JP3654474B2 - アクティブマトリックス液晶表示装置のマトリックスアレイ及び液晶表示装置並びにその製造方法 - Google Patents
アクティブマトリックス液晶表示装置のマトリックスアレイ及び液晶表示装置並びにその製造方法 Download PDFInfo
- Publication number
- JP3654474B2 JP3654474B2 JP31150896A JP31150896A JP3654474B2 JP 3654474 B2 JP3654474 B2 JP 3654474B2 JP 31150896 A JP31150896 A JP 31150896A JP 31150896 A JP31150896 A JP 31150896A JP 3654474 B2 JP3654474 B2 JP 3654474B2
- Authority
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- Japan
- Prior art keywords
- region
- electrode
- liquid crystal
- crystal display
- gate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 87
- 239000011159 matrix material Substances 0.000 title claims description 75
- 238000004519 manufacturing process Methods 0.000 title claims description 38
- 239000010408 film Substances 0.000 claims description 73
- 239000003990 capacitor Substances 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 49
- 239000004065 semiconductor Substances 0.000 claims description 48
- 239000010409 thin film Substances 0.000 claims description 47
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 20
- 229920002120 photoresistant polymer Polymers 0.000 claims description 12
- 238000002161 passivation Methods 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 claims description 2
- 230000036211 photosensitivity Effects 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000003860 storage Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 15
- 230000003071 parasitic effect Effects 0.000 description 10
- 239000004020 conductor Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR95-43742 | 1995-11-25 | ||
| KR1019950043742A KR0158260B1 (ko) | 1995-11-25 | 1995-11-25 | 엑티브 매트릭스 액정표시장치의 매트릭스 어레이 및 제조방법 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09292632A JPH09292632A (ja) | 1997-11-11 |
| JPH09292632A5 JPH09292632A5 (enExample) | 2004-11-18 |
| JP3654474B2 true JP3654474B2 (ja) | 2005-06-02 |
Family
ID=19435726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31150896A Expired - Lifetime JP3654474B2 (ja) | 1995-11-25 | 1996-11-22 | アクティブマトリックス液晶表示装置のマトリックスアレイ及び液晶表示装置並びにその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5694185A (enExample) |
| JP (1) | JP3654474B2 (enExample) |
| KR (1) | KR0158260B1 (enExample) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0926603A (ja) | 1995-05-08 | 1997-01-28 | Semiconductor Energy Lab Co Ltd | 表示装置 |
| US5835177A (en) * | 1995-10-05 | 1998-11-10 | Kabushiki Kaisha Toshiba | Array substrate with bus lines takeout/terminal sections having multiple conductive layers |
| KR100195269B1 (ko) * | 1995-12-22 | 1999-06-15 | 윤종용 | 액정표시장치의 제조방법 |
| JPH09265113A (ja) * | 1996-03-28 | 1997-10-07 | Nec Corp | アクティブマトリクス型液晶表示装置およびその製造方 法 |
| KR100192447B1 (ko) * | 1996-05-15 | 1999-06-15 | 구자홍 | 액정표시장치의 제조방법 |
| JP2776376B2 (ja) * | 1996-06-21 | 1998-07-16 | 日本電気株式会社 | アクティブマトリクス液晶表示パネル |
| JP3126661B2 (ja) | 1996-06-25 | 2001-01-22 | 株式会社半導体エネルギー研究所 | 液晶表示装置 |
| JP3634089B2 (ja) * | 1996-09-04 | 2005-03-30 | 株式会社半導体エネルギー研究所 | 表示装置 |
| KR100247493B1 (ko) | 1996-10-18 | 2000-03-15 | 구본준, 론 위라하디락사 | 액티브매트릭스기판의 구조 |
| KR100251512B1 (ko) | 1997-07-12 | 2000-04-15 | 구본준 | 횡전계방식 액정표시장치 |
| KR100458834B1 (ko) * | 1997-09-09 | 2005-05-27 | 삼성전자주식회사 | 액정표시장치 |
| KR100293436B1 (ko) * | 1998-01-23 | 2001-08-07 | 구본준, 론 위라하디락사 | 횡전계방식액정표시장치 |
| KR100542303B1 (ko) * | 1998-08-24 | 2006-04-06 | 비오이 하이디스 테크놀로지 주식회사 | 액정 표시 장치 |
| US6809787B1 (en) * | 1998-12-11 | 2004-10-26 | Lg.Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device |
| KR100430232B1 (ko) * | 1998-12-21 | 2004-12-31 | 엘지.필립스 엘시디 주식회사 | 액정표시장치및액정표시장치의축적캐패시터 |
| KR100357216B1 (ko) * | 1999-03-09 | 2002-10-18 | 엘지.필립스 엘시디 주식회사 | 멀티도메인 액정표시소자 |
| KR100620845B1 (ko) * | 1999-04-02 | 2006-09-06 | 엘지.필립스 엘시디 주식회사 | 멀티도메인 액정표시소자 제조방법 |
| KR100627107B1 (ko) | 1999-07-31 | 2006-09-25 | 엘지.필립스 엘시디 주식회사 | 멀티 도메인 액정표시소자 및 그 제조방법 |
| KR100348995B1 (ko) * | 1999-09-08 | 2002-08-17 | 엘지.필립스 엘시디 주식회사 | 4 마스크를 이용한 액정표시소자의 제조방법 및 그에 따른 액정표시소자 |
| KR100370800B1 (ko) * | 2000-06-09 | 2003-02-05 | 엘지.필립스 엘시디 주식회사 | 액정표시장치용 어레이기판 제작방법 |
| US7072017B1 (en) * | 2000-06-29 | 2006-07-04 | Lg. Philips Lcd Co., Ltd. | Multi-domain liquid crystal display device having a common-auxiliary electrode and dielectric structures |
| TWI284240B (en) * | 2000-09-27 | 2007-07-21 | Matsushita Electric Industrial Co Ltd | Liquid crystal display device |
| KR20020042898A (ko) | 2000-12-01 | 2002-06-08 | 구본준, 론 위라하디락사 | 액정표시장치용 어레이기판과 그 제조방법 |
| KR100776509B1 (ko) * | 2000-12-30 | 2007-11-16 | 엘지.필립스 엘시디 주식회사 | 액정표시장치 및 그 제조방법 |
| US6639281B2 (en) | 2001-04-10 | 2003-10-28 | Sarnoff Corporation | Method and apparatus for providing a high-performance active matrix pixel using organic thin-film transistors |
| KR100731037B1 (ko) * | 2001-05-07 | 2007-06-22 | 엘지.필립스 엘시디 주식회사 | 액정표시장치 및 그 제조방법 |
| KR100459211B1 (ko) * | 2001-05-25 | 2004-12-03 | 엘지.필립스 엘시디 주식회사 | 폴리실리콘 박막트랜지스터 및 그 제조방법 그리고, 이를적용한 액정표시소자의 제조방법 |
| KR100391157B1 (ko) * | 2001-10-25 | 2003-07-16 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 어레이 기판 및 그의 제조 방법 |
| KR100737702B1 (ko) * | 2002-10-16 | 2007-07-10 | 엘지.필립스 엘시디 주식회사 | 액정표시장치 |
| KR100902244B1 (ko) * | 2002-12-31 | 2009-06-11 | 엘지디스플레이 주식회사 | 박막 트랜지스터형 액정 표시 장치 |
| KR101027866B1 (ko) * | 2003-12-18 | 2011-04-07 | 엘지디스플레이 주식회사 | 액정표시장치 |
| NL1025134C2 (nl) * | 2003-12-24 | 2005-08-26 | Lg Philips Lcd Co | Organische licht emitterende diode-inrichting van de soort met actieve matrix en daarvoor bestemde dunne-filmtransistor. |
| CN100476554C (zh) * | 2004-08-31 | 2009-04-08 | 卡西欧计算机株式会社 | 垂直取向型有源矩阵液晶显示元件 |
| CN100492141C (zh) * | 2004-09-30 | 2009-05-27 | 卡西欧计算机株式会社 | 垂直取向型有源矩阵液晶显示元件 |
| US20060066791A1 (en) * | 2004-09-30 | 2006-03-30 | Casio Computer Co., Ltd. | Vertical alignment active matrix liquid crystal display device |
| TWI290649B (en) * | 2004-11-29 | 2007-12-01 | Casio Computer Co Ltd | Vertical alignment active matrix liquid crystal display device |
| KR100752876B1 (ko) * | 2004-11-30 | 2007-08-29 | 가시오게산키 가부시키가이샤 | 수직배향형의 액정표시소자 |
| US8068200B2 (en) | 2004-12-24 | 2011-11-29 | Casio Computer Co., Ltd. | Vertical alignment liquid crystal display device in which a pixel electrode has slits which divide the pixel electrode into electrode portions |
| JP4639797B2 (ja) * | 2004-12-24 | 2011-02-23 | カシオ計算機株式会社 | 液晶表示素子 |
| KR101127833B1 (ko) * | 2005-06-28 | 2012-03-20 | 엘지디스플레이 주식회사 | 액정 표시 장치 |
| TW200706955A (en) * | 2005-08-08 | 2007-02-16 | Innolux Display Corp | In-plane switching liquid crystal display device |
| US8023054B2 (en) | 2005-12-30 | 2011-09-20 | Lg Display Co., Ltd. | Flat panel display and fabricating method thereof |
| WO2014069260A1 (ja) * | 2012-10-29 | 2014-05-08 | シャープ株式会社 | アクティブマトリクス基板および液晶表示装置 |
| CN109377965B (zh) * | 2018-12-21 | 2021-06-25 | 信利半导体有限公司 | 异形像素驱动单元、像素驱动阵列及显示设备 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5032883A (en) * | 1987-09-09 | 1991-07-16 | Casio Computer Co., Ltd. | Thin film transistor and method of manufacturing the same |
| US5327001A (en) * | 1987-09-09 | 1994-07-05 | Casio Computer Co., Ltd. | Thin film transistor array having single light shield layer over transistors and gate and drain lines |
| JP2543286B2 (ja) * | 1992-04-22 | 1996-10-16 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 液晶表示装置 |
| NL194848C (nl) * | 1992-06-01 | 2003-04-03 | Samsung Electronics Co Ltd | Vloeibaar-kristalindicatorinrichting. |
| EP0592063A3 (en) * | 1992-09-14 | 1994-07-13 | Toshiba Kk | Active matrix liquid crystal display device |
-
1995
- 1995-11-25 KR KR1019950043742A patent/KR0158260B1/ko not_active Expired - Lifetime
-
1996
- 1996-04-29 US US08/639,617 patent/US5694185A/en not_active Expired - Lifetime
- 1996-11-22 JP JP31150896A patent/JP3654474B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09292632A (ja) | 1997-11-11 |
| KR0158260B1 (ko) | 1998-12-15 |
| KR970028666A (ko) | 1997-06-24 |
| US5694185A (en) | 1997-12-02 |
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