CN1898031A - Spin coating device - Google Patents

Spin coating device Download PDF

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Publication number
CN1898031A
CN1898031A CNA2004800387305A CN200480038730A CN1898031A CN 1898031 A CN1898031 A CN 1898031A CN A2004800387305 A CNA2004800387305 A CN A2004800387305A CN 200480038730 A CN200480038730 A CN 200480038730A CN 1898031 A CN1898031 A CN 1898031A
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CN
China
Prior art keywords
cup
coater
spin coating
liquid
turntable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2004800387305A
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Chinese (zh)
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CN100528378C (en
Inventor
稻谷孝佑
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OLISEN ELECTRICAL CO Ltd
Origin Electric Co Ltd
Original Assignee
OLISEN ELECTRICAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP429087/2003 priority Critical
Priority to JP2003429087A priority patent/JP4117843B2/en
Application filed by OLISEN ELECTRICAL CO Ltd filed Critical OLISEN ELECTRICAL CO Ltd
Publication of CN1898031A publication Critical patent/CN1898031A/en
Application granted granted Critical
Publication of CN100528378C publication Critical patent/CN100528378C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08Spreading liquid or other fluent material by manipulating the work, e.g. tilting

Abstract

A spin coating device has a rotating table for holding a disk substrate, a rotation mechanism for rotating the rotating table, a coater cover provided so as to surround the rotating table and receiving liquid thrown off from the disk substrate, an inner cup for receiving the liquid dropping along the coater cover and not discharging the liquid, and a coater cup for supporting the inner cup. The inner cup is removable from the coater cup.

Description

Spin coating device
Technical field
The present invention relates to be used for the spin coating device of application of liquid on various dishes.
The application is willing to advocate priority 2003-429087 number for the spy in application on December 25th, 2003, quotes its content at this.
Background technology
For example in the manufacturing process of Worm type optical disks such as CD-R, DVD-R, DVD+R, by utilizing spin coating device that disc board rotary mode according to the rules is rotated, and the solution by being made recording materials by centrifugal force launches rest solution is got rid of on whole of disc board, thereby forms the recording layer of uniform thickness.
The amount of the solution of supplying with in order to apply a slice disc board is normally about 0.1~2ml.The employed solution of promptly actual formation recording film that wherein is applied on the disc board is less than or equal to 50%.In addition solution or recording materials then are recycled in the returnable with floss hole by coater cup, recovery.
The spin coating device that forms recording layer with form that optical disc protective film is used or to form the spin coating device that semi-conductive photoresists use different, the major part of the solution that it is coated is made of solvent and the dye material that is dissolved in this solvent.For example common recording materials solution in most cases is that phthalocyanine pigment, anthocyanidin, azopigment etc. are dissolved in organic pigment solution in the organic solvent.Therefore,, solvent make dye material become solid state or the high state of slimy viscosity, so for recording materials solution being reclaimed effectively and must taking measures owing to evaporating at short notice.
In spin coating, adhered on the inwall of coater cover and growth by the dye material of the residue organic pigment solution that got rid of.When after when being collided on the dye material of this adhesion by the residue organic pigment solution that got rid of, therefore the residue organic pigment solution that is then rebounded cause yield rate to reduce sometimes again attached on the disc board.
Recording materials solution in will accumulating in the coater cup is collected in the mechanism of returnable by floss hole, if do not shorten vent pathway, then recording materials can solidify halfway with doing one's utmost.So owing to vent pathway is difficult to circulation with regard to being tapered, so the recovery operation of solution becomes difficult.In addition, though spin coating device is provided with the rectification part that the mist that prevents solution spreads to the dorsal part of the dorsal part of disc board or turntable, also can occur sometimes recording materials adhere on this rectification part or recording materials adhere on the butt position of cup and coater cover.
Adhere to bad problem on the device each several part in order to solve recording materials, open the spy and proposed flusher is set in flat 9-27146 communique and the Te Kai 2003-6948 communique and termly to installing device that washes inside and the device that recording materials solution is reclaimed by floss hole.
Yet, even carry out such flushing, also can't prevent adhering to or piling up of recording materials fully, still there be the removing trouble of recording materials of adhering to and the long problem of the time that spin coating device stops.
Particularly mostly the manufacturing installation of Worm type optical disks such as CD-R, DVD-R, DVD+R is to possess the coater cup more than 4 or 4, so the needed time of their maintenance is quite long, thereby becomes obstacle on the service efficiency that improves spin coating device.
Summary of the invention
Spin coating device of the present invention is characterized in that, comprising: turntable, its holding tray substrate; Rotating mechanism, it makes this turntable rotation; The coater cover, it is configured to described turntable is surrounded and block the liquid that gets rid of from the disc board that is maintained on the described turntable; Interior cup, it blocks and keeps along the liquid of described coater cover drippage; The coater cup, cup in its supporting is somebody's turn to do, wherein, described interior cup can unload from described coater cup.According to this device, the interior cup of collecting liquid can be unloaded down simply and be changed or wash, thereby can improve the running efficiency of spin coating device.
This device also can comprise in order to prevent that liquid spread is to the downside of described turntable or described disc board and be configured in rectification part around the described turntable.Described rectification part comprises with respect to the relatively-stationary inboard standing part of cup in described and is arranged to and can loads and unloads part by the outside of these inside part loading and unloading that described outside loading and unloading part has the internal diameter bigger than the diameter of described turntable.According to this device, owing to can utilize rectification part to prevent that liquid spread is to the basis of the downside of turntable or disc board, by the inboard standing part of loading and unloading part in the outside from rectification part unloaded and can easily interior cup be unloaded, so also do not hinder maintenance characteristics.
Described coater cover also can have the annular skirt of also giving prominence in the cup downwards in described.At this moment, can make attached to the liquid on the coater cover and fall into interior cup from the skirt section reliably.
This device can also have the liquid feed mechanism that liquid is supplied with to disc board.At this moment, also can on described coater cover, form at least one aerial injection hole, this aerial injection hole is when described liquid feed mechanism is injected liquid in the air for the obstruction that prevents liquid, in the flow direction that is used to this is injected in the air is described in the cup.At this moment, the liquids recovery that cup will be injected in the air in can be enough and do not need other recovering mechanism.
This device also can be, also has the liquid feed mechanism that liquid is supplied with to disc board, on described coater cover, form at least one aerial injection hole, this aerial injection hole, when described liquid feed mechanism is injected liquid in the air for the obstruction that prevents liquid, in the described interior cup of flow direction that is used to this is injected in the air, the outlet of the lower end in described aerial injection hole is in the outer openings in described skirt section.At this moment, not only can reclaim the liquid of being injected in the air, and the mist that can suppress liquid adheres to the outlet in aerial injection hole with interior cup.
Also can form the groove of the above-below direction extension that links to each other with the described outlet in described aerial injection hole at the outer peripheral face in described skirt section.At this moment, make the liquid that sprays from the outlet in aerial injection hole successfully splash into interior cup aloft in the time of can injecting, thereby can suppress the outside of liquid residue in the skirt section.
Also can be below described coater cover around the endless groove that the outer circumferential side through the described outlet in described aerial injection hole extends that forms in full week of described coater cover.At this moment, can suppress liquid below the coater cover and adhere on the device each several part.
Also can have and be used for the location fastener of described coater cover with respect to cup or described coater cup location in described.At this moment, can be formed on the aerial injection hole on the coater cover and the position alignment of liquid feed mechanism easily.
Cup can not have the discharge structure that is used for described recording materials discharge in described.At this moment, the loading and unloading of interior cup easily and also liquid can not adhere to floss hole yet.It is identical or than its big diameter also can be that described turntable has a diameter with disc board.
Description of drawings
Fig. 1 is the profile of the spin coating device of expression one embodiment of the invention;
Fig. 2 is the amplification profile of this spin coating device;
Fig. 3 is the amplification profile of the employed coater cover of this spin coating device;
Fig. 4 is the bottom view of the part of the employed coater cover of this spin coating device;
Fig. 5 is the plane of the location division of this spin coating device of expression;
Fig. 6 is the recording materials feed mechanism of this spin coating device of expression and the plane in aerial injection hole;
Fig. 7 is the amplification profile of the spin coating device major part of expression another embodiment of the present invention.
Symbol description
1 coater cup; 2 drive motors; 3 main axle units; 4 turntables; 5 rectification parts; The inboard standing part of 5A; 5B outside loading and unloading part; Cup in 6; 7 coater covers; The 7e skirt section; The 7f endless groove; The aerial injection of 7g hole; 8 recording materials feed mechanisms; X1~X4 location division.
The specific embodiment
To Fig. 6 one embodiment of the invention are described according to Fig. 1.Fig. 1 is the profile of the spin coating device 100 of expression one embodiment of the invention.This device comprises: have the round-ended cylinder shape coater cup 1, be configured in the turntable 4 of the circle of this coater cup 1 inboard, the circular interior cup 6 in the outside of turntable 4 is configured in coater cup 1, be configured in the circular rectification part 5 between the cup 6 and turntable 4 in this and be configured in coater cover 7 on glasss 6.
Central authorities at the rounded bottom 1a of coater cup 1 up are equipped with drive motors 2.The revolving force of drive motors 2 passes to turntable 4 by main axle unit 3.Turntable 4 has the discoideus 4A of mounting portion and forms coaxial base portion 4B cylindraceous at its downside, and base portion 4B is combined on the main axle unit 3 coaxially.In order to ensure the flatness of disc board S, as shown in Figure 2, preferably the equal diameters of the diameter d 1 of the 4A of mounting portion and disc board S or bigger than it also can make its diameter than disc board S little if desired.
The periphery of the 4A of mounting portion of turntable 4 and bottom are surrounded coaxially and circular rectification part 5 is set.Rectification part 5 utilizes attraction described later mechanism to carry out rectification so that turntable 4 ambient airs flow to radial outside, its restriction is because centrifugal force and flying to radial outside from the liquid (for example recording materials solution) that disc board S gets rid of, and make the mist of recording materials can not spread to the following of turntable 4 and disc board S below.
The feature of the rectification part 5 of present embodiment is to comprise the circular outside loading and unloading part 5B of circular inboard standing part 5A and the periphery that can be inlaid in this inboard standing part 5A with loading and unloading.Inboard standing part 5A is fixed on the fixed position of fixing with respect to coater cup 1 (diagram is omitted).The inner peripheral surface of inboard standing part 5A has and does not contact with the cylindric base portion 4B of turntable 4 but be configured to coaxial internal face cylindraceous with the outer peripheral face of cylindric base portion 4B.Separate certain clearance and be configured to parallel below the top and 4A of mounting portion of inboard standing part 5A with the 4A of mounting portion.
Inboard standing part 5A is formed by the minor diameter part 5b of the little upside of the large-diameter portion 5a of the big downside of external diameter and Bi Qi diameter.Between large-diameter portion 5a and minor diameter part 5b, be formed with circular stage portion 5c.As shown in Figure 2, the large-diameter portion 5a of inboard standing part 5A and minor diameter part 5b have diameter D2, D2 ' respectively.
As shown in Figure 7, also can be on inboard standing part 5A the coaxial circular protuberance 10 of formation and turntable 4, and the circular groove 12 of formation below the 4A of mounting portion of the turntable 4 relative, and separate small gap and enter in the circular groove 12 around the front end that makes circular protuberance 10 full week of circular groove 12 with circular protuberance 10.At this moment, the mist that produces owing to dispersing of liquid is stopped and is difficult to more enter in the gap of 4A of mounting portion and inboard standing part 5A by circular protuberance 10.
The outside loading and unloading part 5B of rectification part 5 has inner peripheral surface and the stage portion 5d that almost seamlessly engages with outer peripheral face and the stage portion 5c of inboard standing part 5A.Though by the stage portion 5d of outside loading and unloading part 5B and the stage portion 5c butt of inboard standing part 5A outside loading and unloading part 5B is supported by inboard standing part 5A, when lifting, then can easily unload from inboard standing part 5A.Be positioned under the state on the inboard standing part 5A the outside being loaded and unloaded part 5B, the top 5e of the cylindrical circular inner peripheral surface of outside loading and unloading part 5B leaves certain distance with the outer peripheral face of the 4A of mounting portion of turntable 4 and disposes coaxially.
The diameter d 1 that the diameter D1 of the top 5e of the inner peripheral surface of outside loading and unloading part 5B is a bit larger tham the 4A of mounting portion of turntable 4, the difference of diameter d 1 and diameter D1 be not exposure level to several millimeters degree.The top 5f of outside loading and unloading part 5B is configured to and the top roughly the same height of the 4A of mounting portion of turntable 4 or lower slightly than it.The outside of 5f is formed with the conical surface 5g that descends more more laterally in the above.
The interior cup 6 that is used to collect surplus solution comprises: inner wall part 6a cylindraceous, and it has the diameter d 2 bigger than the diameter D2 of the large-diameter portion 5a of inboard standing part 5A; Outside wall portions 6b cylindraceous; Circular base plate 6c, its with the bottom surface of these inner wall parts 6a and outside wall portions 6b in conjunction with and seal.On the base plate 6c of present embodiment, do not form recording materials and discharge the floss hole of usefulness.Therefore, in the surplus solution that is got rid of during spin coating is recovered and accumulates in the cup 6.Be formed with the circular stage portion 6d of expansion laterally on the top of outside wall portions 6b, and erect and be formed with the circular large-diameter portion 6e bigger than outside wall portions 6b diameter from the outer peripheral edges of this stage portion 6d.
Side wall portion 1b upper end at coater cup 1 is formed with the circular stage portion 1c of expansion laterally, and is formed with the large-diameter portion 1d bigger than side wall portion 1b diameter.The internal diameter of large-diameter portion 1d is the degree bigger slightly than the external diameter of large-diameter portion 6e.When the stage portion 1c that is embedded in coater cup 1 as the stage portion 6d with interior cup 6 goes up, then in the base plate 6c of cup 6 and coater cup 1 rounded bottom 1a butt and be supported.Thus, interior cup 6 is by the 1 coaxial and supporting stably of coater cup.
As shown in Figure 3, coater cover 7 comprises: circular top 7b, and it has the diameter medium pore 7a bigger than the diameter of disc board S; Outside wall portions 7c, it has the slightly little and external diameter that held by large-diameter portion 6e of diameter than the large-diameter portion 6e of interior cup 6; Suppress to disperse the 7d of wall portion, it suppresses dispersing of recording materials liquid; Skirt section 7e cylindraceous is in its lower end from the 7d of wall portion that suppresses to disperse extends in the cup 6; Circular endless groove 7f, it is formed on the bottom of coater cover 7 coaxially in the outside of skirt section 7e; And aerial injection hole 7g, it is received in the liquid of the recording materials that sprayed when recording materials feed mechanism 8 is injected in the air.A plurality of aerial injection hole 7g also can be set if desired, also can be the structures of omitting it.
The 7d of wall portion that suppresses to disperse is the conical surface that reduces laterally, its be configured to and the conical surface 5g of outside loading and unloading part 5B between separate the gap.The solution that gets rid of from the outer periderm of disc board S after colliding the 7d of wall portion that suppresses to disperse, the 7d of wall portion flows down along suppressing to disperse and drop into along skirt section 7e and from its lower end in the cup 6.Also can adopt the structure of omitting skirt section 7e, can also be the structure that only forms annular protrusions in the lower end of the 7d of wall portion that suppresses to disperse.
Aerial injection hole 7g is arranged on the position of top 7b of coater cover 7, and the internal diameter maximum of its inlet along with to next and narrow diameter, and begins from here to keep certain internal diameter and arrives outlet with the bottom of the outer peripheral face adjacency of skirt section 7e.That is, the upper end of aerial injection hole 7g forms opening cone-shapedly.
As shown in Figure 4, be formed with the groove 7h that links to each other with aerial injection hole 7g in the outside of present embodiment skirt section 7e, the solution that the aerial injection hole 7g in edge flows down when making aerial the injection splashes in the interior cup 6 by the groove 7h of skirt section 7e.But also can be the structure of omitting this groove 7h.
As shown in Figure 5, in the present embodiment, on each sidewall of coater cup 1, interior cup 6 and coater cover 7, be formed with the fastener X1~X4 that is used for all the time aerial injection hole 7g being positioned at respect to coater cup 1 the location usefulness on the fixed position.In this example, form as being the fastener X1 of the prominent bar of wedge shape, at the outer peripheral face formation conduct of interior glass 6 large-diameter portion 6e and the fastener X2 of the recess of the section wedge shape of fastener X1 engagement at the large-diameter portion 1d of coater cup 1 inner peripheral surface at the upwardly extending section of upper and lower.Equally, form as being the fastener X3 of the prominent bar of wedge shape at the upwardly extending section of upper and lower at the inner peripheral surface of the large-diameter portion 6e of interior cup 6, forming as the section with fastener X3 engagement at the outside wall portions 7c of coater cover 7 is the fastener X4 of the recess of wedge shape.
X1~X4 engages according to priority by these fasteners, and it is fixing that the interior cup 6 and the position of coater cover 7 relative coater cups 1 are remained, thereby makes the position of aerial injection hole 7g also fixing all the time.Thus, when recording materials feed mechanism 8 described later is injected, can make the liquid of ejection fall into aerial injection hole 7g all the time in the air.In addition, though not shown, also can adopt on coater cup 1 and coater cover 7 directly to form the holding section of engaging mutually respectively, interior cup 6 does not engage with these holding sections but keeps the structure of movable state.
Fastener X1~X4 can carry out various distortion, also can be any section shapes such as rectangle, semicircle.Also can replace fastener and just on each sidewall of coater cup 1, interior cup 6 and coater cover 7, form mark in advance, and the position of this mark be aimed at mutually assemble.In addition, also can be arranged on the structure that the fastener on the coater cup 1 engages mutually by the breach on the cup 6 in being arranged on or peristome and fastener on being formed on coater cover 7.Protuberance and recess towards also can be opposite with Fig. 5.Though fastener also can be formed on the position beyond the sidewall, if be formed on the sidewall, on one side then have the advantage that to carry out assembling operation on one side from the position of top observation fastener X1~X4.
As shown in Figure 1, above coater cover 7, possesses the recording materials feed mechanism 8 that is used for recording materials solution is supplied with disc board S.Recording materials feed mechanism 8 has: the nozzle 8b that utilizes arm 8a that not shown drive unit horizontally rotates and be equipped with at the front end of this arm 8a.Other parts are not shown.Shown in the arrow A 1 of Fig. 6, arm 8a from home position P rotate near the disc board S central authorities directly over and stop, solution being supplied with to the interior perimembranous of disc board S from nozzle 8b by medium pore 7a.When supplying with, also can make disc board S low speed rotation.When the supply of solution finished, arm 8a turned back to home position P.
At the kind time-like that changes recording materials when maybe this device stopping period is long, normally recording materials feed mechanism 8 carry out the aerial action of injection of solution and from nozzle 8b ejection solution till recording materials spray solution-stabilizedly.When carrying out this aerial action of injection, arm 8a from home position P move to aerial injection hole 7g directly over, nozzle 8b sprays solution to aerial injection hole 7g.When confirming that when nozzle 8b stably sprayed solution, arm 8a turned back to home position P once more.
In addition, the exhaust outlet 1e that possesses the gas that is used to discharge solvent etc. at the rounded bottom 1a of coater cup 1.By forming by the gap between coater cover 7 and the outside loading and unloading part 5B from the mobile laterally radial air-flow of the peripheral part of disc board S at the peripheral part of disc board S from the 1e exhaust of this exhaust outlet.
The following describes the action of this spin coating device 100 and the replacing operation of interior cup 6.At first, under the state that makes drive motors 2 low speed rotation, go up circular or helically supply to disc board S solution from the nozzle 8b of recording materials feed mechanism 8, utilize drive motors 2 to make disc board S and the rotation of turntable 4 one superhigh speeds then, the solution on the disc board S is launched.At this moment, rest solution is because centrifugal force and being got rid of, and the solution that gets rid of carries out rectification by rectification part 5, and the inhibition of running into coater cover 7 with few angle of dispersing is dispersed on the 7d of wall portion, and along cylindric skirt section 7e etc. and in splashing in the cup 6.At this moment, the solution that has becomes the mist shape, and floating limit, mist limit falls.This mist will invade in the gap of the butt between the parts.
The cylindric skirt section 7e of coater cover 7 has makes mist attached to the effect that reduces the mist amount that spreads to its dorsal part (outer peripheral face side) on the inner circumferential surface.Thus, the mist of inhibition solution invades in the gap at coater cover 7 and interior cup 6 butt positions.
The circular endless groove 7f that is arranged on coater cover 7 bottoms prevents that the solution of aerial injection from flowing to the butt position of coater cover 7 and interior cup 6 along the bottom of coater cover 7.Therefore, owing to can be suppressed to minimum degree,, make maintenance easily so, also can easily coater cover 7 be unloaded from interior cup 6 even the dye material in the solution solidifies with invading the solution of coater cover 7 with the butt position of interior cup 6.
The outside of rectification part 5 loading and unloading part 5B is used to prevent that the mist of solution from spreading to the dorsal part of turntable 4, makes the mist of solution be difficult to invade the butt position that part 5B is loaded and unloaded in inboard standing part 5A and the outside.Therefore, can easily the outside be loaded and unloaded part 5B unloads from inboard standing part 5A.Form operation owing to repeatedly carry out recording film, make that the recording materials in the cup 6 increase in collecting, reach tolerance soon and need to change.At this moment, the recording materials in the interior cup 6 become the solid content or the high liquid of viscosity of powdery.
Cup is 6 o'clock in changing, at first, if desired, after each installation portion (not shown) from coater cup 1, interior cup 6, coater cover 7 unloads hold-down screw, coater cover 7 is lifted upward and unloads, and the outside loading and unloading part 5B with rectification part 5 unloads from inboard standing part 5A then.At this moment, as previously mentioned,, unload from inboard standing part 5A so can easily the outside be loaded and unloaded part 5B because the minimum diameter D1 of outside loading and unloading part 5B is bigger than the maximum diameter d 1 of turntable 4.Under this state, interior cup 6 is lifted and unloads.Because the diameter d 2 of the inner wall part 6d of interior cup 6 is bigger than the maximum outside diameter D2 of the maximum diameter d 1 of turntable 4 and inboard standing part 5A, so turntable 4 and inboard standing part 5A are fixedly unloaded interior cup 6.In addition, as previously mentioned, owing to dye material does not almost adhere on the butt position of each parts, so can easily they be unloaded.
The recording materials that reclaimed by interior cup 6 utilize again.If the outside of rectification part 5 loading and unloading part 5B, interior cup 6, coater cover 7 do not have breakage etc., then can wash and utilize again.In order with flushing liquor recording materials to be come off easily, preferably the inner face to the outside of major general outside loading and unloading part 5B, interior cup 6 and coater cover 7 applies with hydrophobic materials such as fluororesin.
After the outside of coater cover 7, rectification part 5 loading and unloading part 5B, interior cup 6 unloaded, also can be immediately with washed in advance other in cup 6 install in the coater cup 1, and outside loading and unloading part 5B and coater cover 7 are installed.At this moment, the dwell time of spin coating device can be shortened and the running of this device can be begun immediately again.Like this, it is short that the replacing time of the interior cup 6 of present embodiment is promptly maintained the needed time, therefore, compares and the running dwell time of spin coating device can be shortened significantly with the needed time of the flushing of existing apparatus, thereby can enhance productivity.
In above embodiment,, step 5c and 5d can certainly be designed to have the conical surface T of the angle of mutual complementation though the butt of the inboard standing part 5A of rectification part 5 and outside loading and unloading part 5B is carried out with step 5c and 5d.In addition, the skirt section 7e of coater cover 7 can be lower end side to the open shape of radial outside, thus, the interval of the outside wall portions 6b inner face cylindraceous of the lower end of skirt section 7e and interior cup 6 is narrowed down.
In above embodiment, though drive motors 2 is arranged in the coater cup 1, do not transmit to turntable 4 for the heat that makes drive motors 2 as far as possible, also can make drive motors 2 break away from turntable 4.Though not concrete diagram, but also can make drive motors 2 be positioned at the below of coater cup 1, base plate 1a at coater cup 1 is provided with the hole, makes by this hole and adopts the contactless main axle unit 3 of tortuous sealing mechanism etc. to extend, and the revolving force of drive motors 2 is transmitted to turntable 4.Turntable 4 is provided with the vacuum suction mechanism (diagram is omitted) that is used for suction tray substrate S.
The present invention is not limited to above embodiment, can carry out various distortion in the scope that does not break away from inventive concept.
In addition, in the above-described embodiment, have the cylindric skirt section 7e of coater cover 7, aerial injection hole 7g and endless groove 7f, but also can be the apparatus structure that any only is set in them.
According to the present invention, can provide to have the spin coating device that maintenance is easy to structure, when maintenance, can shorten the time that stops spin coating device, thereby seek productive raising.

Claims (11)

1, a kind of spin coating device is characterized in that, comprising: turntable, its holding tray substrate; Rotating mechanism, it makes this turntable rotation; The coater cover, it is configured to described turntable is surrounded and block the liquid that gets rid of from the disc board that is maintained on the described turntable; Interior cup, it blocks and keeps along the liquid of described coater cover drippage; The coater cup, cup in its supporting is somebody's turn to do, wherein, described interior cup can unload from described coater cup.
2, spin coating device as claimed in claim 1, it is characterized in that, also comprise for prevent liquid spread be configured in to the downside of described turntable or described disc board described turntable around rectification part, described rectification part comprises with respect to the relatively-stationary inboard standing part of cup in described and is arranged to and can loads and unloads part by the outside of these inside part loading and unloading that described outside loading and unloading part has the internal diameter bigger than the diameter of described turntable.
3, spin coating device as claimed in claim 2 is characterized in that, described interior cup comprises: internal perisporium, and it has the internal diameter bigger than the external diameter of the described inboard standing part of described rectification part; Outside wall portions is arranged on the outside of this inner wall part its concentric shape; The bottom of ring-type, it connects described inner wall part and described outside wall portions.
4, spin coating device as claimed in claim 1 is characterized in that, described coater cover has the annular skirt of also giving prominence in the cup downwards in described.
5, spin coating device as claimed in claim 1, it is characterized in that, also comprise the liquid feed mechanism that liquid is supplied with to disc board, on described coater cover, form at least one aerial injection hole, this aerial injection hole, when described liquid feed mechanism is injected liquid in the air for the obstruction that prevents liquid, in the flow direction that is used to this is injected in the air is described in the cup.
6, spin coating device as claimed in claim 4, it is characterized in that, also comprise the liquid feed mechanism that liquid is supplied with to disc board, on described coater cover, form at least one aerial injection hole, this aerial injection hole, when described liquid feed mechanism was injected liquid in the air for the obstruction that prevents liquid, in the cup, the outlet of the lower end in described aerial injection hole was in the outer openings in described skirt section in the flow direction that is used to this is injected in the air was described.
7, spin coating device as claimed in claim 6 is characterized in that, the outer peripheral face in described skirt section is formed with the groove of the above-below direction extension that links to each other with the described outlet in described aerial injection hole.
8, spin coating device as claimed in claim 5 is characterized in that, below described coater cover around the endless groove that the outer circumferential side through the described outlet in described aerial injection hole extends that is formed with in full week of described coater cover.
9, spin coating device as claimed in claim 1 is characterized in that, comprises being used for the location fastener of described coater cover with respect to cup or described coater cup location in described.
10, spin coating device as claimed in claim 1 is characterized in that, described interior cup does not have the discharge structure that is used for described recording materials discharge.
11, spin coating device as claimed in claim 1 is characterized in that, it is identical or than its big diameter that described turntable has a diameter with disc board.
CNB2004800387305A 2003-12-25 2004-12-16 Spin coating device Expired - Fee Related CN100528378C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP429087/2003 2003-12-25
JP2003429087A JP4117843B2 (en) 2003-12-25 2003-12-25 Spin coat equipment

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN2009100077731A Division CN101518770B (en) 2003-12-25 2004-12-16 Spin coating device

Publications (2)

Publication Number Publication Date
CN1898031A true CN1898031A (en) 2007-01-17
CN100528378C CN100528378C (en) 2009-08-19

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Publication number Priority date Publication date Assignee Title
CN107116007A (en) * 2017-06-20 2017-09-01 柴德维 Rubber coating fixture for rubber component

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EP2006031B1 (en) 2006-03-01 2017-12-20 Tokuyama Corporation Process for producing laminate
JP5457866B2 (en) * 2010-02-08 2014-04-02 株式会社日立ハイテクノロジーズ Spin coating method and spin coater
CN106111465B (en) * 2016-07-29 2018-10-23 芜湖市振华戎科智能科技有限公司 A kind of encrypted disc production line spin coating device

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JPS5889966A (en) * 1981-11-24 1983-05-28 Hitachi Ltd Coater
JP3002368B2 (en) * 1993-11-12 2000-01-24 東京応化工業株式会社 Rotating cup type liquid supply device
DE19748063A1 (en) * 1997-10-31 1999-05-06 Acr Automation In Cleanroom Device for applying a thin layer on the surface of a display glass bulb
JP2003047903A (en) * 2001-08-08 2003-02-18 Dainippon Screen Mfg Co Ltd Substrate treating apparatus and rectification plate thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107116007A (en) * 2017-06-20 2017-09-01 柴德维 Rubber coating fixture for rubber component

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TW200529222A (en) 2005-09-01
JP2005190532A (en) 2005-07-14
TWI264721B (en) 2006-10-21
JP4117843B2 (en) 2008-07-16
CN101518770B (en) 2011-01-12
CN100528378C (en) 2009-08-19
CN101518770A (en) 2009-09-02
DE112004002534T5 (en) 2006-12-07
WO2005063409A1 (en) 2005-07-14

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