JP4117843B2 - Spin coat equipment - Google Patents

Description

The present invention relates to a spin coater for forming a recording layer in a write-once optical disc such as a CD-R, DVD-R, and DVD + R.

  In the manufacturing process of write-once optical discs such as CD-R, DVD-R, and DVD + R, the recording layer is formed by rotating the optical disc substrate in accordance with a predetermined spin pattern by a spin coater (not shown), and by using the centrifugal force of the recording material. A recording layer having a uniform thickness is formed by spreading over the entire surface of the optical disk substrate and shaking off excess recording material.

  The difference between the spin coater for forming the recording layer and the spin coater for forming a protective film for an optical disk or for forming a semiconductor photoresist film is that most of the recording material to be applied is dissolved in the solvent and the solvent. It consists of the dye material that is. For example, the recording material is often an organic dye solution in which an organic solvent is a main solvent and a phthalocyanine dye, a cyanine dye, an azo dye or the like is dissolved in the organic solvent.

  The amount of recording material supplied to spin-coat one optical disk substrate is generally about 0.1 to 2 cc. Among them, the recording material stays on the optical disk substrate, that is, actually forms a recording film. The recording material used is 50% or less, and the other recording material solutions are collected in a collecting container through a coater cup and a collecting drain. As described above, the recording material solution is often an organic dye solution. In such a case, the solvent evaporates in a short time, and the dye material becomes a solid state or a highly viscous state. It is a point that this measure must be taken.

  Also, the excess dye material of the organic dye solution shaken off by spin coating grows firmly on the inner wall of the coater cover, and then the excess organic dye solution shaken off rebounds by colliding with the fixed dye material. There is a problem in that the excess organic dye solution is reattached to the optical disk substrate, resulting in a decrease in yield.

  Furthermore, in the mechanism that collects the recording material liquid that has been shaken off and accumulated in the coater cup into the collection container through the drain, unless the drain passage is shortened as much as possible, the recording material solidifies in the middle, and the drain passage gradually narrows and flows immediately. There is a problem that it becomes difficult to recover the recording material because it is lost. In addition, the spin coater is provided with a rectifying member that prevents the mist of the recording material from rotating to the back side of the optical disk substrate or the back side of the rotary table, but there is also a problem of sticking of the recording material to the rectifying member. is there. In addition, there is a problem such as sticking of the recording material to a contact portion between the inner cup and the coater cover.

  As a measure for solving the disadvantage caused by such a recording material being dried in a short time and the dye material being fixed, conventionally, a cleaning device has been provided and a cleaning operation is regularly performed (for example, , See Patent Document 1). However, when cleaning, the inner cup, the rectifying member, and the coater cover must be removed from the coater cup. In the conventional structure, the rotary table must be removed to remove them, and it takes time to attach and detach the rotary table. In addition, the time for stopping the spin coating apparatus is long, which is inefficient.

  In particular, many of the write-once optical disk manufacturing apparatuses such as CD-R, DVD-R, and DVD + R have four or more coater cups, so that the time required for these maintenance becomes considerable, and spin The stop time of the coating apparatus becomes longer.

  In the present invention, in order to eliminate such drawbacks, in order to maintain the flatness of the optical disk substrate during spin coating, the rotary table on which the optical disk substrate is placed has a diameter that is equal to or larger than the diameter of the optical disk substrate. Even if it exists, it is set as the structure which can attach and detach three parts, a coater cover, a baffle member, and an inner cup, without removing a rotary table. As a result, when the recording material in the inner cup exceeds a predetermined amount, the inner cup can be easily removed and replaced with a new inner cup by removing the coater cover and the rectifying member without removing the rotary table. This reduces the time required for maintenance.

  In addition, when the recording material is changed, or when there is a possibility that the recording material is solidified in the recording material discharge portion of the recording material supply mechanism because the spin coating operation is interrupted for a long time, so-called air blow In the present invention, the recording material is ejected to the coater cover at the time of the empty shot by removing the inner cup and easily replacing it with a new inner cup. By forming the hole for air shooting that accepts the solution and flows to the inner cup, it is useful for simplifying the recovery mechanism of the recording material discharged during the air shooting and shortening the time required for maintenance. .

In addition, it is easy to attach and detach the coater cover to the inner cup or the coater cup by making the amount of the dye material fixed to the contact portion between the coater cover and the inner cup or the coater cup as small as possible. This also helps to reduce maintenance time.
Japanese Patent No. 3270758

An object of the present invention is to provide a spin coating apparatus that is easy to maintain.

  The invention of claim 1 is a recording material supply mechanism for supplying a recording material to an optical disk substrate, a rotary table on which the optical disk substrate on which a recording film is formed is mounted, a rotation drive motor, and a rotation of the rotation drive motor A spindle unit that transmits force to the rotary table, a rectifying member that prevents a mist of the recording material from wrapping around the rotary table or the optical disk substrate, a coater cup, and an inner cup accommodated in the coater cup And the coater cover, the coater cover is supported by the inner cup or the coater cup so as to be detachable, and the rectifying member includes an inner fixed portion and the inner fixed portion. And an outer detachable portion that is locked to the inner surface, and the outer detachable portion has an inner diameter larger than the diameter d1 of the rotary table. The inner cup includes a cylindrical inner wall portion having an inner diameter d2 larger than an outer diameter D2 of the inner fixed portion of the rectifying member, a cylindrical outer wall portion concentric with the cylindrical inner wall portion, The present invention provides a spin coater comprising an annular bottom portion that joins the cylindrical inner wall portion and the cylindrical outer wall portion, and is detachable from the coater cup.

  According to the first aspect of the present invention, the inner cup for collecting the recording material can be easily attached and detached in a short time, and therefore maintenance can be performed in a short time. Production efficiency can be improved.

  According to a second aspect of the present invention, there is provided a recording material supply mechanism for supplying a recording material to an optical disc substrate, a rotary table on which the optical disc substrate on which a recording film is formed is mounted, a rotary drive motor, and the rotary drive motor A spindle unit that transmits rotational force to the rotary table, a rectifying member that prevents a mist of the recording material from wrapping around the rotary table or the optical disk substrate, a coater cup, and an inner member accommodated in the coater cup In a spin coater including a cup and a coater cover, the coater cover is supported by the inner cup or the coater cup so as to be detachable, and is supported by the inner cup or the coater cup. A cylindrical skirt portion extending downward in the inner cup. It is to provide a spin-coating apparatus according to symptoms.

  According to the second aspect of the present invention, since the mist of the recording material liquid can be prevented from adhering to the contact portion between the coater cover and the inner cup, the inner cup can be easily attached to and detached from the coater cup in a short time. Therefore, since the maintenance can be performed in a short time, the operation stop time of the spin coating apparatus can be shortened, and the production efficiency can be improved.

  According to a third aspect of the present invention, there is provided a recording material supply mechanism for supplying a recording material to an optical disc substrate, a rotary table on which the optical disc substrate on which a recording film is formed is mounted, a rotary drive motor, and the rotary drive motor. A spindle unit that transmits rotational force to the rotary table, a rectifying member that prevents a mist of the recording material from wrapping around the rotary table or the optical disk substrate, a coater cup, and an inner member accommodated in the coater cup In a spin coat apparatus including a cup and a coater cover, the coater cover is supported by the inner cup or the coater cup so as to be detachable, and when the recording material supply mechanism is idle It has a punch hole for flowing the recording material to be discharged into the inner cup. There is provided a Nkoto device.

  According to the invention of claim 3, since the recording material liquid collecting mechanism discharged when the recording material supply mechanism is struck is simplified, and the recording material liquid collecting passage can be shortened, the apparatus is simplified. At the same time, the problem that the dye material adheres to the drain as in the prior art can be solved.

  The invention according to claim 4 is the invention according to claim 3, wherein the coater cover is supported by the inner cup or the coater cup, and in the state of being supported by the inner cup or the coater cup, The present invention provides a spin coat apparatus having a cylindrical skirt portion extending into an inner cup and having an outlet of the idle hole in a radial outward direction of the cylindrical skirt portion.

  According to the invention of claim 4, since it is possible to suppress the mist of the recording material liquid from adhering to the place where the coater cover and the inner cup abut, it is also possible to suppress the mist from adhering to the empty hole. Maintenance becomes easy.

  According to a fifth aspect of the present invention, in the spin coating apparatus according to the fourth aspect of the present invention, the idle hole has an inlet formed on an upper surface of the coater cover, and the inlet is larger than the outlet. Is to provide.

  According to the fifth aspect of the present invention, the recording material liquid discharged when the recording material supply mechanism is struck can be easily collected in the inner cup in a liquid state.

  According to a sixth aspect of the present invention, in the spin coater according to the fourth or fifth aspect, the cylindrical skirt portion is provided with a groove on the outer peripheral surface thereof that communicates with an outlet of the idle hole. Is to provide.

  According to the sixth aspect of the present invention, the recording material liquid discharged when the recording material supply mechanism is struck can be smoothly dropped onto the inner cup, and the recording material liquid is fixed to the outer surface of the cylindrical skirt portion. Can be suppressed.

  According to a seventh aspect of the present invention, in any one of the fourth to sixth aspects, an annular shape is provided on a lower surface of the coater cover in a radial outward direction from the outlet of the cylindrical skirt portion and the air shooting hole. The present invention provides a spin coater characterized by comprising a small groove.

  According to the seventh aspect of the present invention, since the recording material liquid can be prevented from being transmitted along the lower surface of the coater cover and fixed to the contact portion between the coater cover and the inner cup, maintenance is facilitated.

  The invention according to claim 8 is characterized in that, in any one of claims 1 to 7, a positioning locking portion for positioning at least the coater cover on the inner cup or the coater cup is provided. A spin coating apparatus is provided.

  According to the eighth aspect of the present invention, it is possible to easily align the empty hole formed in the coater cover with the recording material supply mechanism, and the coater cover and inner cup to the coater cover at the time of maintenance are provided. The time required for mounting can be shortened.

  The invention according to claim 9 is the spin coat according to any one of claims 1 to 8, wherein the inner cup does not have a drain structure for discharging the recording material. A device is provided.

  According to the invention of claim 9, since the inner cup does not have a drain structure for discharging the collected recording material liquid, the inner cup is easily attached and detached, and the dye material is not fixed to the drain. Maintenance becomes easy.

  A tenth aspect of the present invention is the spin coater according to any one of the first to ninth aspects, wherein the rotary table has a diameter substantially equal to or larger than the same diameter as the optical disk substrate. Is to provide.

According to the invention of claim 10, even if the turntable has a diameter larger than that of the optical disk substrate, the rectifying member and the inner cup can be attached and detached without removing the turntable, so that maintenance is facilitated.

According to the present invention, it is possible to provide a spin coater having a structure that is easy to maintain. Therefore, the time for which the spin coater is stopped during maintenance can be shortened as compared with the prior art, so that productivity can be improved. .

  First, the spin coat apparatus 100 of Example 1 which is the best form for implementing this invention is demonstrated.

  An embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a view showing a spin coater 100 according to an embodiment of the present invention, FIG. 2 is an enlarged view of a part of the spin coater 100, and FIG. 3 is a view showing a partial cross section of a coater cover. 4 is a drawing for explaining the positioning of the coater cup, the inner cup, and the coater cover, and FIG. 5 is a drawing for explaining the empty shot of the recording material supply mechanism.

  In FIG. 1, a normal small rotary drive motor 2 is attached to the center of a circular bottom 1a of a pan-shaped coater cup 1. The rotational force of the rotary drive motor 2 is transmitted to the rotary table 4 by the spindle unit 3. In order to ensure the flatness of the optical disk substrate S, the turntable 4 has a disk-like mounting portion 4A having a diameter d1 equal to or larger than the diameter of the optical disk substrate S, as shown in FIG. And a cylindrical base portion 4B coupled to the spindle unit 3 on the lower side.

  A rectifying member 5 is provided so as to surround the outer periphery and the lower portion of the rotary table 4. The rectifying member 5 rectifies so that the recording material liquid shaken off by the centrifugal force does not scatter, and prevents the mist of the recording material from entering the lower surface of the rotary table 4 and the lower surface of the optical disc substrate S during spin coating. To do. The rectifying member 5 is characterized by an inner fixed portion 5A and an outer detachable portion 5B. An inner fixing portion 5A fixed to a fixing portion (not shown) is an annular plate that surrounds the cylindrical base portion 4B of the turntable 4 so as not to come into contact therewith, and a large-diameter portion 5a having a large outer diameter and It consists of a small diameter portion 5b having a smaller diameter. An annular step portion 5c is formed on the outer periphery of the large diameter portion 5a and the small diameter portion 5b. As shown in FIG. 2, the large-diameter portion 5a and the small-diameter portion 5b of the inner fixed portion 5A have diameters D2 and D2 ', respectively. Although not shown, in order to further prevent the mist from wrapping around, an annular convex portion is formed on the upper surface of the inner fixed portion 5A, and the disc-like placement of the rotary table 4 corresponding to the annular convex portion is provided. An annular groove is formed on the lower surface of the portion 4A, and a part of the annular convex portion enters the annular groove through a gap.

  The outer detachable portion 5B of the rectifying member 5 has a stepped portion 5d that fits and closely contacts the annular stepped portion 5c of the inner fixed portion 5A, and is larger than the diameter d1 of the disc-like mounting portion 4A of the rotary table 4. It has an annular shape having a cylindrical inner wall surface 5e having a large diameter D1. The difference between the diameter d1 and the diameter D1 is not in contact or about several mm. Further, the outer detachable portion 5B has an upper surface 5f that is substantially the same as or somewhat lower than the upper surface of the disc-shaped mounting portion 4A of the turntable 4 and a tapered surface 5g that is lowered outwardly.

  The inner cup 6 for collecting surplus recording material includes a cylindrical inner wall portion 6a having a diameter d2 larger than a diameter D2 of the large diameter portion 5a of the inner fixed portion 5A of the rectifying member 5, and a cylindrical outer wall portion. 6b, and an annular bottom plate portion 6c that connects and closes the bottom surfaces of the inner wall portion 6a and the outer wall portion 6b. The bottom plate portion 6c does not have a drain for discharging the recording material. Therefore, excess recording material liquid shaken off during spin coating is collected and stored in the inner cup 6. The upper portion of the cylindrical outer wall portion 6b is a large-diameter portion 6e having a larger diameter than the cylindrical outer wall portion 6b by an annular step portion 6d extending radially outward from the outer wall portion 6b.

The upper portion of the coater cup 1 is a large-diameter portion 1d having a larger diameter than the cylindrical side wall portion 1b by an annular step portion 1c extending radially outward from the cylindrical side wall portion 1b. The step portion 6d of the cylindrical outer wall portion 6b is supported by the annular step portion 1c. At this time, the bottom plate portion 6c of the inner cup 6 contacts and is supported by the circular bottom portion 1a of the coater cup 1. Therefore, the inner cup 6 is stably supported by the coater cup 1.

  As shown in FIG. 3A, the coater cover 7 includes a circular upper surface 7b having a central hole 7a having a diameter larger than the diameter of the optical disk substrate S, and a large-diameter portion 6e of the inner cup 6. A cylindrical outer wall portion 7c having a diameter slightly smaller than the diameter and accommodated in the large diameter portion 6e, a scattering suppression wall portion 7d for suppressing the liquid of the recording material from scattering, and an inner end from the lower end of the scattering suppression wall portion 7d. A cylindrical skirt portion 7e extending into the cup 6, an annular small groove 7f provided at the bottom in the outward direction of the skirt portion 7e, and a recording material liquid discharged when the recording material supply mechanism 8 is struck. And 7g for air shooting holes. The air shooting hole 7g is provided in a part of the upper surface 7b, has the largest entrance area, and gradually decreases to a predetermined area. After reaching the predetermined area, the area reaches the bottom outlet facing the inner cup 6. Is formed. Further, as shown in FIG. 3 (B), a groove 7h communicating with the air shooting hole 7g is preferably formed on the outer surface of the skirt portion 7e, and the recording material liquid flowing through the air shooting hole 7g at the time of air shooting. Is dripped into the inner cup 6 through the groove 7h of the skirt portion 7e.

  Further, as shown in FIG. 4, the side walls of the coater cup 1, inner cup 6 and coater cover 7 are positioned and locked to always position the empty shooting hole 7g at a fixed position with respect to the coater cup 1. It has parts X1-X4. In this example, the positioning locking portion X1 formed on the inner wall of the large-diameter portion 1d of the coater cup 1 is a wedge-shaped convex portion, and the outer periphery of the large-diameter portion 6e of the inner cup 6 is adapted to the positioning locking portion X1. A positioning locking portion X2, which is a wedge-shaped recess, is formed. A positioning locking portion X3 that is a wedge-shaped convex portion is formed on the inner periphery of the large-diameter portion 6e of the inner cup 6, and a wedge-shaped concave portion that fits the positioning locking portion X3 is formed on the cylindrical outer wall portion 7c of the coater cover 7. A positioning locking portion X4 is formed. By these positioning and locking portions X1 to X4, the positions of the inner cup 6 and the coater cover 7 with respect to the coater cup 1 are always constant, and the positions of the empty shooting holes 7g are also always constant. Although not shown, the coater cup 1 and the coater cover 7 may be directly locked, and the inner cup 6 may be movable without being locked.

  Further, various shapes can be considered for the positioning locking portions X1 to X4. Instead of the wedge shape, a rectangular shape, a semicircular shape, or a positioning locking portion provided on the coater cup 1 is provided on the inner cup 6. It may extend and be locked through a notch or through hole to a positioning locking portion provided on the side wall of the coater cover 7. Of course, the convex portion and the concave portion may be opposite to those in FIG.

Above the coater cover 7, a recording material supply mechanism 8 that supplies the recording material to the optical disc substrate S is provided. The recording material supply mechanism 8 includes an arm member 8a that pivots left and right and a nozzle member 8b that is provided at the tip of the arm member 8a. The other members are not shown. As indicated by an arrow A1 in FIG. 5, the arm member 8a is pivoted from the basic position P to just above the optical disk substrate S and stopped, and the recording material liquid is supplied onto the optical disk substrate S from the nozzle member 8b through the central hole 7a. . When the supply of the recording material liquid is completed, the arm member 8a returns to the basic position P.

  When the recording material to be supplied is changed, or when the operation of this apparatus has been stopped for a long time, the recording material supply mechanism 8 generally performs a blanking operation until the supply of the recording material becomes stable. The recording material liquid is discharged. During this idling operation, the arm member 8a moves from the basic position P to just above the idling hole 7g, and the nozzle member 8b discharges the recording material liquid toward the idling hole 7g. When it is confirmed that the recording material liquid is stably discharged from the nozzle member 8b, the arm member 8a returns to the basic position P again. The circular bottom 1a of the coater cup 1 is provided with an exhaust port 1e for exhausting a gas such as a solvent. In order to always hold the air shooting hole 7g at a predetermined position of the coater cup 1, the positioning locking portions X1 to X4 as described above are provided.

  Next, the replacement work of the inner cup 6 will be described while explaining the operation of the spin coat apparatus 100. In a state where the drive rotation motor 2 is rotated at a low speed, the recording material liquid is supplied onto the optical disk substrate S from the nozzle member 8b of the recording material supply mechanism 8 in an annular shape or a spiral shape, and then the drive rotation motor 2 is rotated at a high speed. Then, the optical disk substrate S is rotated at a high speed together with the rotary table 4 to spread the recording material liquid on the optical disk substrate S. At this time, the surplus recording material liquid is shaken off by the centrifugal force, and the shaken recording material liquid is rectified by the rectifying member 5 and collides with the scattering prevention wall portion 7d of the coater cover 7 at an angle where the scattering is small. Dropped into the inner cup 6 by being transmitted through the portion 7e. At this time, the recording material liquid is in the form of a mist, and the mist descends while floating, but tries to enter the gap between the members.

  The cylindrical skirt portion 7e of the coater cover 7 is a portion where the mist of the recording material liquid comes into contact with the coater cover 7 and the inner cup 6 by adhering mist to the inner surface and reducing the amount of mist that goes around to the back side. It works to suppress entry into the gap. An annular small groove 7 f provided at the bottom of the coater cover 7 prevents the recording material liquid shot by air from flowing through the bottom of the coater cover 7 and flowing to the contact portion between the coater cover 7 and the inner cup 6. prevent. Therefore, since the recording material liquid entering the portion where the coater cover 7 and the inner cup 6 abut can be suppressed to a minimum, the coater cover 7 can be removed from the inner cup 6 even if the dye material in the recording material liquid is solidified. It can be easily removed and maintenance is easy.

  The outer attaching / detaching portion 5B of the rectifying member 5 serves to prevent the recording material liquid mist from flowing around the back side of the rotary table 4, so that the recording material liquid mist contacts the inner fixing portion 5A and the outer attaching / detaching portion 5B. Prevent entry into the area. Therefore, the outer detachable portion 5B can be easily detached from the inner fixed portion 5A. By performing many such recording film forming steps, the recording material collected in the inner cup 6 increases, eventually reaching an allowable amount and needs to be replaced. At this time, the recording material in the inner cup 6 is a powdery solid or a liquid with a high viscosity.

  In replacing the inner cup 6, first, if necessary, the coater cup 1, the inner cup 6, and the coater cover 7 are provided with attachment portions (not shown) having attachment holes, and attachment screws and the like are provided from the attachment holes. After removing, the coater cover 7 is lifted and removed, and then the outer detachable portion 5B of the rectifying member 5 is removed from the inner fixed portion 5A. At this time, as described above, since the minimum inner diameter D1 of the outer attaching / detaching portion 5B is larger than the maximum diameter d1 of the turntable 4, the outer attaching / detaching portion 5B can be easily detached from the inner fixing portion 5A. In this state, the inner cup 6 is lifted and removed. The diameter d2 of the inner wall portion 6d of the inner cup 6 is larger than the maximum outer diameter D2 of the inner fixed portion 5A of the rectifying member 5 as well as the maximum diameter d1 of the rotary table 4, so that the rotary table 4 and the rectifying member The inner cup 6 can be removed while leaving the inner fixing portion 5A of 5 as it is. Further, as described above, since the dye material is hardly fixed at the contact portion of each member, they can be easily removed.

  The recording material collected in the inner cup 6 is reused. Similarly, the outer detachable portion 5B, the inner cup 6 and the coater cover 7 of the rectifying member 5 are cleaned and reused, so that at least the outer side of the recording material is easily removed by the cleaning liquid. The outer surface of the detachable portion 5B and the inner surfaces of the inner cup 6 and the coater cover 7 are preferably coated with a fluororesin.

  At the time of replacement, when the coater cover 7, the outer attaching / detaching portion 5B of the rectifying member 5 and the inner cup 6 are removed, the inner cup 6 that has been washed in advance is immediately set on the coater cup 1, and then the outer side of the rectifying member 5 By attaching the coater cover 7 to the detachable portion 5B, the operation of the apparatus can be resumed immediately with the operation stop of the spin coat apparatus minimized. As described above, the replacement time of the inner cup 6 of this embodiment, that is, the time required for maintenance is short, and therefore the stop time of the operation of the spin coater is significantly reduced compared with the time required for cleaning the conventional device. Production efficiency can be improved.

  In the embodiment described above, the inner fixed portion 5A and the outer detachable portion 5B of the rectifying member 5 are brought into contact with the steps 5c and 5d. However, the tapered surface T having a complementary angle matching the steps 5c and 5d. Of course. Further, the cylindrical skirt portion 7e of the coater cover 7 is such that the lower end side opens radially outward, and the interval between the lower end of the cylindrical skirt portion 7e and the inner surface of the cylindrical outer wall portion 6b of the inner cup 6 is narrowed. It may be.

  In the above embodiment, the drive rotary motor 2 is provided in the coater cup 1. However, in order not to transfer the heat of the drive rotary motor 2 to the rotary table 4 as much as possible, the drive rotary motor 2 can be separated from the rotary table 4. Has been done. Although not shown in particular, if it demonstrates using FIG. 1, the drive rotation motor 2 was located under the coater cup 1, the hole was provided in the bottom plate part 1a of the coater cup 1, and the labyrinth seal mechanism etc. were employ | adopted through the hole. The non-contact spindle unit 3 is extended to transmit the rotational force of the drive rotary motor 2 to the rotary table 4. Since the vacuum suction mechanism for sucking the substrate to the turntable 4 is out of the requirements of the present invention, the description thereof is omitted.

Although the best mode has been described in the above embodiments, the cylindrical skirt portion 7e of the coater cover 7, the empty shot hole 7g, and the small groove 7f are not necessarily provided in a single spin coater.

It is a figure which shows the spin coater 100 which concerns on one Example of this invention. It is the figure which expanded a part of spin coater 100 concerning one example of the present invention. It is a fragmentary sectional view of the coater cover used for the spin coater 100 concerning one example of the present invention. It is a figure for demonstrating the positioning part in the spin coat apparatus 100 which concerns on one Example of this invention. It is a figure for demonstrating the recording material supply mechanism in the spin coater 100 which concerns on one Example of this invention.

Explanation of symbols

1 ... Coater cup,
2 ... Drive rotation motor,
3 ... Spindle unit,
4 ... Rotary table,
5 ... Rectifying member,
5A ... Inside fixed part,
5B ... outer detachable part,
6 ... Inner cup,
7 ... Coater cover,
7e ・ ・ ・ skirt part,
7f ... small groove,
7g ... hole for air shot,
8 ... Recording material supply mechanism,
X1 to X4 ... positioning locking portions.

Claims (4)

A recording material supply mechanism for supplying a recording material to an optical disc substrate, a rotary table on which the optical disc substrate on which a recording film is formed is mounted, a rotary drive motor, and a rotational force of the rotary drive motor are transmitted to the rotary table. And a rectifying member for preventing the mist of the recording material from flowing around to the lower side of the rotary table or the optical disk substrate, a coater cup, an inner cup accommodated in the coater cup, and a coater cover. In spin coating equipment,
The coater cover is supported by the inner cup or the coater cup so as to be detachable,
The rectifying member includes an inner fixed portion and an outer detachable portion locked to the inner fixed portion, and the outer detachable portion has an inner diameter D1 larger than a diameter d1 of the rotary table,
The inner cup includes a cylindrical inner wall portion having an inner diameter d2 larger than an outer diameter D2 of the inner fixed portion of the rectifying member, a cylindrical outer wall portion concentric with the cylindrical inner wall portion, and the cylindrical inner wall portion. And an annular bottom portion that joins the cylindrical outer wall portion, and can be attached to and detached from the coater cup , and the inner cup does not have a drain structure for discharging the recording material. A spin coating apparatus. A recording material supply mechanism for supplying a recording material to an optical disc substrate, a rotary table on which the optical disc substrate on which a recording film is formed is mounted, a rotary drive motor, and a rotational force of the rotary drive motor are transmitted to the rotary table. And a rectifying member for preventing the mist of the recording material from flowing around to the lower side of the rotary table or the optical disk substrate, a coater cup, an inner cup accommodated in the coater cup, and a coater cover. In spin coating equipment,
The coater cover is supported by the inner cup or the coater cup so as to be detachable so that the recording material discharged when the recording material supply mechanism is struck can flow into the inner cup. With a hole for air shooting
The coater cover is adapted to be supported by the inner cup or the coater cup, and in a state of being supported by the inner cup or the coater cup, has a cylindrical skirt portion extending into the inner cup, Having an outlet of the air hole for the radial direction of the cylindrical skirt ,
A spin coat apparatus comprising an annular small groove on a lower surface of the coater cover in a radial outward direction from an outlet of the cylindrical skirt portion and the idle hole . A recording material supply mechanism for supplying a recording material to an optical disc substrate, a rotary table on which the optical disc substrate on which a recording film is formed is mounted, a rotary drive motor, and a rotational force of the rotary drive motor are transmitted to the rotary table. And a rectifying member for preventing the mist of the recording material from flowing around to the lower side of the rotary table or the optical disk substrate, a coater cup, an inner cup accommodated in the coater cup, and a coater cover. In spin coating equipment,
The coater cover is supported by the inner cup or the coater cup so as to be detachable so that the recording material discharged when the recording material supply mechanism is struck can flow into the inner cup. With a hole for air shooting
The coater cover is adapted to be supported by the inner cup or the coater cup, and in a state of being supported by the inner cup or the coater cup, has a cylindrical skirt portion extending into the inner cup, Having an outlet of the air hole for the radial direction of the cylindrical skirt,
The idle driving hole has an inlet formed in the upper surface of the coater cover, said inlet is greatly than the outlet,
A spin coat apparatus comprising an annular small groove on a lower surface of the coater cover in a radial outward direction from an outlet of the cylindrical skirt portion and the idle hole . In claim 2 or claim 3 ,
The spin coater according to claim 1, wherein the cylindrical skirt portion includes a groove on the outer peripheral surface thereof that leads to an outlet of the idle hole.

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