JP3767303B2 - 角速度検出装置 - Google Patents
角速度検出装置 Download PDFInfo
- Publication number
- JP3767303B2 JP3767303B2 JP2000044688A JP2000044688A JP3767303B2 JP 3767303 B2 JP3767303 B2 JP 3767303B2 JP 2000044688 A JP2000044688 A JP 2000044688A JP 2000044688 A JP2000044688 A JP 2000044688A JP 3767303 B2 JP3767303 B2 JP 3767303B2
- Authority
- JP
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- Prior art keywords
- electrode
- angular velocity
- detection device
- detection
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000001514 detection method Methods 0.000 claims description 133
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 18
- 230000035945 sensitivity Effects 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000044688A JP3767303B2 (ja) | 2000-02-22 | 2000-02-22 | 角速度検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000044688A JP3767303B2 (ja) | 2000-02-22 | 2000-02-22 | 角速度検出装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001235331A JP2001235331A (ja) | 2001-08-31 |
| JP2001235331A5 JP2001235331A5 (enExample) | 2005-03-03 |
| JP3767303B2 true JP3767303B2 (ja) | 2006-04-19 |
Family
ID=18567408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000044688A Expired - Fee Related JP3767303B2 (ja) | 2000-02-22 | 2000-02-22 | 角速度検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3767303B2 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6894428B2 (en) * | 2001-01-15 | 2005-05-17 | Seiko Epson Corporation | Vibrating piece, vibrator, oscillator, and electronic device |
| JP2002340559A (ja) * | 2001-05-11 | 2002-11-27 | Piedekku Gijutsu Kenkyusho:Kk | 水晶角速度センサ |
| US7140251B2 (en) | 2004-05-19 | 2006-11-28 | Ngk Insulators, Ltd. | Devices for measuring physical values and vibrators |
| JP4715652B2 (ja) * | 2006-06-30 | 2011-07-06 | セイコーエプソン株式会社 | 圧電振動片 |
| JP4591787B2 (ja) * | 2007-04-19 | 2010-12-01 | セイコーエプソン株式会社 | 振動子および角速度測定装置 |
| JP2010103805A (ja) * | 2008-10-24 | 2010-05-06 | Seiko Epson Corp | 屈曲振動片、屈曲振動子、および圧電デバイス |
| JP4849284B2 (ja) * | 2010-12-27 | 2012-01-11 | セイコーエプソン株式会社 | 振動型ジャイロスコープ用測定素子 |
| JP6337444B2 (ja) * | 2013-10-30 | 2018-06-06 | セイコーエプソン株式会社 | 振動片、角速度センサー、電子機器及び移動体 |
| JP6337443B2 (ja) * | 2013-10-30 | 2018-06-06 | セイコーエプソン株式会社 | 振動片、角速度センサー、電子機器及び移動体 |
-
2000
- 2000-02-22 JP JP2000044688A patent/JP3767303B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001235331A (ja) | 2001-08-31 |
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