JP4008064B2 - 光アイソレータ及びその製造方法 - Google Patents
光アイソレータ及びその製造方法 Download PDFInfo
- Publication number
- JP4008064B2 JP4008064B2 JP00455197A JP455197A JP4008064B2 JP 4008064 B2 JP4008064 B2 JP 4008064B2 JP 00455197 A JP00455197 A JP 00455197A JP 455197 A JP455197 A JP 455197A JP 4008064 B2 JP4008064 B2 JP 4008064B2
- Authority
- JP
- Japan
- Prior art keywords
- optical isolator
- optical
- isolator
- dicing
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 187
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000835 fiber Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 32
- 239000013078 crystal Substances 0.000 claims description 24
- 239000000853 adhesive Substances 0.000 claims description 21
- 230000001070 adhesive effect Effects 0.000 claims description 21
- 238000005520 cutting process Methods 0.000 claims description 19
- 239000006117 anti-reflective coating Substances 0.000 claims description 3
- 238000003475 lamination Methods 0.000 claims 2
- 230000010287 polarization Effects 0.000 description 24
- 239000013307 optical fiber Substances 0.000 description 19
- 239000011521 glass Substances 0.000 description 17
- 238000000576 coating method Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 230000001419 dependent effect Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000004593 Epoxy Substances 0.000 description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000032798 delamination Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002592 echocardiography Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
- G02F1/093—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect used as non-reciprocal devices, e.g. optical isolators, circulators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4207—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback
- G02B6/4208—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback using non-reciprocal elements or birefringent plates, i.e. quasi-isolators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/90—Methods
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S372/00—Coherent light generators
- Y10S372/703—Optical isolater
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US588,042 | 1996-01-17 | ||
| US08/588,042 US5808793A (en) | 1996-01-17 | 1996-01-17 | Low-cost compact optical isolators |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09197345A JPH09197345A (ja) | 1997-07-31 |
| JPH09197345A5 JPH09197345A5 (enExample) | 2004-12-16 |
| JP4008064B2 true JP4008064B2 (ja) | 2007-11-14 |
Family
ID=24352229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP00455197A Expired - Lifetime JP4008064B2 (ja) | 1996-01-17 | 1997-01-14 | 光アイソレータ及びその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5808793A (enExample) |
| EP (1) | EP0785456B1 (enExample) |
| JP (1) | JP4008064B2 (enExample) |
| DE (1) | DE69729230T2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09214024A (ja) * | 1996-02-02 | 1997-08-15 | Fanuc Ltd | 固体レーザ発振装置 |
| US6130778A (en) * | 1997-04-17 | 2000-10-10 | Tdk Corporation | Composite optical element, optical isolator, optical circulator, optical switch and process for producing them |
| DE19725720A1 (de) * | 1997-06-18 | 1998-12-24 | Alsthom Cge Alcatel | Optischer Isolator und Wellenlängenmuliplexer-Modul mit integriertem optischen Isolator |
| JP2002511974A (ja) * | 1997-06-26 | 2002-04-16 | コーニング インコーポレイテッド | 光学素子およびそれらの組立て方法 |
| US6043933A (en) * | 1997-11-21 | 2000-03-28 | Hewlett-Packard Company | Split optical element and a low cost fabrication approach |
| US6075642A (en) * | 1998-06-18 | 2000-06-13 | Hewlett-Packard Company | Multi-port optical isolator |
| US6064522A (en) * | 1998-06-23 | 2000-05-16 | Lucent Technologies Inc | Miniature mass producible non-reciprocal devices |
| US6055101A (en) * | 1998-08-28 | 2000-04-25 | Lucent Technologies, Inc. | Isolator assembly and method of making |
| US6226115B1 (en) * | 1998-09-30 | 2001-05-01 | Fujitsu Limited | Optical circulator or switch having a birefringent wedge positioned between faraday rotators |
| US6600601B1 (en) * | 1999-04-12 | 2003-07-29 | Shin-Etsu Chemical Co., Ltd. | Polarization-independent optical isolator and production method thereof |
| JP2001125047A (ja) | 1999-10-27 | 2001-05-11 | Minebea Co Ltd | 光アイソレータ |
| JP4351339B2 (ja) * | 1999-10-28 | 2009-10-28 | 株式会社精工技研 | 光部品の製造方法 |
| US6373644B1 (en) * | 1999-11-15 | 2002-04-16 | Axsun Technologies, Inc. | Micro optical bench component clip structures |
| WO2002069029A1 (en) * | 2001-02-28 | 2002-09-06 | Board Of Control Of Michigan Technological University | Magneto-photonic crystal isolators |
| US20030031395A1 (en) * | 2001-08-10 | 2003-02-13 | Youfu Shao | High isolation gain flattening filter |
| US7263247B1 (en) | 2002-02-11 | 2007-08-28 | Gemfire Corporation | Integrated optical isolator array |
| US6580842B1 (en) | 2002-02-11 | 2003-06-17 | Markus P. Hehlen | Integrated optical circulator array |
| US6560387B1 (en) | 2002-02-11 | 2003-05-06 | Markus P. Hehlen | Doped fiber amplifier utilizing integrated circulator array |
| JPWO2004046798A1 (ja) * | 2002-11-15 | 2006-04-27 | 住友金属鉱山株式会社 | 磁気光学素子とその製造方法およびこの磁気光学素子が組み込まれた光アイソレータ |
| US7511901B2 (en) * | 2003-06-30 | 2009-03-31 | Micha Zimmermann | Micro-optic alignment system |
| US7801702B2 (en) * | 2004-02-12 | 2010-09-21 | Lockheed Martin Corporation | Enhanced diagnostic fault detection and isolation |
| DE202011107213U1 (de) | 2011-10-27 | 2011-12-16 | Rudi Danz | Optische Isolatoren mit spektraler Lichtwandlung und Erzeugung von Laserstrahlung |
| US9921377B2 (en) | 2014-07-31 | 2018-03-20 | Hewlett Packard Enterprise Department LP | Interposer registration elements |
| WO2016201625A1 (zh) * | 2015-06-16 | 2016-12-22 | 华为技术有限公司 | 一种准直透镜以及包括其的光模块 |
| JP6978719B2 (ja) * | 2016-10-24 | 2021-12-08 | 日本電気硝子株式会社 | 磁気光学素子及びその製造方法 |
| CN111176000B (zh) * | 2020-02-18 | 2024-02-09 | 河南鑫宇光科技股份有限公司 | 一种提高光学隔离器隔离度的方法 |
| CN113281922A (zh) * | 2021-05-21 | 2021-08-20 | 中国科学院半导体研究所 | 光发射模块 |
| JP7634500B2 (ja) * | 2022-05-09 | 2025-02-21 | 信越化学工業株式会社 | 光アイソレータ |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57100410A (en) | 1980-12-15 | 1982-06-22 | Fujitsu Ltd | Optical isolator |
| US4974944A (en) * | 1988-07-21 | 1990-12-04 | Hewlett-Packard Company | Optical nonreciprocal device |
| JPH02123321A (ja) * | 1988-11-02 | 1990-05-10 | Shojiro Kawakami | 光アイソレータの製造方法および同製造方法に用いられる偏光素子アレイ並びに同製造方法で得られた光アイソレータを一体化した光学モジュール |
| US4981341A (en) * | 1989-07-14 | 1991-01-01 | At&T Bell Laboratories | Apparatus comprising a magneto-optic isolator utilizing a garnet layer |
| JP2849655B2 (ja) * | 1990-02-22 | 1999-01-20 | 株式会社トーキン | 光アイソレータの製造方法 |
| JPH03284713A (ja) * | 1990-03-30 | 1991-12-16 | Hitachi Cable Ltd | 光ファイバ型アイソレータ |
| JP2628774B2 (ja) * | 1990-04-20 | 1997-07-09 | 株式会社日立製作所 | 光アイソレータ内蔵形半導体レーザモジュール |
| JPH04338916A (ja) * | 1990-08-06 | 1992-11-26 | Kyocera Corp | 光アイソレータ用素子及び該光アイソレータ用素子を用いた光アイソレータ,半導体レーザモジュール |
| US5267077A (en) * | 1990-11-05 | 1993-11-30 | At&T Bell Laboratories | Spherical multicomponent optical isolator |
| JP2697354B2 (ja) * | 1991-05-10 | 1998-01-14 | 日本電気株式会社 | 光アイソレータの製造方法 |
| US5325456A (en) * | 1992-02-12 | 1994-06-28 | E.I. Du Pont De Nemours And Company | Optical isolator in an optical fiber feedthrough |
| JP2757093B2 (ja) * | 1992-04-20 | 1998-05-25 | 富士電気化学株式会社 | 無偏波分散型光アイソレータ |
| JPH0774343A (ja) * | 1993-08-31 | 1995-03-17 | Fujitsu Ltd | 集積化光装置及びその製造方法 |
| DE4431285C1 (de) * | 1994-09-02 | 1995-12-07 | Ant Nachrichtentech | Lasermodul |
| JP3439275B2 (ja) * | 1994-11-25 | 2003-08-25 | エヌイーシートーキン株式会社 | 光アイソレータの製造方法 |
| KR100286956B1 (ko) * | 1994-12-27 | 2001-04-16 | 도낀 가부시끼가이샤 | 광 아이솔레이터용 광학 소자 조립체 및 그 제조방법 |
-
1996
- 1996-01-17 US US08/588,042 patent/US5808793A/en not_active Expired - Lifetime
-
1997
- 1997-01-09 EP EP97300096A patent/EP0785456B1/en not_active Expired - Lifetime
- 1997-01-09 DE DE69729230T patent/DE69729230T2/de not_active Expired - Lifetime
- 1997-01-14 JP JP00455197A patent/JP4008064B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0785456B1 (en) | 2004-05-26 |
| DE69729230T2 (de) | 2005-06-23 |
| US5808793A (en) | 1998-09-15 |
| DE69729230D1 (de) | 2004-07-01 |
| EP0785456A1 (en) | 1997-07-23 |
| JPH09197345A (ja) | 1997-07-31 |
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