrusion that extends in the downward direction. It is on the outer wall of the applicator cover 13 200529222 7. The parts 7 r, 4 彡 a, a form a locking part X4 of a wedge-shaped recess with a cross-section that is engaged with the locking part X3. ^ These locking parts χ are sequentially engaged, and the applicator cup 丄 can be held by hanging. Inner cup 6 > 5 cold right chestnut, f Γ7 A ~ soil cloth 7 position, test drop hole 7g can also be suspended by the recording material supply mechanism 8 described later when the test drop, can: the discharged solution is often Dropped on the test drop hole 7g. Also, although not shown in the figure, the structure of I ::: is formed on the applicator cup 1 and the applicator cover 7 respectively. These engaging parts are engaged to maintain a movable state. The locking xbu X4 can be deformed in various ways, and can be rectangular or semicircular in any cross-section shape. Instead of the locking part, it can also be coated. The cup, the inner cup and each other, and the side walls of the main cloth plate 7 simply form a mark, so that the mark position a can be assembled. It can also be configured: set in the applicator cup! The card cry: through the set in the inner cup 6 The notch or opening is engaged with the locking portion formed in the coating: wind 7. The direction of the convex portion and the concave portion may also be opposite to that shown in Figure $. Although the portion 'may also be formed outside the side wall, if it is formed in The side wall has the advantages of performing assembly operations above the applicator cover 7 as shown in the storehouse M m 0, and has a recording material supply: a mechanical structure 8 for supplying a recording material solution to a disc substrate s The material supply mechanism δ has an arm 8a, and is provided with a horizontal moxibustion mechanism of the driving mechanism (not shown) and nozzles, and is provided on the arm to guide the cylinder. As for other components, And ::: As shown by the arrow in Figure 6, the arm 8a is turned back from the basic position p and stopped just above the center of the sheet substrate S, and the solution is also supplied from the nozzle 8b through the central hole h 14 200529222. The disc substrate S is made of low-speed soil :: on the inner periphery. When supplied, it returns to the basic position P. Turn. Los liquid supply end of the arm 8a to change in the recording material
士 重頌^ ’或此裝置之停用细P弓P …般而言，記錄材料供應機 ·長 安定排出為止要進行溶液之試滴動作，從；能 液。在此試滴動作時，f ~ 8b排出溶 用孔7,之正上方，噴嘴8b 從基本位置P移動至試滴 戍n… 、 則將溶液向試滴用孔7g排ά 確S忍浴液從嘴嘴8 b安定排出後，f g排出。 又，在塗布器杯！之圓开m 基本位置P。 等之氣I# iifc名+柄_ 1 la具備用以使溶劑 ::二排’之排氣口1e。藉由從此排氣口 le排氣，: 寒片基板S之外周部，通過塗布器蓋 卩、在 之間的空隙，來# w Λ u u w表卸4分5Β 射狀氣流。ν Ί…板s之外周部向外側流動之放 =，說明此旋塗裝置⑽之動作及内杯6之交換作 -百先，以使驅動馬達2低速旋轉 材 供應機構8之噴喈讣胳、…广 攸。己錄材枓 片其板s, 將洛液以圓環狀或螺旋狀供應於碟 ^ ，猎由驅動馬達2使碟片基板s與旋轉台4 _ 溶：=1:使碟片基板S上之溶液展延。此時，剩餘之 :力被㈣’所甩開之溶液則藉由整流構件5 正机，以氣散少之角度碰到飛散抑制壁 狀裙部7e笨，品'A # +人&』p 得至圓同 成，、“ 内。此時，部分溶液會變 成務滴狀’霧滴則邊㈣邊下降。此霧滴欲滲人 之抵接間隙。 再仟間 15 200529222 塗布益盍7之圓筒狀裙部7e，會實現使霧滴附著於其 内周面’而減少繞至其背側（外周面側）之霧滴量的效果。 藉此，抑制溶液之霧滴滲入於塗布器蓋7與内杯6之抵接 處之間隙。 麗I〜瓜口P <圓银狀之银狀僧 Q，防止 所試滴之溶液流傳塗布器蓋7之底部而流至塗布器蓋7與 内杯6之抵接處。藉此，因能抑制滲入於塗布器蓋7與内 杯6之抵接處之溶液為最小限度，故即使溶液中之色素材 料硬化，能將塗布器蓋7從内杯6容易卸下，保養容p 适整流構件5之外側裝卸部分5β，因能防止溶液之霧滴 ㈣台4之背側’故溶液之霧滴則不容易渗入於内側 = 與外側裝卸部分⑽之抵接處。藉此，能 側放卸部分5B從内側固定邻八 、 膜形成牛驟、隹—夕叙 #刀5A谷易卸下。藉由將記錄 :成步驟進饤多數次，在内杯6内所捕 二加，終於達到容許量而f要交換。此時=㈣ 錄材料已變成粉狀之固態物， 不6内之記 次黏度咼之液體。 :要父換内杯6’首先，若必 6、塗布器、蓋7之各袋配部（未 布时杯！、内杯 將塗布器蓋7向上方舉起來 不/下固定螺絲等後， 側裝卸部分5B從内側固定部’其次將整流構件5之外 因外側裝卸部分5B之最小内：A卸：。此時’如前述， d 1大，故能將外側褒卸部八匕旋轉口 4之最大直徑 刀Μ從内側固定邱八 下。以此狀態，將内杯6舉 〗U疋邛刀5Λ容易卸 之直徑d2，因比旋轉台4 “卸下。内杯6之内壁部6d 最大直徑dl、及内側固定部 16 200529222 分5A之最大外徑D2大，故不需要移動旋轉…内側固 定部分5A，能將内杯6卸 得口 I、内侧固 抵接處幾乎未附著色素材料二：述’因在各構件之 藉由内杯6所回收心:：易將此等構件卸下。 之外側裝卸部分5B、内杯斗能再利用。整流構件5 而再使用。為要以先爭二蓋7若無破損則洗淨 ❹為m核容易使記錄材料 至少外側裝卸部分5B之外；^ ^ 罕彳土者為 内杯6與塗布器蓋7之内 ”1氟化樹脂等之撥水性材料塗布。 杯6:下7器蓋7、整流構件5之外側裝卸部分5Β、内 :' 亦可將預先洗淨完之另外内杯6立即放 :杯1’然後袭配外側裝卸部分㈤及塗布器蓋7。在此产 運> 轉能㈣旋塗裝置之停止時間，能立即再開始此裝置^ °此’本實施例之内杯6之交換時間 之時間係短日车Ρ弓# L /卡養所需 習知F晋夕Γ 能使旋塗裝置運轉之停止時間比 、之洗净所需之時間大幅縮短，能提高生產效率。 在以上之實施例，雖將整流構件5之㈣固定部分 ::夕側裝卸部分5Β之抵接以段差5c與5d來進行，但者 然亦可將段差5c與5d形成為具有彼此相補之角度之錐； ::又’塗布器蓋7之裙部7e亦可使下端側形成向直秤 之圓之形狀，藉此亦可使裙部76之下端與内杯： 圓同狀之外壁部6b之内面的間隔狹窄。 在以上之實施例，雖將驅動馬達2設置於塗布器杯1 4為了要使驅動馬達2之熱盡量不傳至旋轉台4，/ "灸驅動馬達2從旋轉台4離開。雖未特別圖示，亦可使 17 200529222 财力馬達2位於塗布器杯！之下方，在塗布器杯】之底板 部la設置孔，通過該孔使非接觸式之心軸單元％採用曲 徑軸封（labyrinth seal)機構等）延伸，將驅動馬達2 之旋轉力傳達至旋轉台4。在旋轉台4設置用以吸附碟片 基板S之真空吸附機構（未圖示）。 匕本發明並不限定於以上之實施例，在不脫離發明之主 旨之範圍内能作任何變形。 、又，在上述實施例，雖均具有塗布器蓋7之裙部7e、 石式滴用孔7g、及環狀槽7f，但亦能構成為設置此等構件春 中僅具有任一構件之裝置。 依本赉明’能提供具有容易保養之構造之旋塗裝置， 因在保養時能縮短使旋塗裝置停止之時間，故可謀求生產 性提升。 【圖式簡單說明】 圖1係表示本發明之一實施例之旋塗裝置的截面圖。 圖2係該旋塗裝置的截面放大圖。 圖3係使用於該旋塗裝置之塗布器蓋的截面放大圖。籲 圖4該塗布器蓋之一部分的底面圖。 圖5係表示該旋塗裝置之定位部的俯視圖。 圖6係表示該旋塗裝置之記錄材料供應機構與試滴用 孔的俯視圖。 圖7係表示本發明之另一實施例之旋塗裝置之要部的 截面放大圖。 【主要元件符號說明】 18 200529222 1 塗布器杯 2 驅動馬達 3 心軸單元 4 旋轉台 5 整流構件 5A 内側固定部分 5B 外側裝卸部分 6 内杯 7 塗布器蓋 7 e 裙部 7f 環狀槽 7g 試滴用孔 8 記錄材料供應機構 XI〜X4 定位部 19Shi Zhongsong ^ ’or the deactivation of this device P… In general, the recording material supply machine · Chang Ding should perform a test drip operation of the solution until it is discharged. During this test drop action, f ~ 8b is discharged directly above the solution hole 7, and the nozzle 8b is moved from the basic position P to the test drop 戍 n, and the solution is discharged to the test hole 7g. After being stably discharged from the mouth 8b, fg is discharged. Again, in the applicator cup! The circle opens m basic position P.气 之 气 I # iifc 名 + 柄 _ 1 la is provided with an exhaust port 1e for making the solvent :: two rows'. By exhausting from this exhaust port le, the outer peripheral portion of the cold plate substrate S passes through the gap between the applicator cover 来 and # ， Λ u u w to discharge 4 minutes and 5B radial air flow. ν Ί ... The outer periphery of the plate s is placed to flow outward, which explains the operation of the spin coating device 及 and the exchange of the inner cup 6-Baixian, so that the drive motor 2 sprays the low-speed rotating material supply mechanism 8 Hey, ... Guangyou. The recording material has a plate s, and the liquid is supplied to the dish in a ring shape or a spiral shape. The drive motor 2 is used to make the disc substrate s and the rotary table 4 _ dissolved: = 1: the disc substrate S is placed on the disc substrate S. The solution spreads. At this time, the remaining: the solution being thrown away by the force ㈣ ′ is passed through the rectifying member 5 and encounters the scattering-preventing wall skirt 7e at a low air dispersion angle. The product 'A # + person & ’ p is the same as the circle, and "inside. At this time, part of the solution will turn into a droplet-like shape, and the mist drops down. This mist droplet will penetrate into the abutment gap. Then again 15 200529222 涂 益 盍 7 The cylindrical skirt portion 7e has the effect of causing the droplets to adhere to its inner peripheral surface, and reducing the amount of droplets that wrap around its back side (outer peripheral surface side). This prevents the droplets of the solution from penetrating into the coating. The gap between the abutment of the applicator lid 7 and the inner cup 6. Lai I ~ Gukou P < Round silver-like silver monk Q prevents the solution of the test drop from flowing to the bottom of the applicator lid 7 and flowing to the applicator lid. 7 is in contact with the inner cup 6. As a result, the penetration of the solution into the abutment between the applicator cover 7 and the inner cup 6 is minimized, so that even if the pigment material in the solution hardens, the applicator cover 7 It is easy to remove from the inner cup 6 and the maintenance volume p is suitable for the mounting and dismounting part 5β on the outer side of the rectifying member 5. Since the mist of the solution can be prevented from dripping on the back side of the stage 4, the solution The mist droplets are not easy to penetrate into the inner side = the contact point with the outer loading and unloading part 借此. With this, the side loading and unloading part 5B can be fixed from the inner side to the film, forming a cow step, and 隹 — 夕夕 # 刀 5A 谷 易易 易. By recording the record into a step many times, the two pluses captured in the inner cup 6 have finally reached the allowable amount and f has to be exchanged. At this time = the recording material has become a powdery solid, not 6 Write down the viscosity of the liquid.: Ask the father to change the inner cup 6 '. First, if necessary, the applicator and cover 7 of the bag (the cup is not clothed!), The inner cup lifts the applicator cover 7 upward. / After fixing screws, etc., the side loading and unloading portion 5B is from the inner fixing portion, and then the outside of the rectifying member 5 is the smallest inside and outside loading and unloading portion 5B: A is removed. At this time, as described above, d 1 is large, so the outer side can be removed. The maximum diameter knife M of the unloading part eight dagger swivel port 4 is fixed from the inside by Qiu Baqi. In this state, the inner cup 6 is lifted. The U 疋 邛 knife 5Λ is easy to remove the diameter d2, because it is "unloaded" than the rotary table 4. The maximum diameter dl of the inner wall portion 6d of the cup 6 and the inner diameter of the fixed portion 16 200529222 5A are large, so no movement is required. Turn ... the inner fixing part 5A can remove the inner cup 6 with mouth I, and the inner solid abutment is almost free of pigment materials 2: the 'recovered by the inner cup 6 in the various components :: easy to collect The components can be removed. The outer loading and unloading part 5B and the inner cup bucket can be reused. The rectifying member 5 can be reused. In order to fight for the second cover 7 if it is not damaged, it is cleaned. It is easy to make at least the outer loading and unloading part of the recording material. Other than 5B; ^ ^ The rare earth is coated with a water-repellent material such as fluorinated resin inside the inner cup 6 and the applicator cover 7. Cup 6: the lower 7 cover 7 and the loading and unloading part 5B on the outer side of the rectifying member 5. 、 Inner: 'It is also possible to put the other inner cup 6 which has been washed in advance: cup 1', and then match the outer loading and unloading part ㈤ and the applicator cover 7. Here, the stop time of the spin-on coating device can be restarted immediately. The time of the exchange time of the inner cup 6 in this embodiment is the short-day car P bow # L / 卡 养The required knowledge F Jin Xi Γ can make the spin coating device stop time ratio, the time required for cleaning is greatly shortened, and can improve production efficiency. In the above embodiment, although the abutment portion of the rectifying member 5 :: the side loading and unloading portion 5B is abutted by the step differences 5c and 5d, the step differences 5c and 5d can also be formed to have angles that complement each other. Taper; :: Also, the skirt 7e of the applicator cover 7 can also make the lower end side into a shape of a straight scale, which can also make the lower end of the skirt 76 and the inner cup: the same outer wall 6b The inner space is narrow. In the above embodiment, although the drive motor 2 is provided in the applicator cup 14 so that the heat of the drive motor 2 is not transmitted to the rotary table 4 as much as possible, the " moxibustion drive motor 2 is separated from the rotary table 4. Although not specifically shown, 17 200529222 financial motor 2 can also be located in the applicator cup! Below, a hole is provided in the bottom plate part 1a of the applicator cup. Through this hole, the non-contact mandrel unit is extended by a labyrinth seal mechanism (such as a labyrinth seal mechanism) to transmit the rotational force of the drive motor 2 to Turntable 4. The rotary table 4 is provided with a vacuum suction mechanism (not shown) for suctioning the disc substrate S. The invention is not limited to the above embodiments, and can be modified in any way without departing from the spirit of the invention. In addition, in the above-mentioned embodiment, although the skirt portion 7e of the applicator cover 7, the stone-type drip hole 7g, and the annular groove 7f are provided, it is also possible to constitute such a component. Device. According to the present invention, a spin coating device having a structure that is easy to maintain can be provided. Since the time for stopping the spin coating device can be shortened during maintenance, productivity can be improved. [Brief Description of the Drawings] FIG. 1 is a cross-sectional view showing a spin coating apparatus according to an embodiment of the present invention. FIG. 2 is an enlarged sectional view of the spin coating device. FIG. 3 is an enlarged cross-sectional view of an applicator cover used in the spin coating device. Figure 4 is a bottom view of a part of the applicator cover. FIG. 5 is a plan view showing a positioning portion of the spin coating device. Fig. 6 is a plan view showing a recording material supply mechanism and a test drip hole of the spin coating apparatus. Fig. 7 is an enlarged sectional view showing a main part of a spin coating apparatus according to another embodiment of the present invention. [Description of main component symbols] 18 200529222 1 Applicator cup 2 Drive motor 3 Spindle unit 4 Rotary table 5 rectifying member 5A Inner fixing part 5B Outer loading and unloading part 6 Inner cup 7 Applicator cover 7 e Skirt 7f Ring groove 7g Trial Drop hole 8 Recording material supply mechanism XI ~ X4 Positioning section 19