TWI264721B - Spin coating apparatus - Google Patents
Spin coating apparatusInfo
- Publication number
- TWI264721B TWI264721B TW93139732A TW93139732A TWI264721B TW I264721 B TWI264721 B TW I264721B TW 93139732 A TW93139732 A TW 93139732A TW 93139732 A TW93139732 A TW 93139732A TW I264721 B TWI264721 B TW I264721B
- Authority
- TW
- Taiwan
- Prior art keywords
- coater
- rotation table
- spin coating
- coating apparatus
- cup
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003429087A JP4117843B2 (ja) | 2003-12-25 | 2003-12-25 | スピンコート装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200529222A TW200529222A (en) | 2005-09-01 |
TWI264721B true TWI264721B (en) | 2006-10-21 |
Family
ID=34736292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW93139732A TWI264721B (en) | 2003-12-25 | 2004-12-21 | Spin coating apparatus |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4117843B2 (zh) |
CN (2) | CN101518770B (zh) |
DE (1) | DE112004002534T5 (zh) |
TW (1) | TWI264721B (zh) |
WO (1) | WO2005063409A1 (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8153194B2 (en) | 2006-03-01 | 2012-04-10 | Tokuyama Corporation | Method for producing laminate |
JP5457866B2 (ja) * | 2010-02-08 | 2014-04-02 | 株式会社日立ハイテクノロジーズ | スピンコート方法及びスピンコーター |
CN106111465B (zh) * | 2016-07-29 | 2018-10-23 | 芜湖市振华戎科智能科技有限公司 | 一种加密光盘生产线用旋涂装置 |
CN107116007A (zh) * | 2017-06-20 | 2017-09-01 | 柴德维 | 用于橡胶零部件的涂胶工装 |
CN113655167A (zh) * | 2020-05-12 | 2021-11-16 | 国家烟草质量监督检验中心 | 一种滤片自动涂液装置测定卷烟主流烟气中氨含量的方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5889966A (ja) * | 1981-11-24 | 1983-05-28 | Hitachi Ltd | 塗布装置 |
JP3002368B2 (ja) * | 1993-11-12 | 2000-01-24 | 東京応化工業株式会社 | 回転カップ式液体供給装置 |
DE19748063A1 (de) * | 1997-10-31 | 1999-05-06 | Acr Automation In Cleanroom | Vorrichtung zum Aufbringen einer dünnen Schicht auf die Oberfläche eines Bildschirmglaskolbens |
JP2003047903A (ja) * | 2001-08-08 | 2003-02-18 | Dainippon Screen Mfg Co Ltd | 基板処理装置及びその整流板 |
-
2003
- 2003-12-25 JP JP2003429087A patent/JP4117843B2/ja not_active Expired - Fee Related
-
2004
- 2004-12-16 CN CN2009100077731A patent/CN101518770B/zh not_active Expired - Fee Related
- 2004-12-16 WO PCT/JP2004/018793 patent/WO2005063409A1/ja active Application Filing
- 2004-12-16 DE DE112004002534T patent/DE112004002534T5/de not_active Withdrawn
- 2004-12-16 CN CNB2004800387305A patent/CN100528378C/zh not_active Expired - Fee Related
- 2004-12-21 TW TW93139732A patent/TWI264721B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE112004002534T5 (de) | 2006-12-07 |
CN100528378C (zh) | 2009-08-19 |
JP2005190532A (ja) | 2005-07-14 |
CN101518770B (zh) | 2011-01-12 |
TW200529222A (en) | 2005-09-01 |
CN101518770A (zh) | 2009-09-02 |
CN1898031A (zh) | 2007-01-17 |
JP4117843B2 (ja) | 2008-07-16 |
WO2005063409A1 (ja) | 2005-07-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |