DE69824658D1 - Optisches System für Projektion - Google Patents
Optisches System für ProjektionInfo
- Publication number
- DE69824658D1 DE69824658D1 DE69824658T DE69824658T DE69824658D1 DE 69824658 D1 DE69824658 D1 DE 69824658D1 DE 69824658 T DE69824658 T DE 69824658T DE 69824658 T DE69824658 T DE 69824658T DE 69824658 D1 DE69824658 D1 DE 69824658D1
- Authority
- DE
- Germany
- Prior art keywords
- projection
- optical system
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B9/00—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or -
- G02B9/12—Optical objectives characterised both by the number of the components and their arrangements according to their sign, i.e. + or - having three components only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10250497A JP3823436B2 (ja) | 1997-04-03 | 1997-04-03 | 投影光学系 |
JP10250497 | 1997-04-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69824658D1 true DE69824658D1 (de) | 2004-07-29 |
DE69824658T2 DE69824658T2 (de) | 2005-07-07 |
Family
ID=14329243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69824658T Expired - Lifetime DE69824658T2 (de) | 1997-04-03 | 1998-04-02 | Optisches System für Projektion |
Country Status (4)
Country | Link |
---|---|
US (1) | US6088171A (de) |
EP (1) | EP0869382B1 (de) |
JP (1) | JP3823436B2 (de) |
DE (1) | DE69824658T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3925576B2 (ja) | 1997-07-24 | 2007-06-06 | 株式会社ニコン | 投影光学系、該光学系を備えた露光装置、及び該装置を用いたデバイスの製造方法 |
JPH1195095A (ja) | 1997-09-22 | 1999-04-09 | Nikon Corp | 投影光学系 |
US6700645B1 (en) | 1998-01-22 | 2004-03-02 | Nikon Corporation | Projection optical system and exposure apparatus and method |
JPH11214293A (ja) | 1998-01-22 | 1999-08-06 | Nikon Corp | 投影光学系及び該光学系を備えた露光装置並びにデバイス製造方法 |
JP2000143278A (ja) * | 1998-11-10 | 2000-05-23 | Nikon Corp | 耐久性の向上された投影露光装置及び結像光学系の製造方法 |
DE19942281A1 (de) | 1999-05-14 | 2000-11-16 | Zeiss Carl Fa | Projektionsobjektiv |
WO2001023933A1 (fr) | 1999-09-29 | 2001-04-05 | Nikon Corporation | Systeme optique de projection |
WO2001023935A1 (fr) * | 1999-09-29 | 2001-04-05 | Nikon Corporation | Procede et dispositif d'exposition par projection, et systeme optique de projection |
EP1094350A3 (de) | 1999-10-21 | 2001-08-16 | Carl Zeiss | Optisches Projektionslinsensystem |
DE10064685A1 (de) * | 2000-12-22 | 2002-07-04 | Zeiss Carl | Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft |
EP1344112A2 (de) | 2000-12-22 | 2003-09-17 | Carl Zeiss SMT AG | Projektionsobjektiv |
JP2002244034A (ja) | 2001-02-21 | 2002-08-28 | Nikon Corp | 投影光学系および該投影光学系を備えた露光装置 |
JP2002323652A (ja) | 2001-02-23 | 2002-11-08 | Nikon Corp | 投影光学系,該投影光学系を備えた投影露光装置および投影露光方法 |
JP2002323653A (ja) * | 2001-02-23 | 2002-11-08 | Nikon Corp | 投影光学系,投影露光装置および投影露光方法 |
US20040005266A1 (en) * | 2001-06-15 | 2004-01-08 | Shigeru Sakuma | Optical member, process for producing the same, and projection aligner |
EP1408348B1 (de) * | 2001-07-17 | 2012-12-19 | Nikon Corporation | Verfahren zur herstellung eines optischen gliedes |
US7154676B2 (en) | 2002-03-01 | 2006-12-26 | Carl Zeiss Smt A.G. | Very-high aperture projection objective |
US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
US20080151365A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
KR20140043485A (ko) | 2004-05-17 | 2014-04-09 | 칼 짜이스 에스엠티 게엠베하 | 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈 |
EP2101209A1 (de) * | 2006-05-05 | 2009-09-16 | Carl Zeiss SMT AG | Symmetrisches Objektiv mit vier Linsengruppen für die Mikrolithographie |
US8345350B2 (en) | 2008-06-20 | 2013-01-01 | Carl Zeiss Smt Gmbh | Chromatically corrected objective with specifically structured and arranged dioptric optical elements and projection exposure apparatus including the same |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2153543B (en) * | 1983-12-28 | 1988-09-01 | Canon Kk | A projection exposure apparatus |
US4811055A (en) * | 1984-02-27 | 1989-03-07 | Canon Kabushiki Kaisha | Projection exposure apparatus |
JP3747951B2 (ja) * | 1994-11-07 | 2006-02-22 | 株式会社ニコン | 反射屈折光学系 |
JPH09311278A (ja) * | 1996-05-20 | 1997-12-02 | Nikon Corp | 反射屈折光学系 |
US5568325A (en) * | 1993-08-25 | 1996-10-22 | Asahi Kogaku Kogyo Kabushiki Kaisha | Achromatic lens system |
JPH07128590A (ja) * | 1993-10-29 | 1995-05-19 | Olympus Optical Co Ltd | 縮小投影レンズ |
JPH0817719A (ja) * | 1994-06-30 | 1996-01-19 | Nikon Corp | 投影露光装置 |
JPH08179204A (ja) * | 1994-11-10 | 1996-07-12 | Nikon Corp | 投影光学系及び投影露光装置 |
JPH08203812A (ja) * | 1995-01-30 | 1996-08-09 | Nikon Corp | 反射屈折縮小投影光学系及び露光装置 |
JPH103041A (ja) * | 1996-06-14 | 1998-01-06 | Nikon Corp | 反射屈折縮小光学系 |
JPH103040A (ja) * | 1996-06-14 | 1998-01-06 | Nikon Corp | 反射屈折光学系 |
JPH1020195A (ja) * | 1996-06-28 | 1998-01-23 | Nikon Corp | 反射屈折光学系 |
-
1997
- 1997-04-03 JP JP10250497A patent/JP3823436B2/ja not_active Expired - Fee Related
-
1998
- 1998-04-02 DE DE69824658T patent/DE69824658T2/de not_active Expired - Lifetime
- 1998-04-02 US US09/054,082 patent/US6088171A/en not_active Expired - Lifetime
- 1998-04-02 EP EP98106068A patent/EP0869382B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0869382A2 (de) | 1998-10-07 |
EP0869382B1 (de) | 2004-06-23 |
EP0869382A3 (de) | 1999-05-06 |
JP3823436B2 (ja) | 2006-09-20 |
US6088171A (en) | 2000-07-11 |
JPH10282411A (ja) | 1998-10-23 |
DE69824658T2 (de) | 2005-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8380 | Miscellaneous part iii |
Free format text: DER VERTRETER IST ZU ERGAENZEN: WAGNER & GEYER, PARTNERSCHAFT PATENT- RECHTSANWAELTE, 80538 MUENCHEN |