JP4096990B2 - セラミック多層基板およびその製造方法 - Google Patents
セラミック多層基板およびその製造方法 Download PDFInfo
- Publication number
- JP4096990B2 JP4096990B2 JP2006552410A JP2006552410A JP4096990B2 JP 4096990 B2 JP4096990 B2 JP 4096990B2 JP 2006552410 A JP2006552410 A JP 2006552410A JP 2006552410 A JP2006552410 A JP 2006552410A JP 4096990 B2 JP4096990 B2 JP 4096990B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic
- layer
- ceramic green
- conductive paste
- multilayer substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 239000000919 ceramic Substances 0.000 title claims description 299
- 239000000758 substrate Substances 0.000 title claims description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000004020 conductor Substances 0.000 claims description 74
- 239000011574 phosphorus Substances 0.000 claims description 71
- 229910052698 phosphorus Inorganic materials 0.000 claims description 71
- 229910010293 ceramic material Inorganic materials 0.000 claims description 56
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 50
- 239000000843 powder Substances 0.000 claims description 39
- 238000010304 firing Methods 0.000 claims description 26
- -1 phosphorus compound Chemical class 0.000 claims description 25
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 238000005245 sintering Methods 0.000 claims description 11
- 229910018557 Si O Inorganic materials 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 239000002131 composite material Substances 0.000 description 26
- 238000012360 testing method Methods 0.000 description 19
- 239000011230 binding agent Substances 0.000 description 14
- 239000002904 solvent Substances 0.000 description 11
- 239000011521 glass Substances 0.000 description 9
- 239000002002 slurry Substances 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000004014 plasticizer Substances 0.000 description 4
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000001856 Ethyl cellulose Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 3
- 229910019142 PO4 Inorganic materials 0.000 description 3
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000008602 contraction Effects 0.000 description 3
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 235000019325 ethyl cellulose Nutrition 0.000 description 3
- 229920001249 ethyl cellulose Polymers 0.000 description 3
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000010452 phosphate Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229940116411 terpineol Drugs 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- IHWJXGQYRBHUIF-UHFFFAOYSA-N [Ag].[Pt] Chemical compound [Ag].[Pt] IHWJXGQYRBHUIF-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 description 2
- 239000003985 ceramic capacitor Substances 0.000 description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 229920000180 alkyd Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000001506 calcium phosphate Substances 0.000 description 1
- 229910000389 calcium phosphate Inorganic materials 0.000 description 1
- 235000011010 calcium phosphates Nutrition 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- FQENQNTWSFEDLI-UHFFFAOYSA-J sodium diphosphate Chemical compound [Na+].[Na+].[Na+].[Na+].[O-]P([O-])(=O)OP([O-])([O-])=O FQENQNTWSFEDLI-UHFFFAOYSA-J 0.000 description 1
- 229940048086 sodium pyrophosphate Drugs 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 235000019818 tetrasodium diphosphate Nutrition 0.000 description 1
- 239000001577 tetrasodium phosphonato phosphate Substances 0.000 description 1
- QORWJWZARLRLPR-UHFFFAOYSA-H tricalcium bis(phosphate) Chemical compound [Ca+2].[Ca+2].[Ca+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QORWJWZARLRLPR-UHFFFAOYSA-H 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
- H05K3/4629—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0183—Dielectric layers
- H05K2201/0195—Dielectric or adhesive layers comprising a plurality of layers, e.g. in a multilayer structure
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0263—Details about a collection of particles
- H05K2201/0269—Non-uniform distribution or concentration of particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Conductive Materials (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005270703 | 2005-09-16 | ||
JP2005270703 | 2005-09-16 | ||
PCT/JP2006/315927 WO2007032167A1 (ja) | 2005-09-16 | 2006-08-11 | セラミック多層基板およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4096990B2 true JP4096990B2 (ja) | 2008-06-04 |
JPWO2007032167A1 JPWO2007032167A1 (ja) | 2009-03-19 |
Family
ID=37864765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006552410A Active JP4096990B2 (ja) | 2005-09-16 | 2006-08-11 | セラミック多層基板およびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7691469B2 (zh) |
JP (1) | JP4096990B2 (zh) |
CN (1) | CN101268725B (zh) |
DE (1) | DE112006002451B4 (zh) |
TW (1) | TW200714163A (zh) |
WO (1) | WO2007032167A1 (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101836511B (zh) * | 2007-10-26 | 2013-04-03 | 纳幕尔杜邦公司 | 非对称的介电薄膜 |
KR100896601B1 (ko) * | 2007-11-05 | 2009-05-08 | 삼성전기주식회사 | 무수축 세라믹 기판의 제조방법 및 이를 이용한 무수축세라믹 기판 |
TW201037803A (en) * | 2009-04-13 | 2010-10-16 | High Conduction Scient Co Ltd | Multi-layer packaging substrate, method for making the packaging substrate, and package structure of light-emitting semiconductor |
JP5644945B2 (ja) * | 2011-06-29 | 2014-12-24 | 株式会社村田製作所 | 多層セラミック基板およびその製造方法 |
EP2738799A4 (en) * | 2011-07-29 | 2015-06-17 | Ngk Insulators Ltd | MULTI-LAYER FRITTED CERAMIC PRINTED CIRCUIT BOARD, AND SEMICONDUCTOR ASSEMBLY COMPRISING THE PRINTED CIRCUIT BOARD |
JP6065355B2 (ja) * | 2011-09-20 | 2017-01-25 | 株式会社村田製作所 | 多層セラミック基板およびその製造方法 |
WO2013089128A1 (ja) * | 2011-12-16 | 2013-06-20 | 株式会社村田製作所 | 導電性組成物、多層セラミック基板およびその製造方法 |
US20130229777A1 (en) * | 2012-03-01 | 2013-09-05 | Infineon Technologies Ag | Chip arrangements and methods for forming a chip arrangement |
WO2014104035A1 (ja) * | 2012-12-27 | 2014-07-03 | 富士フイルム株式会社 | 反射基板 |
JP5941588B2 (ja) * | 2014-09-01 | 2016-06-29 | Dowaエレクトロニクス株式会社 | 接合材およびそれを用いた接合方法 |
JP2017050391A (ja) * | 2015-09-01 | 2017-03-09 | 株式会社デンソー | 多層基板およびその製造方法 |
WO2017047647A1 (ja) * | 2015-09-18 | 2017-03-23 | 株式会社村田製作所 | セラミック多層基板 |
JP2017220525A (ja) * | 2016-06-06 | 2017-12-14 | 株式会社村田製作所 | 積層セラミック電子部品 |
JP2017220522A (ja) * | 2016-06-06 | 2017-12-14 | 株式会社村田製作所 | 積層セラミック電子部品 |
WO2018037842A1 (ja) | 2016-08-22 | 2018-03-01 | 株式会社村田製作所 | セラミック基板及び電子部品内蔵モジュール |
US11667585B2 (en) | 2018-09-19 | 2023-06-06 | Apple, Inc. | Ceramic substrate with glass fill for decoration and housing materials |
KR102211998B1 (ko) * | 2019-04-10 | 2021-02-04 | 주식회사 디아이티 | 상이한 열팽창 계수를 갖는 상하면을 구비한 다층 세라믹 기판 및 그의 제조 방법 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4868034A (en) | 1988-02-11 | 1989-09-19 | Heraeus Incorporated Cermalloy Division | Non-oxidizing copper thick film conductors |
US5130280A (en) * | 1988-10-14 | 1992-07-14 | Raychem Corporation | Metal oxide dielectric dense bodies, precursor powders therefor, and methods for preparing same |
US5188886A (en) * | 1988-10-14 | 1993-02-23 | Raychem Corporation | Metal oxide dielectric dense bodies, precursor powders therefor, and methods for preparing same |
JPH05242724A (ja) * | 1992-02-27 | 1993-09-21 | Taiyo Yuden Co Ltd | 導電性ペースト |
JPH06204512A (ja) | 1993-01-07 | 1994-07-22 | Dai Ichi Kogyo Seiyaku Co Ltd | 半導体基板用電極ペースト |
TW341022B (en) * | 1995-11-29 | 1998-09-21 | Nippon Electric Co | Interconnection structures and method of making same |
JPH09241862A (ja) | 1996-03-01 | 1997-09-16 | Murata Mfg Co Ltd | 銅粉末及び銅ペースト並びにセラミック電子部品 |
JPH109226A (ja) | 1996-06-21 | 1998-01-13 | Suzuki Motor Corp | 板金製クランプ |
JPH1092226A (ja) | 1996-09-11 | 1998-04-10 | Murata Mfg Co Ltd | 導電性組成物 |
JPH10242644A (ja) | 1997-02-26 | 1998-09-11 | Hitachi Ltd | 導体回路付グリーンシートおよびその製造法並びにこれを用いた多層配線セラミック基板 |
JP3656484B2 (ja) | 1999-03-03 | 2005-06-08 | 株式会社村田製作所 | セラミック多層基板の製造方法 |
JP2002095244A (ja) | 2000-09-18 | 2002-03-29 | Toshiba Corp | レギュレータ回路 |
JP3669255B2 (ja) * | 2000-09-19 | 2005-07-06 | 株式会社村田製作所 | セラミック多層基板の製造方法および未焼成セラミック積層体 |
-
2006
- 2006-07-11 TW TW095125332A patent/TW200714163A/zh not_active IP Right Cessation
- 2006-08-11 CN CN2006800341245A patent/CN101268725B/zh active Active
- 2006-08-11 DE DE112006002451.5T patent/DE112006002451B4/de active Active
- 2006-08-11 JP JP2006552410A patent/JP4096990B2/ja active Active
- 2006-08-11 WO PCT/JP2006/315927 patent/WO2007032167A1/ja active Application Filing
-
2008
- 2008-03-17 US US12/049,848 patent/US7691469B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI331890B (zh) | 2010-10-11 |
TW200714163A (en) | 2007-04-01 |
DE112006002451T5 (de) | 2008-07-10 |
WO2007032167A1 (ja) | 2007-03-22 |
CN101268725B (zh) | 2012-07-18 |
DE112006002451B4 (de) | 2016-08-18 |
JPWO2007032167A1 (ja) | 2009-03-19 |
US7691469B2 (en) | 2010-04-06 |
CN101268725A (zh) | 2008-09-17 |
US20080156413A1 (en) | 2008-07-03 |
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