JP3821171B2 - 検査装置及び検査方法 - Google Patents

検査装置及び検査方法 Download PDF

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Publication number
JP3821171B2
JP3821171B2 JP28247196A JP28247196A JP3821171B2 JP 3821171 B2 JP3821171 B2 JP 3821171B2 JP 28247196 A JP28247196 A JP 28247196A JP 28247196 A JP28247196 A JP 28247196A JP 3821171 B2 JP3821171 B2 JP 3821171B2
Authority
JP
Japan
Prior art keywords
probe
group
terminals
terminal
electrical signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP28247196A
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English (en)
Japanese (ja)
Other versions
JPH09318662A (ja
JPH09318662A5 (enExample
Inventor
明 塗岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OHT Inc
Original Assignee
OHT Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OHT Inc filed Critical OHT Inc
Priority to JP28247196A priority Critical patent/JP3821171B2/ja
Priority to EP96117953A priority patent/EP0773445A3/en
Publication of JPH09318662A publication Critical patent/JPH09318662A/ja
Priority to US09/186,692 priority patent/US6160409A/en
Publication of JPH09318662A5 publication Critical patent/JPH09318662A5/ja
Application granted granted Critical
Publication of JP3821171B2 publication Critical patent/JP3821171B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06705—Apparatus for holding or moving single probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
    • G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Measuring Leads Or Probes (AREA)
JP28247196A 1995-11-10 1996-10-24 検査装置及び検査方法 Expired - Fee Related JP3821171B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP28247196A JP3821171B2 (ja) 1995-11-10 1996-10-24 検査装置及び検査方法
EP96117953A EP0773445A3 (en) 1995-11-10 1996-11-08 Inspection apparatus of conductive patterns
US09/186,692 US6160409A (en) 1995-11-10 1998-11-06 Inspection method of conductive patterns

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP7-317302 1995-11-10
JP31730295 1995-11-10
JP8-104150 1996-03-28
JP8-104149 1996-03-28
JP10415096 1996-03-28
JP10414996 1996-03-28
JP28247196A JP3821171B2 (ja) 1995-11-10 1996-10-24 検査装置及び検査方法

Publications (3)

Publication Number Publication Date
JPH09318662A JPH09318662A (ja) 1997-12-12
JPH09318662A5 JPH09318662A5 (enExample) 2004-10-21
JP3821171B2 true JP3821171B2 (ja) 2006-09-13

Family

ID=27469186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28247196A Expired - Fee Related JP3821171B2 (ja) 1995-11-10 1996-10-24 検査装置及び検査方法

Country Status (3)

Country Link
US (1) US6160409A (enExample)
EP (1) EP0773445A3 (enExample)
JP (1) JP3821171B2 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3214415B2 (ja) * 1997-10-30 2001-10-02 日本電産リード株式会社 基板検査装置および基板検査方法
US6456099B1 (en) * 1998-12-31 2002-09-24 Formfactor, Inc. Special contact points for accessing internal circuitry of an integrated circuit
KR100548103B1 (ko) * 1998-12-31 2006-02-02 폼팩터, 인크. 반도체 제품 다이 테스트용 테스트 다이를 포함하는테스트 장치 및 반도체 제품 다이 테스트 방법
US6191600B1 (en) * 1999-01-22 2001-02-20 Delaware Capital Formation, Inc. Scan test apparatus for continuity testing of bare printed circuit boards
KR100368075B1 (ko) * 2000-02-07 2003-01-15 마이크로 인스펙션 주식회사 로울링 와이어 프로브를 이용한 스캔방식의 검사장치 및방법
JP2002156417A (ja) * 2000-11-17 2002-05-31 Oht Inc 回路基板の検査装置及び検査方法
JP2002156399A (ja) * 2000-11-17 2002-05-31 Oht Inc 回路基板の検査装置及び検査方法
US6791344B2 (en) * 2000-12-28 2004-09-14 International Business Machines Corporation System for and method of testing a microelectronic device using a dual probe technique
US6631556B2 (en) * 2001-05-30 2003-10-14 Intel Corporation Fixture to couple an integrated circuit to a circuit board
US6788078B2 (en) 2001-11-16 2004-09-07 Delaware Capital Formation, Inc. Apparatus for scan testing printed circuit boards
JP2003344474A (ja) * 2002-05-27 2003-12-03 Oht Inc 検査装置及び検査方法
WO2007143647A2 (en) * 2006-06-05 2007-12-13 Visicon Inspection Technologies Llc Stent inspection system
US20080144918A1 (en) * 2006-09-21 2008-06-19 Kan Li System and method for tube scarf detection
JP4861860B2 (ja) * 2007-03-08 2012-01-25 新光電気工業株式会社 プリント基板検査用治具及びプリント基板検査装置
JP4843071B2 (ja) * 2009-06-04 2011-12-21 マイクロクラフト株式会社 プリント配線板の検査装置及び検査方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1538131A1 (de) * 1965-01-23 1969-09-25 Sacer Dipl Ing F Joze Planungsverfahren zur Ausgestaltung eines elektrischen Netzes
US3562643A (en) * 1969-01-21 1971-02-09 Ostby & Barton Co Spring loaded test probe assembly
CA1038042A (en) * 1975-03-03 1978-09-05 Motorola Programmable probe fixture and method of connecting units under test with test equipment
US4035722A (en) 1975-03-17 1977-07-12 Anatoly Leonidovich Ryabov Multiprobe head for checking electrical parameters of semiconductor instruments and microcircuits
US4342957A (en) * 1980-03-28 1982-08-03 Honeywell Information Systems Inc. Automatic test equipment test probe contact isolation detection apparatus and method
US4342958A (en) * 1980-03-28 1982-08-03 Honeywell Information Systems Inc. Automatic test equipment test probe contact isolation detection method
US4471298A (en) * 1981-12-11 1984-09-11 Cirdyne, Inc. Apparatus for automatically electrically testing printed circuit boards
US4565966A (en) * 1983-03-07 1986-01-21 Kollmorgen Technologies Corporation Method and apparatus for testing of electrical interconnection networks
JPH0619404B2 (ja) * 1988-06-17 1994-03-16 共栄制御機器株式会社 液晶電極基板の通電検出装置
JPH02168164A (ja) * 1988-12-22 1990-06-28 Nec Corp プローブ
US5214375A (en) * 1989-02-06 1993-05-25 Giga Probe, Inc. Multi-point probe assembly for testing electronic device
US5006808A (en) * 1989-03-21 1991-04-09 Bath Scientific Limited Testing electrical circuits
JPH03113375A (ja) * 1989-09-28 1991-05-14 Nec Kyushu Ltd プローブ
US5003254A (en) * 1989-11-02 1991-03-26 Huntron, Inc. Multi-axis universal circuit board test fixture
US5408189A (en) * 1990-05-25 1995-04-18 Everett Charles Technologies, Inc. Test fixture alignment system for printed circuit boards
DE9014236U1 (de) * 1990-10-13 1990-12-20 Feinmetall Gmbh, 7033 Herrenberg Kontaktiervorrichtung für die elektrische Verbindung einer Prüfeinrichtung mit einem Prüfling
JPH05196681A (ja) * 1991-06-26 1993-08-06 Digital Equip Corp <Dec> 連続移動する電気回路の相互接続試験方法及び装置
US5256975A (en) * 1992-06-01 1993-10-26 Digital Equipment Corporation Manually-operated continuity/shorts test probe for bare interconnection packages
US5357191A (en) * 1992-11-09 1994-10-18 Probot, Inc. Method and apparatus for testing circuit boards
US5420500A (en) * 1992-11-25 1995-05-30 Hewlett-Packard Company Pacitive electrode system for detecting open solder joints in printed circuit assemblies
TW227644B (enExample) * 1992-12-18 1994-08-01 Tesukon Kk
US5467020A (en) * 1994-03-29 1995-11-14 International Business Machines Corporation Testing fixture and method for circuit traces on a flexible substrate
US5461324A (en) * 1994-08-08 1995-10-24 International Business Machines Corporation Split-fixture configuration and method for testing circuit traces on a flexible substrate
JPH08189939A (ja) * 1995-01-10 1996-07-23 Iwaki Electron Corp Ltd プロービング特性試験装置

Also Published As

Publication number Publication date
JPH09318662A (ja) 1997-12-12
EP0773445A3 (en) 1999-08-25
US6160409A (en) 2000-12-12
EP0773445A2 (en) 1997-05-14

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