JP3750640B2 - 素子基板、電子装置、光学装置、及び電子機器 - Google Patents
素子基板、電子装置、光学装置、及び電子機器 Download PDFInfo
- Publication number
- JP3750640B2 JP3750640B2 JP2002242476A JP2002242476A JP3750640B2 JP 3750640 B2 JP3750640 B2 JP 3750640B2 JP 2002242476 A JP2002242476 A JP 2002242476A JP 2002242476 A JP2002242476 A JP 2002242476A JP 3750640 B2 JP3750640 B2 JP 3750640B2
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- JP
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- Prior art keywords
- film
- substrate
- phase separation
- separation structure
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- 230000003287 optical effect Effects 0.000 title claims description 101
- 238000005191 phase separation Methods 0.000 claims description 146
- 239000000463 material Substances 0.000 claims description 39
- 229920001400 block copolymer Polymers 0.000 claims description 23
- 239000002346 layers by function Substances 0.000 claims description 23
- 229920001519 homopolymer Polymers 0.000 claims description 13
- 238000000926 separation method Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000010408 film Substances 0.000 description 349
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- 238000004519 manufacturing process Methods 0.000 description 83
- 239000000126 substance Substances 0.000 description 80
- 238000000034 method Methods 0.000 description 78
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- 238000002347 injection Methods 0.000 description 9
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- 239000004793 Polystyrene Substances 0.000 description 7
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- 125000001624 naphthyl group Chemical group 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
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- 239000004020 conductor Substances 0.000 description 4
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 229910052741 iridium Inorganic materials 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
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- 150000002739 metals Chemical class 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M methacrylate group Chemical group C(C(=C)C)(=O)[O-] CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 239000000178 monomer Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
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- 229920000548 poly(silane) polymer Polymers 0.000 description 2
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- 229910052709 silver Inorganic materials 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- IGGDKDTUCAWDAN-UHFFFAOYSA-N 1-vinylnaphthalene Chemical compound C1=CC=C2C(C=C)=CC=CC2=C1 IGGDKDTUCAWDAN-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
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- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 241000446313 Lamella Species 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- JFBZPFYRPYOZCQ-UHFFFAOYSA-N [Li].[Al] Chemical compound [Li].[Al] JFBZPFYRPYOZCQ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
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- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
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- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- -1 magnesium / silver Chemical class 0.000 description 1
- SJCKRGFTWFGHGZ-UHFFFAOYSA-N magnesium silver Chemical compound [Mg].[Ag] SJCKRGFTWFGHGZ-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
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- 238000002844 melting Methods 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
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- 238000005192 partition Methods 0.000 description 1
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- 229920000885 poly(2-vinylpyridine) Polymers 0.000 description 1
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- 239000009719 polyimide resin Substances 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
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- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- SJMYWORNLPSJQO-UHFFFAOYSA-N tert-butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(C)(C)C SJMYWORNLPSJQO-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Lasers (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002242476A JP3750640B2 (ja) | 2002-08-22 | 2002-08-22 | 素子基板、電子装置、光学装置、及び電子機器 |
| US10/639,534 US7166872B2 (en) | 2002-08-22 | 2003-08-13 | Device substrate, production method therefor, electronic device, production method therefor, optic device, production method therefor, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002242476A JP3750640B2 (ja) | 2002-08-22 | 2002-08-22 | 素子基板、電子装置、光学装置、及び電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005258857A Division JP2006082077A (ja) | 2005-09-07 | 2005-09-07 | 膜製造方法及び素子基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004087531A JP2004087531A (ja) | 2004-03-18 |
| JP2004087531A5 JP2004087531A5 (cg-RX-API-DMAC7.html) | 2005-09-08 |
| JP3750640B2 true JP3750640B2 (ja) | 2006-03-01 |
Family
ID=32051553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002242476A Expired - Fee Related JP3750640B2 (ja) | 2002-08-22 | 2002-08-22 | 素子基板、電子装置、光学装置、及び電子機器 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7166872B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP3750640B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8278818B2 (en) | 2004-06-04 | 2012-10-02 | Samsung Mobile Display Co., Ltd. | Electroluminescent display device and method of fabricating the same |
| US8133534B2 (en) | 2004-11-22 | 2012-03-13 | Wisconsin Alumni Research Foundation | Methods and compositions for forming patterns with isolated or discrete features using block copolymer materials |
| JP5377857B2 (ja) * | 2004-11-22 | 2013-12-25 | ウィスコンシン・アラムナイ・リサーチ・ファウンデーション | 非周期的パターン共重合体フィルムのための方法及び組成 |
| JP4363319B2 (ja) * | 2004-12-14 | 2009-11-11 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| US8168284B2 (en) | 2005-10-06 | 2012-05-01 | Wisconsin Alumni Research Foundation | Fabrication of complex three-dimensional structures based on directed assembly of self-assembling materials on activated two-dimensional templates |
| US8618221B2 (en) | 2005-10-14 | 2013-12-31 | Wisconsin Alumni Research Foundation | Directed assembly of triblock copolymers |
| JP2008027815A (ja) * | 2006-07-24 | 2008-02-07 | Tdk Corp | Elパネル |
| WO2009079241A2 (en) | 2007-12-07 | 2009-06-25 | Wisconsin Alumni Research Foundation | Density multiplication and improved lithography by directed block copolymer assembly |
| JP5515237B2 (ja) * | 2008-05-14 | 2014-06-11 | セイコーエプソン株式会社 | 発光装置及び電子機器 |
| US9299381B2 (en) | 2011-02-07 | 2016-03-29 | Wisconsin Alumni Research Foundation | Solvent annealing block copolymers on patterned substrates |
| US9718250B2 (en) | 2011-09-15 | 2017-08-01 | Wisconsin Alumni Research Foundation | Directed assembly of block copolymer films between a chemically patterned surface and a second surface |
| US9372398B2 (en) | 2012-03-02 | 2016-06-21 | Wisconsin Alumni Research Foundation | Patterning in the directed assembly of block copolymers using triblock or multiblock copolymers |
| WO2015079641A1 (ja) * | 2013-11-26 | 2015-06-04 | 株式会社Joled | 有機elパネル及びその製造方法、並びにカラーフィルター基板 |
| CN109192075B (zh) * | 2018-10-30 | 2022-01-25 | 云谷(固安)科技有限公司 | 柔性盖板及其制备方法 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05323327A (ja) | 1992-05-20 | 1993-12-07 | Matsushita Electric Ind Co Ltd | 液晶表示パネルおよびその製造方法 |
| JPH07152024A (ja) | 1993-05-17 | 1995-06-16 | Sharp Corp | 液晶表示素子 |
| US5547763A (en) * | 1993-09-27 | 1996-08-20 | Eastman Kodak Company | Organic nonlinear optical article with improved transmission enhancement layer |
| JP3077959B2 (ja) * | 1993-11-25 | 2000-08-21 | シャープ株式会社 | 液晶表示素子 |
| JP3152041B2 (ja) | 1993-12-08 | 2001-04-03 | 松下電器産業株式会社 | 液晶パネルとその製造方法およびそれを用いた液晶投写型テレビ |
| JPH0858375A (ja) | 1994-08-23 | 1996-03-05 | Kasai Kogyo Co Ltd | 自動車用内装部品 |
| JP3193267B2 (ja) | 1994-10-14 | 2001-07-30 | シャープ株式会社 | 液晶素子およびその製造方法 |
| JP3267844B2 (ja) | 1994-11-09 | 2002-03-25 | シャープ株式会社 | 液晶素子およびその製造方法 |
| JPH08179287A (ja) | 1994-12-26 | 1996-07-12 | Sharp Corp | 液晶表示素子及びその製造方法 |
| JP3528995B2 (ja) | 1995-11-14 | 2004-05-24 | シャープ株式会社 | 液晶表示素子の製造方法 |
| JPH09302101A (ja) | 1996-05-16 | 1997-11-25 | Dainippon Ink & Chem Inc | 光学素子の製造方法 |
| JPH1010502A (ja) | 1996-06-20 | 1998-01-16 | Sharp Corp | 液晶表示装置およびその製造方法 |
| JPH10115704A (ja) | 1996-10-11 | 1998-05-06 | Sharp Corp | 反射型カラーフィルタおよび液晶表示装置 |
| JPH10333131A (ja) | 1996-12-17 | 1998-12-18 | Matsushita Electric Ind Co Ltd | 表示パネル、表示パネルの製造方法、表示パネルの駆動方法、表示パネルの欠陥修正方法、及び表示パネルを用いた表示装置 |
| JP3393979B2 (ja) | 1997-07-01 | 2003-04-07 | 松下電器産業株式会社 | 画像表示パネルと画像表示装置およびそれを用いた投射型表示装置とビューファインダ |
| JPH10319375A (ja) | 1997-05-16 | 1998-12-04 | Matsushita Electric Ind Co Ltd | 高分子分散型液晶表示素子とその製造方法 |
| JP3233883B2 (ja) * | 1997-08-29 | 2001-12-04 | 科学技術振興事業団 | 発色性高分子構造体とその製造方法 |
| US5976686A (en) * | 1997-10-24 | 1999-11-02 | 3M Innovative Properties Company | Diffuse reflective articles |
| JP3418353B2 (ja) | 1999-03-15 | 2003-06-23 | 松下電器産業株式会社 | 樹脂・液晶形成体とこれを用いた液晶表示装置並びにこれらの製造方法 |
| JP3418354B2 (ja) | 1999-03-16 | 2003-06-23 | 松下電器産業株式会社 | 樹脂・液晶形成体とこれを用いた液晶表示装置並びにこれらの製造方法 |
| JPH11305204A (ja) | 1998-04-21 | 1999-11-05 | Matsushita Electric Ind Co Ltd | 表示パネルとその製造方法および該表示パネルを用いた表示装置 |
| JP4037554B2 (ja) | 1999-03-12 | 2008-01-23 | 株式会社東芝 | 窒化物半導体発光素子およびその製造方法 |
| JP2000303002A (ja) | 1999-04-16 | 2000-10-31 | Nitta Ind Corp | 防汚塗料組成物 |
| JP4226159B2 (ja) | 1999-08-06 | 2009-02-18 | シャープ株式会社 | 有機ledディスプレイの製造方法 |
| JP3403136B2 (ja) * | 1999-12-28 | 2003-05-06 | 株式会社東芝 | スイッチング素子の製造方法、スイッチング素子及びスイッチング素子アレイ |
| JP2001305316A (ja) | 2000-02-18 | 2001-10-31 | Matsushita Electric Ind Co Ltd | 反射板、それを用いた反射型表示素子、及び反射板の製造方法 |
| JP2001244066A (ja) * | 2000-03-01 | 2001-09-07 | Seiko Epson Corp | 発光装置 |
| JP2001318201A (ja) * | 2000-05-11 | 2001-11-16 | Mitsubishi Chemicals Corp | 相分離材料 |
| JP2002157241A (ja) | 2000-09-06 | 2002-05-31 | Fujitsu Ltd | 辞書作成装置 |
| JP2002110362A (ja) * | 2000-09-27 | 2002-04-12 | Seiko Epson Corp | 面発光装置 |
| JP2002134277A (ja) * | 2000-10-19 | 2002-05-10 | Jsr Corp | エレクトロルミネッセンス用材料並びにエレクトロルミネッセンス素子およびその製造方法 |
| JP3538149B2 (ja) * | 2001-01-30 | 2004-06-14 | Nec液晶テクノロジー株式会社 | 反射型液晶表示装置及びその製造方法 |
| AU2002307151A1 (en) | 2001-04-06 | 2002-10-21 | Carnegie Mellon University | A process for the preparation of nanostructured materials |
| US7244669B2 (en) | 2001-05-23 | 2007-07-17 | Plastic Logic Limited | Patterning of devices |
| JP2003165241A (ja) | 2001-12-03 | 2003-06-10 | Alps Electric Co Ltd | サーマルヘッド |
-
2002
- 2002-08-22 JP JP2002242476A patent/JP3750640B2/ja not_active Expired - Fee Related
-
2003
- 2003-08-13 US US10/639,534 patent/US7166872B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20040080920A1 (en) | 2004-04-29 |
| JP2004087531A (ja) | 2004-03-18 |
| US7166872B2 (en) | 2007-01-23 |
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