JP3823436B2 - 投影光学系 - Google Patents

投影光学系 Download PDF

Info

Publication number
JP3823436B2
JP3823436B2 JP10250497A JP10250497A JP3823436B2 JP 3823436 B2 JP3823436 B2 JP 3823436B2 JP 10250497 A JP10250497 A JP 10250497A JP 10250497 A JP10250497 A JP 10250497A JP 3823436 B2 JP3823436 B2 JP 3823436B2
Authority
JP
Japan
Prior art keywords
lens group
lens
fluorite
optical system
projection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10250497A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10282411A5 (enExample
JPH10282411A (ja
Inventor
慎太郎 工藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10250497A priority Critical patent/JP3823436B2/ja
Priority to DE69824658T priority patent/DE69824658T2/de
Priority to US09/054,082 priority patent/US6088171A/en
Priority to EP98106068A priority patent/EP0869382B1/en
Publication of JPH10282411A publication Critical patent/JPH10282411A/ja
Publication of JPH10282411A5 publication Critical patent/JPH10282411A5/ja
Application granted granted Critical
Publication of JP3823436B2 publication Critical patent/JP3823436B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
    • G02B9/12—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having three components only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP10250497A 1997-04-03 1997-04-03 投影光学系 Expired - Fee Related JP3823436B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10250497A JP3823436B2 (ja) 1997-04-03 1997-04-03 投影光学系
DE69824658T DE69824658T2 (de) 1997-04-03 1998-04-02 Optisches System für Projektion
US09/054,082 US6088171A (en) 1997-04-03 1998-04-02 Projection optical system
EP98106068A EP0869382B1 (en) 1997-04-03 1998-04-02 Projection optical system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10250497A JP3823436B2 (ja) 1997-04-03 1997-04-03 投影光学系

Publications (3)

Publication Number Publication Date
JPH10282411A JPH10282411A (ja) 1998-10-23
JPH10282411A5 JPH10282411A5 (enExample) 2005-02-24
JP3823436B2 true JP3823436B2 (ja) 2006-09-20

Family

ID=14329243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10250497A Expired - Fee Related JP3823436B2 (ja) 1997-04-03 1997-04-03 投影光学系

Country Status (4)

Country Link
US (1) US6088171A (enExample)
EP (1) EP0869382B1 (enExample)
JP (1) JP3823436B2 (enExample)
DE (1) DE69824658T2 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3925576B2 (ja) 1997-07-24 2007-06-06 株式会社ニコン 投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法
JPH1195095A (ja) 1997-09-22 1999-04-09 Nikon Corp 投影光学系
US6700645B1 (en) 1998-01-22 2004-03-02 Nikon Corporation Projection optical system and exposure apparatus and method
JPH11214293A (ja) 1998-01-22 1999-08-06 Nikon Corp 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
JP2000143278A (ja) * 1998-11-10 2000-05-23 Nikon Corp 耐久性の向上された投影露光装置及び結像光学系の製造方法
DE19942281A1 (de) * 1999-05-14 2000-11-16 Zeiss Carl Fa Projektionsobjektiv
EP1139138A4 (en) * 1999-09-29 2006-03-08 Nikon Corp PROJECTION EXPOSURE PROCESS, DEVICE AND OPTICAL PROJECTION SYSTEM
WO2001023933A1 (en) 1999-09-29 2001-04-05 Nikon Corporation Projection optical system
EP1094350A3 (en) 1999-10-21 2001-08-16 Carl Zeiss Optical projection lens system
WO2002052303A2 (de) 2000-12-22 2002-07-04 Carl Zeiss Smt Ag Projektionsobjektiv
DE10064685A1 (de) * 2000-12-22 2002-07-04 Zeiss Carl Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft
JP2002244034A (ja) 2001-02-21 2002-08-28 Nikon Corp 投影光学系および該投影光学系を備えた露光装置
JP2002323652A (ja) 2001-02-23 2002-11-08 Nikon Corp 投影光学系，該投影光学系を備えた投影露光装置および投影露光方法
JP2002323653A (ja) * 2001-02-23 2002-11-08 Nikon Corp 投影光学系，投影露光装置および投影露光方法
WO2002103413A1 (en) * 2001-06-15 2002-12-27 Nikon Corporation Optical member, process for producing the same, and projection aligner
JP4238727B2 (ja) * 2001-07-17 2009-03-18 株式会社ニコン 光学部材の製造方法
US7154676B2 (en) 2002-03-01 2006-12-26 Carl Zeiss Smt A.G. Very-high aperture projection objective
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151364A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
JP5522520B2 (ja) * 2006-05-05 2014-06-18 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学レンズ系
US8345350B2 (en) * 2008-06-20 2013-01-01 Carl Zeiss Smt Gmbh Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153543B (en) * 1983-12-28 1988-09-01 Canon Kk A projection exposure apparatus
US4811055A (en) * 1984-02-27 1989-03-07 Canon Kabushiki Kaisha Projection exposure apparatus
JP3747951B2 (ja) * 1994-11-07 2006-02-22 株式会社ニコン 反射屈折光学系
JPH09311278A (ja) * 1996-05-20 1997-12-02 Nikon Corp 反射屈折光学系
US5568325A (en) * 1993-08-25 1996-10-22 Asahi Kogaku Kogyo Kabushiki Kaisha Achromatic lens system
JPH07128590A (ja) * 1993-10-29 1995-05-19 Olympus Optical Co Ltd 縮小投影レンズ
JPH0817719A (ja) * 1994-06-30 1996-01-19 Nikon Corp 投影露光装置
JPH08179204A (ja) * 1994-11-10 1996-07-12 Nikon Corp 投影光学系及び投影露光装置
JPH08203812A (ja) * 1995-01-30 1996-08-09 Nikon Corp 反射屈折縮小投影光学系及び露光装置
JPH103040A (ja) * 1996-06-14 1998-01-06 Nikon Corp 反射屈折光学系
JPH103041A (ja) * 1996-06-14 1998-01-06 Nikon Corp 反射屈折縮小光学系
JPH1020195A (ja) * 1996-06-28 1998-01-23 Nikon Corp 反射屈折光学系

Also Published As

Publication number Publication date
US6088171A (en) 2000-07-11
EP0869382A3 (en) 1999-05-06
DE69824658D1 (de) 2004-07-29
EP0869382A2 (en) 1998-10-07
DE69824658T2 (de) 2005-07-07
JPH10282411A (ja) 1998-10-23
EP0869382B1 (en) 2004-06-23

Similar Documents

Publication Publication Date Title
JP3823436B2 (ja) 投影光学系
JP3624973B2 (ja) 投影光学系
JP3819048B2 (ja) 投影光学系及びそれを備えた露光装置並びに露光方法
JP3500745B2 (ja) 投影光学系、投影露光装置及び投影露光方法
JP3750123B2 (ja) 投影光学系
JP3454390B2 (ja) 投影光学系、投影露光装置及び投影露光方法
JPH116957A (ja) 投影光学系および投影露光装置並びに投影露光方法
US6867922B1 (en) Projection optical system and projection exposure apparatus using the same
KR100573913B1 (ko) 투영광학계및노광장치
JPH11214293A (ja) 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法
JPH07140384A (ja) 投影光学系及び投影露光装置
JPH07140385A (ja) 投影光学系及び投影露光装置
JPH1048517A (ja) 投影光学系
JPH1195095A (ja) 投影光学系
JPH07128592A (ja) 縮小投影レンズ
KR100522503B1 (ko) 투영광학계 및 이것을 가진 투영노광장치, 그리고디바이스제조방법
JP4228130B2 (ja) 投影光学系、露光装置及びデバイスの製造方法
JP2005114881A (ja) 投影光学系、露光装置、および露光方法
JP4300509B2 (ja) 投影光学系、露光装置、および露光方法
JP6511701B2 (ja) 投影光学系、投影露光装置、及びデバイス製造方法
JP2000056219A (ja) 投影光学系
JP2000056218A (ja) 投影光学系およびそれを備えた露光装置ならびに半導体デバイス製造方法
JP2869849B2 (ja) 集積回路製造方法
JPH11297612A (ja) 投影光学系および投影露光装置
JP2000131607A (ja) 投影光学系

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040322

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20040322

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20051028

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20051213

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060208

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060404

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060427

RD05 Notification of revocation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7425

Effective date: 20060427

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060606

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060619

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120707

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150707

Year of fee payment: 9

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150707

Year of fee payment: 9

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150707

Year of fee payment: 9

LAPS Cancellation because of no payment of annual fees