JP2023512201A5 - - Google Patents

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Publication number
JP2023512201A5
JP2023512201A5 JP2022545782A JP2022545782A JP2023512201A5 JP 2023512201 A5 JP2023512201 A5 JP 2023512201A5 JP 2022545782 A JP2022545782 A JP 2022545782A JP 2022545782 A JP2022545782 A JP 2022545782A JP 2023512201 A5 JP2023512201 A5 JP 2023512201A5
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JP
Japan
Prior art keywords
gas distribution
distribution plate
arc
shaped portion
inner rings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022545782A
Other languages
English (en)
Japanese (ja)
Other versions
JP7579866B2 (ja
JP2023512201A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2021/014988 external-priority patent/WO2021154673A1/en
Publication of JP2023512201A publication Critical patent/JP2023512201A/ja
Publication of JP2023512201A5 publication Critical patent/JP2023512201A5/ja
Priority to JP2024188692A priority Critical patent/JP2025013990A/ja
Application granted granted Critical
Publication of JP7579866B2 publication Critical patent/JP7579866B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022545782A 2020-01-28 2021-01-26 高電力、高圧プロセス用の分割されたガス分配プレート Active JP7579866B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024188692A JP2025013990A (ja) 2020-01-28 2024-10-28 高電力、高圧プロセス用の分割されたガス分配プレート

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062966816P 2020-01-28 2020-01-28
US62/966,816 2020-01-28
PCT/US2021/014988 WO2021154673A1 (en) 2020-01-28 2021-01-26 Segmented gas distribution plate for high-power, high-pressure processes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024188692A Division JP2025013990A (ja) 2020-01-28 2024-10-28 高電力、高圧プロセス用の分割されたガス分配プレート

Publications (3)

Publication Number Publication Date
JP2023512201A JP2023512201A (ja) 2023-03-24
JP2023512201A5 true JP2023512201A5 (https=) 2024-01-31
JP7579866B2 JP7579866B2 (ja) 2024-11-08

Family

ID=77078307

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022545782A Active JP7579866B2 (ja) 2020-01-28 2021-01-26 高電力、高圧プロセス用の分割されたガス分配プレート
JP2024188692A Pending JP2025013990A (ja) 2020-01-28 2024-10-28 高電力、高圧プロセス用の分割されたガス分配プレート

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024188692A Pending JP2025013990A (ja) 2020-01-28 2024-10-28 高電力、高圧プロセス用の分割されたガス分配プレート

Country Status (6)

Country Link
US (1) US20220375725A1 (https=)
JP (2) JP7579866B2 (https=)
KR (2) KR102925637B1 (https=)
CN (1) CN115004332A (https=)
TW (1) TWI904130B (https=)
WO (1) WO2021154673A1 (https=)

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TWI899187B (zh) * 2020-03-19 2025-10-01 美商蘭姆研究公司 基板處理系統
CN116334585A (zh) * 2021-12-23 2023-06-27 中微半导体设备(上海)股份有限公司 一种半导体设备喷淋头及等离子体装置
CN115547804B (zh) * 2022-09-29 2026-01-09 西实显示高新材料(沈阳)有限公司 大尺寸icp供气模组与icp设备

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