JP2025507250A5 - - Google Patents

Info

Publication number
JP2025507250A5
JP2025507250A5 JP2024541671A JP2024541671A JP2025507250A5 JP 2025507250 A5 JP2025507250 A5 JP 2025507250A5 JP 2024541671 A JP2024541671 A JP 2024541671A JP 2024541671 A JP2024541671 A JP 2024541671A JP 2025507250 A5 JP2025507250 A5 JP 2025507250A5
Authority
JP
Japan
Prior art keywords
carbon film
glassy carbon
manufacturing process
thin layer
composite structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024541671A
Other languages
English (en)
Japanese (ja)
Other versions
JP2025507250A (ja
Filing date
Publication date
Priority claimed from FR2201443A external-priority patent/FR3132976B1/fr
Application filed filed Critical
Publication of JP2025507250A publication Critical patent/JP2025507250A/ja
Publication of JP2025507250A5 publication Critical patent/JP2025507250A5/ja
Pending legal-status Critical Current

Links

JP2024541671A 2022-02-18 2023-01-31 複合構造および関連する製造プロセス Pending JP2025507250A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR2201443 2022-02-18
FR2201443A FR3132976B1 (fr) 2022-02-18 2022-02-18 Structure composite et procede de fabrication associe
PCT/EP2023/052346 WO2023156193A1 (fr) 2022-02-18 2023-01-31 Structure composite et procede de fabrication associe

Publications (2)

Publication Number Publication Date
JP2025507250A JP2025507250A (ja) 2025-03-18
JP2025507250A5 true JP2025507250A5 (https=) 2025-12-10

Family

ID=81580657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024541671A Pending JP2025507250A (ja) 2022-02-18 2023-01-31 複合構造および関連する製造プロセス

Country Status (8)

Country Link
US (1) US20250140602A1 (https=)
EP (1) EP4479994A1 (https=)
JP (1) JP2025507250A (https=)
KR (1) KR20240154013A (https=)
CN (1) CN118696397A (https=)
FR (1) FR3132976B1 (https=)
TW (1) TW202349454A (https=)
WO (1) WO2023156193A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6371143B2 (ja) * 2014-07-08 2018-08-08 イビデン株式会社 ＳｉＣウェハの製造方法、ＳｉＣ半導体の製造方法及び黒鉛炭化珪素複合基板
JP6371142B2 (ja) * 2014-07-08 2018-08-08 イビデン株式会社 ＳｉＣウェハの製造方法、ＳｉＣ半導体の製造方法及び炭化珪素複合基板
US20180158672A1 (en) * 2015-06-25 2018-06-07 Tivra Corporation Crystalline Semiconductor Growth on Amorphous and Poly-Crystalline Substrates

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