JP3951058B2 - 音叉型圧電振動片 - Google Patents

音叉型圧電振動片 Download PDF

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Publication number
JP3951058B2
JP3951058B2 JP2004141105A JP2004141105A JP3951058B2 JP 3951058 B2 JP3951058 B2 JP 3951058B2 JP 2004141105 A JP2004141105 A JP 2004141105A JP 2004141105 A JP2004141105 A JP 2004141105A JP 3951058 B2 JP3951058 B2 JP 3951058B2
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Japan
Prior art keywords
type piezoelectric
fork type
vibrating piece
piezoelectric vibrating
tuning fork
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2004141105A
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English (en)
Japanese (ja)
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JP2005102138A5 (enExample
JP2005102138A (ja
Inventor
憲也 平沢
誠一郎 小倉
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2004141105A priority Critical patent/JP3951058B2/ja
Priority to US10/916,602 priority patent/US7015631B2/en
Priority to CNB200410058590XA priority patent/CN100440562C/zh
Publication of JP2005102138A publication Critical patent/JP2005102138A/ja
Publication of JP2005102138A5 publication Critical patent/JP2005102138A5/ja
Application granted granted Critical
Publication of JP3951058B2 publication Critical patent/JP3951058B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/09—Elastic or damping supports

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2004141105A 2003-08-19 2004-05-11 音叉型圧電振動片 Expired - Lifetime JP3951058B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004141105A JP3951058B2 (ja) 2003-08-19 2004-05-11 音叉型圧電振動片
US10/916,602 US7015631B2 (en) 2003-08-19 2004-08-12 Tuning-fork type piezo-oscillator piece and mounting method thereof
CNB200410058590XA CN100440562C (zh) 2003-08-19 2004-08-18 音叉型压电振动片及音叉型压电振动片的安装方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003295606 2003-08-19
JP2004141105A JP3951058B2 (ja) 2003-08-19 2004-05-11 音叉型圧電振動片

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006287991A Division JP4529143B2 (ja) 2003-08-19 2006-10-23 音叉型圧電振動片

Publications (3)

Publication Number Publication Date
JP2005102138A JP2005102138A (ja) 2005-04-14
JP2005102138A5 JP2005102138A5 (enExample) 2005-09-22
JP3951058B2 true JP3951058B2 (ja) 2007-08-01

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Family Applications (1)

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JP2004141105A Expired - Lifetime JP3951058B2 (ja) 2003-08-19 2004-05-11 音叉型圧電振動片

Country Status (3)

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US (1) US7015631B2 (enExample)
JP (1) JP3951058B2 (enExample)
CN (1) CN100440562C (enExample)

Cited By (1)

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US7521846B2 (en) 2004-10-20 2009-04-21 Seiko Epson Corporation Piezoelectric resonator element and piezoelectric device

Families Citing this family (78)

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Publication number Priority date Publication date Assignee Title
US7994877B1 (en) 2008-11-10 2011-08-09 Hrl Laboratories, Llc MEMS-based quartz hybrid filters and a method of making the same
US8766745B1 (en) 2007-07-25 2014-07-01 Hrl Laboratories, Llc Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
JP4049017B2 (ja) * 2003-05-16 2008-02-20 セイコーエプソン株式会社 圧電振動子
JP4415382B2 (ja) * 2005-01-20 2010-02-17 セイコーエプソン株式会社 振動ジャイロ素子、振動ジャイロ素子の支持構造およびジャイロセンサ
JP4658625B2 (ja) * 2005-01-25 2011-03-23 日本電波工業株式会社 角速度センサ及びその製造方法
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
US20060279176A1 (en) * 2005-06-09 2006-12-14 Eta Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US7112914B1 (en) 2005-06-09 2006-09-26 Eta Sa Manufacture Horlogere Suisse Piezoelectric resonator and assembly comprising the same enclosed in a case
US7138752B1 (en) * 2005-06-09 2006-11-21 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
ATE417405T1 (de) * 2005-06-09 2008-12-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit kleinen abmessungen
DE602005005646T2 (de) * 2005-06-09 2009-04-16 Eta Sa Manufacture Horlogère Suisse Piezoelektrischer Resonator und Anordnung mit dem in ein Gehäuse eingeschlossenen Resonator
ATE421799T1 (de) * 2005-06-09 2009-02-15 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer resonator
EP1732220B1 (en) * 2005-06-09 2008-03-26 ETA SA Manufacture Horlogère Suisse Small-sized piezoelectric resonator
JPWO2007004348A1 (ja) * 2005-06-30 2009-01-22 株式会社大真空 圧電振動片及び圧電振動デバイス
US7694734B2 (en) * 2005-10-31 2010-04-13 Baker Hughes Incorporated Method and apparatus for insulating a resonator downhole
JP4389924B2 (ja) 2006-11-07 2009-12-24 エプソントヨコム株式会社 圧電デバイス
JP5015678B2 (ja) * 2007-07-02 2012-08-29 日本電波工業株式会社 圧電デバイス及び圧電振動片
US10266398B1 (en) 2007-07-25 2019-04-23 Hrl Laboratories, Llc ALD metal coatings for high Q MEMS structures
JP5062413B2 (ja) * 2007-11-08 2012-10-31 セイコーエプソン株式会社 音叉型圧電振動片及び音叉型圧電振動子
EP2071721B1 (en) * 2007-12-13 2011-02-23 ETA SA Manufacture Horlogère Suisse Piezoelectric resonator in a small-sized package
JP4629094B2 (ja) 2007-12-28 2011-02-09 日本電波工業株式会社 圧電振動片、圧電デバイス及びそれらの製造方法
US20090174289A1 (en) * 2007-12-28 2009-07-09 Adaptivenergy Llc Magnetic impulse energy harvesting device and method
US8151640B1 (en) 2008-02-05 2012-04-10 Hrl Laboratories, Llc MEMS on-chip inertial navigation system with error correction
US7802356B1 (en) 2008-02-21 2010-09-28 Hrl Laboratories, Llc Method of fabricating an ultra thin quartz resonator component
JP2009206759A (ja) * 2008-02-27 2009-09-10 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
WO2009116523A1 (ja) * 2008-03-18 2009-09-24 シチズンホールディングス株式会社 圧電デバイス
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
JP5181938B2 (ja) * 2008-09-03 2013-04-10 株式会社大真空 音叉型水晶振動子
JP5348133B2 (ja) * 2008-09-26 2013-11-20 株式会社大真空 音叉型圧電振動片、および音叉型圧電振動デバイス
JP4685910B2 (ja) * 2008-09-29 2011-05-18 日本電波工業株式会社 圧電デバイス
JP4709884B2 (ja) 2008-09-29 2011-06-29 日本電波工業株式会社 圧電振動片および圧電デバイス
JP4714770B2 (ja) * 2008-10-06 2011-06-29 日本電波工業株式会社 音叉型圧電振動片及び音叉型圧電振動片の製造方法
US7811862B2 (en) * 2008-12-17 2010-10-12 Infineon Technologies Ag Thermally enhanced electronic package
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
KR101214318B1 (ko) * 2009-09-18 2013-01-09 세이코 엡슨 가부시키가이샤 진동편, 진동자, 발진기 및 전자기기
TW201131975A (en) * 2009-09-18 2011-09-16 Seiko Epson Corp Vibrating reed, vibrator, oscillator, and electronic device
US8176607B1 (en) 2009-10-08 2012-05-15 Hrl Laboratories, Llc Method of fabricating quartz resonators
JP5593979B2 (ja) * 2009-11-11 2014-09-24 セイコーエプソン株式会社 振動片、振動子、発振器、センサー及び電子機器
US8299863B2 (en) 2009-12-25 2012-10-30 Seiko Epson Corporation Flexural mode resonator element, resonating device, and electronic apparatus
JP5782707B2 (ja) * 2010-12-01 2015-09-24 セイコーエプソン株式会社 電子機器
US8283988B2 (en) 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP5732728B2 (ja) * 2010-02-25 2015-06-10 セイコーエプソン株式会社 振動片、振動子及び発振器
US8692632B2 (en) * 2010-03-17 2014-04-08 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP2011220997A (ja) * 2010-03-26 2011-11-04 Seiko Epson Corp 物理量検出素子、物理量検出装置、および電子機器
JP5085681B2 (ja) * 2010-03-31 2012-11-28 日本電波工業株式会社 圧電振動片、圧電デバイスおよび圧電振動片の製造方法
JP5062784B2 (ja) 2010-03-31 2012-10-31 日本電波工業株式会社 音叉型圧電振動片及び圧電デバイス
JP5085682B2 (ja) * 2010-04-26 2012-11-28 日本電波工業株式会社 圧電デバイス
JP2010246126A (ja) * 2010-04-28 2010-10-28 Seiko Epson Corp 圧電振動片および圧電デバイス
US8912711B1 (en) * 2010-06-22 2014-12-16 Hrl Laboratories, Llc Thermal stress resistant resonator, and a method for fabricating same
JP5585240B2 (ja) * 2010-06-25 2014-09-10 セイコーエプソン株式会社 振動片及び振動デバイス
WO2012052267A1 (en) * 2010-10-21 2012-04-26 Micro Crystal Ag Method for mounting a piezoelectric resonator in a case and packaged piezoelectric resonator
CN102455193A (zh) * 2010-10-26 2012-05-16 查红红 一种开放式传感器中的碗型振子及其成型方法
EP2624450B1 (en) * 2011-02-25 2015-02-11 Daishinku Corporation Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator
TW201242246A (en) * 2011-02-25 2012-10-16 Seiko Epson Corp Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, vibration gyro element, vibration gyro sensor, and electronic apparatus
JP5911349B2 (ja) * 2012-03-28 2016-04-27 京セラクリスタルデバイス株式会社 水晶デバイス
TWI493866B (zh) * 2012-05-10 2015-07-21 Siward Crystal Technology Co Ltd Piezoelectric components
JP6119134B2 (ja) 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP6155897B2 (ja) 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
US9599470B1 (en) 2013-09-11 2017-03-21 Hrl Laboratories, Llc Dielectric high Q MEMS shell gyroscope structure
JP6346423B2 (ja) * 2013-09-25 2018-06-20 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子
JP6216213B2 (ja) * 2013-10-29 2017-10-18 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
US9879997B1 (en) * 2013-11-19 2018-01-30 Hrl Laboratories, Llc Quartz resonator with plasma etched tethers for stress isolation from the mounting contacts
JP6375622B2 (ja) 2013-12-27 2018-08-22 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器、センサーおよび移動体
US9977097B1 (en) 2014-02-21 2018-05-22 Hrl Laboratories, Llc Micro-scale piezoelectric resonating magnetometer
JP6636683B2 (ja) * 2014-03-07 2020-01-29 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
US9991863B1 (en) 2014-04-08 2018-06-05 Hrl Laboratories, Llc Rounded and curved integrated tethers for quartz resonators
JP5787007B2 (ja) * 2014-06-20 2015-09-30 セイコーエプソン株式会社 振動片、振動子及び発振器
US10308505B1 (en) 2014-08-11 2019-06-04 Hrl Laboratories, Llc Method and apparatus for the monolithic encapsulation of a micro-scale inertial navigation sensor suite
JP6450551B2 (ja) * 2014-09-30 2019-01-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片及び圧電振動子
JP5885825B1 (ja) 2014-12-25 2016-03-16 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子および圧電振動子の製造方法
US10031191B1 (en) 2015-01-16 2018-07-24 Hrl Laboratories, Llc Piezoelectric magnetometer capable of sensing a magnetic field in multiple vectors
JP6536783B2 (ja) * 2015-02-09 2019-07-03 セイコーエプソン株式会社 振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体
WO2017110126A1 (ja) * 2015-12-21 2017-06-29 株式会社村田製作所 共振子及び共振装置
US10175307B1 (en) 2016-01-15 2019-01-08 Hrl Laboratories, Llc FM demodulation system for quartz MEMS magnetometer
WO2018042994A1 (ja) * 2016-08-30 2018-03-08 株式会社大真空 水晶振動板、及び水晶振動デバイス
CN110235363B (zh) * 2017-03-30 2023-05-26 株式会社大真空 音叉型压电振动片及使用该音叉型压电振动片的音叉型压电振子
CN117730482A (zh) * 2021-08-03 2024-03-19 株式会社村田制作所 谐振子以及谐振装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5458395A (en) 1977-10-19 1979-05-11 Matsushima Kogyo Kk Piezooelectric vibrator
JPS5685921A (en) 1979-12-14 1981-07-13 Seiko Epson Corp Quartz oscillator
JPS5685922A (en) 1979-12-14 1981-07-13 Seiko Epson Corp Quartz oscillator
JPS57185717A (en) 1981-05-12 1982-11-16 Citizen Watch Co Ltd Tuning fork type quartz oscillator
JP2002319838A (ja) * 2001-02-19 2002-10-31 Seiko Epson Corp 圧電デバイス及びそのパッケージ
JP3900846B2 (ja) * 2001-03-02 2007-04-04 セイコーエプソン株式会社 音叉型水晶振動片、振動子、発振器及び携帯用電話装置
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP4049017B2 (ja) * 2003-05-16 2008-02-20 セイコーエプソン株式会社 圧電振動子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7521846B2 (en) 2004-10-20 2009-04-21 Seiko Epson Corporation Piezoelectric resonator element and piezoelectric device

Also Published As

Publication number Publication date
US7015631B2 (en) 2006-03-21
CN100440562C (zh) 2008-12-03
JP2005102138A (ja) 2005-04-14
CN1585146A (zh) 2005-02-23
US20050062368A1 (en) 2005-03-24

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