JP3734432B2 - マスク搬送装置、マスク搬送システム及びマスク搬送方法 - Google Patents

マスク搬送装置、マスク搬送システム及びマスク搬送方法 Download PDF

Info

Publication number
JP3734432B2
JP3734432B2 JP2001172953A JP2001172953A JP3734432B2 JP 3734432 B2 JP3734432 B2 JP 3734432B2 JP 2001172953 A JP2001172953 A JP 2001172953A JP 2001172953 A JP2001172953 A JP 2001172953A JP 3734432 B2 JP3734432 B2 JP 3734432B2
Authority
JP
Japan
Prior art keywords
mask
carriage
mounting table
mask storage
track rail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001172953A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002362737A (ja
Inventor
錫▲ヒョン▼ 金
謙二 徳永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to JP2001172953A priority Critical patent/JP3734432B2/ja
Priority to KR1020020028563A priority patent/KR100693836B1/ko
Publication of JP2002362737A publication Critical patent/JP2002362737A/ja
Application granted granted Critical
Publication of JP3734432B2 publication Critical patent/JP3734432B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2001172953A 2001-06-07 2001-06-07 マスク搬送装置、マスク搬送システム及びマスク搬送方法 Expired - Fee Related JP3734432B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2001172953A JP3734432B2 (ja) 2001-06-07 2001-06-07 マスク搬送装置、マスク搬送システム及びマスク搬送方法
KR1020020028563A KR100693836B1 (ko) 2001-06-07 2002-05-23 마스크 반송 장치, 마스크 반송 시스템 및 마스크 반송방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001172953A JP3734432B2 (ja) 2001-06-07 2001-06-07 マスク搬送装置、マスク搬送システム及びマスク搬送方法

Publications (2)

Publication Number Publication Date
JP2002362737A JP2002362737A (ja) 2002-12-18
JP3734432B2 true JP3734432B2 (ja) 2006-01-11

Family

ID=19014498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001172953A Expired - Fee Related JP3734432B2 (ja) 2001-06-07 2001-06-07 マスク搬送装置、マスク搬送システム及びマスク搬送方法

Country Status (2)

Country Link
JP (1) JP3734432B2 (ko)
KR (1) KR100693836B1 (ko)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101163435B1 (ko) 2003-04-09 2012-07-13 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TW201834020A (zh) 2003-10-28 2018-09-16 日商尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TWI512335B (zh) 2003-11-20 2015-12-11 尼康股份有限公司 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法
TWI412067B (zh) 2004-02-06 2013-10-11 尼康股份有限公司 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法
EP3232270A3 (en) 2005-05-12 2017-12-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
JP4200387B2 (ja) 2006-04-14 2008-12-24 村田機械株式会社 搬送システム
JP5267029B2 (ja) 2007-10-12 2013-08-21 株式会社ニコン 照明光学装置、露光装置及びデバイスの製造方法
US8379187B2 (en) 2007-10-24 2013-02-19 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9116346B2 (en) 2007-11-06 2015-08-25 Nikon Corporation Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method
KR101699983B1 (ko) * 2007-11-15 2017-01-26 가부시키가이샤 니콘 마스크 케이스, 반송 장치, 노광 장치, 마스크 반송 방법 및 디바이스 제조 방법
JP5427099B2 (ja) * 2010-04-23 2014-02-26 西部電機株式会社 板状物の搬送システム
KR101341425B1 (ko) * 2011-11-02 2013-12-13 주식회사 에스에프에이 스토커 시스템
JP5700255B2 (ja) * 2012-03-27 2015-04-15 株式会社ダイフク 物品保管設備及び物品搬送設備
KR101396223B1 (ko) * 2012-08-17 2014-05-19 주식회사 에스에프에이 마스크 공급시스템
JP5739036B1 (ja) * 2014-03-27 2015-06-24 株式会社椿本チエイン 搬送装置
JP6149805B2 (ja) 2014-06-05 2017-06-21 株式会社ダイフク 搬送装置
JP6435704B2 (ja) * 2014-08-20 2018-12-12 村田機械株式会社 搬送保管システム
KR101658056B1 (ko) 2014-12-19 2016-09-20 주식회사 에스에프에이 대상물 공급시스템
KR101666803B1 (ko) 2014-12-31 2016-10-17 주식회사 에스에프에이 정렬장치 및 이를 구비한 카세트 공급시스템
CN107082279B (zh) * 2017-05-22 2020-01-03 昆山国显光电有限公司 面板搬运装置
NO344310B1 (en) * 2017-11-22 2019-11-04 Autostore Tech As Automated storage and retrieval system comprising a three dimensional grid, container-handling vehicle and method of retrieving at least one storage container from the storage 40 storage and retrieval system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0247045U (ko) * 1988-09-27 1990-03-30
JPH04370950A (ja) * 1991-06-19 1992-12-24 Fujitsu Ltd 搬送車
JP2501262Y2 (ja) * 1992-01-28 1996-06-12 村田機械株式会社 オ―バ―ヘッド型物品搬送装置
JPH0680382A (ja) * 1992-09-04 1994-03-22 Murata Mach Ltd オーバーヘッド型物品搬送装置
JP3124393B2 (ja) * 1992-10-09 2001-01-15 宮城沖電気株式会社 ウエハキャリアの移載装置
JP2704591B2 (ja) * 1993-06-15 1998-01-26 株式会社岡村製作所 走行体への情報伝達装置
KR19980034829A (ko) * 1996-11-08 1998-08-05 김광호 마스크이송장치 및 이송방법
JPH1111860A (ja) * 1997-06-17 1999-01-19 Shinko Electric Co Ltd 天井搬送装置及び天井搬送車
JPH118186A (ja) * 1997-06-18 1999-01-12 Toshiba Corp レクチルの搬送方法および搬送装置
JPH1159829A (ja) * 1997-08-08 1999-03-02 Mitsubishi Electric Corp 半導体ウェハカセット搬送装置、半導体ウェハカセット搬送装置で用いられるストッカ、ならびに半導体ウェハカセット搬送装置で用いられるストッカ入庫作業制御方法、ストッカ出庫作業制御方法、自動搬送車制御方法、およびストッカ在庫照合方法
JP3335912B2 (ja) * 1998-06-26 2002-10-21 株式会社東芝 搬送システム
JP2000159332A (ja) * 1998-11-20 2000-06-13 Okamura Corp 物品搬送装置における情報伝達部品の取付装置
JP3071423B1 (ja) * 1999-03-08 2000-07-31 株式会社東芝 レチクルキャッシュ方式半導体製造装置
JP3005584B1 (ja) * 1999-03-18 2000-01-31 九州日本電気株式会社 レチクルケ―ス搬送装置
JP3647330B2 (ja) * 1999-09-02 2005-05-11 キヤノン株式会社 半導体製造装置およびデバイス製造方法

Also Published As

Publication number Publication date
JP2002362737A (ja) 2002-12-18
KR20020095075A (ko) 2002-12-20
KR100693836B1 (ko) 2007-03-12

Similar Documents

Publication Publication Date Title
JP3734432B2 (ja) マスク搬送装置、マスク搬送システム及びマスク搬送方法
US7591624B2 (en) Reticle storage pod (RSP) transport system utilizing FOUP adapter plate
JP5880693B2 (ja) 搬送システム
TW200301748A (en) Carrier system of polishing processing body and conveying method of polishing processing body
TWI722208B (zh) 搬送系統
WO2006046580A1 (ja) 搬送システム、基板処理装置、及び搬送方法
JP2008222346A (ja) 懸垂式軌道搬送台車及び搬送システム
JP2007096140A (ja) 懸垂式昇降搬送台車における物品の授受方法並びに装置
TW201351551A (zh) 用於半導體製程區之晶圓處理系統以及在半導體設備間輸送晶圓之裝置及方法
JP2007096145A (ja) 懸垂式昇降搬送台車における物品の授受方法並びに装置
KR20020064918A (ko) 웨이퍼 이송 시스템
WO2013150841A1 (ja) 搬送システム
TWI842932B (zh) 搬送系統
JP2000188316A (ja) 搬送方法および装置ならびにそれを用いた半導体装置の製造方法
JP2008024417A (ja) 一時保管棚装置
JP2005136294A (ja) 移載装置
JP2001077173A (ja) 半導体製造装置およびデバイス製造方法
KR20220126717A (ko) Foup 이송 장치
CN115427329A (zh) 输送车系统
JPH11145243A (ja) 半導体の生産方法
JP2007150369A (ja) 半導体装置の製造方法
JPH0584059B2 (ko)
TWI788792B (zh) 半導體製造設備系統及其操作方法
JP2611747B2 (ja) ウエハ収納箱搬送装置
JPH0110932Y2 (ko)

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20041019

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041220

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050222

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20050318

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050420

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20050927

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20051018

R150 Certificate of patent or registration of utility model

Ref document number: 3734432

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091028

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091028

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101028

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111028

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121028

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131028

Year of fee payment: 8

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees