JP3858585B2 - 流体供給方法 - Google Patents

流体供給方法 Download PDF

Info

Publication number
JP3858585B2
JP3858585B2 JP2000303338A JP2000303338A JP3858585B2 JP 3858585 B2 JP3858585 B2 JP 3858585B2 JP 2000303338 A JP2000303338 A JP 2000303338A JP 2000303338 A JP2000303338 A JP 2000303338A JP 3858585 B2 JP3858585 B2 JP 3858585B2
Authority
JP
Japan
Prior art keywords
piston
discharge
cylinder
actuator
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000303338A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002102768A (ja
JP2002102768A5 (enExample
Inventor
照雄 丸山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2000303338A priority Critical patent/JP3858585B2/ja
Publication of JP2002102768A publication Critical patent/JP2002102768A/ja
Publication of JP2002102768A5 publication Critical patent/JP2002102768A5/ja
Application granted granted Critical
Publication of JP3858585B2 publication Critical patent/JP3858585B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2000303338A 2000-10-03 2000-10-03 流体供給方法 Expired - Fee Related JP3858585B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000303338A JP3858585B2 (ja) 2000-10-03 2000-10-03 流体供給方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000303338A JP3858585B2 (ja) 2000-10-03 2000-10-03 流体供給方法

Publications (3)

Publication Number Publication Date
JP2002102768A JP2002102768A (ja) 2002-04-09
JP2002102768A5 JP2002102768A5 (enExample) 2004-12-09
JP3858585B2 true JP3858585B2 (ja) 2006-12-13

Family

ID=18784551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000303338A Expired - Fee Related JP3858585B2 (ja) 2000-10-03 2000-10-03 流体供給方法

Country Status (1)

Country Link
JP (1) JP3858585B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003047898A (ja) 2001-08-03 2003-02-18 Matsushita Electric Ind Co Ltd 流体塗布装置及び方法
JP4837227B2 (ja) * 2002-11-20 2011-12-14 株式会社半導体エネルギー研究所 成膜装置
JP6772725B2 (ja) 2016-09-29 2020-10-21 セイコーエプソン株式会社 流体吐出装置および流体を吐出する方法
JP2018051478A (ja) 2016-09-29 2018-04-05 セイコーエプソン株式会社 流体吐出装置および流体を吐出する方法
CN114029198B (zh) * 2021-11-04 2023-02-03 四川遂宁市利普芯微电子有限公司 一种点胶装置及其点胶方法

Also Published As

Publication number Publication date
JP2002102768A (ja) 2002-04-09

Similar Documents

Publication Publication Date Title
EP1132615B1 (en) Fluid dispenser
US6565333B2 (en) Fluid discharge apparatus and fluid discharge method
JP3648882B2 (ja) 流体供給装置及び方法
JP2001246298A (ja) 流体吐出装置及び流体吐出方法
JP4032729B2 (ja) 流体塗布方法
US6679685B2 (en) Method and device for discharging viscous fluids
JP3858585B2 (ja) 流体供給方法
JP3685009B2 (ja) 流体供給装置及び流体供給方法
JP2004084592A (ja) 流体制御装置及び流体制御方法
JP4077624B2 (ja) 流体吐出装置及び流体吐出方法
JP2002143746A (ja) 流体供給装置及び流体供給方法
JP3747764B2 (ja) 流体供給装置および流体供給方法
JP3873607B2 (ja) 流体供給方法
JP2002320895A (ja) 流体塗布装置
JP2002102766A (ja) 塗布装置
JP4082181B2 (ja) パターン形成方法
JP2004305828A (ja) 流体供給装置
JP2003181328A (ja) 流体吐出方法及び吐出装置
JP2002301414A (ja) 流体吐出方法及び流体吐出装置
JP2004105799A (ja) 流体吐出装置
JPH08173885A (ja) 流体供給装置
JP2002346450A (ja) 流体吐出装置
JP2002355580A (ja) 流体塗布方法及び流体塗布装置
JP7215790B1 (ja) ディスペンサー
JP2003260397A (ja) 流体吐出装置および流体吐出方法

Legal Events

Date Code Title Description
RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20050630

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060224

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060425

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060623

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060829

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060911

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090929

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100929

Year of fee payment: 4

LAPS Cancellation because of no payment of annual fees