JP3856901B2 - 表示装置 - Google Patents
表示装置 Download PDFInfo
- Publication number
- JP3856901B2 JP3856901B2 JP11354997A JP11354997A JP3856901B2 JP 3856901 B2 JP3856901 B2 JP 3856901B2 JP 11354997 A JP11354997 A JP 11354997A JP 11354997 A JP11354997 A JP 11354997A JP 3856901 B2 JP3856901 B2 JP 3856901B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- display device
- insulating film
- circuit
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010408 film Substances 0.000 claims description 140
- 230000002093 peripheral effect Effects 0.000 claims description 49
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 37
- 239000010936 titanium Substances 0.000 claims description 37
- 229910052719 titanium Inorganic materials 0.000 claims description 37
- 239000004973 liquid crystal related substance Substances 0.000 claims description 35
- 239000000758 substrate Substances 0.000 claims description 34
- 239000011159 matrix material Substances 0.000 claims description 33
- 229910052782 aluminium Inorganic materials 0.000 claims description 30
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 20
- 239000010410 layer Substances 0.000 claims description 18
- 239000010409 thin film Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 229920001721 polyimide Polymers 0.000 claims description 10
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 239000003566 sealing material Substances 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- 239000004642 Polyimide Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 3
- 239000004593 Epoxy Substances 0.000 claims description 2
- 239000004952 Polyamide Substances 0.000 claims description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims description 2
- 229920002647 polyamide Polymers 0.000 claims description 2
- 229910021332 silicide Inorganic materials 0.000 claims description 2
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 8
- 239000011521 glass Substances 0.000 description 6
- 230000010287 polarization Effects 0.000 description 6
- 239000009719 polyimide resin Substances 0.000 description 6
- 238000000059 patterning Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/0101—Head-up displays characterised by optical features
- G02B2027/0138—Head-up displays characterised by optical features comprising image capture systems, e.g. camera
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/02—Function characteristic reflective
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11354997A JP3856901B2 (ja) | 1997-04-15 | 1997-04-15 | 表示装置 |
| US09/058,870 US6400426B1 (en) | 1997-04-15 | 1998-04-13 | Reflective liquid crystal display panel and device using same |
| KR1019980013390A KR100553112B1 (ko) | 1997-04-15 | 1998-04-15 | 반사형액정디스플레이패널및이것을이용한장치 |
| US10/127,581 US6967696B2 (en) | 1997-04-15 | 2002-04-23 | Reflective liquid crystal display panel and device using same |
| US11/282,483 US7675583B2 (en) | 1997-04-15 | 2005-11-21 | Reflective liquid crystal display panel and device using same |
| US12/683,473 US8031284B2 (en) | 1997-04-15 | 2010-01-07 | Reflective liquid crystal display panel and device using same |
| US13/247,342 US8405789B2 (en) | 1997-04-15 | 2011-09-28 | Reflective liquid crystal display panel and device using same |
| US13/848,234 US8576348B2 (en) | 1997-04-15 | 2013-03-21 | Reflective liquid crystal display panel and device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11354997A JP3856901B2 (ja) | 1997-04-15 | 1997-04-15 | 表示装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006067421A Division JP3857302B2 (ja) | 2006-03-13 | 2006-03-13 | 表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10288797A JPH10288797A (ja) | 1998-10-27 |
| JPH10288797A5 JPH10288797A5 (enExample) | 2005-03-10 |
| JP3856901B2 true JP3856901B2 (ja) | 2006-12-13 |
Family
ID=14615131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11354997A Expired - Fee Related JP3856901B2 (ja) | 1997-04-15 | 1997-04-15 | 表示装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (6) | US6400426B1 (enExample) |
| JP (1) | JP3856901B2 (enExample) |
| KR (1) | KR100553112B1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101337319B1 (ko) | 2006-10-04 | 2013-12-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 디바이스 및 이의 제작 방법 |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9825314D0 (en) | 1998-11-20 | 1999-01-13 | Koninkl Philips Electronics Nv | Active matrix liquid crystal display devices |
| TW490713B (en) | 1999-07-22 | 2002-06-11 | Semiconductor Energy Lab | Semiconductor device and manufacturing method thereof |
| JP2002040486A (ja) | 2000-05-19 | 2002-02-06 | Seiko Epson Corp | 電気光学装置、その製造方法および電子機器 |
| JP4827984B2 (ja) * | 2000-05-29 | 2011-11-30 | 株式会社半導体エネルギー研究所 | 液晶表示装置の作製方法 |
| US7019718B2 (en) * | 2000-07-25 | 2006-03-28 | Semiconductor Energy Laboratory Co., Ltd. | Display device |
| US6734924B2 (en) * | 2000-09-08 | 2004-05-11 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device |
| JP2002162646A (ja) * | 2000-09-14 | 2002-06-07 | Sony Corp | 反射型液晶表示装置 |
| JP2002229061A (ja) * | 2001-02-01 | 2002-08-14 | Sony Corp | 薄膜半導体装置及び反射型表示装置 |
| JP2002244585A (ja) * | 2001-02-02 | 2002-08-30 | Koninkl Philips Electronics Nv | 画像表示装置 |
| US6731572B2 (en) * | 2001-04-12 | 2004-05-04 | Samsung Electronics Co., Ltd. | Optical pickup actuator, optical pickup employing the optical pickup actuator, and optical recording and/or reproducing apparatus employing the optical pickup |
| US6686977B2 (en) * | 2001-07-24 | 2004-02-03 | Three-Five Systems, Inc. | Liquid crystal on silicon device |
| JP2003076298A (ja) * | 2001-09-05 | 2003-03-14 | Toshiba Corp | 表示装置 |
| JP4634673B2 (ja) * | 2001-09-26 | 2011-02-16 | シャープ株式会社 | 液晶表示装置及びその製造方法 |
| JP3983037B2 (ja) * | 2001-11-22 | 2007-09-26 | 株式会社半導体エネルギー研究所 | 発光装置およびその作製方法 |
| JP4073239B2 (ja) * | 2002-04-24 | 2008-04-09 | 三洋電機株式会社 | 表示装置 |
| JP2003316284A (ja) * | 2002-04-24 | 2003-11-07 | Sanyo Electric Co Ltd | 表示装置 |
| JP4019868B2 (ja) * | 2002-09-11 | 2007-12-12 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| JP4085369B2 (ja) * | 2002-10-10 | 2008-05-14 | 日本ビクター株式会社 | 液晶表示装置 |
| CN100370491C (zh) * | 2002-12-10 | 2008-02-20 | 株式会社半导体能源研究所 | 发光装置及其制作方法 |
| US7486341B2 (en) * | 2005-11-03 | 2009-02-03 | University Of Central Florida Research Foundation, Inc. | Head mounted display with eye accommodation having 3-D image producing system consisting of, for each eye, one single planar display screen, one single planar tunable focus LC micro-lens array, one single planar black mask and bias lens |
| KR101250790B1 (ko) | 2006-06-30 | 2013-04-04 | 엘지디스플레이 주식회사 | 액정표시장치의 제조방법 |
| US8354674B2 (en) * | 2007-06-29 | 2013-01-15 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device wherein a property of a first semiconductor layer is different from a property of a second semiconductor layer |
| KR101540341B1 (ko) * | 2008-10-17 | 2015-07-30 | 삼성전자주식회사 | 패널 구조체, 패널 구조체를 포함하는 표시장치 및 이들의 제조방법 |
| JP5515281B2 (ja) * | 2008-12-03 | 2014-06-11 | ソニー株式会社 | 薄膜トランジスタ、表示装置、電子機器および薄膜トランジスタの製造方法 |
| JP4752927B2 (ja) * | 2009-02-09 | 2011-08-17 | ソニー株式会社 | 薄膜トランジスタおよび表示装置 |
| JP5236812B2 (ja) * | 2009-09-11 | 2013-07-17 | シャープ株式会社 | アクティブマトリクス基板およびアクティブマトリクス型表示装置 |
| CN105206514B (zh) * | 2009-11-28 | 2018-04-10 | 株式会社半导体能源研究所 | 层叠的氧化物材料、半导体器件、以及用于制造该半导体器件的方法 |
| JP2012208294A (ja) * | 2011-03-29 | 2012-10-25 | Seiko Epson Corp | 電気光学装置の製造方法、電気光学装置、投射型表示装置および電子機器 |
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| JP2999271B2 (ja) * | 1990-12-10 | 2000-01-17 | 株式会社半導体エネルギー研究所 | 表示装置 |
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| JP3071851B2 (ja) | 1991-03-25 | 2000-07-31 | 株式会社半導体エネルギー研究所 | 電気光学装置 |
| JP2794499B2 (ja) | 1991-03-26 | 1998-09-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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-
1997
- 1997-04-15 JP JP11354997A patent/JP3856901B2/ja not_active Expired - Fee Related
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1998
- 1998-04-13 US US09/058,870 patent/US6400426B1/en not_active Expired - Lifetime
- 1998-04-15 KR KR1019980013390A patent/KR100553112B1/ko not_active Expired - Fee Related
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2002
- 2002-04-23 US US10/127,581 patent/US6967696B2/en not_active Expired - Fee Related
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2005
- 2005-11-21 US US11/282,483 patent/US7675583B2/en not_active Expired - Fee Related
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2010
- 2010-01-07 US US12/683,473 patent/US8031284B2/en not_active Expired - Fee Related
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2011
- 2011-09-28 US US13/247,342 patent/US8405789B2/en not_active Expired - Fee Related
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101337319B1 (ko) | 2006-10-04 | 2013-12-06 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 디바이스 및 이의 제작 방법 |
| KR101406770B1 (ko) | 2006-10-04 | 2014-06-12 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 디바이스 및 이의 제작 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100553112B1 (ko) | 2006-07-06 |
| US8031284B2 (en) | 2011-10-04 |
| KR19980081413A (ko) | 1998-11-25 |
| JPH10288797A (ja) | 1998-10-27 |
| US20020123175A1 (en) | 2002-09-05 |
| US20100134709A1 (en) | 2010-06-03 |
| US20060072059A1 (en) | 2006-04-06 |
| US8576348B2 (en) | 2013-11-05 |
| US6400426B1 (en) | 2002-06-04 |
| US8405789B2 (en) | 2013-03-26 |
| US20120019739A1 (en) | 2012-01-26 |
| US20130215351A1 (en) | 2013-08-22 |
| US7675583B2 (en) | 2010-03-09 |
| US6967696B2 (en) | 2005-11-22 |
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